• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.176.1-176.1
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• 2015

본 연구는 플라즈마 건식 식각 후 박막의 물성 특성 변화 측정에 Nano-Indentation 분석 기법을 도입하였으며, 식각 후 박막 표면 강도를 nano 영역에서 측정하여 박막 표면의 damage 분석에 적용하여 물리적인 해석을 시도하였다. 하지만 기판의 대면적화로 인하여 반도체 공정에 사용되는 기판은 300 mm로 증가하였고 이로 인하여 플라즈마 건식 식각에서 대면적에 대한 균일도 향상 연구를 진행 중에 있다. 이 연구에서는 플라즈마 건식 식각 후 박막의 균일도를 Nano-indenter 측정 결과를 기반으로 Weibull 분포 해석을 통하여 정량적인 균일도를 측정하고자 하였다. 플라즈마 건식 식각을 위하여 플라즈마 소스는 Adaptively Coupled Plasma (ACP)를 사용하였고 식각 후 TEOS $SiO_2$ 박막 표면을 분석하기 위하여, 시료 평면의 x, y 축에 대하여 각각 $20{\mu}m$로 indent 각 지점을 이격하여 동일한 측정 조건에서 Nano-indenter를 이용하여 박막 표면의 강도를 측정하였다. 측정된 결과는 Weibull 분포를 활용하여 정량화하였다. 결과에 의하면 플라즈마 소스의 bias 파워가 300 W 일 때 균일도가 가장 높은 29.84로 측정되었고, 150 W 일 때 가장 낮은 8.38로 측정되었다. 식각 전 TEOS $SiO_2$ 박막의 Weibull 분포에 의한 균일도가 17.93으로 측정됨을 기반으로 ACP 플라즈마 소스의 식각 조건에 따라 TEOS $SiO_2$ 박막의 균일도가 상대적으로 변함을 정량적으로 분석할 수 있었다.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.44 no.4 s.316
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• pp.86-92
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• 2007

A discrete dynamic model for tracking feature points in 2D images is developed. Conventional snake approaches deform a contour to lock onto features of interest within an image by finding a minimum of its energy functional, composed of internal and external forces. The neighborhood around center snaxel is a space matrix, typically rectangular. The structure of the model proposed in this paper is a set of connected vertices. Energy model is designed for its local minima to comprise the set of alternative solutions available to active process. Block on tracking is one dimension, line type. Initial starting points are defined to the satisfaction of indent states, which is then automatically modified by an energy minimizing process. The track is influenced by curvature constraints, ascent/descent or upper/lower points. The advantages and effectiveness of this layer approach may also be applied to feature points tracking of digital image whose pixels have one directional properties with high autocorrelation between adjacent data lines, vertically or horizontally. The test image is the ultrasonic carotid artery image of human body, and we have verified its effect on intima/adventitia starting points tracking.

• Korean Journal of Oriental Medicine
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• v.14 no.3
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• pp.113-119
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• 2008

In pulse diagnosis, the indentation pressure is one of the most important factors as well as the change of pulse shape and the distribution of pressure via time. But, on the oriental medical doctor's indentation pressure control, the understandings of the neurophysiological meanings and mechanisms have been lacked. So, in this paper, we considered on these issues and then proposed a proper system which can imitate the OMD's indentation pressure control mechanisms. As a result, both tactile information and kinesthetic information were found to be essential to the indentation pressure control so that a system, which can measure both the physical indent pressure and the displacement of an indentation arm, has been proposed. With this proposed system, while the indentation was being controlled through the moving step number of the step motor, the physical indentation pres sure and displacement of the indentation arm were measured. From these measured data, the relationships between the moving step number and both physical indentation pressure and displacement were revealed to have linear characteristics in early phase and to have nonlinear characteristics in latter phase. Additionally, three types of graph were generated whose X axis means the moving step number, the physical indentation pressure and the displacement respectively and Y axis means the pulse pressure. By comparing these graphs, we come to conclude that different concepts on indentation pressure control cause different diagnostic results on floating/sinking degrees for the same subject. Consequently, an indentation system for the pulse diagnosis should be able to provide both the tactile information and kinesthetic information, that is, the physical indentation pressure and the displacement of the indentation arm. In future, the proposed system should be optimized to the pulse diagnosis environment and how to combine the both information for more reliable diagnosis should be studied.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1997-1998
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• 2008

Pulse diagnosis is the one of the most important diagnostic process to traditional medical doctors. Although the pulse diagnosis position, Gwan is apart from Chon or Cheok by 10$\sim$20mm at most, traditional medical doctors applies different indent pressures and even they states different pulse images are felt at Chon, Gwan and Cheok. One the other hand, the education on pulse diagnosis behavior includes tantalizing problem caused by no tool for communication between trainer and trainee. On account of this situation, we tried to develop a system which can measure the hold-down pressure during a pulse diagnosis and compare the hold-down pressure profile of trainer and that of trainee. This system can be divided into three parts - pulse pressure sensing part, signal acquisition part and data storing part. A correction curve was generated by the relation between output voltages and standard weights. Using this system, 3 channel hold-down pressure profile of a oriental medical doctor were recorded three times. In the profile, three period were observed and all period included two process for searching the depth of pulsation and for classifying the pulse feeling into one or more of 28 pulse types. The maximum value of pulse profile was 1.3$kg{\cdot}f$ which was more than reported by previous chinese groups and the mean values of three channel ranged from 240$g{\cdot}f$ to 430$g{\cdot}f$. In frequency domain, each channel has some dominant frequency components - about 10Hz, 35Hz and 75Hz. In further study, we want to collect more profiles from lage number of oriental medicine doctors and hope to develop a measuring system which can measure the hold-down pressure on subject's skin directly.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.315-316
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• 2012

반도체와 금속배선의 확산을 방지하기 위한 확산방지막의 필요성이 대두되고 있으며, 이에 대한 연구는 많은 연구 그룹에서 진행중에 있다. 하지만 이러한 연구의 대부분은 전기적, 결정학적 특성에 대하여 안전성 및 재료학적 연구에 국한되어 진행되어졌다. 본 연구그룹은 텅스텐(W)을 질화시킨 W-N 확산방지막에 대하여 연구를 진행하였고, 역시 결정학적 특성에 대한 열적인 안전성을 주로 연구하였으나, 본 연구에서는 W-N 박막의 나노영역에 대한 기계적 특성 평가에 주안점을 두어 W-N 박막의 stress를 nano-indenter 기법을 이용하여 측정하고자하였다. 특히 공정시간의 단축 효과 등의 이유로 박막의 두께를 감소시키는 현재 추세에 맞춰 더 얇은 W-N 확산방지막을 제작하였으며, 이에 대한 분석을 실시하였다. W-N 확산방지막은 Ar(Argonne), $N_2$ (nitrogen) 총유량을 40 sccm으로 고정하여, 질소 유입 조건을 0, 0.5, 1 sccm 으로 변화시켜 Si (silicon) (100) 기판 위에 rf (radio-frequency) magnetron sputter를 이용하여 증착하였다. 이때 W-N 박막의 두께를 30, 100 nm로 달리하여 증착하였으며, 증착된 박막은 질소 분위기 $600^{\circ}C$에서 30분간 열처리하였다. 증착된 시료는 nano-indent를 통하여 표면으로부터 10 nm 부근의 극 표면 물성을 측정하였다. 측정 결과, $N_2$ 가스의 유량을 0.5 sccm 흘려주면서 증착한 W-N 박막이 $N_2$가스를 흘려주지 않은 W 박막과 비교하여 압축응력을 덜 받아 비교적 열에 대하여 안정적임을 확인하였다. 또 30 nm 두께의 W-N 박막이 100 nm 두께의 W-N 박막보다 더 기계적으로 안정적인 상태임을 확인하였다.

• Ocean Systems Engineering
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• v.11 no.1
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• pp.83-97
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• 2021

The submerged U-shape breakwater interaction with the solitary wave is simulated by the Boussinesq equations using the finite-difference scheme. The wave reflection, transmission, and dissipation (RTD) coefficients are used to investigate the U-shape breakwater's performance for different crest width, Lc1, and indent breakwater height, du. The results show that the submerged breakwater performance for a set of U-shape breakwater with the same cross-section area is related to the length of submerged breakwater crest, Lc1, and the distance between the crests, Lc2 (or the height of du). The breakwater has the maximum performance when the crest length is larger, and at the same time, the distance between them increases. Changing the Lc1 and du of the U-shape breakwaters result in a significant change in the RTD coefficients. Comparison of the U-shape breakwater, having the best performance, with the averaged RTD values shows that the transmission coefficients, Kt, has a better performance of up to 4% in comparison to other breakwaters. Also, the reflection coefficients KR and the diffusion coefficients, Kd shows a better performance of about 30% and 55% on average, respectively. However, the model governing equations are non-dissipative. The non-energy conserving of the transmission and reflection coefficients due to wave and breakwater interaction results in dissipation type contribution. The U-shape breakwater with the best performance is compared with the rectangular breakwater with the same cross-section area to investigate the economic advantages of the U-shape breakwater. The transmission coefficients, Kt, of the U-shape breakwater shows a better performance of 5% higher than the rectangular one. The reflection coefficient, KR, is 60% lower for U-shape in comparison to rectangular one; however, the diffusion coefficients, Kd, of U-shape breakwater is 35% higher than the rectangular breakwater. Therefore, we could say that the U-shape breakwater has a better performance than the rectangular one.

• Journal of the Korean Society of Marine Environment & Safety
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• v.27 no.1
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• pp.60-66
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• 2021

The importance of maintenance is leading the application of the maintenance strategy in various industries. The maritime industry is also a part of them, with changes in selecting and applying the maintenance strategy, but rather slowly, by retaining the old strategy. In particular, the ship is maintaining a previously used strategy. In the circumstance of the sea, ship requires a new suggestion for maintenance strategy. A ship predictive maintenance model predicts the breakdown or malfunction of machineries to secure maintenance time with preventive actions and treatments, thereby avoiding maintenance-related dangerous factors. This study focused on applying text analysis to an Liquefied Natural Gas Carriers dock indent document, and the analysis results were interpreted from the original document. The inter-relational patterns observed from the frequency of common maintenance combinations among different parts and equipment in ships will be applied to the development of ship predictive maintenance.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.35 no.2
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• pp.101-107
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• 2022

This study proposes the deconvolution method for the nanoindentation test results of geopolymer employing the Gaussian mixture model. Geopolymer has been studied extensively as an alternative construction material because it emits relatively lower CO₂ compared to ordinary Portland cement. Geopolymer is made of aluminosilicate and alkaline solution, and the Si/Al molar ratio affects its mechanical properties. Previous studies revealed that the Si/Al molar ratio of 1.8~2.0 results in the highest compressive strength, and the Si/Al molar ratio over 1.8 degrades the compressive strength of geopolymer severely; however the reason for the compressive strength degradation is still unclear. To understand the effect of the Si/Al molar ratio on the geopolymer structure, this study exploits the nanoindentation. The phase deconvolution of the indent modulus data is successful using the Gaussian mixture model, and it is observed that the Si/Al molar ratio alters the homogeneity of the geopolymer. Geopolymer becomes more homogeneous up to an Si/Al molar ratio of 1.8 at which geopolymer exhibits the highest compressive strength. The examination of this study is assumed to be adopted as evidence of strength degradation by the Si/Al ratio higher than the optimum value.

• Journal of the Society of Naval Architects of Korea
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• v.59 no.4
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• pp.192-199
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• 2022

With the advent of autonomous ships, it is emerging as one of the very important issues not only to operate with a minimum crew or unmanned ships, but also to secure the safety of ships to prevent marine accidents. On-site inspection of the hull is mainly performed by the inspector's visual inspection, and video information is recorded using a small camera if necessary. However, due to the shortage of inspection personnel, time and space constraints, and the pandemic situation, the necessity of introducing an automated inspection system using artificial intelligence and remote inspection is becoming more important. Furthermore, research on hardware and software that enables the automated inspection system to operate normally even under the harsh environmental conditions of a ship is absolutely necessary. For automated inspection systems, it is important to review artificial intelligence technologies and equipment that can perform a variety of hull failure detection and classification. To address this, it is important to classify the hull failure. Based on various guidelines and expert opinions, we divided them into 6 types(Crack, Corrosion, Pitting, Deformation, Indent, Others). It was decided to apply object detection technology to cracks of hull failure. After that, YOLOv5 was decided as an artificial intelligence model suitable for survey and a common hull crack dataset was trained. Based on the performance results, it aims to present the possibility of applying artificial intelligence in the field by determining and testing the equipment required for survey.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 2002.02a
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• pp.282-288
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• 2002

본 연구는 상업용 규모의 쇄미선별공정에 사용할 수 있는 파이로트 규모 원통형 홈 선별기 시작기의 설계 및 제작에 필요한 기초 연구로서, 실험실용 원통형 홈 선별기를 이용하여 쇄미선별 실험을 실시하였다. 원통 회전속도, trough각도, indent 크기와 형상, 공급량을 요인으로 하여 완전립의 수거율과 순도, 쇄립의 수거율과 순도 및 선별효율을 조사하였다. 수행한 연구결과를 요약하면 다음과 같다. 1. 선별효율에 대한 원통 회전속도와 trough각도의 단독효과 및 교호작용은 1% 수준에서 유의성이 인정되었다. 원통 회전속도가 커지면trough각도 역시 그에 따라 적절히 증가시켜야만 선별효율의 저하가 방지되는 것으로 나타났다. 2. 최고 선별효율 값은 홈의 모양과 크기, 그리고 공급량에 관계없이 낮은 회전속도 (17rpm)와 중간 trough각도 (37.5$^{\circ}$또는 60$^{\circ}$)가 조합된 처리에서 나타났으며, 60~70% 범위의 높은 값을 보였다. 선별효율에 관한 원통 회전속도와 trough각도의 최적 조합은 17rpm, 37.5$^{\circ}$라고 판단된다. 3. 말발굽형 홈과 반구형 홈 간 선별효율의 차이는 없었다. 따라서, 실제 상업용 규모의 원통형 홈 쇄미선별기 개발에 있어서는 제작이 쉽고 유지.보수가 간편한 반구형 홈을 채택하는 것이 바람직할 것으로 생각된다. 길이 2.5mm이하의 미립인 쇄미의 선별에 사용할 홈의 크기는 2.5mm 보다는 약간 큰 3.0mm 정도가 되어야만 할 것으로 판단된다. 4. 공급량에 따른 선별효율의 차이는 1% 수준에서 유의성이 인정되었으며, 공급량이 작았을 때 전반적으로 선별효율이 높았다.타리 시프터를 채택, 사용하고 있었으며, 로타리시프터 사용상의 문제는 회전몸체를 지지하는 rod spring의 파손 등 구조와 관련된 것이었다. 로타리 시프터에 의한 쇄립의 선별과 제거정도는 만족할 만한 수준은 아니었다. 4. 국내 유통백미 완전립의 길이, 폭, 두께는 각각 5.02mm, 2.93mm, 2.03mm이었으며, 산물밀도와 천립중은 각각 745.3kg/m3 및 20.46g이었다. 5. RPC 백미제품의 품질경쟁력 향상을 유도하고자 현행 쇄미의 정의와 기준을 보다 강화하여 다음과 같은 쇄미 기준과 계급을 설정, 제시하였다. "완전립" - 길이가 3.75mm이상인 미립 "준완전립" - 길이가 2.5∼3.75mm인 미립 "쇄미" - 길이가 1.75∼2.5 mm인 미립 "이물" - 길이가 1.75mm이하인 미립.볼 때 상토 종자혼합비 6 : 1, 성형롤 회전속도 약 7 rpm으로 판단되며, 이 때 제조능력은 시간당 약 65 Kg(펠렛종자 약 39,000 개), 성형률 약 87 %, 종자손실률은 약 30 %, 펠렛종자 내 평균 종자수는 약 5.5 개, 완전 벼 종자 3개 이상 포함 펠렛종자 비율은 약 100 %가 될 것으로 보인다. 세포의 Androgen 생성을 촉진시키는 역할이 있는 것으로 보여진다 따라서 옻나무 유래 F는 포유동물의 생식기능에 중요하게 작용하는 것으로 사료된다.된다.정량 분석한 결과이다. 시편의 조성은 33.6 at% U, 66.4 at% O의 결과를 얻었다. 산화물 핵연료의 표면 관찰 및 정량 분석 시험시 시편 표면을 전도성 물질로 증착시키지 않고, Silver Paint 에 시편을 접착하는 방법으로도 만족한 시험 결과를 얻을 수 있었다.째, 회복기 중에 일어나는 입자들의 유입은 자기폭풍의 지속시간