• 한국세라믹학회지
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• 제44권7호
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• pp.368-374
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• 2007

CVD-SiC coating has been introduced as a protective layer in TRISO nuclear fuel particle of high temperature gas cooled reactor (HTGR) due to its excellent mechanical stability at high temperature. In order to prevent the failure of the TRISO particles, it is important to evaluate the fracture strength of the SiC coating layer. It is needed to develop a new simple characterization technique to evaluate the mechanical properties of the coating layer as a pre-irradiation step. In present work, direct strength measurement method with the specimen of hem i-spherical shell configuration was suggested. The indentation experiment on a hemisphere shell with a plate indenter was conducted. The fracture strength of the coating layer is related with the critical load for radial cracking of the shell. The finite element analysis was used to drive the semi-empirical equation for the strength measurement. The SiC hemispherical shells were successfully recovered from the section-grinding of TRISO coated particle and successive heat treatment in air. The strength of CVD-SiC coating layer was evaluated from the experimentally measured critical load during the indentation on SiC hemisphere shell. Weibull diagram of fracture strength was also constructed. This study suggested a new strength equation and experimental method to measure the fracture strength of CVD-SiC coating of TRISO coated fuel particles.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.333-334
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• 2007

Diamond-like carbon (DLC)박막은 높은 경도, 화학적 안정성, 높은 광 투과성을 가지고 있어, 공구강, 광학렌즈 및 플라스틱의 보호 코팅을 위해 응용되어진다. 본 연구에는 DLC 박막은 Silicon을 기반으로 하는 태양전지 반사 반지막으로 응용을 위해, 13.56 MHz RF 플라즈마 화학기상 증착 (RF-PECVD)법을 통해 합성되었다. DLC 합성 시 RF power는 150 W, 메탄 (CH4)가스의 유량은 6%~10% 조절되었다. 합성되어진 DLC 박막의 광학적 특성은 UV spectrometry, Ellipsometry를 사용하여 분석되었고, 경도는 Nano-indenter를 사용하여 측정되었다. 측정 결과 투과도와 굴절률 등의 광학적 특성은 탄소 조성비가 6%정도에서 가장 좋은 결과 값을 얻었으나, 물리적 특성인 경도는 탄소 조성비가 높을수록 증가하는 경향을 보였으며, Si기판과의 접착력은 32N 이상의 높은 값을 나타내었다. 결과로써, DLC 박막은 합성시 적절한 탄소 조성비를 통해 silicon을 기반으로 하는 태양전지 반사방지막으로 응용할 수 있다.

• 한국진공학회지
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• 제4권S2호
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• pp.40-48
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• 1995

$TiB_2$-TiN double-layer coating have been prepared by ion beam enhanced deposition. AES, XRD, TEM and HRTEM were employed to characterize the $TiB_2$ layer. The microhardness of the coatings was evaluated by an ultra low-load microhardness indenter system, and the tribological behavior was examined by a ball-on-disc tribology wear tester. It was found that in a single titanium diboride layer, the composition is uniform along the depth of the film, and it is mainly composed of nanocrystalline $TiB_2$ with hexagonal structure, which resulted from the ion bombardment during the film growth. The hardness of the $TiB_2$ films increases with increasing ion energy, and approaches a maximum value of the $TiB_2$ films increases with increasing ion energy, and approaches a maximum value of 39 Gpa at ion energy of 85 keV. The tribological property of the TiB2 films is also improved by higher energy of 85keV. The tribological property of the $TiB_2$ films is also improved by higher energy ion beam bombardment. There is no major disparity in the mechanical properties of double-layer $TiB_2$/TiN coatings and TiN/$TiB_2$ coatings. Both show an improved wear resistance compared with single-layer $TiB_2$ films. The adhesion of double-layer coatings is also superior to that of single-layer films.

• 한국진공학회지
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• 제20권3호
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• pp.200-204
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• 2011

이 논문에서는 반도체의 기판으로 사용되는 Si(silicon)기판과 금속배선 물질인 Cu(copper)의 확산을 효과적으로 방지하기 위한 W(Tungsten)-C(Carbon)-N(Nitrogen) 확산방지막을 제시하였고, 시료 증착을 위하여 rf magnetron sputter를 사용하여 동일한 증착조건에서 질소(N)의 비율을 다르게 증착한 후 시료의 열적 안정성 측정을 위하여 상온에서 $800^{\circ}C$까지 각각 질소 분위기에서 30분간 열처리 과정을 실시하여 열적 손상을 인가하였다. 이후 Nanoindentation 기법을 이용하여 총 16 points에서 Elastic modulus와 Weibull distribution을 측정하였다. 그 결과 질화물질이 고온에서 물성변화가 적게 나타나는 것을 알 수 있었고, 온도변화에 따른 박막의 균일도와 결정성 또한 질화물질에서 더 안정적이었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.114-114
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• 2010

최근 고용량의 디커플링 캐패시터를 기판에 내장하여 고주파 발생의 원인인 배선길이와 실장 면적을 획기적으로 줄이는 임베디드 디커플링 캐패시터에 대한 연구가 활발히 진행되고 있다. 하지만 기존의 공정들은 높은 공정온도와 같은 공정상의 한계를 가지고 있어 상온 저 진공 분위기에서 세라믹 분말을 기판에 고속 분사시켜 기공과 균열이 거의 없는 치밀한 나노구조의 세라믹 제작이 가능한 후막코팅기술인 Aerosol Deposition Method (ADM)에 착목하였으며, 이 ADM을 박막공정으로 응용하여 $BaTiO_3$ 박막을 제작하고 고용량의 디커플링 캐패시터 제작을 실현하고자 한다. 하지만, Cu 기판 상에 성막 된 $0.5\;{\mu}m$이하의 $BaTiO_3$ 박막에서는 $BaTiO_3$ 분말 내에 존재하는 평균입자 보다 큰 입자와 응집분말로 인해 발생하는 pore, crater, not-fully-crushed particles와 같은 거시적인 결함들에서의 전류 통전과 울퉁불퉁한 $BaTiO_3$ 박막과 기판 사이의 계면에서의 전계의 집중에 의한 전류의 증가로 인하여 큰 누설전류 발생하는 문제에 봉착하였다. 이러한 문제를 해결하기 위하여 제시된 효과적인 방법으로 Stainless steel 기판과 같이 표면경도가 높은 기판을 사용하는 것이며, 이를 통해 $0.2\;{\mu}m$의 두께까지 유전 $BaTiO_3$ 박막을 성막 할 수 있었으며, 치밀한 표면 미세구조와 줄어든 $BaTiO_3$ 박막과 기판 사이의 계면의 거칠기를 확인하였다. 하지만, $BaTiO_3$ 박막 내에 발생하는 누설전류의 근본원인을 확인하기 위해서는 누설전류에 대한 미시적인 접근이 더욱 요구된다. 이에 본 연구에서는 누설전류 발생원인의 미시적 접근을 위해 두께에 따른 $BaTiO_3$ 박막의 누설전류 전도기구에 대한 조사하였으며, 이를 통해 $BaTiO_3$ 박막내 발생하는 누설전류의 원인은 $BaTiO_3$막 내에서 donor로서 역할을 하는 oxygen vacancy와 불균일한 전계의 집중으로 인한 전자의 tunneling 현상임을 확인할 수 있었다. 또한, Nano-indenter와 Conductive atomic force microscopic를 이용한 정밀 측정을 통해 표면경도의 중요성을 재확인하였으며 $BaTiO_3$ 박막의 두께가 $0.2\;{\mu}m$이하로 더욱 얇아지게 되면 입자간 결합 문제 또한 ADM을 박막화 하는데 있어 중요한 요소임을 확인하였다.

• 대한기계학회논문집A
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• 제36권1호
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• pp.81-90
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• 2012

재료시험기법 중 하나인 압입시험은 크리프 특성 분석에 이용될 수 있다. 그러나 많은 기존 연구들이 정상상태의 크리프 특성만을 이용하고 있기 때문에, 단축시험과 압입시험 사이에는 상당한 차이가 발생한다. 따라서 정확한 크리프 평가를 위해서는 천이 크리프 특성을 고려하여야 한다. 본 연구에서는 Ogbonna 등(14)의 구형 압입자를 이용한 천이 크리프 해석을 확장, 자기 유사성을 갖는 원뿔형 압입자에 적용했다. 천이 크리프 특성을 유한요소해석을 통해 분석하여 정리하였으며, 구형 및 원뿔형 압입시험의 천이 특성을 비교했다. 또한 재료의 탄성변형률, 압입자 형상, 압입접촉면적, 대표 변형률 등 기존 평가법들에서 정량적으로 잘 고려되지 못하고 있는 부분들을 살펴보고 그 해결방안을 제시했다.

• Tribology and Lubricants
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• 제37권4호
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• pp.144-150
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• 2021

The most cost-effective method of reducing abrasive wear in mechanical parts is increasing their hardness with thin hard coatings. In practice, the composite hardness of the coated substrate is more important than that of the substrate or coating. After full unloading of the load applied to an indenter, its indentation hardness evaluated based on the dent created on the test piece was almost dependent on plastic deformation of the substrate. Following the first part of this study, which proposes a new Brinell hardness test method for a coated surface, the remainder of the study is focused on practical application of the method. Indentation analyses of a rigid sphere and elastic-perfect plastic materials were performed using finite element analysis software. The maximum principal stress and plastic strain distributions as well as the dent shapes according to the substrate yield stress and coating thickness were compared. The substrate yield stress had a significant effect on the dent size, which in turn determines the Brinell hardness. In particular, plastic deformation of the substrate produced dents regardless of the state of the coating layer. The hardness increase by coating behaved differently depending on the substrate yield stress, coating thickness, and indentation load. These results are expected to be useful when evaluating the composite hardness values of various coated friction surfaces.

• Restorative Dentistry and Endodontics
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• 제44권1호
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• pp.1.1-1.12
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• 2019

Objectives: The aim of this in vitro study was to test the effect of 2 finishing-polishing sequences (QB, combining a 12/15-fluted finishing bur and an EVO-Light polisher; QWB, adding a 30-fluted polishing bur after the 12/15-fluted finishing bur used in the QB sequence) on 5 nanotech-based resin composites (Filtek Z500, Ceram X Mono, Ceram X Duo, Tetric Evoceram, and Tetric Evoceram Bulk Fill) by comparing their final surface roughness and hardness values to those of a Mylar strip control group (MS). Materials and Methods: Twelve specimens of each nanocomposite were prepared in Teflon moulds. The surface of each resin composite was finished with QB (5 samples), QWB (5 samples), or MS (2 samples), and then evaluated (60 samples). Roughness was analysed with an optical profilometer, microhardness was tested with a Vickers indenter, and the surfaces were examined by optical and scanning electron microscopy. Data were analysed using the Kruskal-Wallis test (p < 0.05) followed by the Dunn test. Results: For the hardness and roughness of nanocomposite resin, the QWB sequence was significantly more effective than QB (p < 0.05). The Filtek Z500 showed significantly harder surfaces regardless of the finishing-polishing sequence (p < 0.05). Conclusions: QWB yielded the best values of surface roughness and hardness. The hardness and roughness of the 5 nanocomposites presented less significant differences when QWB was used.

• Tribology and Lubricants
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• 제35권4호
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• pp.229-236
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• 2019

This study investigates the stress singularity that occurs at the contact edge of three bodies in a frictional complete contact. We use the asymptotic analysis method, wherein we constitute an eigenvalue problem and observe the eigenvalue behavior, which we use to obtain the order of the stress singularity. For the present geometry of three bodies in contact, a contact between a cracked indenter and half plane is considered. This is a typical geometry of the PCMI problem of a nuclear fuel rod. Thus, this paper, specifically presents the characteristics of the PCMI problem from the perspective of stress singularity. Consequently, it is noted that the behavior of the stress singularity varies with the difference in the crack angle, coefficient of friction, and material dissimilarity, as is observed in a frictional complete contact of two bodies. In addition, we find that the stress singularity changes essentially linearly with respect to the coefficient of friction, regardless of the variation in the crack angle and material dissimilarity. Concurrently, we find the order of singularity to be 0.5 at a certain coefficient of friction, irrespective of the crack angle, which we also observe in the crack problem of a homogeneous and isotropic body. The order of singularity can also exceed 0.5 in the frictional complete contact problem of three bodies. This implies that the propensity for failure when three bodies are in frictional complete contact can be even worse than that in case of a failure induced by a crack.

• 대한금속재료학회지
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• 제47권7호
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• pp.416-422
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• 2009

Approaches for analyzing indentation hardness are still controversial, although the instrumented indentation technique has been generalized as one powerful method that can record surface deformation behaviors. Material pile-ups around the indenter/surface contact region make the conventional Oliver and Pharr's analysis on the instrumented indentation curve inaccurate. Thus, in order to prove the validity of the hardness analyses, five approaches were applied to the experimental data obtained from fused quartz and (100) monocrystalline tungsten specimens; an elastic recovery analysis on instrumented indentation curves, three indentation work analyses on the unit plastic volume, and a differentiation analysis on remnant indentation morphologies were tried. Five kinds of indentation hardness overlapped on one result plot showed the validity of each analysis. The modified indentation work approach based on a new definition of plastic volume showed consistent results with those from the Oliver-Pharr's and image differentiation methods. In the case of pile-up accompanying deformation, the Oliver-Pharr's and image differentiation methods showed the upper and lower limits of indentation hardness, respectively.