• Title/Summary/Keyword: In-Situ 혼합

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Effects of the Integrity of Silicon Thin Films on the Electrical Characteristics of Thin Dielectric ONO Film (실리콘 박막의 Integrity가 ONO(Oxide/Nitride/Oxide) 유전박막의 전기적 성질에 미치는 영향)

  • 김동원;라사균;이영종
    • Journal of the Korean Vacuum Society
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    • v.3 no.3
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    • pp.360-367
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    • 1994
  • Si2H6PH3 혼합기체를 사용하여 증착된 in-situ P-doped 비정질 실리콘과 SiH4 기체를사용하여 증착한후에 As+ 이온주입에 의해 도핑시킨 다결정 실리콘 박막을 하부 전극으로 하는 캐패시터를 형성 하였다. 여기서 유전박막층은 자연산화막 화학증착된 실리콘질화막 및 질화막의 산화에 의해 형성된 O-N-O 구조를 갖는 것이었다. 두 종류의 하부전극에 따른 캐패시터의 전기적 특서을 조사하였다. 전기 적 특성으로는 정전용량, 누설전류, 절연파괴전압 및 TDDB 등이었다. 이 가운데 정전용량, 누설전류 및 절연파괴전압은 하부전극에 따라 큰 차이를 보이지않았다. 그러나 음의 전장하에서의 TDDB 특성은 in-situ P-doped 비정실 실리콘이 하부전극인 캐패시터가 As+ 이온 주입실리콘이 하부전극인 것에 비해 더우수하였다. 이와 같은 TDDB 특성의 차이는 하부전극 실리콘의 integrity 차이로 인한 자연산화막의 결함 정도의 차이에 기인하는 것 같다. 이를 뒷받침하는 것으로 투과전자현미경 단면사진으로 확인하였 다. Shallow junction을 유지하는데도 in-situ P-doped 비정실 실리콘은 만족할 만한 결과를 보이며 박 막자체의 면저항값도 낮출 수 있어 초고집적 회로의 캐패시터 전극으로서 이용될 수 있는 것으로 평가 되었다.

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Prediction of Physical Characteristics of Cement-Admixed Clay Ground (점토-시멘트 혼합 지반의 물리적 특성 예측)

  • Park, Minchul;Jeon, Jesung;Jeong, Sangguk;Lee, Song
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.34 no.2
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    • pp.529-536
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    • 2014
  • Physical characteristics of cement-admixed clay such as water content, specific gravity, unit weight and void ratio are main factors for strength, compressibility and prediction of consolidation behavior. In the past, the physical characteristics of admixed soils could be understanded through complex laboratory tests and field survey after construction. In this study, the tests were performed with conditions such as clay water contents 0%-170%, cement contents 5%-25% and curing period 3-90days after that analyzed for changes which are water content, specific gravity unit weight and void ratio of admixed soils. A prediction of properties through mechanical relationships with clay in situ water content, cement content and curing period could be proposed using the test results. The prediction equation of void ratio of admixed soils was derived using void ratio equation in geotechnical engineering and compared with test results of bangkok clay and then this study could be verified.

Remote Sensing of NO2 vertical profiles in Beijing on the basis of MAX-DOAS measurements (지상 MAX-DOAS를 이용한 중국 베이징에서의 이산화질소 연직분포 산출 및 지상자료와 비교를 통한 검증연구)

  • Ryu, Jae-Yong
    • Korean Journal of Remote Sensing
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    • v.30 no.6
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    • pp.703-708
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    • 2014
  • $NO_2$ vertical profiles were retrieved via ground based MAX-DOAS measurements for the summer period in 2006 in Beijing, one of the megacities in the Northeast Asia. Large portion of $NO_2$ load was observed at the 0-1 km layer. We found that $NO_2$ rapidly decreases up to the altitude of 3 km. In addition, the retrieved $NO_2$ mixing ratios within 0-1 km layer were compared with those observed at the surface by in-situ monitor. The correlation coefficient (R) between $NO_2$mixing ratios within 0-1 km layer and those at the surface was calculated to be 0.7. The major causes of such discrepancy are thought to be both differences in measured areas and rapid decrease in $NO_2$ mixing ratio with height.

In situ Epitaxial Growth of the $TiSi_2$ on si(111)-7$\times$7 Substrate by Codeposition (동시증착에 의한 Si(111)-7$\times$7 기판 위에 $TiSi_2$ 에피택셜 성장)

  • 최치규;류재연;오상식;염병렬;박형호;조경익;이정용;김건호
    • Journal of the Korean Vacuum Society
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    • v.3 no.4
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    • pp.405-413
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    • 1994
  • 초고진공에서 기판 Si(111)-7$\times$7 위에 Ti:Si 또는 1:2의 조성비로 Ti와 Si을 동시증착한 후 in situ 열처리하여 TiSi2 박막을 에피택셜 성장시켰다 XRD와 XPS 분석결과 동시증착된 혼합 층에서 C49-TiSi2 박막의 성장은 핵형성에 의함을 확인하였으며 양질의 C49-TiSi2 박막은 Ti를 증착한후 Ti와 Si를 동시 증착한 (Ti+2Si)/(Ti)/Si(111)-7$\times$7구조의 시료를 초고진공에서 50$0^{\circ}C$에서 열처리하여 얻을수 있었다. 형성된 C49-TiSi2/Si(111)의 계면은 깨끗하였고 HRTEM 분석 결과 C49-TiSi2\ulcornerSi(111)의 계면은 약 10。 의 편의를 가지면서 TiSi2[211]∥Si[110] TiSi2(031)/Si(111) 의 정합성을 가졌으며 시료의 전 영 역에 에피택셜 성장되었다.

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Micro In-situ Tests on Overconsolidated Clay Prepared in Chambers (토조내에 준비된 과압밀 점토에 대한 모형 원위치 시험)

  • Cho Nam Jun
    • Journal of the Korean Geotechnical Society
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    • v.21 no.2
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    • pp.5-16
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    • 2005
  • Tn this study, model soil deposits are prepared in large test chambers to minimize the scale effects. Also, slurry of mixture containing 50 percent kaolin clay and 50 percent silica has been consolidated to simulate the process of natural soil deposit formation and to reduce the consolidation time. To provide a more detailed description of varying soil properties along the soil profile of model clay deposits and to compare the in-situ test results with those from prototype tests, miniature in-situ tests, including vane shear, piezoprobe, and cone penetration tests were conducted in each of the clay deposits. The current results indicate that consistent soil deposits were prepared for the current and previous test programs. Also, reasonable predicting methods of prototype behavior based on model in-situ test results were suggested in this study by examining differences between the test results from both the model and prototype tests.

Crystal structure of Mn-Co-Ni thermistor (Mn-Co-Ni 서미스터의 결정구조 분석)

  • Lee, Jung-Il;Mhin, Sungwook;Ryu, Jeong Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.25 no.5
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    • pp.225-229
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    • 2015
  • This study was performed to investigate crystal structure of cubic spinel-type monophase oxide composed of the Mn-Co-Ni ternary system. Starting material was prepared by mixing Mn, Co, Ni oxides then evaporation to dryness. The XRD patterns were analyzed by in-situ XRD as increasing temperature from room temperature to $1400^{\circ}C$ in air atmosphere. The cubic spinel phase was existed in a temperature range from $900^{\circ}C$. However, separation of NiO phase was detected from $1300^{\circ}C$, which was the origin of deterioration in the crytallinity. The surface morphology of the manufactured NTC thermistors were analyzed by FE-SEM for comparison of good and bad samples.

Relationship between Unconfined Compressive Strength and Shear Wave Velocity of Cemented Sands (고결모래의 일축압축강도와 전단파속도의 상관관계)

  • Park, Sung-Sik;Hwang, Se-Hoon
    • Journal of the Korean Geotechnical Society
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    • v.30 no.1
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    • pp.65-74
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    • 2014
  • Cemented soils have been widely used in road and dam construction, and recently ground improvement of soft soils. The strength of such cemented soils can be tested by using cored sample or laboratory-prepared specimen through unconfined compression or triaxial tests. It takes time to core a sample or prepare a testing specimen in the laboratory. In a certain situation, it is necessary to determine the in-situ strength of cemented soils very quickly and on time. In this study, the relation between unconfined compressive strength and shear wave velocity was investigated for predicting the in-situ strength of cemented soils. A small cemented specimen with 5 cm in diameter and 10 cm in height was prepared by Nakdong river sand and ordinary Portland cement. Its cement ratios were 4, 8, 12, and 16% and air cured for 7, 14, and 28 days. For recycling of resources, a blast furnace slag was also used with sodium hydroxide as an alkaline activator. The shear wave velocity for cemented soils was measured and then unconfined compressive strength test was carried out. As a cement ratio increased, the shear wave velocity and unconfined compressive strength increased due to increased density and denser structure. The relation between unconfined compressive strength and shear wave velocity increased nonlinearly for cemented soils with less than 16% of cement ratio.

In-Situ Fabrication of TCP/Al2O3 and Fluorapatite/Al2O3 Composites by Normal Sintering of Hydroxyapatite and Al2O3 Powder Mixtures (Hydroxyapatite와 Al2O3 혼합분말의 상압소결에 의한 TCP/Al2O3 및 Fluorapatite/Al2O3 복합재료의 In-Situ 제조)

  • Ha, Jung-Soo;Han, Yoo-Jeong
    • Korean Journal of Materials Research
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    • v.29 no.2
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    • pp.129-135
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    • 2019
  • A powder mixture of 70 wt% $Al_2O_3$ and 30 wt% hydroxyapatite (HA) is sintered at $1300^{\circ}C$ or $1350^{\circ}C$ for 2 h at normal pressure. An $MgF_2$-added composition to make HA into fluorapatite (FA) is also prepared for comparison. The samples without $MgF_2$ show ${\alpha}$ & ${\beta}$-tricalcium phosphates (TCPs) and $Al_2O_3$ phases with no HA at either of the sintering temperatures. In the case of $1,350^{\circ}C$, a $CaAl_4O_7$ phase is also found. Densification values are 69 and 78 %, and strengths are 156 and 104 MPa for 1,300 and $1,350^{\circ}C$, respectively. Because the decomposition of HA produces a $H_2O$ vapor, fewer large pores of $5-6{\mu}m$ form at $1,300^{\circ}C$. The $MgF_2$-added samples show FA and $Al_2O_3$ phases with no TCP. Densification values are 79 and 87 %, and strengths are 104 and 143 MPa for 1,300 and $1,350^{\circ}C$, respectively. No large pores are observed, and the grain size of FA ($1-2{\mu}m$) is bigger than that of TCP ($0.7{\mu}m{\geq}$) in the samples without $MgF_2$. The resulting $TCP/Al_2O_3$ and $FA/Al_2O_3$ composites fabricated in situ exhibit strengths 6-10 times higher than monolithic TCP and HA.

Effects of In-Situ flushing on the Bioremediation of Soil Contaminated with Endosulfan (In-Situ Flushing기법이 Endosulfan으로 오염된 토양의 생물학적 처리에 미치는 영향)

  • 전민하;최상일
    • Journal of Soil and Groundwater Environment
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    • v.6 no.2
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    • pp.39-47
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    • 2001
  • According to a series of batch-scale washing tests, SDS+$POE_5$ and $POE_5$+$POE_14$ were determined for the applicable mixed surfactants. Because SDS+$POE_5$ showed slightly negative effects on the microbes in the toxicity tests, $POE_5$+$POE_14$((1:1) 1%) was chosen for this study. In the in-situ flushing experiments, the removal rate of endosulfan was 67% for the injection rate of 1.5L/min/$\textrm{km}^2$. And when methanol and ethanol were added as cosolvent, 75% and 81% removal efficiencies were achieved, respectively. In the tests of bioremediation after the application of in-situ flushing, the removal rates of contaminated soils having 13mg/kg dry soil and 3mg/kg dry soil as initial concentrations were 86% and 81%, respectively. There were no significant degradation after 24 hours. The major rate-limiting factor for the biodegradation of endosulfan might be the mass transfer from soil phase to liquid phase after 24 hours. With the addition of surfactant, 89% removal was achieved after 120 hours. Because the surfactant improved the mass transfer rate, the biodegradation of endosulfan was enhanced. When surfactant and cosolvent were added together, the adaptation period of microorganisms to the surfactant became longer and the removal rates were 84% and 83% for methanol and ethanol, respectively.

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In Situ Bio-barrier Formation using Bacteria/Fungi-Soil Mixture (Bacteria/Fungi 혼합토를 이용한 현장 Bio-barrier 형성)

  • 김건하;송영우;구동영
    • Proceedings of the Korean Geotechical Society Conference
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    • 2000.03b
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    • pp.489-495
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    • 2000
  • When microorganisms such as bacteria and fungi are injected into porous medium such as soils along with appropriate substrate and nutrients, biomass retained in the soil pore. Soil pore size and shape are varied from the initial condition as a result of biofilm formation, which make hydraulic conductivity reduced. In this research, hydraulic conductivity reduction was measured after microorganism are inoculated and cultured with synthetic substrates and nutrients. Biomass-soil mixture was evaluated its applicability to the field condition as an alternative liner material in landfill by measuring hydraulic conductivity change after repetitive freeze-thaw cycles.

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