• 제목/요약/키워드: Ion Irradiation

검색결과 453건 처리시간 0.033초

저에너지 집속이온빔리소그라피(FIBL)에 의한 미세패턴 형성 (Micropatterning by Low-Energy Focused ton Beam Lithography(FIBL))

  • 이현용;김민수;정홍배
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
    • /
    • pp.224-227
    • /
    • 1995
  • The micro-patterning by a Bow energy FIB whish has been conventionally utilized far mask-repairing was investigated. Amorphous Se$\_$75/Gee$\_$25/ resist irradiated by 9[keV]-defocused Ga$\^$+/ ion beam(∼10$\^$15/[ions/$\textrm{cm}^2$]) resulted in increasing the optical absorption, which was also observed also in the film exposed by an optical dose of 4.5${\times}$10$\^$20/[photons/$\textrm{cm}^2$]. The ∼0.3[eV] edge shift for ion-irradiated film was about twice to that obtained for photo-exposed. These large shift could be estimated as due to an increase in disorder from the decrease in the sloop of the Urbach tail. For Ga$\^$+/ FIB irradiation with a relatively low energy, 30[keV] and above the amount of dose of 1.4${\times}$10$\^$16/[ions/$\textrm{cm}^2$], the irradiated region in a-Se$\_$75/Ge$\_$25/ resist was perfectly etched in acid solution for 10[sec], which is relatively a short development time. A contrast was about 2.5. In spite of the relatively low incident energy,∼0.225[$\mu\textrm{m}$] pattern was clearly obtained by the irradiation of a dose 6.5${\times}$10$\^$16/[ions/$\textrm{cm}^2$] and a scan diameter 0.2[$\mu\textrm{m}$], from which excellent results were expected fur incident energies above 50[keV] which was conventionally used in FIBL.

  • PDF

Irradiation-Induced Electronic Structure Modifications in ZnO Thin Films Studied by X-Ray Absorption Spectroscopy

  • Gautam, Sanjeev;Yang, Bum Jin;Lee, Yunju;Jung, Ildoo;Won, Sung Ok;Song, Jonghan;Asokan, K.;Chae, Keun Hwa
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
    • /
    • pp.456-456
    • /
    • 2013
  • We report the modifications in the electronic structureof ZnO thin films induced by swift heavy ion (SHI) irradiated ZnO thin films by using near edge X-ray absorption fine structure (NEXAFS) spectroscopy at O K-edge was performed at BL10D XAS-KIST beamline at Pohang Accelerator Lab (PAL). ZnO films of 250 nm thickness oriented in [200] plane deposited by RF magnetron sputtering using equal $Ar:O_2$ atmosphere and air annealed at $500^{\circ}C$ for 6 hours for stability were irradiated with 120 MeV Au and 100 MeV O beams separately with different doses ranging from $1{\times}10^{11}$ to $5{\times}10^{12}$ ions/$cm^2$. High Resolution X-ray diffraction and NEXAFS analysis indicates significant changes in the electronic structure and the SHI effect is different for Ag and O-beams. The NEXAFS measurements provide direct evidence of O 2p and Zn 3d orbital hybridization. The NEXAFS results will be presented in detail.

  • PDF

이온빔을 이용한 폴리카보네이트 필름의 자외선 차단 특성 (Characteristics of Polycarbonate Film by Ion Beam for UV Block)

  • 최병훈;김영준
    • 폴리머
    • /
    • 제29권6호
    • /
    • pp.588-592
    • /
    • 2005
  • 자외선을 차단할 목적으로, 단일 모재를 사용함으로써 기존 방법이 갖고 있는 차단제의 적층에 따른 두께 증가와 접착제의 반응 온도에 따른 변형 등의 단점을 개선하고자 하였다. 화장품 용기 및 옥외용으로 사용 가능한 고분자 필름(폴리카보네이트) 표면에 이온 조사를 통하여 고분자 표면을 개질하였다. 표면 개질된 필름의 280$\∼$400 nm 사이 자외선 차단 특성, 표면의 화학 및 형태 변화 특성, 자외선에 대한 저항성을 W분광기, FTIR(ATR)과AFM, UV 촉진 내광성 시험기를 이용하여 측정하였다. 분석 결과, 개질된 고분자 필름은 자외선 전 영역을 차단할 수 있었고 이온의 주입량에 따라 차단율을 자유롭게 변화시킬 수 있었다. 이는 이온들의 주입으로 인한 고분자의 표면 화학 변화에 기인한다. 개질된 고분자 표면은 nm수준으로, 별도의 차단제가 필요없는 하나의 모재로, 자외선 차단을 위해 활용 할 수 있으리라 판단된다. 또한 자외선 조사에 따른 고분자의 색 변화 및 자외선 투과 특성 변화가 없음을 확인하여 일상 생활환경에서 지속적인 자외선 차단 방법으로 사용 가능하리라 기대할 수 있었다.

이온빔처리된 고분자막을 이용한 TN 셀의 전기광학특성 (Electro-optical property of twisted nematic liquid crystal cells with ion-beam irradiated polymer surface)

  • 김대현;옥철호;박홍규;김병용;황정연;서대식
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
    • /
    • pp.338-338
    • /
    • 2009
  • To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, noncontact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. We investigated the high pretilt angle effects on electro-optical properties of ion beam (IB)-irradiated liquid crystal cells. on a blended polymer surface. High pretilt angle of liquid crystals IB-irradiated on a blended polymer surface including such as 5% and 10% of homeotropic polymer contents can' be achieved. The threshold voltages of IB-irradiated twisted nematic (TN) cells on a blended polymer surface decrease with increasing the pretilt angle. Also, the rising time of IB-irradiated TN cells decreases with increasing the pretilt angle. However the decay time of IB-irradiated TN cells increases with increasing the pretilt angle. Consequently, the electro-optical properties of IB-irradiated TN cells depend strongly on the pretilt angle in a blended polymer surface.

  • PDF

Effect of Ar+ Ion Irradiation of Polymeric Fiber on Interface and Mechanical Properties of Cementitious Composites

  • Seong, Jin-Wook;Lee, Seung-Hun;Kim, Ki-Hwan;Beag, Young-Whoan;Koh, Seok-Keun;Yoon, Ki-Hyun
    • 한국세라믹학회지
    • /
    • 제41권6호
    • /
    • pp.430-434
    • /
    • 2004
  • The values of fracture energy and mechanical flexural strength of Fiber Reinforced Cement (FRC) with polypropylene (PP) fiber modified by Ion Assisted Reaction (JAR), by which functional groups were grafted on the surface of PP fiber, was improved about 2 times as those of fracture energy and flexural strength of cement reinforced by untreated PP fiber. PP fiber was irradiated in O$_2$ environment by Ar$\^$+/ ion. The contact angle of PP treated by IAR decreased largely when compared with untreated PP. From this result, we expected that surface energy and interfacial adhesion force of treated PP fiber increased. The strain hardening occurred in the strain-stress curve of FRC including PP treated by IAR when compared with that of FRC with untreated PP. These enhanced mechanical properties might be due to strong interaction between hydrophilic group on modified PP fiber and hydroxyl group in cement matrix. This hydrophilic group on surface modified PP fiber was confirmed by XPS analysis. We clearly observed hydration products that were fixed at modified PP fiber due to the strong adhesion force of interface in cement reinforced modified PP by SEM (Scanning Electron Microscopy) study.

아미드옥심기와 인산기가 함유된 이온 교환 섬유의 합성 및 우라늄 흡착 특성 (Synthesis of ion Exchange Fiber Containing Amidoxime and Phosphoric Acid Groups and Its Uranium Adsorption Properties)

  • 황택성;박진원
    • 폴리머
    • /
    • 제27권3호
    • /
    • pp.242-248
    • /
    • 2003
  • 전자선 전조사법을 이용하여 아크릴로니트릴 (AN)과 스티렌 (Sty)을 PP섬유에 그라프트반응시컨 PP-g-(AN/Sty) 공중합체를 합성하고, 이어서 아미드옥심화 및 인산화 반응을 수행하였다. 공단량체 중 AN의 양이 증가할수록 공중합체 내의 AN의 몰분율은 선형적으로 증가하였으며 공중합체 내에 그라프트 되어진 AN의 양은 공단량체 중 AN의 조성이 40 vol%에서 최대 45%를 나타내었다. 용매인 메탄올의 양이 증가함에 따라 공중합체 내에 도입되어진 AN의 몰분율은 감소하였다 반응온도에 따른 공중합체의 그라프트율은 반응온도 5$0^{\circ}C$까지 선형적으로 증가하였으며 이후 평형에 도달하였다. 이온 교환 섬유에 도입되어진 아미드옥심기는 하이드록실아민의 양이 증가함에 따라 증가하였으며 하이드록실아민 농도 9 wt%에서 최대 5.8 mmol/g을 나타내었다. 공중합체에 도입되어진 인산기는 인산의 농도가 0.5 N까지 증가하는 경향을 나타내었으며 이후 감소하였다. 우라늄 흡착 실험 결과, 우라늄 흡착량은 이관능성 이온 교환 섬유가 아미드옥심화 이온 교환체 및 인산화 이온 교환체보다 우수한 흡착량을 나타내었다.

요오드 전극을 이용한 방법과 중성자방사화 분석에 의한 모유 및 우유내 요오드 함량 분석 방법 비교 (The Determination of Iodine in Human Milk and Cow Milk by Iodide Specific Ion electrode and Neutron Activation Analysis)

  • 문수재
    • Journal of Nutrition and Health
    • /
    • 제31권2호
    • /
    • pp.213-219
    • /
    • 1998
  • This study was conducted to compare and evaluate the iodide specific ion electrode method (ISE) and neutron activation analysis method (NAA) for determining iodine in human milk and cow milk. The neutron irradiation and counting operations were carried out at the TRIGA Mark-III reactor facility of the Korea Atomic Energy Research Institute. The mean concentrations of iodine in human milk samples by the ISE and the NAA were 1450$\mu\textrm{g}$/L and 1350$\mu\textrm{g}$/L, respectively. The levels were not significantly different. In cow milk samples , the mean concentrations of iodine by the ISE and the NAA were 250$\mu\textrm{g}$.L and 200$\mu\textrm{g}$/L, respectively. here, the ISE reading was significantly higher than the NAA. reading. The correlations of the two methods were 0.92(p<0.001) for human milk samples and 0.65 for cow milk samples . The coefficient of variation was 8.3% in the ISE and 4.9% in the NAA. Therefore, the iodide specific ion electrode method is sample and fast method, but probably not in processed milk since free sulfhydryl groups in milk are also detected by the iodide electrode. However, these also indicate that the ISE method may be applicable to human milk and pasteurized milk if the conventional pasteurization time-temperature relationship of standards is not exceeded. On the other hand, the NAA method , which is independent of chemical forms and matrix, can be used for determining iodine in all kinds of milk and foods.

  • PDF

X-Ray Absorption Spectroscopic Study of 120 MeV $Ag^{9+}$ Ion-Irradiated N-Doped ZnO Thin Films

  • Gautam, Sanjeev;Lim, Weon Cheol;Kang, Hee Kyung;Lee, Ki Soo;Song, Jaebong;Song, Jonghan;Asokan, K.;Chae, Keun Hwa
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
    • /
    • pp.315-315
    • /
    • 2013
  • We report the electronic structure modification in the swift heavy ion (SHI) irradiated N-doped ZnO thin films prepared by RF sputtering from ZnO target in different ratio of Ar/$N_2$ gas mixture using highly pure $N_2$ gas. The different N-ZnO thin lms were then irradiated with 120 MeV Ag ion beam with different doses ranging from $1{\times}10^{11}$ to $5{\times}10^{12}$ ions/$cm^2$ and characterized by XRD and near edge X-ray absorption ne structure (NEXAFS) at N and O K-edges. The NEXAFS measurements provide direct evidence of O 2p and Zn 3d orbital hybridization and also the bonding of N ions with Zn and O ions. The minimum value of resistivity of $790{\Omega}cm$, a Hall mobility of $22cm^2V^-1s^-1$ and the carrier concentration of $3.6{\times}10^{14}cm^{-3}$ were yielded at 75% $N_2$. X-ray diffraction (XRD) measurements revealed that N-doped ZnO films had the preferential orientation of (002) plane for all samples, while crystallinity start decreasing at 32.5% $N_2$. The average crystallite size varies from 5.7 to 8.2 nm for 75% and then decreases to 7.8 nm for 80% $Ar:N_2$ ratio.

  • PDF

$SiO_x(x{\le}2)$ 플레이트의 표면 결함 분포가 화학 소염에 미치는 영향 (Effects of Surface Defect Distribution of $SiO_x(x{\le}2)$ Plates on Chemical Quenching)

  • 김규태;권세진
    • 한국연소학회:학술대회논문집
    • /
    • 한국연소학회 2005년도 제31회 KOSCO SYMPOSIUM 논문집
    • /
    • pp.328-336
    • /
    • 2005
  • Effects of surface defect distribution on flame instability during flame-surface interaction are experimentally investigated. To examine the chemical quenching phenomenon, we prepared thermally grown silicon oxide plates with well-defined defect density. Ion implantation was used to control the number of defects, i.e. oxygen vacancies. In an attempt to preferentially remove the oxygen atoms from silicon dioxide surface, argon ions with low energy level from 3keV to 5keV were irradiated at the incident angle of $60^{\circ}C$. Compositional and structural modification of $SiO_2$ induced by low-energy $Ar^+$ ion irradiation has been characterized by Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS). The analysis shows that as the ion energy increases, the number of structural defect also increases and non-stoichiometric condition of $SiO_x(x{\le}2)$ plates is enhanced. From the quenching distance measurements, we found out that when the surface temperature is under $300^{\circ}C$, the quenching distance decreases on account of reduced heat loss; as the surface temperature increases over $300^{\circ}C$, however, quenching distance increases despite reduced heat loss effect. Such aberrant behavior is caused by heterogeneous chemical reaction between active radicals and surface defect sites. The higher defect density, the larger quenching distance. This results means that chemical quenching is governed by radical adsorption and can be parameterized by the oxygen vacancy density on the surface.

  • PDF

UV조사에 의한 Poly(lactic acid)-g-Acrylic Acid 이온교환체의 합성 및 흡착특성 (Synthesis of Poly(lactic acid)-g-Acrylic Acid Ion Exchanger by UV Radiation Method and Metal Adsorption Properties)

  • 최은미;손복기;이창수;황택성
    • 폴리머
    • /
    • 제33권1호
    • /
    • pp.52-57
    • /
    • 2009
  • 본 연구는 UV 조사법으로 poly(lactic acid)-g-acrylic acid(PLA-g-AAc) 이온교환체를 합성하고 이들의 금속흡착 특성을 ICP-AES 분석을 통해 확인하였다. PLA-g-AAC의 UV 조사량과 AAc의 농도변화에 따른 함수율, 그래프트율 및 이온교환용량을 측정하였다. 그래프트율은 AAc 및 benzophenone(BP) 농도가 각각 1.0, 0.1 mol/L일때 최대 28%이었으며, 이온교환용량과 함수율은 각각 1.13 meq/g와 38%로 UV 조사량 및 AAc의 농도가 증가함에 따라 증가하였다. 한편, PLA-g-AAc의 흡착시간에 따른 $Cu^{2+}$, $Co^{2+}$, $Ni^{2+}$에 대한 선택 흡착성은 모두 높게 나타났으며 $Cu^{2+}$가 가장 우수한 선택흡착성을 나타내었다.