• Journal of Mechanical Science and Technology
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• v.15 no.12
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• pp.1808-1815
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• 2001

The characteristics of a pulsed plasma jet originating from an electrothermal capillary discharge have been investigate using laser-induced fluorescence (LIF) measurement. Previous emission measurements of a 3.1 kJ plasma jet show trial upstream of the Mach disk the temperature and electron number density are about 14,000 K and and 10$\^$17/ cm$\^$-3/, while downstream of the Mach dick tole values are about 25,000 K and 10$\^$18/ cm$\^$-3/, respectively. However, these values are barred on line-of-sight integrated measurements that may be misleading. Hence, LIF is being used to provide both spatially and temporally resolved measurements. Our recent work has been directed at using planar laser-induced fluorescence (PLIF) imaging of atomic copper in the plasma jet flow field. Copper is a good candidate for PLIF studies because it is present throughout the plasma and has electronic transitions that provide an excellent pump-detect strategy. Our PLIF results to date show that emission measurements may give a misleading picture of the flow field, as there appeals to be a large amount of relatively low temperature copper outside the barrel shock. which may lead to errors in temperature inferred from emission spectroscopy. In this paper, the copper LIF image is presented and at the moment, relative density of atomic copper, which is distributed in the upstream of the pulsed plasma jet, is discussed qualitatively.

• The KSFM Journal of Fluid Machinery
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• v.15 no.3
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• pp.46-50
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• 2012

Plasma actuator makes parallel flow on the wall surface by the interaction between plasma and neutral air particles. Dielectric barrier discharge (DBD) plasma actuator is widely studied as one type of plasma actuators, which consists of one electrode exposed to the environmental gas and the other encapsulated by a dielectric material. This paper is experimentally focused on the performance of DBD plasma actuator mounted on a flat plate, which depends on kinds of the electrode materials, their thicknesses and the supplied voltage including its frequency. We measured the velocity magnitudes of the induced flow by a stagnation probe as a performance parameter of the plasma actuators. The velocity profiles of the flow induced by the plasma actuators are similar in all measurement cases. The magnitude of the induced velocity is strongly influenced by the thickness of the electrodes and the frequency of the input voltage. The performance of DBD plasma actuators is related to the electric properties of the electrode materials such as the ionization energy and the electrical resistivity.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.287-287
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• 2011

ITRS(international technology roadmap for semiconductors)에 따르면 MOS (metal-oxide-semiconductor)의 CD(critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/SiO2를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두되고 있다. 일반적으로 metal gate를 식각시 정확한 CD를 형성시키기 위해서 plasma를 이용한 RIE(reactive ion etching)를 사용하고 있지만 PIDs(plasma induced damages)의 하나인 PICD(plasma induced charging damage)의 발생이 문제가 되고 있다. PICD의 원인으로 plasma의 non-uniform으로 locally imbalanced한 ion과 electron이 PICC(plasma induced charging current)를 gate oxide에 발생시켜 gate oxide의 interface에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 metal gate의 식각공정에 HDP(high density plasma)의 ICP(inductively coupled plasma) source를 이용한 중성빔 시스템을 사용하여 PICD를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. 식각공정조건으로 gas는 HBr 12 sccm (80%)와 Cl2 3 sccm (20%)와 power는 300 w를 사용하였고 200 eV의 에너지로 식각공정시 TEM(transmission electron microscopy)으로 TiN의 anisotropic한 형상을 볼 수 있었고 100 eV 이하의 에너지로 식각공정시 하부층인 HfO2와 높은 etch selectivity로 etch stop을 시킬 수 있었다. 실제 공정을 MOS의 metal gate에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU(North Carolina State University) CVC model로 effective electric field electron mobility를 구한 결과 electorn mobility의 증가를 볼 수 있었고 또한 mos parameter인 transconductance (Gm)의 증가를 볼 수 있었다. 그 원인으로 CP(Charge pumping) 1MHz로 gate oxide의 inteface의 분석 결과 이러한 결과가 gate oxide의 interface trap양의 감소로 개선으로 기인함을 확인할 수 있었다.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.57 no.2
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• pp.79-83
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• 2008

In this paper, we introduced a LIF measurement method and summarized the theoretical side. When an altered wavelength of laser and electric power, lamp applied electric power, we measured the relative density of the metastable state in mercury after observing a laser induced fluorescence signal of 404.8nm and 546.2nm, and confirmed the horizontal distribution of plasma density in the discharge lamp. Due to this generation, the extinction of atoms in a metastable state occurred through collision, ionization, and excitation between plasma particles. The density and distribution of the metastable state depended on the energy and density of plasma particles, intensely. This highlights the importance of measuring density distribution in plasma electric discharge mechanism study. The results confirmed the resonance phenomenon regarding the energy level of atoms along a wavelength. change, and also confirmed that the largest fluorescent signal in 436nm, and that the density of atoms in 546.2nm ($6^3S_1{\to}6^3P_2$) were larger than 404.8nm ($6^3S_1{\to}6^3P_2$). According to the increase of lamp applied electric power, plasma density increased, too. When increased with laser electric power, the LIF signal reached a saturation state in more than 2.6mJ. When partial plasma density distribution along a horizontal axis was measured using the laser induced fluorescence method, the density decreased by recombination away from the center.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.802-805
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• 2003

The ion-induced secondary electron emission coefficient ${\gamma}$ for MgO thin film with $O_{2}$ plasma treatment has been investigated by ${\gamma}$-FIB (focused ion beam) system. The MgO thin film deposited from sintered material with $O_2$ plasma treatment is found to have higher ${\gamma}$ than that without $O_{2}$ plasma treatment. The energy of $Ne^{+}$ ions used has been ranged from 100eV to 200eV throughout this experiment. It is found that the highest secondary electron emission coefficient ${\gamma}$ has been achieved for 10 minutes of $O_{2}$ plasma treatment.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.2
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• pp.9-17
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• 2020

In this study, the surface changes of titanium alloy using laser surface treatment and the surface analysis using laser-induced plasma spectroscopy were carried out. The laser surface treatment induced changes in surface roughness and the diffusion of atmospheric elements. Excessive melting or less melting caused roughness changes, but when moderate levels of energy were applied, a smoother surface could be obtained than the initial surface. In the process, the diffusion of atmospheric elements took place. To analyze the diffusion of atmospheric elements with respect to surface morphology, the surfaces were re-shaped with grinding. In this experimental conditions, the effect of plasma formation by surface roughness was identified. Compensated plasma signals for the material properties were obtained and analysed by removing the background plasma signal.

• Preventive Nutrition and Food Science
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• v.4 no.3
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• pp.200-202
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• 1999

The effectsof garlic vinegar supplementation on body weight, blood blucose, and plasma triglyceride and cholesterol were investigated in streptozotocin -induced diabetic rats fed high-cholesterol(1%) diet for 4 wk. The garlic vinegar was made by fermenting 20% frsh garlic juice. There was no effect of garlic vinegar on body weight, plasma glucose or triglyceride concentrations in the diabetic rats. Plasma total -cholesterol concentrations were unaffected by garlic vinegarr supplementation. However, plasma LDL-cholesterol concentrations and atherogenic index were significantly lower in the diabetic rats supplemented with garlic vinegar diet than tin the cotnrol rats. The diabetic-rats supplemented with garlic vinegar not only had increased HDL-cholesterol levels but had decreased LDL-cholesterol. This alteration in the HDL/LDL-cholesterol ratio in the diabetic rats may decrease the risk of atheroscelrosis. Therefore, the over-all effect of garlic vinegar supplement may contribute to the antiatherogenic role in streptozotocin-induced diabetic rats.

• Journal of the Korean Society of Food Science and Nutrition
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• v.27 no.2
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• pp.326-332
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• 1998

The effect of mushroom extracts from Pleurotus ostreatus and Lentinus edodes on carbon tetrachloride(CCl4)-induced hepatotoxicity was investigated. Rats were administered orally each mushroom extract at the dose of 150mg/kg, foolwed by treatment with CCl4. Liver damage was produced in male Sprague-Dawley rats, after 21hrs from dosing with CCl4(0.25ml/kg) which were given intraperitoneally. Liver damage without renal injury was confirmed by measuring plasma enzyme, creatinine and blood analysis and liver analysis. Plasma aminotransferase activity, and levels of cholesterol and triglyceride were analyzed. Plasma alanine aminotransferase and aspartate aminotransferase activities were decreased by 34% and 61.5% in pretreatment group of Lentinus edodes compared with CCl4 treated group, respectively. The adminstration of all mushroom extracts led the plasma cholesterol and triglyceride levels decrease more than the CCl4-treated rats. These results suggest that Lentinus edodes extract protect liver from damage induced by CCl4.

• Journal of the Korean Chemical Society
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• v.35 no.6
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• pp.699-706
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• 1991

The moderate power (500 W) Microwave Induced Plasma was generated with helium gas and was used for the direct analysis of aqueous samples. Usually, the helium plasma obtained with a modified Beenakker type cavity forms a cylindrical one. Though, by the careful controls of gas flows, a "toroidal" shape plasma could be made but its analytical performances were found to be worse. Using the glass frit nebuliser, the detection limits for metal ions obtained were around 10~100 ppb and that for chloride was about 50ppm.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.579-579
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• 2013

We study on Argon metastable and 4p state neutral atom density in magnetized ICP Helicon plasmas by Laser Induced Fluorescence and plasma emission. The results show that metastable density is too low at the center of chamber due to significant neutral depletion. Otherwise, 4p state is high at the center of chamber because electron density is very high. Power and pressure dependence of metastable and 4p state neutral atom have been spatially measured in the radial direction of cylindrical chamber.