• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.216.1-216.1
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• 2013

PZT 박막은 강유전 특성과 압전소자 특성을 나타내는 물질로 DRAM (dynamic random acess memory)과 FRAM (ferroelectric RAM) 등의 기억소자용 capacitor와 MEMS (micro electro mechanical system) 소자의 압전 물질로 사용하기 위한 연구가 진행중에 있다. 하지만 이러한 연구에서는 PZT 박막의 전기적 특성 향상을 주목적으로 연구가 진행되어 왔다. 특히, 박막 공정중 발생하는 plasma에 의한 PZT의 전기적 특성 변화가 박막 표면의 물리적 변화에 기인할 것으로 추정하고 있지만 이에 대한 구체적인 연구는 미비하다. 이 연구에서는 plasma에 의한 PZT 박막 표면의 물리적 특성 변화를 연구하기 위하여 PZT 박막을 sol-gel을 이용하여 Si 기판위에 약 100 nm의 두께로 증착하였으며, 이후 최대 300 W의 Ar plasma로 plasma power을 증가시켜 각각 10분간 plasma처리를 실시하였다. PZT 박막 표면의 nano-mechanics 특성을 분석하기 위하여 Nano-indenter와 Kelvin Probe Force Microscopy (KPFM)을 사용하여 surface hardness, surface morphology를 확인하였고 특히, surface potential 분석을 통하여 PZT 박막 표면의 plasma에 의한 박막 극 표면의 전기적 특성 변화를 연구하였다. 이 연구로 plasma에 의한 PZT 박막은 표면으로부터 최대 43 nm 깊이에서의 hardness는 최대 5.1 GPa에서 최소 4.3 GPa의 분포로 plasma power 변화에 의한 특성은 측정 불가능하였다. 이는 plasma에 의한 영향이 시료 극 표면에 국한되어 나타나기 때문으로 추정되며 이를 보완하기 위하여 surface potential을 분석하였다. 결과에 의하면 plasma power가 0 W에서 300 W로 증가함에 따라 potential이 30 mV에서 -20 mV로 감소하였으나 potential의 분산은 100 W에서 최대인 17 mV로 측정되었으며, 이때 RMS roughness역시 가장 높은 20.145 nm로 측정되었다. 특히, 100 W에서 potential에서는 물결 모양과 같은 일정한 패턴의 potential 무늬가 확인되었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.307-310
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• 2009

Nowadays, the usage of high strength steel has been growing in automobile industry mainly as structural parts since for its lightweight and high strength properties the oil crisis happened. Owing to poor formability, complex-shaped high-strength steel components are invariably produced through hot press forming. The high-strength steel sheets are in so me instances used with an Al-Si-coating with a view to prevent scaling of components during hot press forming. How ever, friction and fracture characteristics of Al-Si-coated high-strength steel during hot press forming process have not yet been investigated. In this paper, the formed parts which were formed in hot bending process were investigated by using EDS. SEM and nano indenter in order to analysis the coating layer behavior.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.38-46
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• 1999

Numerical methods are procured for evaluating the contact stresses, the dissipation of friction energy density and the fatigue cracking emanated from the contact surface under the partial slip condition. A rounded punch is used for the indenter pressing and slipping on the elastic half plane. Plane strain condition is assumed for the present analysis. Several sample calculations are carried out to investigate the effect of the punch roundness, the shear load path, and the crack obliquity and closure on the failure. It is found that the present methods can be a useful tool for studying the physical failure of the of the contacting materials such as fretting wear and fretting fatigue cracking.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1991.06a
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• pp.60-62
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• 1991

세라믹스 및 Si과 같은 반도체의 사용을 위해서는 drilling, cutting, polishing 등의 과정이 필요하고 이와 같은 기계적인 가공에는 막대한 시간과 에너지가 필요하게 된다. 그리고 가공중에 생긴 결함은 최종제품의 전기적, 화학적, 기계적 성질들에 영향을 주기 때문에 이들 재료의 손상부위 분석을 포함한 tribological거동의 이해는 경제적인 이유뿐만 아니라 기술적인 면에서도 중요하다. 이러한 이유에서 비금속표면성질에 미치는 용액의 영향에 대한 연구는 학문적 관심뿐만 아니라 실용적인 관심을 끌고 있다. Rebinder에 의해 액체와 접촉하고 있는 고체의 역학적 성질의 변화에 대한 보고가 있은 이래 소위 chemomechanical effect에 대한 실험결과가 많이 보고되었다. 본 연구에서는 단결정 Si기판율 diamond indenter에 의해 전해질 용액에서 scratch함으로써 Si의 cutting 및 polishing 등에 미치는 용액의 효과를 규명하고자 하였다.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.197-198
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• 2002

In order to produce micromachined parts with a great dimensional accuracy, it is important to clarify the influence of heterogeneity and/or discontinuity of workpiece materials on the micromachining process, because almost all structural materials are composed of heterogeneous and/or homogeneous crystal grains at the micro scale. Experiments where JIS S25C steel had been scratched with a diamond triangular pyramid indenter were conducted under a field emission scanning electron microscope (FE-SEM). The difference of plastic deformation at a groove scratched between a pearlite zone and a proeutectoid ferrite zone was investigated through comparison with the groove scratched of a pearlite zone and a proeutectoid ferrite zone.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.10
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• pp.911-916
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• 2015

In the nano/micro scale, material properties are dependent on the size-scale of a structure. However, conventional micro-scale tensile tests have limitations to obtain reliable values of nano-scale material properties owing to residual stress and elastic slippage in the gripping/aligning process. The indenter-driven nano-scale tensile test provides prominent advantages simple testing device, high-quality nano-scale metallic specimen with negligible residual stress. In this paper, two-types of specimens (a specimen with multi-testing parts and a specimen with a single-testing part) are discussed. Focused ion beam (FIB) is employed to fabricate a nano-scale specimen from a thin nickel film. Using the specimen with a single-testing part, we obtained a nano-scale stress-strain curve of electroplated nickel film.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.7
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• pp.631-635
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• 2006

The properties of metal interlayered DLC films between the Si substrate and the DLC films were studied. DC magnetron sputtering method has been used to deposit intermediate layers of metals. And RF-PECVD method has been employed to synthesize DLC onto substrates of the silicon and metal layers. After we used metal Inter-layers, such as chromium, nickel, titanium and we studied tribological properties of the DLC films. The thickness of films were observed by field emission scanning electron microscope (FE-SEM). Also the surface morphology of the films were observed by an atomic force microscope (AFM). The crystallographic properties of the films were analyzed with X-ray diffraction (XRD), the friction coefficients were investigated by AFM in friction force microscope (FFM) mode. Tribological performances of the films were estimated by nano-indenter, stress tester measurement.

• Journal of the Korean Ceramic Society
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• v.34 no.12
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• pp.1268-1274
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• 1997

Effect of elastic/plastic mismatch on the fracture of Si3N4 coating in Si3N4/Si3N4 -BN bilayer was investigated by Hertzian indentation testing. A different amount of mismatch between two layers was induced by different BN addition in the substrate layer, and Hertizian cracks were induced by using WC ball indenter. As a result, as the elastic/plastic mismatch between coating and substrate layer increased, the coating fracture easily occurred. A bending stress induced by different elastic/plastic mismatch was main reason to cause the fracture of coating.

• Journal of the Korean Society for Heat Treatment
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• v.33 no.3
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• pp.117-123
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• 2020

Due to high corrosion resistance, Zinc has been widely used in the automobile, shipping or construction industries as a galvanizing material. Zinc is popular as a coating element, but its low mechanical strength impede the expansion of applications as a load-bearing structure. The mechanical strength of Zinc can be increased through zinc based alloy process, but the ductility is significantly reduced. In this study, the mechanical strength and ductility of Zinc-Magnesium alloys with respect to heat treatment hold time was investigated. In order to enhance the mechanical strength of Zinc, a Zinc-Magnesium alloy was fabricated by a melting process. The heat treatment process was performed to improve the ductility of Zinc-Magnesium alloy. The microstructure of the heat-treated alloy specimen was analyzed using SEM. The hardness and compressive strength of the specimen were measured by a micro-hardness tester and a nano-indenter, respectively.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.1 s.244
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• pp.42-51
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• 2006

An indentation method to determine equi-biaxial residual stress is proposed by examining the data from the incremental plasticity theory based finite element analyses. We first select optimal normalized-parameters, which are minimally affected by indentation depth and material properties. Numerical linear regressions of obtained data exhibit that maximum load and contact area of imprint are the main parameters measuring the residual stress. The proposed indentation approach provides a substantial enhancement in accuracy compared with the prior methods.