• Title/Summary/Keyword: IR-spectrometer

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OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal (적외선 배경신호 처리를 통한 OES 기반 PECVD공정 모니터링 정확도 개선)

  • Lee, Jin Young;Seo, Seok Jun;Kim, Dae-Woong;Hur, Min;Lee, Jae-Ok;Kang, Woo Seok
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.1
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    • pp.5-9
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    • 2019
  • Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

The Synthesis of Red-Sensitizing Dye for Color Photography (천연색 사진용 적감색소의 합성)

  • Kim, Yeoung-Chan
    • Journal of the Korean Applied Science and Technology
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    • v.18 no.2
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    • pp.136-141
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    • 2001
  • Naphthothiazolo carbocyanine is of industrial importance as red-sensitizing dye in the spectral sensitization of emulsion microcrystals in negative film-making. In this study, red-sensitizing dye was prepared by the reaction of 2-methyl-3-sulfopropyl-4,5-naphthothiazolium(inner salt) with triethyl orthoacetate in the presence of triethylamine. The product was identified by using various analytical tools such as Elemental analyzer, IR spectrophotometer, UV-Vis spectrophotometer, Mass spectrometer, $^{1}H-NMR$ spectrometer, TGA and DSC. The maximum absorption peak in methanol solvent was 573nm. Therefore, it was concluded that naphthothiazolo carbocyanine dye can be used as red0sensitizing dye for the spectral sensitization of photographic emulsion.

CHEMICAL INVESTIGATION ON THE REACTION BETWEEN CALCIUM HYDROXIDE INTRACANAL MEDICAMENT AND ZINC OXIDE-EUGENOL (수산화칼슘 근관약제와 산화아연-유지놀의 반응에 관한 화학적 분석)

  • Park, Sook-Hyung;Park, Joon-Chol;Kim, Sung-Kyo
    • Restorative Dentistry and Endodontics
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    • v.25 no.2
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    • pp.272-288
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    • 2000
  • Calcium hydroxide is used as a root canal medicament with its several pharmacological effects. However, it has been known that the usage of calcium hydroxide in the root canal system before canal filling with gutta-percha and zinc oxide eugenol-based cement induced change in the properties of root canal cement which might adversely affect sealing ability of the canal filling. The purpose of this study was to identify the reactivity of calcium hydroxide-eugenol compound made from chemical interaction of between calcium hydroxide and zinc oxide eugenol. Chemical properties of calcium hydroxide, eugenol, zinc oxide eugenol, calcium hydroxide-eugenol and calcium hydroxide-zinc oxide eugenol compound were analyzed using XRD. FT-IR Spectrophotometer and FT-NMR Spectrometer. The results were as follows: 1. The compound made from interaction between calcium hydroxide and zinc oxide eugenol was as follows : 2. Calcium hydroxide was shown to make chemical bond (ionic bond) with eugenol. 3. Since bonding between $Ca^{2+}$ and eugenol is simple ionic nature, under water existence, calcium hydroxide-eugenol compound may be ionized easily and its physical property be deteriorated.

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Resolution and Adhesion Properties of Solder Resist for Printed Circuit Board (인쇄회로기판용 solder resist의 해상성과 밀착력)

  • Chol, Sung-Ho;Hwang, Seong-Jin;Kim, Hyung-Sun
    • Korean Journal of Materials Research
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    • v.17 no.12
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    • pp.676-681
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    • 2007
  • According to progress rapidly digitalization, networked and mobilization of electronics industry, there are demands for being smaller, thinner, more light, and more efficient complex functions of electronic devices which are wireless devices, semi-conductors, packages and mobile devices. Therefore, the solder resist on a printed circuit board have been required with the high resolution and the eco-friendly materials in the surface treatments such as high heating process and coating process with electrolysis. In this study, the photoinitiator initiator and monomers of the solder resist were prepared with their contents for reducing the occurrence of the under-cut. We investigated the sample surface by UV/VIS spectrometer, FT-IR, OM after HASL and ENIG process. From our results, it is possible to get a high adhesion of resist with optimal contents between the photoinitiator initiator and monomers after surface treatments.

Reaction Mechanism on the Synthesis of $SrTiO_3$ by Direct Wet Process ($SrTiO_3$ 습식 직접 합성 반응기구에 관한 연구)

  • 이경희;이병하;김대웅
    • Journal of the Korean Ceramic Society
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    • v.23 no.6
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    • pp.45-51
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    • 1986
  • $SrTiO_3$ reaction mechanism formed from $TiCl_4$ and $SrCl_2$ solution by direct-wet-process was studied. Through this study it is identified that crystalline $SrTiO_3$ is formed above pH 13.8 amorphous $SrTiO_3$ above pH7 and crystallization temperature of amorphous $SrTiO_3$ is at 37$0^{\circ}C$. the final products are composed of 60% crystalline $SrTiO_3$ and 40% amorphous $SrTiO_3$ The amorphous $SrTiO_3$ is identified with the IR absorption spectrum of Sr-Ti-O by FT-IR spectrometer. Under pH 7 gelationus metatitanate (H2TiO3) is formed from TiCl4 but above pH7 the activity by the formation of metatitnic acid ion $[TiO_3]^{2-}$ is so high that $SrTiO_3$is formed more easily through the reaction with $Sr^{2+}$.

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Principles and Analytical Applications of Acousto-Optic Tunable Filters

  • Tran, Chieu D.
    • Analytical Science and Technology
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    • v.8 no.4
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    • pp.1101-1108
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    • 1995
  • Acousto-optic tunable filter is a compact, all solid state electronic dispersive device. It is based on the acousto-optic interaction in an anisotropic crystal. Compared to conventional grating monochromators. the AOTF has no moving parts, wider spectral tuning range (from UV through visible and near-IR to IR), higher throughput, higher resolution, faster scanning (${\mu}s$) and random wavelength access. These features make it possible to use the filter to develop novel instruments which are not possible otherwise. The instrument development and unique advantages of such AOTF based instruments including the multidimensional fluorimeter, the multiwavelength thermal lens spectrometer, and the detectors for HPLC and flow injection analysis are described.

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A research on the Tunnel bracket insulator pollution characteristic in Korea Railroad (터널브라킷 애자류 오염도 분석에 관한 연구)

  • Jeon, Yong-Joo;Ryu, Young-Tae;Park, Young-Sik;Park, Ki-Bum;Lee, Tae-Hoon
    • Proceedings of the KSR Conference
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    • 2009.05a
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    • pp.1963-1969
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    • 2009
  • This paper introduces method to estimate pollutant negative influence to polymer type insulator according to the international standard. To accomplish this goal, effective sample collecting method was surface was collected directly with the same dimension. Distilled Through this method pollute is easily and accurately collected. The second step is pollutant analysis. Several analyze item is selected such as quantity, conductivity, contact angle, Optical Microscope(OM), IR spectrometer(FT-IR), Equivalent Salt Deposit Density(ESDD), Thermal Analyzer(TA) and ICP-AES. The third step, best represent tunnel was selected considering location, length and natural surroundings. Also to consider the difference at inside the tunnel, several bracket insulators were selected along to the location. To make the result precise, above procedure was repeated several times at the same target. Finally relation among type of train, numbers of movement, surroundings, length will be considered in combination with the pollution. With this result pollute map for KORAIL could be accomplished and inspect period will be optimized case by case.

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Detection of Voletile Organic Compounds by Using DBR Porous Silicon (DBR 다공성 실리콘을 이용한 휘발성 유기화합물의 감지)

  • Park, Cheol Young
    • Journal of Integrative Natural Science
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    • v.2 no.4
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    • pp.275-279
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    • 2009
  • Recently, number of studies for porous silicon (PSi) have been investigated by many researchers. Multistructured porous silicon such as a distributed Bragg reflector (DBR) PSi, has been a topic of interest, because of its unique optical properties. DBR PSi were prepared by using an electrochemical etch of $P{^+}{^+}$-type silicon wafer with resistivity between 0.1 and $10m{\Omega}cm$. The electrochemical etch with square wave current density results in two different refractive indices in the porous layer. In this work, DBR porous silicon chips for a simple and portable organic vapor-sensing device have fabricated. The optical characteristics of DBR PSi have been investigated. DBR porous silicon have been characterized by FT-IR and Ocean optics 2000 spectrometer. The device used DBR PSi chip has been demonstrated as an excellent gas sensor, showing a great senstivity to organic vapor at room temperature.

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Electronics Design of the NISS onboard NEXTSat-1

  • Lee, Dae-Hee
    • The Bulletin of The Korean Astronomical Society
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    • v.40 no.2
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    • pp.55.2-55.2
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    • 2015
  • NISS is a unique spaceborne imaging spectrometer (R = 20) onboard the Korea's next micro-satellite NEXTSat-1 to investigate the star formation history of Universe in near infrared wavelength region (0.9 - 3.8 um), with a customized H1RG IR sensor(Jeong 2014). In this paper, we will introduce the compact electronics system (Fig. 1) as well as the novel readout method to reduce the 1/f noise for NISS.

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Studies on the Synthesis of Intermediate Cyan Coupler and Color Development (Cyan Coupler 중간체의 합성과 발색현상에 관한 연구)

  • Kim, Yeoung-Chan;Sohn, Byoung-Chung
    • Journal of the Korean Applied Science and Technology
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    • v.13 no.3
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    • pp.35-41
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    • 1996
  • In this paper, intermediate cyan coupler was prepared by the reaction of 2-nitro-4, 6-dichloro-5-methylphenol with Pd(5wt%). The product was identified by using various analytical tools such as melting point, elemental analyzer, IR spectrophotometer and mass spectrometer. The reaction of intermediate cyan coupler with CD-3(color development agent) was shown cyan color.