• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.147-153
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• 1998

The strain characteristics of a fiber optic Fabry-Perot pressure sensor with high sensitivity using a $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ (N/O/N) diaphragm is experimentally investigated. A 600 nm thick N/O/N diaphragm was fabricated by silicon anisotropic etching technology in 44 wt% KOH solution. An interferometric fiber optic pressure sensor has been manufactured by using a fiber optic Fabry-Perot intereferometer and a N/O/N diaphragm. The 2 cm length fiber optic Fabry-Perot interferometers in the continuous length of single mode fiber were produced with two pieces of single mode fiber coated with $TiO_{2}$ dielectric film utilizing the fusion splicing technique. The one end of the fiber optic Fabry-Perot interferometer was bonded to a N/O/N diaphragm. and the other end was connected to an optical setup through a 3 dB coupler. For the N/O/N diaphragm sized $2{\times}2\;mm^{2}$ and $8{\times}8\;mm^{2}$, the pressure sensitivity was measured 0.11 rad/kPa and 1.57 rad/kPa, respectively, and both of the nonlinearities were less than 0.2% FS.

• Journal of The Korean Astronomical Society
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• v.48 no.2
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• pp.125-137
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• 2015

We report results of the performance evaluation of a new hardware correlator in Korea, the Daejeon correlator, developed by the Korea Astronomy and Space Science Institute (KASI) and the National Astronomical Observatory of Japan (NAOJ). We conduct Very Long Baseline Interferometry (VLBI) observations at 22 GHz with the Korean VLBI Network (KVN) in Korea and the VLBI Exploration of Radio Astrometry (VERA) in Japan, and correlated the aquired data with the Daejeon correlator. For evaluating the performance of the new hardware correlator, we compare the correlation outputs from the Daejeon correlator for KVN observations with those from a software correlator, the Distributed FX (DiFX). We investigate the correlated flux densities and brightness distributions of extragalactic compact radio sources. The comparison of the two correlator outputs shows that they are consistent with each other within < 8%, which is comparable with the amplitude calibration uncertainties of KVN observations at 22 GHz. We also find that the 8% difference in flux density is caused mainly by (a) the difference in the way of fringe phase tracking between the DiFX software correlator and the Daejeon hardware correlator, and (b) an unusual pattern (a double-layer pattern) of the amplitude correlation output from the Daejeon correlator. The visibility amplitude loss by the double-layer pattern is as small as 3%. We conclude that the new hardware correlator produces reasonable correlation outputs for continuum observations, which are consistent with the outputs from the DiFX software correlator.

• Korean Journal of Optics and Photonics
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• v.34 no.3
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• pp.117-123
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• 2023

The size of an optical surface can significantly affect the performance of an optical system, and high spatial frequency errors have a greater impact. Therefore, it is crucial to measure the surface figure error with high frequency. To address this, a new method called rotational prism stitching interferometer (RPSI) is proposed in this study. The RPSI is a type of stitching interferometer that enhances spatial resolution, but it differs from conventional stitching interferometers in that it does not require the movement of either the mirror tested or the interferometer itself to obtain sub-aperture interferograms. Instead, the RPSI uses a beam expander and a rotating Dove prism to select particular sub-apertures from the entire aperture. These sub-apertures are then stitched together to obtain a full-aperture result proportional to the square of the beam expander's magnification. The RPSI's effectiveness was demonstrated by measuring a 40 mm diameter spherical mirror using a three-magnification beam expander and comparing the results with those obtained from a commercial interferometer. The RPSI achieved surface testing results with nine times higher sampling density than the interferometer alone, with a small difference of approximately 1 nm RMS.

• Journal of Astronomy and Space Sciences
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• v.14 no.1
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• pp.94-108
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• 1997

The temperature of the upper thermosphere is generally varied with the solar activity, and largely with geomagnetic activity in the high latitude. The data analyzed in this study are acquired at two ground stations, Thule Air Base($76,5{deg} N, 68.4{deg} W, A = 86{deg}$) and $S{psi}ndre Str{psi}mfjord (67.0{deg} N, 50.9{deg} W, A = 74{deg}$), Greenland. Both stations are located in the high latitude not only geographically but also geomagnetically. The terrestrial night glow at 6300 ${angs}$ from atomic oxygen has been observed from the two ground-based Fabry-Perot interferometers, during periods of 1986~1991 in Thule Air Base and 1986~1994 in $S{psi}ndre Str{psi}mfjord$. Some features noted in this study are as follows: (1) The correlation between the solar activity and the measured thermospheric temperature is highest in the case of $3{leq}Kp{leq}4$ in Thule, and increases with the geomagnetic activity in $S{psi}ndre Str{psi}mfjord$. (2) The measured temperatures at Thule is generally higher than those at $S{psi}ndre Str{psi}mfjord$, but the latter shows steeper slope with the solar activity. (3) The harmonic analysis shows that the diurnal variation(24hrs) is the main feature of the daily temperature variation with a temperature peak at about 13-14 LT (LT=UT-4). However, the semi-diurnal variation is evident during the period of weak solar activity. (4) Generally the predicted temperatures from both MSIS86 and VSH models are lower than the measured temperature, and this discrepancy grows as the solar activity increases. Therefore, we urge modelers to develope a new thermospheric model utilizing broader sets of measurements, especially for high solar activity.