• Title/Summary/Keyword: Incident Light Extinction Method

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A study of optical characteristics correlated with low dielectric constant of SiOCH thin films through Ellipsometry (Ellipsometry를 이용한 저 유전 상수를 갖는 SiOCH박막의 광학특성 연구)

  • Park, Yonh-Heon;Hwang, Chang-Su;Kim, Hong-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.198-198
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    • 2010
  • The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-ramp in the range from 190nm to 2100nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

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A Study of Optical Characteristics Correlated with Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry (Ellipsometry를 이용한 저 유전상수를 갖는 SiOCH박막의 광학특성 연구)

  • Park, Yong-Heon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.3
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    • pp.228-233
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    • 2010
  • We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

A Study on the Diesel Spray by Means of Image Analysis of Shadow Photographs (陰影寫眞의 畵像解析에 의한 디이젤 噴霧의 硏究)

  • 장영준;신본무정;동경공
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.12 no.2
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    • pp.319-327
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    • 1988
  • A new measuring method is proposed, which measures the atomization characteristics of a non-evaporating, axi-symmetric diesel spray by means of an image analysis of high speed shadow photographs. The instantaneous sauter mean diameter and the fuel concentration in the spray are calculated of the splay axis and in the radial direction and the data of the fuel injection rate, using an onion peeling model. Some examples of application of this method to eight different diesel sprays are demonstrated, and the results are compared to predicted results by the conventional immersion method and a quasi-steady one dimensional spray model.

A Study on the Diesel Flame by Means of Image Analysis ofn Shadow Photographs (음영사진의 화상해석에 의한 디젤화염에 관한 연구)

  • 장영준;박호준;신본무정
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.5
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    • pp.1222-1233
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    • 1990
  • The formation and oxidation processes of soot particles in a diesel flame were investigated with a rapid compression machine. A cloud of soot particles was successfully visualized by means of the instantaneous laser shadow photographs technique and the equivalence ratio of the soot formation zone was estimated from a measured fuel concentration distribution in a nonevaporating spray. The temporal and spatial variation of soot concentration in the flame was also correlated with the rate of heat release. Soot particles appears first in a region near the flame tip when diffusion combustion period starts, and its concentration is a maximum at about the end of injection, then decreases due to oxidation. The reason for soot being formed in a fuel lean region near the flame tip is the evaporated fuel requires time to be pyrolized as it travels through the burning fuel rich zone towards the flame tip.

An Improvement of the Extended Jones Matrix Expression for Analyzing Polarization Transmission Characteristics of a Uniaxial Medium (이방성 매질의 편광투과특성 분석을 위한 확장된 존스 행렬식의 개선)

  • Ryu, Jang-Wi;Shin, You-Sik;Kim, Sang-Youl;An, Sung-Hyuck;Kim, Yong-Ki
    • Korean Journal of Optics and Photonics
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    • v.19 no.2
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    • pp.150-158
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    • 2008
  • The exact transmission coefficients at the interface between a uniaxial anisotropic medium and an isotropic medium at? oblique incidence are derived by applying the extended Jones matrix method. When the birefringence of the uniaxial anisotropic medium is small ($|n_e-n_o|\;{\ll}\;n_o,\;n_e$), the exact transmission coefficients are compared with those by the conventional extended Jones matrix method by Yeh et al. They showed an excellent agreement with each other. In addition, using the exact transmission coefficients, we calculated the polarization characteristics of a light through a uniaxial medium to an incident light with arbitrary polarization state at? oblique incidence. We compared the transmittances of an unpolarized light through a pair of crossed o-type polarizers by two different methods and calculated the transmittance as the variation of the optical constants of the polarizers to evaluate of the extinction ratio. The polarization analysis method using the exact transmission coefficients can be applied to polarization characteristics of a light through a uniaxial medium with large birefringence as well as to liquid crystals and to optical anisotropic material.