• Title/Summary/Keyword: Inter-relation

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Effects of Consumable on STI-CMP Process (STI-CMP 공정에서 Consumable의 영향)

  • 김상용;박성우;정소영;이우선;김창일;장의구;서용진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.185-188
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    • 2001
  • Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

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A Study on the Pulse Conditions and Symptoms of Diseases Related with Pathogenic Factor of Deficiency Type, Excess Type, Zei Pathogenic Factor and Indistinct Pathogenic Factor of the Five Viscera in the Third Volume in the Maek Kyoung(脈經) III (맥경(脈經) 권삼(卷三) 오장(五臟)의 허(虛).실(實).적(賊).미사(微邪)에 따른 맥상(脈象)과 병증(病證)에 대(對)한 연구(硏究) III)

  • Sung, Back-Man;Park, Kyung
    • The Journal of the Society of Korean Medicine Diagnostics
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    • v.9 no.2
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    • pp.57-71
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    • 2005
  • Background and purpose: Maek Kyoung(脈經) is a book written, compiled, and edited by Wang Hui circa 3 A.D. This book is the first technical book devoted to the diagnostics. These are very important data but never make a special study and translate. so I hope this treatise can be great help to understand diagnosis study. Methods: Maek Kyoung(脈經) consists of ten volumes, and the third volume consists of the five chapters, including inter-generation and inter-restriction of the five viscera and the six entrails and prognosis of diseases. This treatise is made up of principal, notes, study and conclusion, we tried to make a translation faithful to the original. Results and Conclusion: Chapter 5 refers to three things. The first is relation between kidney and urinary bladder, the second is ordinary and extraordinary pulse condition of kidney, and the third is how to treat diseases related to kidney.

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The Economic Effect of Industrial Investment on North Korea Natural Gas and Coal (북한 천연가스산업과 석탄산업 투자에 따른 경제적 파급효과)

  • Kim, Hyoungtae;Chae, Jungmin;Cho, Youngah
    • Journal of Energy Engineering
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    • v.25 no.3
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    • pp.1-8
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    • 2016
  • North Korea is currently undergoing an economic crisis of industrial productivity reduction, which resulted from decreased energy production and economic sanctions due to conflicts with the international society. This paper examined the technological status of North Korea's natural gas and coal industries which are essential sectors for recovery of the economy and North-South cooperation on energy industry. This paper also analyzed investment strategies in North Korean energy industries and calculated the size of economic ripple effect of the investment on North and South Korea. In order to analyze the effect of the investment on North Korean economy, we constructed an inter-industry relation table of North Korea for year 2014 and used an input-output model. The ripple effect of the investment in natural gas and coal industries turned out to be 1.012 billion dollars and 2.742 billion dollars respectively. In order to analyze the ripple effect of the investment on South Korean economy, we constructed an inter-industry relation table of South Korea for year 2013 and used a demand-driven model for inter-industry analysis. As a result, production, added-value and employment inducement coefficients of the investment were calculated as 2.02073, 0.62697 and 8.99409 for the natural gas industry and 2.02130, 0.62701 and 9.00413 for the coal industry respectively.

The Economic Effect of Industrial Investment on North Korea Energy and Natural Gas (북한 에너지산업과 천연가스분야 투자에 따른 경제적 파급효과)

  • Kim, Hyoung-Tae;Chae, Jung-Min;Cho, Young-Ah;Kim, Jin-Ho
    • Journal of the Korean Institute of Gas
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    • v.20 no.4
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    • pp.7-14
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    • 2016
  • The economic crisis in North Korea has reduced its capacity to invest in the energy industries. The country is going through a vicious cycle of decreased investment in the energy industries and reduced energy production. This suggests that the energy industries would come to the top priority of investment once the economy improves. This paper calculated the economic ripple effect of the investment on North and South Korean economies based on the assumption that 390 billion won was invested in the construction of a natural gas combined-cycle power plant in Gaesong Industrial Complex. In order to analyze the economic ripple effect of the investment on North Korean economy, we constructed the inter-industry relation table of North Korea for year 2014 and used the input-output model. The ripple effect of the investment in the natural gas industry turned out to be 1.012 billion dollars. In order to analyze the effect of the investment on South Korean economy, we constructed the inter-industry relation table of South Korea for year 2013 and used the demand-driven model for inter-industry analysis. As a result, production, added-value and employment inducement coefficients of the investment in the natural gas industry were calculated as 2.02073, 0.62697 and 8.99409 respectively.

Influence of D.I. Water Pressure and Purified $N_2$ Gas on the Inter Level Dielectric-Chemical Mechanical Polishing Process (탈이온수의 압력과 정제된 $N_2$ 가스가 ILD-CMP 공정에 미치는 영향)

  • Kim, Sang-Yong;Seo, Yong-Jin;Kim, Chang-Il;Chung, Hun-Sang;Lee, Woo-Sun;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.04b
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    • pp.31-34
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    • 2000
  • It is very important to understand the correlation of between inter layer dielectric(ILD) CMP process and various facility factors supplied to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD CMP process were studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyzed various facilities supplied at supply system. With facility shortage of D.I. water(DIW) pressure, we introduced an adding purified $N_2(PN_2)$ gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and PN2 gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and PN2 gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

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Understanding the Ongoing Archival Research on the Permanent Preservation of Electronic Records (전자문서의 영구보존을 위한 표준화 연구 동향)

  • Park, Eun-Gyung
    • Journal of Korean Society of Archives and Records Management
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    • v.2 no.1
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    • pp.97-117
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    • 2002
  • In the fast growing digital environment, assuring continued authenticity is an essential and intransigent preservation consideration for digital data and records. Several key issues need to be addressed, including: What are electronic records and data?; Which intellectual and technical elements of data and records are essential for assuring authenticity in electronic format?; How should these be maintained and preserved over time?; How are authentic data and records used in various systems of practice?; and What are the best strategies of preserving authentic electronic records and data?. There have been many research projects to answer these questions to date. This paper discusses the characteristics of electronic records in light of preservation consideration and reports the activities and findings of some of the research projects in brief. This paper focuses on explaining the InterPARES (International Research on Permanent Authentic Records in Electronic Systems) Project, which is defining requirements for authenticity that can help develop strategies for long-term preservation in electronic records. To identify those requirements, more than thirty case studies have been conducted with government agencies, academic institutions, and various organizations in America, Canada, Europe, Asia and Australia and models developed for appraisal, preservation, and strategies in relation to the management of electronic records. The paper also suggests research questions and implications for preserving authentic electronic records as well as the encouragement for Korean research on digital preservation.

Improvement of Inter prediction by using Homography Reference Picture (Homography 참조 픽처를 사용한 화면 간 예측 효율 향상 방법)

  • Kim, Tae Hyun;Park, Gwang Hoon
    • Journal of Broadcast Engineering
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    • v.22 no.3
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    • pp.397-400
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    • 2017
  • Recently, a lot of images containing various global movements have been generated by the activation of the photographic equipment such as the drone and the action cam. In this case, when the motion such as rotation, scaling is generated, it is difficult to expect a high coding efficiency in the conventional inter-picture prediction method using the 2D motion vector. In this paper, we propose a video coding method that reflects global motion through homography reference pictures. As a proposed method, there are 1) a method of generating a new reference picture by grasping a global motion relation between a current picture and a reference picture by homography, and 2) a method of utilizing a homography reference picture for inter-picture prediction. The experiment was applied to the HEVC reference software HM 14.0, and the experimental result showed an increase in encoding efficiency of 6.6% based on RA. Especially, the results using the videos with rotational motion have a maximum coding efficiency of 32.6%, which is expected to show high efficiency in video, which is often represented by complex global motion such as drones.

Effects of Various Facility Factors on CMP Process Defects (CMP 공정의 설비요소가 공정 결함에 미치는 영향)

  • Park, Seong-U;Jeong, So-Yeong;Park, Chang-Jun;Lee, Gyeong-Jin;Kim, Gi-Uk;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.5
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    • pp.191-195
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    • 2002
  • Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

A Study on the Relation Between Frequency Diversity and Inter Code Interference in the Multi-rate MC-CDMA system (Multi-rate MC-CDMA시스템에서의 코드 간 간섭과 주파수 다이버시티와의 관계에 대한 연구)

  • Lee, Kyu-Jin;Lee, Kye-San;Kim, Jin-Young
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.7 no.5
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    • pp.131-138
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    • 2008
  • The channel parameters such as RMS delay spread and Doppler frequency have an effect on performance of system. This paper investigates the effect between the Inter-Code Interference (ICI) and the frequency diversity gain in the multi-rate MC-CDMA system. The multi-rate MC-CDMA system has achieved the more variable data rate than the MC-CDMA and moreover it has the better performance than the OFDMA system, because it has achieved the frquency diversity gain. However, the frequency diversity gain and ICI have a trade-off relationship by using the spreading code. Therefore, we have improved the system performance by efficient choice of system parameters. In order to evaluate the effectiveness of the frequency diversify gain and the ICI effect, we perform simulations by altering the Doppler frequency and RMS delay spread.

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A Study on Promoting Inter-organizational Linkages for Vocational Rehabilitation of People with Psychiatric Disabilities : Focusing on Linkage Experiences and Predictors (지역기반 정신장애인 직업재활수행기관간 연계강화에 관한 연구 : 연계경험 및 예측요인 분석을 중심으로)

  • Lee, Keum-Jin
    • Korean Journal of Social Welfare
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    • v.54
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    • pp.35-64
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    • 2003
  • This study is to explore experience on the inter-organizational linkages for vocational rehabilitation of people with psychiatric disabilities and to find out predictors affecting the linkages. This study used triangulation a way as to combine the advantages of both the qualitative and the quantitative approach. The qualitative approach is based on grounded theory by Strauss & Cobin. The quantitative research used the samples of 122 organizations, and was analyzed by multiple regression & logistic regression. The results are as follows. First, as results of in-depth interview, interviewees perceived linkage experience as 'turning the eyes on the other organization in community', namely 'the pursue of collaboration'. This concept is classified four types: initiative, cooperative, authoritative and passive type. Second, according to Tobin(1986)'s five phase of the closeness of inter-organizational linkages, our linkages were found to be in third phase, "coordination". Finally, predictors of the attempt of having linkages & linkage strengthening were analyzed by logistic regression & multiple regression. 'The experience of professional training on people with psychiatric disabilities' and 'the resource dependency' have statistically significant relation with the attempt to have linkages. 'The length of current service', 'the experience of professional training on people with psychiatric disabilities', and 'recognition about other organizational activities' are significantly related to strengthening linkage. Based on the results of this study, alternatives for promoting inter-organization linkages for vocational rehabilitation of people with psychiatric disabilities were proposed.

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