• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.51.3-51.3
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• 2010

Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.2
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• pp.90-98
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• 2021

Piezoelectric ceramic fiber composite (PCFC) was fabricated using a planar electrode printed piezoelectric ceramic fiber driven in transverse mode for small-scale wind energy harvester applications. The PCFC consisted of an epoxy matrix material and piezoelectric ceramic fibers sandwiched by interdigitated electrode (IDE) patterned polyimide films. The PCFC showed an excellent mechanical performance under a continuous stress. For the fabrication of PCB cantilever harvester, five -PCFCs were vertically attached onto a flexible printed circuit board (PCB) substrate, and then PCFCs were serially connected through a printed Cu circuit. The energy harvesting performance was evaluated applying an inverted structure, which imples its free leading edge located at an open end but the trailing edge at a clamped end, to enhance strain energy in a wind tunnel. The output voltage of the PCB cantilever harvester was increased as the wind speed increased. The maximum output power was 17.2 ㎼ at a resistance load of 200 ㏀ and wind speed of 9 m/s. It is considered that the PCB cantilever energy harvester reveals a potential use for wind energy harvester applications.

• Bulletin of the Korean Chemical Society
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• v.33 no.9
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• pp.2867-2872
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• 2012

SAN/$BMIPF_6$ nanofibers were fabricated by an electrospinning process and used as chemiresistors for sensing alcohol vapours. A hydrophobic and air-stable ionic liquid, $BMIPF_6$, was used to impart electrical conductivity to insulating SAN nanofibers. The effects of $BMIPF_6$ addition on the morphology of the nanofibers were explained in terms of surface tension, viscosity and conductivity. After exposing the SAN/$BMIPF_6$ nanofibers collected on an interdigitated electrode to alcohol vapours (ethanol, 1-propanol and 1-butanol), the resistance of the nanofibers decreased due to adsorption of alcohol molecules. The electrospun SAN/$BMIPF_6$ nanofibers sensor exhibited good sensitivity and reproducibility.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.9-12
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• 2005

Recently, research on the morphing wing is an interesting issue to develop the capability of the wing such as improving the lift and reduction of drag during the operation of an aircraft by changing the wing shape from one configuration to another. A more efficient weight reduction of the wing using smart or morphing wing concept can be achieved in comparison with the conventional flaps. In this study, it is investigated the behaviors of the morphing wing using Macro Fiber Composite (MFC) actuators. Generally, MFC is the piezocomposite actuator with the rectangular PZT fiber and epoxy matrix, and uses the interdigitated electrode to produce more powerful actuation in the in-plane direction. Furthermore, it can produce the twisting actuation as compared with the traditional PZT actuators. In the formulation, the first-order shear deformation plate theory is used, and finite element method is adopted in the numerical analysis of the model. Results show the characteristics of the static behavior of the morphing wing according to the change of the actuation voltage.

• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.292-297
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• 2004

Carbon nanotubes (CNT) were synthesized by arc-discharge method. To fabricate CNT sensor, CNT powder was dispersed in ${\alpha}$-Terpinol($C_{10}H_{17}OH$) solution. The CNT tilms were fabricated by screen printing method on the interdigitated Pt/Pd alloy electrode. The microstructure of CNT film was observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). In order to investigate the gas sensing characteristics of the film, the CNT film was experimented to measure NO response and recovery time. The CNT sensor with a heater was compared to that without a heater. And this sensor shows better reproductibility and faster recovery time than another CNT sensors. We suggest the possibility to utilize a CNT as new sensing materials for environmental monitoring.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.12 s.105
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• pp.1408-1415
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• 2005

Active vibration control of smart hull structure using Macro Fiber Composite (MFC) actuator is performed. Finite element modeling is used to obtain governing equations of motion and boundary effects of end-capped smart hull structure. Equivalent interdigitated electrode model is developed to obtain piezoelectric couplings of MFC actuator. Modal analysis is conducted to investigate the dynamic characteristics of the hull structure, and compared to the results of experimental investigation. MFC actuators are attached where the maximum control performance can be obtained. Active controller based on Linear Quadratic Gaussian (LQG) theory is designed to suppress vibration of smart hull structure. It is observed that closed loop damping can be improved with suitable weighting factors in the developed LQG controller and structural vibration is controlled effectively.

• Korean Journal of Materials Research
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• v.14 no.4
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• pp.276-280
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• 2004

Carbon nanotubes(CNT) were synthesized by arc-discharge method. To fabricate CNT sensor, CNT powder was dispersed in $\alpha$-Terpinol($C_{10}$ $H_{17}$OH) solution. The CNT films were fabricated by screen printing on the interdigitated Pt/Pd alloy electrode. The microstructure of CNT film were observed by scanning electron microscopy (SEM). In order to investigate the gas sensing characteristics of the film, the CNT film was experimented to measure NH$_3$ response and recovery time. And this sensor shows better reproductibility and faster recovery time than another CNT sensors. We suggest the possibility to utilize a CNT as new sensing materials for environmental monitoring.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.475-480
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• 2006

Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2073-2075
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• 2003

This paper presents the active vibration control of flexible cantilever beam using piezoceramic actuators. The transfer function from the force input to the bending displacement was obtained via modal analysis results and piezoelectric constitutive equations. For the active vibration control piezoceramic actuators and sensors were used to construct a flexible smart cantilever beam. To further enhance the sensing and actuation properties of the piezoceramics, a typical interdigitated electrode pattern was fabricated. The PID controller was designed via various simulation and experiment trials. It was shown that the PID controller could suppress vibration of the beam effectively. Simulations and experiments verified good performances of the designed controller.