• 제목/요약/키워드: InZnO

검색결과 4,256건 처리시간 0.029초

펄스 레이저 증착법에 의한 ZnO:Li 박막 성장과 열처리 효과 (Effect of Thermal Annealing and Growth of ZnO:Li Thin Film by Pulesd Laser Deposition)

  • 홍광준
    • 한국재료학회지
    • /
    • 제15권5호
    • /
    • pp.293-300
    • /
    • 2005
  • ZnO:Li epilayers were synthesized on sapphire substrates by the pulesd laser deposition (PLD) after the surface of the ZnO:Li sintered pellet was irradiated by the ArF (193 nm) excimer laser. The growth temperature was fixed at $400^{\circ}C$. The crystalline structure of epilayers was investigated by the photoluminescence (PL) and double crystal X-ray diffraction (DCXD). The carrier density and mobility of epilayers measured by van der Pauw-Hall method are $2.69\times10cm^{-3}$ and $52.137cm^2/V{\cdot}s$ at 293 K, respectively. The temperature dependence of the energy band gap of epilayers obtained from the absorption spectra is well described by the Varshni's relation, $E_g(T)=3.5128eV{\cdot}(9.51\times10^{-4}eV/K)T^2/(T+280K)$. After the as-grown ZnO:Li epilayer was annealed in Zn atmospheres, oxygen and vaccum the origin of point defects of ZnO:Li has been investigated by PL at 10 K. The Peaks of native defects of $V_{zn},\;V_o,\;Zn_{int},\;and\;O_{int}$ showned on PL spectrum are classified as a donors or accepters type. We confirm that $ZnO:Li/Al_2O_3$ in vacuum do not form the native defects because ZnO:Li epilayers in vacuum existe in the form of stable bonds.

ZnO세라믹 바리스터에 NiO첨가가 전기적 특성에 미치는 영향 (Influence of NiO additive on electrical properties of ZnO-based ceramic varistors)

  • 남춘우
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제9권6호
    • /
    • pp.542-550
    • /
    • 1996
  • ZnO-based ceramic varistors containing NiO range 0.5 mol% to 4.0 mol% were fabricated by standard ceramic techniques. The influence of NiO on the microstructure and electrical behavior of ZnO varistor was investigated. As the content of NiO additive increases, average grain size decreased from 16.5.mu.m to 13.2.mu.m, and the amount of NiO existing in the grain interior and grain boundary region was approximately equal. NiO acted as an acceptor which decreases donor concentration due to the increase of Zn vacancy in the grain, and as a driver which migrates Zn interstitial in the depletion region toward the interface of grain boundary, which resulted in the decrease of interface state density. As a result, increasing the content of NiO additive, barrier height, nonlinear exponent, and varistor voltage decreased, and leakage current increased. Wholly, the physical and electrical properties of the ZnO varistor can be said to be affected by the NiO additive.

  • PDF

Recent Progress in Synthesis of Plate-like ZnO and its Applications: A Review

  • Jang, Eue-Soon
    • 한국세라믹학회지
    • /
    • 제54권3호
    • /
    • pp.167-183
    • /
    • 2017
  • Zinc oxide (ZnO) is one of the most versatile semiconductors, and one-dimensional (1D) ZnO nanostructures have attracted significant interest for use in ultraviolet (UV) lasers, photochemical sensors, and photocatalysts, among other applications. It is known that 1D ZnO nanowires can be fabricated readily owing to the anisotropic growth of ZnO along the [0001] direction. However, this type of growth results in a decrease in the surface area of the (0001) plane, which plays a vital role not only in UV lasing but also in the photocatalytic process. Thus, we attempted to synthesize ZnO crystals with an increased polar surface area by controlling the crystal growth process. The purpose of this review is to propose a simple route for the synthesis of plate-like ZnO crystals with highly enhanced polar surfaces and to explore their feasibility for use in UV lasers as well as as a photocatalyst and antibacterial agent. In addition, we highlight the recent progress made in the pilot-scale synthesis of plate-like ZnO crystals for industrial applications.

스퍼터링 방법으로 성장시킨 나노구조의 Ga 농도 변화에 따른 형상 변화

  • 김영이;우창호;조형균
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2009년도 추계학술발표대회
    • /
    • pp.23.1-23.1
    • /
    • 2009
  • ZnO is of great interest for various technological applications ranging from optoelectronics to chemical sensors because of its superior emission, electronic, and chemical properties. In addition, vertically well-aligned ZnO nanorods on large areas with good optical and structural properties are of special interest for the fabrication of electronic and optical nanodevices. To date, several approaches have been proposed for the growth of one-dimensional (1D) ZnO nanostructunres. Several groups have been reported the MOCVD growth of ZnO nanorods with no metal catalysts at $400^{\circ}C$, and fabricated a well-aligned ZnO nanorod array on a PLD prepared ZnO film by using a catalyst-free method. It has been suggested that the synthesis of ZnO nanowires using a template-less/surfactant-free aqueous method. However, despite being a well-established and cost-effective method of thin film deposition, the use of magnetrons puttering to grow ZnO nanorods has not been reported yet. Additionally,magnetron sputtering has the dvantage of producing highly oriented ZnO film sat a relatively low process temperature. Currently, more effort has been concentrated on the synthesis of 1D ZnO nanostructures doped with various metal elements (Al, In, Ga, etc.) to obtain nanostructures with high quality,improved emission properties, and high conductance in functional oxide semiconductors. Among these dopants, Ga-doped ZnO has demonstrated substantial advantages over Al-doped ZnO, including greater resistant to oxidation. Since the covalent bond length of Ga-O ($1.92\;{\AA}$) is nearly equal to that of Zn-O ($1.97\;{\AA}$), high electron mobility and low electrical resistivity are also expected in the Ga-doped ZnO. In this article, we report the successful growth of Ga-doped ZnO nanorods on c-Sapphire substrate without metal catalysts by magnetrons puttering and our investigations of their structural, optical, and field emission properties.

  • PDF

수열합성법을 이용한 ZnO 나노로드의 제조 및 이산화질소 감응 특성 (Preparation of ZnO nanorods by hydrothermal method and their $NO_2$ sensing characteristics)

  • 조평석;김기원;이종흔
    • 한국진공학회지
    • /
    • 제15권5호
    • /
    • pp.506-511
    • /
    • 2006
  • $Zn(NO_3)_2{\cdot}6H_2O$, 수산화나트륨, cyclohexylamine, 에탄올, 물이 혼합된 용액을 수열합성하여 ZnO 나노로드를 합성하고, 합성한 물질의 이산화 질소$(NO_2)$와 일산화 탄소(CO)에 대한 감응특성을 조사하였다. 혼합 용액에 첨가되는 물의 양을 변화시켜 ZnO 나노로드의 형상과 응집현상을 조절할 수 있었다. 이는 물과 cyclohexylamine의 반응에 의해 발생되는 $OH^-$ 이온의 농도변화에 의한 것으로 해석된다. 물의 함량이 낮을 때에는 뭉쳐진 성게모양의 ZnO 나노로드를, 물의 함량이 많을 때에는 잘 분산된 ZnO 나노로드를 각각 합성할 수 있었다. 잘 분산된ZnO 나노로드는 공기 중에서 50 ppm 의 CO에 노출되었을 때 주목할 만한 반응을 보이지 않는 반면, 1 ppm 의 $NO_2$에 노출되었을 때에는 저항이 1.8배 증가하였다. 이러한 선택적 반응을 보이는 ZnO 나노로드는 자동차용 자동환기 시스템의 핵심부품인 매연센서의 감응물질로 사용될 수 있다.

ZnO와 ZnO-CuO후막의 일산화탄소 감응특성 (CO gas sensitivity of ZnO and ZnO-CuO thick films)

  • 전석택;최우성
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제9권8호
    • /
    • pp.819-824
    • /
    • 1996
  • We have investigated the temperature dependence of CO gas sensitivity for ZnO and ZnO-CuO thick films at 200 ppm CO gas, where those films were prepared by thermal transformation. The ZnO thick film shows the maximum sensitivity of -4 at >$300^{\circ}C$ On the other hand, ZnO-CuO(more than 1mol%) thick film shows that the maximum sensitivity reduced to less than 1.5. The decrease in sensitivity of CO gas with increasing the CuO contents is due to the decrease of the oxygen absorption in thick films.

  • PDF

환원분이기에 따른 ZnO:Zn 형광체의 합성 및 그 형광 특성 (Synthesis of ZnO:Zn Phosphors with Reducing Atmosphere and Their Luminescence Properties)

  • 김봉철;백종봉;한윤수;이남양;이병교
    • 한국세라믹학회지
    • /
    • 제37권1호
    • /
    • pp.1-5
    • /
    • 2000
  • Cathodoluminescence(CL) properties of ZnO:Zn green phosphor were investigated. ZnO:Zn phosphor was synthesized by varying reducing agents and firing temperatures. ZnS, charcoal and 5% H2 gas mixed with 95% N2 gas(5H2-95N2) were used as the reducing agent and atmosphere. The highest CL intensity of ZnO:Zn phosphor was observed under the condition of 5H2-95N2 atmosphere and firing temperature of 90$0^{\circ}C$ for 1h. Charocal and ZnO as reducing agents in the syntehsis of ZnO:Zn phosphor exhibited about 60% and 40%, respectively, of the CL intensity obtained with 5H2-95N2 atmosphere.

  • PDF

RF 스퍼터링으로 Si 기판위에 제작된 ZnO 박막에서 ZnO 버퍼층의 가스분위기 영향 (Effects of the Gas Atmosphere of ZnO Buffer Layers in the ZnO films grown on Si Substrates by RF Magnetron Sputtering)

  • 박태은;조형균;공보현;홍순구
    • 한국전기전자재료학회논문지
    • /
    • 제18권7호
    • /
    • pp.656-661
    • /
    • 2005
  • The effects of gas atmosphere and in-situ thermal annealing in buffet layers on the characteristic of the ZnO grown by RF magnetron sputtering have been investigated. It was shown that the introduction of buffer layers grown at the gas atmospheres of the mixed $Ar/O_2$ and the in-situ thermal treatment of the ZnO buffer layer improved the structural and optical properties. In addition, the ZnO films on the buffer layer thermal-annealed at $N_2$ gas ambience showed the strong emission of the near band gap exciton with narrow linewidth by combining the high-temperature growth of the ZnO film.

피뢰기용 ZnO 바리스터 소자의 미세구조 및 전기적 특성에 관한 연구 (A study on the Microstructure and electrical characteristics of ZnO varistors for arrester)

  • 김석수;조한구;박태곤;박춘현
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
    • /
    • pp.489-494
    • /
    • 2001
  • In this thesis, the microstructure and electrical properties of ZnO varistors were investigated according to ZnO varistors with various formulation. A∼E's ZnO varistor ceramics were exhibited good density, 95% of theory density and low porosity, 5%, wholly. The average grain size of A-E's ZnO varistor ceramics exhibited 11.89$\mu\textrm{m}$, 13.57$\mu\textrm{m}$, 15.44$\mu\textrm{m}$, 11.92$\mu\textrm{m}$, 12.47$\mu\textrm{m}$, respectively. Grain size of C's ZnO varistor is larger and grain size of A and D's are smaller than other varistors. In the microstructure, A∼E's ZnO varistor ceramics sintered at l130$^{\circ}C$ was consisted of ZnO grain(ZnO), spinel phase(Zn$\sub$2.33/Sb$\sub$0.67/O$_4$), Bi-rich Phase(Bi$_2$O$_3$) and inergranular phase, wholly. Reference voltage of A∼E's ZnO varistor sintered at 1130$^{\circ}C$ decreased in order D, E > A > B > C's ZnO varistors. Nonlinear exponent of varistors exhibited high characteristics, above 30, wholly. Consequently, C's ZnO varistor exhibited good nonlinear exponent, 68. Lightning impulse residual voltage of A, B, C and E's ZnO varistors suited standard characteristics, below 12kV at current of 5kA.

  • PDF

Ampoule-tube 법으로 P와 As을 도핑한 ZnO/Sapphire 박막의 미세구조와 전기적 특성 (The Microstructures and Electrical Properties of ZnO/Sapphire Thin Films Doped by P and As based on Ampouele-tube Method)

  • 유인성;진은미;소병문;박훈배
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
    • /
    • pp.120-121
    • /
    • 2006
  • To investigate the ZnO thin films which are interested in the next generation of short wavelength LEDs and Lasers, the ZnO thin films were deposited by RF magnetron sputtering system. Al sputtering process of ZnO thin films substrate temperature, work pressure respectively is $100^{\circ}C$ and 15 mTorr, and the purity of target is ZnO 5N. The ZnO thin films were in-situ annealed at $600^{\circ}C$, $800^{\circ}C$ in $O_2$ atmosphere. Phosphorus (P) and arsenic (As) were diffused into ZnO thin films sputtered by RF magnetron sputtering system in ampoule tube which was below $5{\times}10^{-7}$ Torr. The dopant sources of phosphorus and arsenic were $Zn_3P_2$ and $ZnAS_2$. Those diffusion was perform at $650^{\circ}C$ during 3hr. We confirmed that p-type properties of ZnO thin films were concerned with dopant sources rather than diffusion temperature.

  • PDF