• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of the Korean Institute of Gas
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• v.27 no.2
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• pp.71-78
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• 2023

In general, electric submersible pumps (ESPs), which have an average life of 1.0 to 1.5 years, experience a decrease in performance and a reduction in life of the pump depending on oil and gas reservoir characteristics and operating conditions in wells. As the result, the failure of ESP causes high well workover costs due to retrieval and installation, and additional costs due to shut down. In this study, a flow loop system was designed and established to predict the life of ESP in long­term operation of oil and gas wells, and the life cycle data of ESP from the time of installation to the time of failure was acquired and analyzed. Among the data acquired from the system, flow rate, inlet and outlet temperature and pressure, and the data of the vibrator installed on the outside of ESP were analyzed, and then the performance status according to long-term operation was classified into five stages: normal, advice I, advice II, maintenance, and failed. Through the experiments, it was found that there was a difference in the data trend by stage during the long­term operation of the ESP, and then the condition of the ESP was diagnosed and the failure of the pump was predicted according to the operating time. The results derived from this study can be used to develop a failure prediction program and data analysis algorithm for monitoring the condition of ESPs operated in oil and gas wells.

• Journal of the Korean Electrochemical Society
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• v.10 no.1
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• pp.25-30
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• 2007

Proton exchange membrane fuel cell(PEMFC) performance could be affected by various factors such as cell temperature, total pressure, partial pressure of reactants and relative humidity. Hydrogen ion is combined with water to form hydronium ion [$H_3O^+$] and pass through membrane resulting electricity generation. Cooling system is needed to remove heat and other uses on large scale fuel cell. In case that collant conductivity is increased, fuel cell performance could be decreased because produced electricity could be leaked through coolant. In this study, triple distilled water(TDW) and antifreeze solution containing ethylene glycol was used to observe resistance change. Resistance of TDW was taken 28 days to reach preset value, and effect on fuel cell operation was not observed. Resistance of antifreeze solution was not reached to preset value up to 48 days, but performance failure occurred presumably caused by bipolar plate junction resulting stoppage resistance experiment. Generally PEMFC humidification is performed near-saturated operating conditions at various temperatures and pressures, but non-humidifying condition could be applied in small scale fuel cell to improve efficiency and reduce system cost. However, it was difficult to operate large scale fuel cell without humidifying, especially higher than $50{\sim}60^{\circ}C$. In case of small flux such as 0.78 L/min, temperature difference between inlet and outlet was occurred larger than other cases resulting performance decrease. Non-humidifying performance experiments were done at various cell temperature. When both of anode and cathode humidification were removed, cell performance was strongly depended on cell operating temperature.

• Journal of Animal Science and Technology
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• v.50 no.3
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• pp.391-400
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• 2008

Odor management is significantly concerned with sustainable livestock production because odor nuisance is a primary cause for complaint to neighbors. This study was conducted to measure the concentration of odorous compounds, odor intensity, and odor offensiveness at unit process in animal waste treatment facility combined composting and methane fermentation process by an instrumental analysis and direct olfactory method. Ammonia, sulfur-containing compounds, and volatile fatty acid were analyzed at each process units and boundary area in summer and winter, respectively. Higher concentration of odorants occurred in the summer than in the winter due to high ambient temperature. The maximum concentration of odorants was detected in composting pile when mixed manure was being turned followed by inlet, curing, outlet, and screen & packing process. Highest concentration of detected odorous compounds was ammonia ranging from 3.4 to 224.7 ppm. Among the sulfur-containing compounds measured, hydrogen sulfide was a maximum level of 2.3 ppm and most of them exceeded reported odor detection thresholds. Acetic acid was the largest proportion of VFA generated, reaching a maximum of 51 to 89%, followed by propionic and butyric acid at 1.9 to 35% and 1.8 to 15%, respectively. Malodor assessment by a human panel appeared a similar tendency in instrumental analysis data. Odor quotient for predicting major odor-causing compounds was calculated by dividing concentrations measured in process units by odor detection thresholds. In the composting process, hydrogen sulfide, ammonia, dimethyl sulfide, and methyl mercaptan were deeply associated with odor-causing compounds, while the major malodor compounds in the inlet process were methyl mercaptan, hydrogen sulfide, and butyric acid.

• Analytical Science and Technology
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• v.19 no.6
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• pp.535-543
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• 2006

Being used widely in semiconductor and display manufacturing, $NF_3$ is internationally considered as one of the regulated compounds in emission. Numerous companies have been continuously trying to reduce the emissions of $NF_3$ to comply with the global environmental regulation. This work is made to report the destruction and removal efficiency (DRE) of electrically heated scrubbers and the use rate in process chambers installed in three main LCD manufacturing companies in Korea. As the measurement techniques for $NF_3$ emission, mass flow controlled helium gas was continuously supplied into the equipment by which scrubber efficiency is being measured. The partial pressures of $NF_3$ and helium were accurately measured for each sample using a mass spectrometer, as it is emitted from inlet and outlet of the scrubber system. The results show that the DRE value for electrically heated scrubbers installed before 2004 is less than 52 %, while that for the new scrubbers modified based on measurement by scrubber manufacturer has been sigificentely improved upto more than 95 %. In additon, we have confirmed the efficiency depends on such variables as the inlet gas flow rate, water content, heater temperature, and preventative management period. The use rates of $NF_3$ in process chambers were also affected by the process type. The use rate of radio frequency source chambers, built in the $1^{st}$ and $2^{nd}$ generation process lines, was determined to be less than 75 %. In addition, that of remote plasma source chambers for the $3^{rd}$ generation was measured to be aboove 95 %. Therefore, the combined application of improved scrubber and the RPSC process chamber to the semiconductor and display process can reduce $NF_3$ emmision by 99.95 %. It is optimistic that the mission for the reduction of greenhouse gas emission can be realized in these LCD manufacturing companies in Korea.

• Economic and Environmental Geology
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• v.49 no.6
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• pp.459-467
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• 2016

Due to the limited areal space for installation, borehole heat exchangers (BHEs) at depths deeper than 300 m are considered for geothermal heating and cooling in the urban area. The deep vertical closed-loop BHEs are unconventional due to the depth and the range of the typical installation depth is between 100 and 200 m in Korea. The BHE in the study consists of 50A (outer diameter 50 mm, SDR 11) PE U-tube pipe in a 150 mm diameter borehole with the depth of 300 m. In order to compensate the buoyancy caused by the low density of PE pipe ($0.94{\sim}0.96g/cm^3$) in the borehole filled with ground water, 10 weight band sets (4.6 kg/set) were attached to the bottom of U-tube. A thermal response test (TRT) and fundamental basic surveys on the thermophysical characteristics of the ground were conducted. Ground temperature measures around $15^{\circ}C$ from the surface to 100 m, and the geothermal gradient represents $1.9^{\circ}C/100m$ below 100 m. The TRT was conducted for 48 hours with 17.5 kW heat injection, 28.65 l/min at a circulation fluid flow rate indicates an average temperature difference $8.9^{\circ}C$ between inlet and outlet circulation fluid. The estimated thermophysical parameters are 3.0 W/mk of ground thermal conductivity and 0.104 mk/W of borehole thermal resistance. In the stepwise evaluation of TRT, the ground thermal conductivity was calculated at the standard deviation of 0.16 after the initial 13 hours. The sensitivity analysis on the borehole thermal resistance was also conducted with respect to the PE pipe diameter and the thermal conductivity of backfill material. The borehole thermal resistivity slightly decreased with the increase of the two parameters.

• Journal of Korean Society of Environmental Engineers
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• v.33 no.12
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• pp.886-892
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• 2011

In a study on THMs formation at the distribution facilities in Seoul water supply for past 3 years from 2007 to 2009, THMs production was increased from inlet to outlet during the process in water treatment plant. However, such increased THMs amount was very small compared to THMs production formed after pre-chlorination and post chlorination. Accordingly, this study is aimed to investigate the characteristics of water quality parameters of Han River related to THMs formation in 6 water treatment plants in Seoul. The results showed that THMs and other factors such as temperature (r = 0.539~0.846) and turbidity (r = 0.421~0.863) had positive correlation while THMs had negative correlation with pH (r = -0.613~-0.800) and algae (r = -0.582~-0.901). There is no correlation between THMs and $NH_3-N$. According to the factor analysis, generally metabolite and organic matter factor $X_1$ (pH, BOD, algae), and seasonal and natural factor $X_2$ (temperature, turbidity) played an important role in the formation of THMs. Multiple regression analysis for THMs formation showed significance of regression appeared in most water systems.

• Magazine of the Korean Society of Agricultural Engineers
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• v.12 no.2
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• pp.1937-1947
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• 1970

This experiment was conducted, making use of the 'NONG-RIM No, 6' a recommended variety of rice plant for the year of 1969. Main purpose of the experiment are to explore possibilities of; a) ways and means of saving irrigation water and, b) overcoming drought at the same time so that an increaded yield in rice production could be resulted in Specifically, it was tried to determine the effects of the Rotation Irrigation method combined with differentiated thickess of Lining upon the growth and Yield of rice production. Some of the major finding are summarized in the follows. 1) The Different thicknesses show a significant relationship with the weight of 1000 grains. In the case of 3cm Lined plot, the grain weight is 39.0 Grams, the heaviest. Next in order is 6 cm lined plnt, 5 day control plot, 6 day control plot. 2) In rice yield, it is found that there is a considerably moderate signicant relationship with both the different thickness of lining and the number of irrgation, as shown in the table No,7. 3) There is little or no difference among different plot in terms of; a) physical and chemical properties of soil, b) quality of irrgation water, c) climatic condition, and rainfalls. 4) It is found that there is no significant relationship between differences in the method of rotation irrgation and the number of ears per hill because of too much rainydays and low temperature during irrigation season. 5) In uyny1-treated plots, it is shown that there is on difference among different plots, but the irrigation water requirement saved as much as 1/2 to actual irrigation water compare to uncontroled plot. 6) The irrigation water requirement for 48 days is saved as much 67% compared to uncontroled plot, the order are; the 9cm lined plot, the plot of vinyl with no hole, the plot with a hole of $1cm/m^2$ as shows in fig 15. 7) The rate of percolation of 40-30mm/day is decreased to 30-20/day. It is found that the decreasad rate of percolation due to vinyl-cutoff in footpath. 8) The growing condition was fine, and there was no found that decease and lageing as always submerged plot. 9) It is found that it must be constructed irrigation and drainage system, inlet and outlet perpect, respectly, of which could be irrigation water saved and would be inereased the irrigation water temperature.