GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma
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- Proceedings of the Korean Vacuum Society Conference
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- 2012.08a
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- pp.80-81
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- 2012
Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.
The LWR (Locally Weighted Regression) model, which is traditionally a lazy learning model, is designed to obtain the solution of the prediction according to the input variable, the query point, and it is a kind of the regression equation in the short interval obtained as a result of the learning that gives a higher weight value closer to the query point. We study on an incremental ensemble learning approach for LWR, a form of lazy learning and memory-based learning. The proposed incremental ensemble learning method of LWR is to sequentially generate and integrate LWR models over time using a genetic algorithm to obtain a solution of a specific query point. The weaknesses of existing LWR models are that multiple LWR models can be generated based on the indicator function and data sample selection, and the quality of the predictions can also vary depending on this model. However, no research has been conducted to solve the problem of selection or combination of multiple LWR models. In this study, after generating the initial LWR model according to the indicator function and the sample data set, we iterate evolution learning process to obtain the proper indicator function and assess the LWR models applied to the other sample data sets to overcome the data set bias. We adopt Eager learning method to generate and store LWR model gradually when data is generated for all sections. In order to obtain a prediction solution at a specific point in time, an LWR model is generated based on newly generated data within a predetermined interval and then combined with existing LWR models in a section using a genetic algorithm. The proposed method shows better results than the method of selecting multiple LWR models using the simple average method. The results of this study are compared with the predicted results using multiple regression analysis by applying the real data such as the amount of traffic per hour in a specific area and hourly sales of a resting place of the highway, etc.
Many malicious programs have been compressed or encrypted using various commercial packers to prevent reverse engineering, So malicious code analysts must decompress or decrypt them first. The OEP (Original Entry Point) is the address of the first instruction executed after returning the encrypted or compressed executable file back to the original binary state. Several unpackers, including PinDemonium, execute the packed file and keep tracks of the addresses until the OEP appears and find the OEP among the addresses. However, instead of finding exact one OEP, unpackers provide a relatively large set of OEP candidates and sometimes OEP is missing among candidates. In other words, existing unpackers have difficulty in finding the correct OEP. We have developed new tool which provides fewer OEP candidate sets by adding two methods based on the property of the OEP. In this paper, we propose two methods to provide fewer OEP candidate sets by using the property that the function call sequence and parameters are same between packed program and original program. First way is based on a function call. Programs written in the C/C++ language are compiled to translate languages into binary code. Compiler-specific system functions are added to the compiled program. After examining these functions, we have added a method that we suggest to PinDemonium to detect the unpacking work by matching the patterns of system functions that are called in packed programs and unpacked programs. Second way is based on parameters. The parameters include not only the user-entered inputs, but also the system inputs. We have added a method that we suggest to PinDemonium to find the OEP using the system parameters of a particular function in stack memory. OEP detection experiments were performed on sample programs packed by 16 commercial packers. We can reduce the OEP candidate by more than 40% on average compared to PinDemonium except 2 commercial packers which are can not be executed due to the anti-debugging technique.
Database query and reporting tools, OLAP tools and data mining tools are typical front-end tools in Business Intelligence environment which is able to support gathering, consolidating and analyzing data produced from business operation activities and provide access to the result to enterprise's users. Traditional reporting tools have an advantage of creating sophisticated dynamic reports including SQL query result sets, which look like documents produced by word processors, and publishing the reports to the Web environment, but data source for the tools is limited to RDBMS. On the other hand, OLAP tools and data mining tools have an advantage of providing powerful information analysis functions on each own way, but built-in visualization components for analysis results are limited to tables or some charts. Thus, this paper presents a system that integrates three typical front-end tools to complement one another for BI environment. Traditional reporting tools only have a query editor for generating SQL statements to bring data from RDBMS. However, the reporting tool presented by this paper can extract data also from OLAP and data mining servers, because editors for OLAP and data mining query requests are added into this tool. Traditional systems produce all documents in the server side. This structure enables reporting tools to avoid repetitive process to generate documents, when many clients intend to access the same dynamic document. But, because this system targets that a few users generate documents for data analysis, this tool generates documents at the client side. Therefore, the tool has a processing mechanism to deal with a number of data despite the limited memory capacity of the report viewer in the client side. Also, this reporting tool has data structure for integrating data from three kinds of data sources into one document. Finally, most of traditional front-end tools for BI are dependent on data source architecture from specific vendor. To overcome the problem, this system uses XMLA that is a protocol based on web service to access to data sources for OLAP and data mining services from various vendors.
The performance of the multiprocessor systems is limited by the several factors. The system performance is affected by the processor speed, memory delay, and interconnection network bandwidth/latency. By the evolution of semiconductor technology, off the shelf microprocessor speed breaks beyond GHz, and the processors can be scalable up to multiprocessor system by connecting through the interconnection networks. In this situation, the system performances are bound by the latencies and the bandwidth of the interconnection networks. SCI, Myrinet, and Gigabit Ethernet are widely adopted as a high-speed interconnection network links for the high performance cluster systems. Performance improvement of the interconnection network can be achieved by the bandwidth extension and the latency minimization. Speed up of the operation clock speed is a simple way to accomplish the bandwidth and latency betterment, while its physical distance makes the difficulties to attain the high frequency clock. Hence the system performance and scalability suffered from the interconnection network limitation. Duplicating the link of the interconnection network is one of the solutions to resolve the bottleneck of the scalable systems. Dual-ring SCI link structure is an example of the interconnection network improvement. In this paper, I propose a network topology and a transaction path algorism, which optimize the latency and the efficiency under the duplicated links. By the simulation results, the proposed structure shows 1.05 to 1.11 times better latency, and exhibits 1.42 to 2.1 times faster execution compared to the dual ring systems.
The wall shear stress in the vicinity of end-to end anastomoses under steady flow conditions was measured using a flush-mounted hot-film anemometer(FMHFA) probe. The experimental measurements were in good agreement with numerical results except in flow with low Reynolds numbers. The wall shear stress increased proximal to the anastomosis in flow from the Penrose tubing (simulating an artery) to the PTFE: graft. In flow from the PTFE graft to the Penrose tubing, low wall shear stress was observed distal to the anastomosis. Abnormal distributions of wall shear stress in the vicinity of the anastomosis, resulting from the compliance mismatch between the graft and the host artery, might be an important factor of ANFH formation and the graft failure. The present study suggests a correlation between regions of the low wall shear stress and the development of anastomotic neointimal fibrous hyperplasia(ANPH) in end-to-end anastomoses. 30523 T00401030523 ^x Air pressure decay(APD) rate and ultrafiltration rate(UFR) tests were performed on new and saline rinsed dialyzers as well as those roused in patients several times. C-DAK 4000 (Cordis Dow) and CF IS-11 (Baxter Travenol) reused dialyzers obtained from the dialysis clinic were used in the present study. The new dialyzers exhibited a relatively flat APD, whereas saline rinsed and reused dialyzers showed considerable amount of decay. C-DAH dialyzers had a larger APD(11.70
The wall shear stress in the vicinity of end-to end anastomoses under steady flow conditions was measured using a flush-mounted hot-film anemometer(FMHFA) probe. The experimental measurements were in good agreement with numerical results except in flow with low Reynolds numbers. The wall shear stress increased proximal to the anastomosis in flow from the Penrose tubing (simulating an artery) to the PTFE: graft. In flow from the PTFE graft to the Penrose tubing, low wall shear stress was observed distal to the anastomosis. Abnormal distributions of wall shear stress in the vicinity of the anastomosis, resulting from the compliance mismatch between the graft and the host artery, might be an important factor of ANFH formation and the graft failure. The present study suggests a correlation between regions of the low wall shear stress and the development of anastomotic neointimal fibrous hyperplasia(ANPH) in end-to-end anastomoses. 30523 T00401030523 ^x Air pressure decay(APD) rate and ultrafiltration rate(UFR) tests were performed on new and saline rinsed dialyzers as well as those roused in patients several times. C-DAK 4000 (Cordis Dow) and CF IS-11 (Baxter Travenol) reused dialyzers obtained from the dialysis clinic were used in the present study. The new dialyzers exhibited a relatively flat APD, whereas saline rinsed and reused dialyzers showed considerable amount of decay. C-DAH dialyzers had a larger APD(11.70