• 제목/요약/키워드: Interfacial contact resistivity

검색결과 21건 처리시간 0.027초

초고온 MEMS용 다결정 3C-SiC의 Ohmic Contact 형성 (Ohmic contact formation of polycrystalline 3C-SiC for high-temperature MEMS applications)

  • 온창민;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.406-407
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    • 2006
  • This paper describes the ohmic contact formation between a TiW film as a contact material deposied by RF magnetron sputter and polycrystalline 3C-SiC films deposied on thermally grown Si wafers. The specific contact resistance (${\rho}_c$) of the TiW contact was measured by using the C-TLM. The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature were also analyzed by XRD and SEM. All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30min., the lowest contact resistivity of $2.90{\times}10^{-5}{\Omega}cm^2$ was obtained due to the improved interfacial adhesion.

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초고온 MEMS용 다결정 3C-SiC의 Ohmic Contact 특성 (Ohmic contact characteristics of polycrystalline 3C-SiC for high-temperature MEMS applications)

  • 정귀상;온창민
    • 센서학회지
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    • 제15권6호
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    • pp.386-390
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    • 2006
  • This paper describes the ohmic contact formation of polycrystalline 3C-SiC films deposited on thermally grown Si wafers. In this work, a TiW (titanium tungsten) film as a contact material was deposited by RF magnetron sputter and annealed with the vacuum process. The specific contact resistance (${\rho}_{c}$) of the TiW contact was measured by using the C-TLM (circular transmission line method). The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature as also analyzed by XRD (X-ray diffraction) and SEM (scanning electron microscope). All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30 min., the lowest contact resistivity of $2.90{\times}10{\Omega}cm^{2}$ was obtained due to the improved interfacial adhesion. Therefore, the good ohmic contact of polycrystalline 3C-SiC films using the TiW film is very suitable for high-temperature MEMS applications.

Micromechanical 시험법과 전기적 고유저항 측정을 이용한 탄소섬유강화복합재료의 계면 물성과 경화거동에 관한 연구 (Interfacial Properties and Curing Behavior of Carbon Fiber/Epoxy Composites using Micromechanical Techniques and Electrical Resistivity Measurement)

  • 이상일;박종만
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2000년도 추계학술발표대회 논문집
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    • pp.17-21
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    • 2000
  • Logarithmic electrical resistivity of the untreated or thin diameter carbon fiber composite increased suddenly to the infinity when the fiber fracture occurred by tensile electro-micromechanical test, whereas that of the ED or thick fiber composite increased relatively broadly up to the infinity. Electrical resistance of single-carbon fiber composite increased suddenly due to electrical disconnection by the fiber fracture in tensile electro-micromechanical test, whereas that of SFC increased stepwise due to the occurrence of the partial electrical contact with increasing the buckling or overlapping in compressive test. Electrical resistivity measurement can be very useful technique to evaluate interfacial properties and to monitor curing behavior of single-carbon fiber/epoxy composite under tensile/compressive loading.

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다결정 3C-SiC/TiW Ohmic Contact에 관한 연구 (Study for ohmic contact of polycrystalline 3C-SiC/TiW)

  • 온창민;정귀상
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1311-1312
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    • 2006
  • This paper describes the ohmic contact formation between a TiW film as a contact material deposied by RF magnetron sputter and polycrystalline 3C-SiC films deposied on thermally grown Si wafers. The specific contact resistance (${\rho}_c$) of the TiW contact was measured by using 4he C-TLM. The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature were also analyzed by XRD and SEM. All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30min., the lowest contact resistivity of $2.90{\times}10^{-5}{\Omega}{\cdot}cm^2$ of was obtained due to the improved interfacial adhesion.

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고분자 전해질 연료전지용 분리판으로서 스테인리스강에 HVOF 용사된 AISI316-WC 코팅층 (HVOF Thermal Sprayed AISI316-WC Coating Layer on Stainless Steel for PEMFC Bipolar Plate)

  • 남대근
    • 신재생에너지
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    • 제4권1호
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    • pp.31-36
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    • 2008
  • Stainless steels have been widely considered as metallic bipolar plates, due to their passive surface film, which is good for corrosion resistance. However, the high resistivity of the passive film increases interfacial contact resistance between the bipolar plates and the electrodes. Stainless steels thermal spray coated with a mixture of tungsten carbide and stainless steel powders showed that the coated layer safely combined with the matrix but they suffered many internal defects including voids and cracks. Many cracks were formed in the coated layer and the interface of the matrix and the coated layer during the rolling process. The coated and rolled stainless steels showed lower interfacial contact resistance and corrosion resistance than bare stainless steel because of low resistivity of tungsten carbide and numerous defects, which caused crevice corrosion, in the coated layer.

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고분자 전해질 연료전지용 스테인리스강 분리판의 HVOF AISI316-WC 코팅층 특성 (Characteristic of HVOF AISI316-WC Coating Layer on Stainless Steel Separator for PEMFC)

  • 남대근;강남현;박영도;김영석
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 추계학술대회 논문집
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    • pp.1-5
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    • 2008
  • Stainless steels have been widely considered as metallic separators, due to their passive surface film, which is good for corrosion resistance. However, the high resistivity of the passive film increases interfacial contact resistance between the separators and electrodes. Stainless steels thermal spray coated with a mixture of tungsten carbide and stainless steel powders showed that the coated layer safely combined with the matrix but they suffered many internal defects including voids and cracks. Many cracks were formed in the coated layer and the interface of the matrix and the coated layer during the rolling process. The coated and rolled stainless steels showed lower interfacial contact resistance and corrosion resistance than bare stainless steel because of low resistivity of tungsten carbide and numerous defects, which caused crevice corrosion, in the coated layer.

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AI 이온 주입된 p-type 4H-SiC에 형성된 Ni/AI 오믹접촉의 전기 전도 특성 (Conduction Properties of NitAI Ohmic Contacts to AI-implanted p-type 4H-SiC)

  • 주성재;송재열;강인호;방욱;김상철;김남균;이용재
    • 한국전기전자재료학회논문지
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    • 제22권9호
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    • pp.717-723
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    • 2009
  • Ni/Al ('/' denotes deposition sequence) contacts were deposited on Al-implanted 4H-SiC for ohmic contact formation, and the conduction properties were characterized and compared with those of Ni-only contacts. The thicknesses of the Ni and Al thin film were 30 nm and 300 nm, respectively, and the films were sequentially deposited bye-beam evaporation without vacuum breaking. Rapid thermal anneal (RTA) temperature was varied as follows : $840^{\circ}C$, $890^{\circ}C$, and $940^{\circ}C$. The specific contact resistivity of the Ni contact was about $^{\sim}2\;{\pm}\;10^{-2}\;{\Omega}{\cdot}cm^2$, However, with the addition of Al overlayer, the specific contact resistivity decreased to about $^{\sim}2\;{\pm}\;10^{-4}\;{\Omega}{\cdot}cm^2$, almost irrespective of RTA temperature. X-ray diffraction (XRD) analysis of the Ni contact confirmed the existence of various Ni silicide phases, while the results of Ni/Al contact samples revealed that Al-contaning phases such as $Al_3Ni$, $Al_3Ni_2$, $Al_4Ni_3$, and $Ab_{3.21}Si_{0.47}$ were additionally formed as well as the Ni silicide phases. Energy dispersive spectroscopy (EDS) spectrum showed interfacial reaction zone mainly consisting of Al and Si at the contact interface, and it was also shown that considerable amounts of Si and C have diffused toward the surface. This indicates that contact resistance lowering of the Ni/Al contacts is related with the formation of the formation of interfacial reaction zone containing Al and Si. From these results, possible mechanisms of contact resistance lowering by the addition of Al were discussed.

Electro-Micromechanical 시험법과 음향방출을 이용한 단섬유시멘트복합재료의 미세파괴구조와 비파괴적 평가 (Nondestructive Evaluation and Microfailure Modes of Single Fibers/Cement Composites using Electro-Micromechanical Technique and Acoustic Emission)

  • Lee, Sang-Il;Kim, Jin-Won;Park, Joung-Man;Yoon, Dong-Jin
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2001년도 춘계학술발표대회 논문집
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    • pp.258-262
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    • 2001
  • The contact resistivity was correlated with IFSS and microfailure modes in conductive fiber/cement composites electro-pullout and AE. As IFSS increased, the number of AE signals increased and the contact resistivity increased latter to the infinity. In dual matrix composite (DMC) test and AE, the number of signals with high amplitude and energy in g]ass fiber composite is significantly larger than that of no-fiber composite. Many vertical and diagonal cracks were observed in glass fiber and no-fiber composite under tensile test, respectively. Electro-micromechanical technique and AE can be used efficiently for sensitive nondestructive (NDT) evaluation and to detect microfailure mechanisms in various conductive fibers reinforced brittle and nontransparent cement composites.

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자체-센서와 미세 작동기를 위한 CNT/PVDF 및 ITO/PVDF 나노복합재료의 전기적 및 계면 내구성 비교 평가 (Interfacial Durability and Electrical Properties of CNT or ITO/PVDF Nanocomposites for Self-Sensor and Micro Actuator)

  • 구가영;왕작가;권동준;박종만
    • Composites Research
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    • 제24권6호
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    • pp.12-17
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    • 2011
  • 자체-센서와 미세 작동기 응용을 위한 CNT와 ITO로 코팅된 나노복합재료의 계면접착 내구성과 전기적 특성을 평가하였다. 나노복합재료의 접착 및 계면 내구성은 반복하중 피로시험에 따른 전기저항도를 측정하여 평가하였다. CNT와 ITO의 고유 전기적 특성으로 인하여 CNT가 코팅된 PVDF 나노복합재료는 ITO가 코팅된 경우보다 다소 낮은 전기저항도를 나타내었으나, 모두 양호한 자체-감지능을 보여주었다. CNT/PVDF와 ITO/PVDF 나노복합재료 모두 계면 내구성은 양호함을 확인하였다. 정적 접촉각 시험을 통해 CNT와 ITO 그리고 PVDF간의 표면에너지, 접착일, 그리고 퍼짐계수를 평가하여 계면 내구성과 의 상호 관련성을 확인하였다. 수용액에서 CNT와 ITO로 코팅된 PVDF 시편의 최적의 작동성은 주파수와 전압을 달리하여 레이져 변위센서를 사용한 연신율 변화로 측정하였다. 작동된 두 나노복합재료들의 연신율은 주파수가 증가함에 따라 감소하며, 반면에 전압의 증가에 따라 상승하였다. 각 나노복합재료의 나노구조 및 고유의 전기적 특성으로 인하여, CNT/PVDF가 ITO/PVDF 보다 자체-감지 및 작동기로서 더 적합하다는 것을 알 수 있었다.

Electro-Micromechanical 시험법을 이용한 Ni Nanowire Strands 강화 고분자 복합재료의 Sensing과 계면 물성 평가 (Sensing and Interfacial Evaluation of Ni Nanowire Strands/Polymer Composites using Electro-micromechanical Technique)

  • 김성주;정진규;박종만
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2005년도 추계학술발표대회 논문집
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    • pp.141-144
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    • 2005
  • Sensing and interfacial evaluation of Ni nanowire strands/polymer composites were investigated using Electro-micromechanical technique. Electro-micromechanical techniques can be used as sensing method for micro damage, loading, temperature of interfacial properties. Using Ni nanowire strands/silicone composites with different content, load sensing response of electrical contact resistivity was investigated under tensile and compression condition. The mechanical properties of Ni nanowire strands with different type/epoxy composites were measured using uniformed cyclic loading and tensile test. Ni nanowire strands/epoxy composites showed humidity and temperature sensing within limited ranges, 20 vol% reinforcement. Some new information on temperature and humidity sensing plus loading sensing of Ni nanowire strands/polymer composites could be obtained from the electrical resistance measurement as a new concept of the nondestructive interfacial evaluation.

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