• Journal of IKEEE
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• v.21 no.4
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• pp.375-380
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• 2017

A differential current-to-time interval converter is presented for current mode sensors. It consists of a ramp voltage generator, a current mode sensor, a reference current source, two current-tunable Schmitt triggers, a one-shot multivibrator, and two logic gates. The design principle is to apply a ramp voltage to each input of the two current-tunable Schmitt triggers whose threshold voltages are proportional to the drain current values of the current mode sensors. A proposed circuit converts a current change in the ISFET biosensor into its equivalent pulse width change. A prototype circuit built using TSMC 0.18 nm CMOS process exhibit a conversion sensitivity amounting to $726.9{\mu}s/pH$ over pH variation range of 2-12 and a linearity error less than ${\pm}0.05%$.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1694-1696
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• 2004

$Si_3N_4$ 박막을 동일한 공정 파라메터로 저압 화학기상증착법(LPCVD)으로 증착하고, IS, LOCOS- IS 및 ISFET의 세 가지 각각 다른 구조로 하여 용약 중 pH 농도 감지용 센서소자를 제작하였다. 이 세 가지 다른 센서소자에 대하여 pH 농도변화에 따른 감지도, 감지특성곡선의 선형성, 히스테리시스 등 주요 특성을 각각 조사한 후 비교 분석하였다. LOCOS-IS 구조의 pH 센서는 ISFET 구조의 pH 센서와 유사한 우수한 제반 pH 감지특성을 보였으나, 간단한 IS 구조의 pH 센서는 이들에 비해 상대적으로 열악한 pH 감지특성을 보였다. 동일공정으로 제작된 Si3N4 박막으로 제작되었음에도 불구하고 간단한 IS 구조의 pH 센서의 비교적 열악한 특성을 보이는 원인을 규명하기 위하여, pH 농도 변화에 따른 C-V특성 변화에 의한 pH 감지특성 조사시의 IS 및 LOCOS-IS 구조의 정전용량의 변화를 비교하고 고찰하였다.

• Proceedings of the KOSOMBE Conference
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• v.1996 no.05
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• pp.22-26
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• 1996

In this paper, we designed 4-channel electrolyte analyzer that can measure simultaneousely the 4 electrolytes - pH, $pNa^{+}$, $pCa^{2+}$, and $pK^{+}-$ using 2-point calibration and implemented it. Developed electrolyte analyzer consists of singal processing part, actuator part and control unit for sample flow system. To implement reliable instrument, design considerations are emphasized on flow system and sample chamber that requires small sample volume and prevent air contact with sample solution. In addition to the hardware design, we developed system software which controls full measuring process. After system developed, we verified the system performance by the test measurement for pH, $pNa^{+}$, $pCa^{2+}$, and $pK^{+}$ value.

• Journal of information and communication convergence engineering
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• v.20 no.1
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• pp.49-57
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• 2022

Fertilizers have long been used to increase crop yields; however, farmers are still having difficulties in managing fertilizers for growing crops as well as economic problems. The conventional method of soil sampling and laboratory analysis to determine soil pH is time consuming and costly; therefore, a portable pH sensor is developed to characterize spatial or temporal variability within fields via rapid and dense data acquisition. The portable pH sensor comprises an electrode unit, a portable console, and a USB connector. The soil water content (SWC) and electrical conductivity (EC) affect the electrical resistance of soil. An artificial test soil is performed to evaluate the effect of SWC and EC on soil pH. The test results show that stable pH measurements are achieved at SWCs greater than 20 mL (16.3%). Regardless of the SWC, the electric potential difference (EPD) remains at 2.5 g of NaCl. As the EC increases in the soil samples, the EPD increases.

• Journal of Sensor Science and Technology
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• v.6 no.3
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• pp.207-213
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• 1997

A field effect transistor(FET) type dissolved carbon dioxide($pCO_{2}$) sensor with a double layer structure of hydrogel membrane and $CO_{2}$ gas permeable membrane was fabricated by utilizing a $H^{+}$ ion selective field effect transistor(pH-ISFET) with Ag/AgCl reference electrode as a base chip. Formation of hydrogel membrane with photo-crosslinkable PVA-SbQ or PVP-PVAc/photosensitizer system was not suitable with the photolithographic process. Furthermore, hydrogel membrane on pH-ISFET base chip could be fabricated by photolithographic method with the aid of N,N,N',N'-tetramethyl othylenediarnine(TED) as $O_{2}$ quencher without using polyester film as a $O_{2}$ blanket during UV irradiation process. Photosensitive urethane acrylate type oligomer was used as gas permeable membrane on top of hydrogel layer. The FET type $pCO_{2}$ sensor fabricated by photolithographic method showed good linearity (linear calibration curve) in the range of $10^{-3}{\sim}10^{0}\;mol/{\ell}$ of dissolved $CO_{2}$ in aqueous solution with high sensitivity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.199-199
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• 2010

A back-gated MOSFET on silicon-on-insulator (SOI) substrate for pH sensor was investigated. We used concentrations of pH solution from 6 to 9. The fabricated back-gated MOSFET has current difference and threshold voltage shift by pH concentrations. Therefore, It can be used to simplification of conventional pH sensor.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.490-492
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• 1987

Urea-Sensor was fabricated by immobilizing urease on ISFET's gate using BSA(bovine serum albumin) and glutaraldehyde, and its characteristics were examined. This sensor showed approximately linear characteristic in the urea concentration range of $3{\times}10^{-5}-10^{-9}$ (g/ml). Fast response time was obtained and minute amounts of expensive enzyme were used in comparison to general electrode type biosensors.

• Applied Chemistry for Engineering
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• v.9 no.1
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• pp.6-12
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• 1998

A FET(Field Effect Transistor) type dissolved $CO_2$ sensor based on Severinghaus type $CO_2$ sensor was fabricated by the photolithographic process. The sensor consists of Ag/AgCl reference electrode and membranes (hydrogel membrane and $CO_2$ gas permeable membrane) on the pH-ISFET base chip. Ag/AgCl reference electrode was fabricated as follows. Ag layer was thermally evaporated and then its upper surface was chemically chloridized into the AgCl. The hydrogel used as an internal electrolyte solution was fabricated by a photolithographic method using 2-hydroxyethyl methacrylate(HEMA) and acrylamide. $CO_2$ permeable membrane on the top of the hydrogel layer was formed by photolithographic process with UV-oligomer. The FET type $pCO_2$ sensor fabricated by photolithographic method showed good linearity within the concentration range of $10^{-3}{\sim}10^0mole/{\ell}$ of dissolved $CO_2$ in aqueous solution with high sensitivity.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.11
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• pp.1358-1366
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• 1988

The dual dielectric films have been grown on single-crystalline silicon substrates with the thickness ranging from 125A to 180A at various gas and temperature conditions by using rapid thermal process that included independent nitridation step. The film characteristics and their dependence on the contents of the hydrochloric gas and the processing time have been studied. By the addition of the hydrochloric gas, the initial oxide thickness was significantly changed, but after sequential nitridation processes the thickness of the films was nevertheless a little bit varied within 10A. All the samples of the dual dielectric films show the increased breakdown voltages in proportion to the additive contents of the hydrochloric gas and also show the higher breakdown strengths than the thermal oxide and nitrided oxide films grown by the conventional furnance process or the rapid thermal nitridation process that was composed of the dependent nitridation cycles.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.35-40
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• 1993

A FET(field effect transistor) type lipid sensor was fabricated uy immobilizing lipase enzyme on the gate of pH-ISFET($SiO_{2}/Si_{3}N_{4}$). A water soluble polymer, polyvinyl alcohol(PVA) was modified with 1-methyl-4-(formyl-styryl) pyridinium methosulfate(SbQ) to give a photosensitive membrane(PVA-SbQ) in which lipase was immobilized. The optimum photolithographic conditions were ; spin coating speed $5,000{\sim}6,000$ rpm. UV exposure time $20{\sim}30$ seconds, developing time in water $30{\sim}40$ seconds, and vacuum drying time 45 min. at room temperature with the suspension containing PVA-SbQ aqueous solution(SbQ 1mol%, 10 wt %) $200{\mu}L$, bovine serum albumin (BSA) 7.5 mg, and lipase 10 mg. The lipid sensor showed good linear calibration curve in the range of $10{\sim}100$ mM triacetin as a lipid sample.