• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• Food Science and Preservation
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• v.15 no.3
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• pp.450-455
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• 2008

Previously, we have shown that green tea extract lowers the intestinal absorption of cholesterol, fat, and other fat-soluble compounds. We conducted this study to determine whether green tea extract affects the rate of $^{14}C$-oleic acid esterification into various lipids in the intestinal mucosa of rats. Male Sprague-Dawley ruts were had free access to a nutritionally adequate AIN-93G diet and deionized water. Initially, the rat's mucosal content of total lipids was measured following 1 mL olive oil administration with (green tea group) or without (control group) 100 mg green tea extract powder. At 1 h and 5 h, intestinal segments were extracted for total lipid analysis. Secondly, to measure mucosal esterification rates of lipids, an abdominal incision was made along the midline, and a 10-cm long jejunal segment of the small intestine was ligated in situ. Then, micellar solutions with or without green tea extract were injected into the ligated jejunal segments and incubated for 10 mill. The micellar solution contained $200.0\;{\mu}$ Ci $^{14}C$-oleic acid, $200.1\;{\mu}mol$ unlabelled oleic acid, $66.7\;{\mu}mol$ 2-monooleoylglycerol, $66.7\;{\mu}mol$ palmitoyl-sn-glycero-3-phosphocholine, 2.2 mmol glucose, $50.0\;{\mu}mol$ albumin, and 16.5 mmol Na-taurocholate per L of phosphate buffered saline (pH, 6.3) with or without 8.87 g green tea extract powder. At 10 min, each rat was sacrificed by cervical dislocation under anesthesia and the segment was removed for lipid analysis. Significant differences were observed in mucosal triglyceride content at 1 h and 5 h in ruts given green tea extract. Significant differences in the rate of $^{14}C$-oleic acid esterification into triglycerides and phospholipids fractions were observed between control and green tea groups. However, There were no significant differences in other lipid fractions. These results indicate that the lowered esterification rates of $^{14}C$-oleic acid into triglycerides and phospholipids fractions is attributable to presence of green tea extract. This may be associated with an inhibitory effect of green tea catechin on the mucosal processes of lipids, leading to the inhibition of intestinal absorption of lipids.

• Korean Journal of Environment and Ecology
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• v.35 no.1
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• pp.68-80
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• 2021

This study aimed to provide basic data such as the structure of the Carpinus turczaninowii community and characteristics of the habitat environment for ex situ conservation by analyzing the plant community structure of Carpinus turczaninowii, an island plant resource. For the community structure analysis, this study established 29 plots, sized 100㎡ each, in Seokmo, Yeongjong, Yeongheung, and Daebu islands. TWINSPAN was used for the classification of communities. The classification identified six communities. Group I was the C. turczaninowii-Quercus serrata community, group II was the C. turczaninowii-Pinus densiflora community, group III was the C. turczaninowii-Quercus mongolica community, group IV was the C. turczaninowii-Sorbus alnifolia community, group V was the C. turczaninowii typical community, and group VI was the C. turczaninowii-Quercus variabilis community. The species diversity was 0.90008~1.12868, the dominance was 0.17536~0.25665, and the similarity index was 17.1429~38.2979%. The result of correlation analysis of 7 environmental factors for 6 communities by RDA ordination showed a positive correlation between the crown density and litter layer and a negative correlation between the bare rock, soil hardness, and altitude on the 1st axis. On the 2nd axis, the bare rock and crown density showed a positive correlation, and the slope showed a negative correlation. In the C. turczaninowii-Quercus serrata community (I), the crown density and the litter layer were the environmental factors affecting the vegetation distribution. In the C. turczaninowii-Pinus densiflora (II) and C. turczaninowii-Quercus mongolica (III) communities, the slope was the factor affecting vegetation distribution. In the C. turczaninowii-Sorbus alnifolia (IV), C. turczaninowii typical (V), and C. turczaninowii-Quercus variabilis (VI) communities, the bare rock, altitude, and soil hardness were the factors affecting vegetation distribution.

• Korean Journal of Remote Sensing
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• v.39 no.6_2
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• pp.1565-1576
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• 2023

An atmospheric correction algorithm based on the radiative transfer model is required to obtain remote-sensing reflectance (R_rs) from the Geostationary Ocean Color Imager-II (GOCI-II) observed at the top-of-atmosphere. This R_rs derived from the atmospheric correction is utilized to estimate various marine environmental parameters such as chlorophyll-a concentration, total suspended materials concentration, and absorption of dissolved organic matter. Therefore, an atmospheric correction is a fundamental algorithm as it significantly impacts the reliability of all other color products. However, in clear waters, for example, atmospheric path radiance exceeds more than ten times higher than the water-leaving radiance in the blue wavelengths. This implies atmospheric correction is a highly error-sensitive process with a 1% error in estimating atmospheric radiance in the atmospheric correction process can cause more than 10% errors. Therefore, the quality assessment of R_rs after the atmospheric correction is essential for ensuring reliable ocean environment analysis using ocean color satellite data. In this study, a Quality Assurance (QA) algorithm based on in-situ R_rs data, which has been archived into a database using Sea-viewing Wide Field-of-view Sensor (SeaWiFS) Bio-optical Archive and Storage System (SeaBASS), was applied and modified to consider the different spectral characteristics of GOCI-II. This method is officially employed in the National Oceanic and Atmospheric Administration (NOAA)'s ocean color satellite data processing system. It provides quality analysis scores for R_rs ranging from 0 to 1 and classifies the water types into 23 categories. When the QA algorithm is applied to the initial phase of GOCI-II data with less calibration, it shows the highest frequency at a relatively low score of 0.625. However, when the algorithm is applied to the improved GOCI-II atmospheric correction results with updated calibrations, it shows the highest frequency at a higher score of 0.875 compared to the previous results. The water types analysis using the QA algorithm indicated that parts of the East Sea, South Sea, and the Northwest Pacific Ocean are primarily characterized as relatively clear case-I waters, while the coastal areas of the Yellow Sea and the East China Sea are mainly classified as highly turbid case-II waters. We expect that the QA algorithm will support GOCI-II users in terms of not only statistically identifying R_rs resulted with significant errors but also more reliable calibration with quality assured data. The algorithm will be included in the level-2 flag data provided with GOCI-II atmospheric correction.

• International Journal of Highway Engineering
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• v.8 no.2 s.28
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• pp.63-74
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• 2006

During the construction of circular underground pipe, the non-proper compaction along the pipe and the decrease of compaction efficiency have been the main problems to induce the failure of underground pipe or facility. The use of CLSM (controlled low strength materials) should be one of the possible applications to overcome those problems. In this research, the full-scaled field test and the numeric analysis using PENTAGON-3D FEM program were carried out for three different cases on the change of backfill materials, including the common sand, the soil from construction site, and the CLSM. From the full-scaled test in field, the use of in-situ CLSM as backfill materials reduced the vertical and lateral deformation of the pipe, as well as the deformation of the ground surface. The main reason for reducing the deformation would be the characteristics of the CLSM, especially self-leveling and self-hardening properties. The measured earth pressure at the surround of the corrugated pipe using the CLSM backfills was the smaller than the other cases, and the absolute value was almost zero. Judging from the full-scaled field test and FEM analysis, the use of CLSM as backfill materials should be one of the best choices reducing the failure of the underground pipes.

• Asian Pacific Journal of Cancer Prevention
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• v.17 no.4
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• pp.2159-2164
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• 2016

Background: A diagnosis of chronic myeloid leukemia (CML) is made on discovery of the presence of a Philadelphia (Ph) chromosome. The success of the treatment of this form of leukemia with tyrosine kinase inhibitor (TKI) is monitored by reduction of the Ph chromosome. Objective: To compare the role of conventional cytogenetic (CC) methods with a real time quantitative polymerase chain reaction (RQ-PCR) and fluorescence in situ hybridization (FISH) for diagnosis and treatment monitoring of CML patients. The secondary outcome was to analyze the treatment responses to TKI in CML patients. Materials and Methods: This was a retrospective study of CML patients who attended the Hematology clinic at Chiang Mai University Hospital from 2005-2010. Medical records were reviewed for demographic data, risk score, treatment response and the results of CC methods, FISH and RQ-PCR. Results: One hundred and twenty three cases were included in the study, 57.7% of whom were male with a mean age of 46.9 years. Most of the patients registered as intermediate to high risk on the Sokal score. At diagnosis, 121 patients were tested using the CC method and 118 (95.9%) were identified as positive. Five patients failed to be diagnosed by CC methods but were positive for BCR-ABL1 using the FISH method. Imatinib was the first-line treatment used in 120 patients (97.6%). In most patients (108 out of 122, 88.5%), a complete cytogenetic response (CCyR) was achieved after TKI therapy and in 86 patients (70.5%) CCyR was achieved long term by the CC method. Five out of the 35 analyzed patients in which CCyR was achieved by the CC method had a positive FISH result. Out of the 76 patients in which CCyR was achieved, RQ-PCR classified patients to only CCyR in 17 patients (22.4%) with a deeper major molecular response (MMR) in 4 patients (5.3%) and complete molecular response (CMR) in 55 patients (72.4%). In the case of initial therapy, CCyR was achieved in 95 patients (79.1%) who received imatinib and in both patients who received dasatinib (100%). For the second line treatment, nilotinib were used in 30 patients and in 19 of them (63.3%) CCyR was achieved. In half of the 6 patients (50%) who received dasatinib as second line or third line treatment CCyR was also achieved. Conclusions: CML patients had a good response to TKI treatment. FISH could be useful for diagnosis in cases where CC analysis failed to detect the Ph chromosome. RQ-PCR was helpful in detecting any residual disease and determining the depth of the treatment response at levels greater than the CC methods.

• Journal of Korean Society of Forest Science
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• v.86 no.2
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• pp.186-199
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• 1997

The soils derived from granite gneiss occupy almost one third of the land area in Korea. The soils under forest vegetation, formed on granite gneiss, in Sun chon-shi, Chollanam-do in southern part of Korea, were studied to evaluate the weathering and the transformation of primary minerals into secondary minerals, clay minerals. The studied soils contained large amounts of ferromagnesian minerals, weathered biotites and were well weathered, strongly acid and low in organic matters and in ration exchange capacity. The clay contents in the Bt horizon were almost two times higher than those in the C horizon. The O horizon had a thin layer which consisted of a little decomposed plant components with a granic fabric and high porosity, and showed the micromorphological characteristics of moder humus. The related distribution pattern of the E horizon were enaulic and large amounts of silts and small amounts of sand grains were another characteristics of the E horizon. The most striking micromorphological features were multilaminated clay coating and infillings in the voids in the Bt and C horizons, and generally limpid ferriargillans ejected from the biotites and imparted red color to the soils in the Bt horizon. High clay contents in the Bt horizon was not only due to clay translocation, but also due to intensive in situ mineral weathering in this horizon. The most significant pedogenic process, revealed by the petrographic microscope and SEM, was the formation of iron oxides from biotites, the formation of tubular halloysites and the weathering models of biotites; wedge weathering and layer weathering. The thick coating on the weathering biotites showed the characteristics of the weathering process and the synthetic hematites were revealed in clays by TEM. Total chemical analysis of clays revealed extensive loss of Ca, and Na and the concentration of Fe and Al. Mineralogical studies of clays by XRD showed that micas were almost completely weathered to kaolinite, vermiculite-kaolinite intergrade, hematite, gibbsite, while halloysites from other primary minerals. Some dioctahedral mica appeared to be resistant in the soils. Parent rock of the soils contained a considerable amounts of biotites and this forest soils showed especially a dominant characteristics of biotite weathering.

• Korean Journal of Remote Sensing
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• v.35 no.6_1
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• pp.883-893
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• 2019

In this study, crop coefficients were calculated in two different methods and the results were evaluated. In the first method, appropriateness of GLDAS-based evapotranspiration was evaluated by comparing it with observed data of Cheongmi-cheon (CMC) Flux tower. Then, crop coefficient was calculated by dividing actual evapotranspiration with potential evapotranspiration that derived from GLDAS. In the second method, crop coefficient was determined by using MLR (Multiple Linear Regression) analysis with vegetation index (NDVI, EVI, LAI and SAVI) derived from MODIS and in-situ soil moisture data observed in CMC, In comparison of two crop coefficients over the entire period, for each crop coefficient GLDAS K_c and SM&VI K_c, shows the mean value of 0.412 and 0.378, the bias of 0.031 and -0.004, the RMSE of 0.092 and 0.069, and the Index of Agree (IOA) of 0.944 and 0.958. Overall, both methods showed similar patterns with observed evapotranspiration, but the SM&VI-based method showed better results. One step further, the statistical evaluation of GLDAS K_c and SM&VI K_c in specific period was performed according to the growth phase of the crop. The result shows that GLDAS K_c was better in the early and mid-phase of the crop growth, and SM&VI K_c was better in the latter phase. This result seems to be because of reduced accuracy of MODIS sensors due to yellow dust in spring and rain clouds in summer. If the observational accuracy of the MODIS sensor is improved in subsequent study, the accuracy of the SM&VI-based method will also be improved and this method will be applicable in determining the crop coefficient of unmeasured basin or predicting the crop coefficient of a certain area.

• Korean Journal of Remote Sensing
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• v.34 no.2_1
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• pp.237-248
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• 2018

The vertical distribution of hydrometeor before precipitation near the cloud base has been analyzed using a scanning lidar, rawinsonde data, and Cloud-Resolving Storm Simulator (CReSS). This study mostly focuses on 13 Desember 2016 only. The typical synoptic pattern of lake-effect snowstorm induced easterly in the Yeongdong region. Clouds generated due to high temperature difference between 850 hPa and sea surface (SST) penentrated in the Yeongdong region along with northerly and northeasterly, which eventually resulted precipitation. The cloud base height before the precipitation changed from 750 m to 1,280 m, which was in agreement with that from ceilometer at Sokcho. However, ceilometer tended to detect the cloud base 50 m ~ 100 m below strong signal of lidar backscattering coefficient. As a result, the depolarization ratio increased vertically while the backscattering coefficient decreased about 1,010 m~1,200 m above the ground. Lidar signal might be interpreted to be attenuated with the penetration depth of the cloud layer with of nonspherical hydrometeor (snow, ice cloud). An increase in backscattering signal and a decrease in depolarization ratio occured in the layer of 800 to 1,010 m, probably being associated with an increase in non-spherical particles. There seemed to be a shallow liquid layer with a low depolarization ratio (<0.1) in the layer of 850~900 m. As the altitude increases in the 680 m~850 m, the backscattering coefficient and depolarization ratio increase at the same time. In this range of height, the maximum value (0.6) is displayed. Such a result can be inferred that the nonspherical hydrometeor are distributed by a low density. At this time, the depolarization ratio and the backscattering coefficient did not increase under observed melting layer of 680 m. The lidar has a disadvantage that it is difficult for its beam to penetrate deep into clouds due to attenuation problem. However it is promising to distinguish hydrometeor morphology by utilizing the depolarization ratio and the backscattering coefficient, since its vertical high resolution (2.5 m) enable us to analyze detailed cloud microphysics. It would contribute to understanding cloud microphysics of cold clouds and snowfall when remote sensings including lidar, radar, and in-situ measurements could be timely utilized altogether.

• Journal of Korea Water Resources Association
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• v.56 no.3
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• pp.195-210
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• 2023

Additional deposition and erosion in large rivers in South Korea have continued to occur toward morphological stabilization after massive dredging through the four major river restoration project, subsequently requiring precise bathymetry monitoring. Hyperspectral bathymetry method has increasingly been highlighted as an alternative way to estimate bathymetry with high spatial resolution in shallow depth for replacing classical intrusive direct measurement techniques. This study introduced the conventional Optimal Band Ratio Analysis (OBRA) of hyperspectral bathymetry method, and evaluated the performance in a domestic large river in normal turbid and flow condition. Maximum measurable depth was estimated by applying correlation coefficient and root mean square error (RMSE) produced during OBRA with cascadedly applying cut-off depth, where the consequent hyperspectral bathymetry map excluded the region over the derived maximum measurable depth. Also non-linearity was considered in building relation between optimal band and depth. We applied the method to the Nakdong and Hwang River confluence as a large river case and obtained the following features. First, the hyperspectal method showed acceptable performance in morphological mapping for shallow regions, where the maximum measurable depth was 2.5 m and 1.25 m in the Nakdong and Hwang river, respectively. Second, RMSE was more feasible to derive the maximum measurable depth rather than the conventional correlation coefficient whereby considering various scenario of excluding range of in situ depths for OBRA. Third, highly turbid region in Hwang River did not allow hyperspectral bathymetry mapping compared with the case of adjacent Nakdong River, where maximum measurable depth was down to half in Hwang River.