• Korean Journal of Materials Research
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• v.34 no.9
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• pp.432-438
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• 2024

Cu-Ti thin films were fabricated using a combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW) devices. The Cu-Ti sample library was grown with various chemical compositions and electrical resistivity, providing important information for selecting the most suitable materials for SAW devices. Considering that acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of interdigital transducer (IDT) electrodes, three types of Cu-Ti thin films with different Cu contents were fabricated. The thickness of the Cu-Ti thin films used in the SAW-IDT electrode was fixed at 150 nm. As the Cu content of the Cu-Ti films was increased from 31.2 to 71.3 at%, the resistivity decreased from 10.5 to 5.8 × 10^-5 ohm-cm, and the density increased from 5.5 to 7.3 g/cm³, respectively. A SAW device composed of Cu-Ti IDT electrodes resonated at exactly 143 MHz without frequency shifts, but the full width at half maximum (FWHM) values of the resonant frequency gradually increased as the Cu content increased. This means that although the increase in Cu content in the Cu-Ti thin film helps to improve the electrical properties of the IDT electrode, the increased density of the IDT electrode deteriorates the acoustic performance of SAW devices.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.2
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• pp.307-315
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• 2005

We have studied to obtain the SAW filter for the passband was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift of the SAW filter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000$\AA$ and 3.6$mu$m, respectively. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 8.2MHz. And we could obtain that return loss is less then 16dB, ripple characteristics is probably 4dB and triple transit echo is less then 18dB after when we have matched impedance.

• Journal of Sensor Science and Technology
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• v.33 no.5
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• pp.353-358
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• 2024

Al-Ni thin films were fabricated using combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW) devices. The Al-Ni sample library was grown with various chemical compositions and electrical resistivities, which provided important information for selecting the most suitable materials for SAW devices. As acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of the interdigital transducer (IDT) electrodes, three types of Al-Ni thin films with different Al contents were fabricated. The thickness of the Al-Ni thin film used in the SAW-IDT electrode was fixed at 100 nm. As the Al content of the Al-Ni film decreased from 79.2 to 24.5 at%, the resistivity increased slightly from 4.8 to 5.8 × 10^-5 Ω-cm, whereas the calculated density increased significantly from 3.6 to 6.9 g/cm³. The SAW device composed of Al-Ni IDT electrodes resonated at 71 MHz without frequency shifts; however, the selectivity of the resonant frequency and insertion loss deteriorated as the Al content decreased. When there is no significant difference in the electrical characteristics of the SAW-IDT electrodes, the performance of the SAW devices can be determined by the density of the IDT electrodes.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.12
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• pp.1730-1736
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• 2013

Slanted and chirp interdigital transducer(IDT) configurations were studied for generating the surface acoustic wave(SAW) with wide bandwidths on a piezoelectric substrate. These devices can be applied to manipulate optical path of light along the waveguide, ultimately used for optical switches and holographic image implementation. Prior to fabrication, the coupling of modes(COM) modeling and simulation were performed to extract optimal design parameters. The optimally designed wideband device showed wide bandwidth of 30MHz, low insertion loss of -25dB, and abrupt side suppression ratio (SSR). Several design conditions were determined during device implementation, such as slanted angle, aperture length, number of fingers, and central frequencies of IDTs. These factors were experimentally analyzed and described in details in this paper.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.3
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• pp.699-706
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• 2010

We have studied to obtain the slanted finger interdigital(SFIT) type filter was formed on the Langasite substrate and was evaporated two IDT electrode by Aluminum-Copper alloy respectively. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift conditions of the SPIT type filter. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflectors are $5000\;{\AA}$ and $3.6{\mu}m$ respectively. At the first sample, we have employed that the distance from the hot electrode to the reflectors is $2.4{\mu}m$ distance from the ground electrode to the reflectors is $1.8{\mu}m$ and the distance from the hot electrode to the ground is $1.5{\mu}m$ respectively. At the other sample, we have also employed that the distance from the hot electrode to the reflectors and the distance from the ground electrode to the reflectors are $2.4{\mu}m$. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7.3 MHz. And we could obtain that return is less than -20dB, ripple characteristics is probably 3dB and triple transit echo(TTE) is less than -22dB after when we have matched impedance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.12
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• pp.2662-2670
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• 2009

The effect of the reflector type for the SAW filter on the characteristics of the slanted finger IDT filter have been studied by computer simulation. The IDT was evaporated by Aluminum-Copper alloy. The design condition was optimized by the phase shift of the SAWfilter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness are $5,000{\AA}$, and the width and the space of reflector are $3.6{\mu}m$ and $2.0{\mu}m$, respectively. Frequency response of the fabricated SFIT filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 8.2MHz. And we could obtain that the return loss is less then 16dB, the ripple characteristics is probably 4dB and the triple transit echo is less then 18dB after when we have matched impedance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.3
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• pp.602-608
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• 2005

We have studied to obtain the SAW filter for the Single Phase Unidirectional Transduce. (SPUDT), was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulations. Also, we have performed to obtain the properly conditions about impedance matching of the SAW filter for SPUDT. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000A and $3.6{\mu}m$, respectively. And the width of IDT' fingers is $2.4{\mu}m$, and the space between IDT' finger and reflector is $2.0{\mu}m$. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7.7MHz after when we have matched impedance. Also, we could obtain that ripple characteristics is less than 0.4dB and standing wave ratio is probably 1.5 after when we have matched impedance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.79-83
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• 2014

In this paper, SAW devices are fabricated using various IDT shape(Single/Double) to check an effect of the IDT on SAW device. And based on theory of a particle velocity moved by SAW and IDT, a particle velocity is measured and calculated. Depend on insert power, a particle velocity using Single-IDT SAW device is about two times bigger than Double-IDT SAW device and it's almost same with a theoretical different.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.11
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• pp.88-98
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• 1993

In this paper, the effective permittivity in the piezoelectric material is numerically obtained and greens function is derived from that. It is shown that the admittance and the transfer function of an interdigital transducer is represented by electrostatic charge distribution using Quasi-static approximation. To prove the validity of the quasi-static approximation, numerical results for the uniform IDT of a filter mounted on 128 $^{\circ}$ rotated Y-cut X-propagating Lithium Niobate are compared with the measured ones.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.10
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• pp.1916-1923
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• 2007

We have studied to obtain the SAW filter for the passband was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and thin we performed computer-simulated by simulator. We cm fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift of the SAW filter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are $5000\;{\AA}$ and $3.6{\mu}m$ respectively. And we have employed that the distances from the hot electrode to the reflector are $2.0{\mu}m$, $2.4{\mu}m$ and the distance from the hot electrode to the ground is $1.5{\mu}m$ respectively. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7,8MHz. And we could obtain that return loss is less then -18dB, ripple characteristics is probably 3dB and triple transit echo is less then -25dB after when we have matched impedance.