• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.209-215
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• 1997

Aluminum nitride(AIN) thin films were deposited by reactive single ion beam sputtering using N2 or NH3 as reactive gas. The structural, compositional and optical properties of AIN thin films were characterized by XRD, GAXRD, TEM, SEM, XPS UV/VIS spectrophotometer, and FT-IR. All the deposited AIN thin films were amorphous by the analysis fo XRD and GAXRD. However, TEM analysis showed that AIN nano-crystallites were uniformly distributed in the films. The presence of Al-N bonds were also confirmed by FT-IR and XPS analyses. The optical bandgap of AIN films increased up to 6.2 eV and the transmittance was a-bout 100% in visible range with approaching the stoichimetric composition. Irrespective of using N2 or NH3 as reactive gas, the deposited AIN thin films had very smooth surface morphologies. Their refractive index ranged from 1.6 to 1.7.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.1
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• pp.6-10
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• 2001

In this study, we investigated the optical properties of sub-wavelength a-Si thin film transmission gratings, especially the polarization effect, the phase difference and the birefringence by using linearly polarized He-Ne laser beam (632.8nm). The a-Si transmission grating of the thickness $of < 0.1 \mum$ with four-type period($\Lambda = 0.4 \mum and 0.6 \mum$ for sub-wavelength and $\Lambda = 1.0 \mum and 1.4 \mum$ for above-wavelength) on quartz substrates have been fabricated using 50 KeV Ga+ Focused-Ion-Beam(FIB) Milling and $CF_4$Reactive-Ion-Etching(RIE) method. Finally, we obtained the trating array of a-Si thin film with a period $0.4 \mum, 0.6 \mum, 1.0 \mum, 1.4 \mum$ which have nearly equal finger spacing and width, sucessfully. Especially, for gratings with $\Lambda = 0.6 \mum(linewidth=0.25 \mum, linespace=0.35\mum), the \etamax at \theta_в=17.0^{\circ}$ is estimated to be 96%. As the results, we believe that the sub-wavelength grating arrayed a-Si thin film has the applicability as the optical device and components.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.23 no.1
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• pp.47-54
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• 2019

An improved method of spectrum detection algorithm for mass spectrum analysis system is proposed. In the conventional spectrum detection algorithm that utilizes the results of the linear approximation and quadratic curve fitting on the ion signal block of each mass index, it is possible to reduce the detection error in the mass spectrum detection by further improving the condition of eliminating the invalid ion signals. Also, the proposed method can reduce the estimation error of the peak value of the mass spectrum by using the result of quadratic curve fitting for the effective ion signal block in which the peak position error is corrected. To evaluate the effectiveness of the proposed method, computer simulations were carried out step by step using the measured ion signal. Also, by comparing the rate of false detection for several inputs, the proposed method showed better detection performance than the conventional method.

• Applied Chemistry for Engineering
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• v.22 no.4
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• pp.395-399
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• 2011

Material of the gasket for lithium ion battery requires the chemical resistance, the electrical insulting property, the compression set, the anti-contamination level and the low temperature resistance. We compounded ethylene propylene diene monomer (EPDM), which showed widely different solubility parameter index, with adjusting the amount of metal oxide as an activator. We did long-term test and compression set against an electrolyte with consideration for operating conditions in lithium-ion battery. In these tests, we checked the physical, chemical characteristics and the effect to lithium ion battery with different kinds of activators. In case of rubber with ZnO as an activator, through 1000 h depositing test in propylene carbonate which is one of representative solvents, we could get the satisfying characteristics and result. However, $Zn^{2+}$ had eluted in the ion elution test. So, ZnO should be limited in EPDM compound for the gasket material in lithium-ion battery.

• Journal of the Korean Ceramic Society
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• v.31 no.2
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• pp.206-212
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• 1994

Effects of the film deposition process parameters on the properties such as deposition rate, etch rate, refractive index, stress and step coverage of plasma enhanced chemical vapor deposited (PECVD) tetraethylorthosilicate glass (TEOS) SiO2 film were investigated and analysed using SEM, FTIR and SIMS techniques. Increasing TEOS flow or decreasing O2 flow increased the deposition rate and the compressive stress of the oxide film but produced a less denser film. The deposition rate decreased owing to the decrease in the sticking coefficient of the TEOS and the O2 molecules onto the substrate Si with increasing the substrate temperature. Increasing the substrate temperature produced a denser film with a lower etch rate and the higher refractive index by lowering SiOH and moisture contents. Increasing the rf power increases the ion bombardment energy. This increase in energy, in turn, increases the deposition rate and tends to make the film denser. No appreciable changes were found in the deposition rate but the refractive index and the stress of the film decreased with increasing the deposition pressure. The carbon content in the plasma TEOS CVD oxide film prepared under our standard deposition conditions were very low according to the SIMS analysis results.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.381.1-381.1
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• 2014

In this study, we investigated the deposition behavior and the etch resistivity of plasma polymerized carbon hardmask (ppCHM) film with the variation of process temperature. The etch resistivity of deposited ppCHM film was analyzed by thickness measurement before and after direct contact reactive ion etching process. The physical and chemical properties of films were characterized on the Fourier transform infrared (FT-IR) spectroscope, Raman spectroscope, stress gauge, and ellipsometry. The deposition behavior of ppCHM process with the variation of temperature was correlated refractive index (n), extinction coefficient (k), intrinsic stress (MPa), and deposition rate (A/s) with the hydrocarbon concentration, graphite (G) and disordered (D) peak by analyzing the Raman and FT-IR spectrum. From this experiment we knew an optimal deposition condition for structure of carbon hardmask with the higher etch selectivity to oxide. It was shown the density of ppCHM film had 1.6~1.9 g/cm3 and its refractive index was 1.8~1.9 at process temperature, $300{\sim}600^{\circ}C$. The etch selectivity of ppCHM film was shown about 1:4~1:8 to undoped siliconoxide (USG) film (etch rate, 1300 A/min).

• Environmental Engineering Research
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• v.17 no.1
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• pp.17-25
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• 2012

Concern about green water problem has surfaced as a serious issue in Korea. In order to solve this problem, it is necessary to research inhibition of green water and corrosion control of copper pipe in water service. This paper discovered that moderate corrosion inhibitors can solve the green water problem and copper corrosion in water service by adding the optimal concentration of corrosion inhibitors based on regulation. Firstly, in the case of phosphate based corrosion inhibitors, as dosage of the corrosion inhibitor increases from 1 mg/L to 5 mg/L, the relative effect of corrosion inhibitor declines rapidly. Secondly, except for 1 mg/L dosage of silicate based inhibitor, relative effects of the inhibitor displays a positive number depending on inhibitor concentration. The most significant result is that the amount of copper release shows a downward trend, whereas the phosphate based inhibitor accelerates copper ion release as the inhibitor dosage increases. Thirdly, as the dosage of mixed inhibitors increases to 10 mg/L, the copper release change shows a similar trend of phosphate based inhibitor. Lastly, according to the Langelier saturation index (LI), silicate based inhibitors have the most non corrosive value. Larson ratio (LR) indicates that phosphate based inhibitors are the least corrosive. Korea water index (KWI) represents that silicate based inhibitors are most effective in controlling copper pipe corrosion.

• Journal of the Speleological Society of Korea
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• no.92
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• pp.9-18
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• 2009

A number of closed metal mines act as point sources of contamination on nearby streams, soils and plants in our country. The contamination of twelve decomposed samples had earned from nine closed metal mines had been evaluated by TEA-3000. The contents of heavy metal with ion fraction exchange and carbonate fraction forms had been showed that the speciation of heavy metals represented with easy solubility, mobility and bioavailable of plants, and in case of sulfide compounds and organic residuals forms are related with the speciation of metals which may be stable forms because of strong bindable capacity. Also heavy metals elements in mosts of mines got with relative stable within crystal lattice, but results of trace element analyser showed that, in the most of tailings from mine areas, large portions of concentration of heavy metals were explained as stable from, sulfides/ organics and residual. In tailing from Imchun mines, the concentrations extracted by water were relatively high as compared with other mine areas whose total concentrations were very high because of large quantities of exchangeable ions and carbonates and low soil pH. Danger Index (D.I.) suggested in this study was based on the cumulative concentrations of step 1 and 2 from the result of trace element analyser. When the soil pH was considered, this index became better indicator to determine the priority for the remediation of mine area.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.28-32
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• 2003

Both $LiNbO_3$ and $KTiOPO_4$ samples were implanted with 350 keY $H^+$ and $He^+$ ions at different doses ranging from $1 ${\times}$\times10^{16}$ to of $5 ${\times}$\times10^{16}$ ions/$\textrm{cm}^2$. Single and multi-energy implantations were performed at room temperature. Mono-mode or a few modes in both $LiNbO_3$ and $KTiOPO_4$ waveguides were observed. The effect of temperature on the refractive index profiles of $LiNbO_3$ and $KTiOPO_4$ waveguids was studied. The temperature covered from room temperature, $200^{\circ}C$, 194.5 K (dry ice) and 77K (liquid nitrogen). Different mechanisms are needed to interpret the observed behavior. A n, increased mono-mode $LiNbO_3$ waveguide was formed by multi-energy keV $He^+$ ions.

• Journal of Soil and Groundwater Environment
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• v.20 no.6
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• pp.28-36
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• 2015

Simultaneous mobility reduction of explosives and heavy metals in an operational range by monopotassium phosphate (MKP) and bentonite spreading technology was investigated. Potassium ion and phosphate ion in MKP act as explosives sorption enhancer and insoluble heavy metal phosphate formation, respectively, while bentonite acts as the explosives adsorbent. Then, the decrease in surface water concentration of the pollutants and resulting risk reduction for local residents of the operational range, by MKP/bentonite application was estimated. Under untreated scenario, the noncancer hazard index (HI) exceeded unity on February, July and August, mainly due to 2,4,6-trinitrotoluene (TNT); however, MKP/bentonite treatment was expected to lower the noncancer hazard index by decreasing the surface water concentration of explosives and heavy metals (especially TNT). For example, on July, estimated surface water concentration and HI of TNT were 0.01 mg/L and 1.1, respectively, meanwhile the sorption coefficient of TNT was 3.9 mg¹⁻ⁿkg⁻¹Lⁿ. However, by MKP/bentonite treatment, the TNT sorption coefficient increased to 113.8 mg¹⁻ⁿkg⁻¹Lⁿ and the surface water concentration and HI decreased to about 0.002 mg/L and 0.2, respectively. Based on the result, it can be concluded that MKP/bentonite spreading is a benign technology that can mitigate the risk posed by the pollutants migration from operational ranges.