A study of optical characteristics correlated with low dielectric constant of SiOCH thin films through Ellipsometry (Ellipsometry를 이용한 저 유전 상수를 갖는 SiOCH박막의 광학특성 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.198-198
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- 2010