• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.349-352
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• 2009

This paper describes the fabrication and characteristics of micro heaters built on AlN($0.1{\mu}m$)/3C-SiC($1{\mu}m$) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about $800^{\circ}C$ and can be operated at about $500^{\circ}C$ with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/$^{\circ}C$. A thermal distribution measured by IR thermovision is uniform on the membrane surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1033-1036
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• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• Solar Energy
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• v.14 no.2
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• pp.29-37
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• 1994

Radiative charaacteristics of glass windows and porous absorbing media which can be used for a solar air heater are determined through the measurements of spectral transmittances. Those in the visible range are measured by the UV-IR spectrometer. Refractive index of glass are obtained by the comparison of the measured transmittances and the correlations derived from the electromagnetic theory and are compared to the theoretical ones calculated from the classical dispersion theory. Absorption and back-scattering coefficients of 15-mesh stainless wire screens are calcuated by the comparison of the measured transmittances and the correlations derived from the two flux model.

• Solar Energy
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• v.13 no.2_3
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• pp.79-90
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• 1993

A theoretical study is conducted for the design of solar air heaters using porous material. Radiative characteristics of glazing and porous absorbing media are found through spectral transmittances measured by the Visible spectrometer and the FT-IR. Using those characteristics the efficiencies of collectors are calculated one-dimensionally with the use of the Two-Flux radiation model. The efficiencies increase, as the air flow rates or albedos in the visible range increase, and as albedos in the IR range decrease. The optimum thickness of the porous medium of 15-mesh stainless steel wire screens is 0.001m, which represents the opacity of one.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.5
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• pp.455-462
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• 2016

Output Characteristics of the spaceborn image sensor such as infrared(IR) sensor are varied according to time elapses and sensor repetition on/off operation. As a result, the quality of IR sensor image is decreased. Therefore, spaceborne image sensor require a periodic calibration using a black body system by correcting a non-uniformity of the sensor. In this paper, we proposed a MEMS-based black body system that can implement the high temperature uniformity at various standard temperatures ranging from low to high temperature and easily estimate the representative surface temperature. In addition, it has advantages lightweight, low-power and high accuracy. The feasibility of the proposed MEMS-based black body system was verified through the thermal analysis.

• Proceedings of the KSRS Conference
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• 2007.10a
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• pp.199-202
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• 2007

COMS (Communication, Ocean and Meteorological Satellite) is a geostationary satellite and has been developing by KARI for communication, ocean observation and meteorological observation. Conventional thermal control design, using MLI (Multi Layer Insulation), OSR (Optical Solar Reflector), heater and heat pipe, is utilized. Ka-band components are installed on South wall, while other equipment for sensors are installed on the opposite side, North wall. High dissipating communication units are located on external (surface) heat pipe and are covered by internal insulation blankets to decouple them from the rest of the satellite. External satellite walls are covered by MLI or OSR for insulation from space and for rejection internal heat to space. The ocean and meteorological sensors are installed on optical benches on the top floor to decouple thermally from the satellite. Single solar array wing is adopted in order to secure clear field of view of radiant cooler of IR meteorological sensor. This paper presents principles of thermal control design for the COMS.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.259-264
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• 1999

The $CO_2$ measuring system using infrared sensor has the variance according to the temperature change. Therefore, the temperature compensation should be needed to obtain a reliable measurement. In this study, the sensor module consist of infrared $CO_2$ Sensor, IR Source, pipe and the heater and measuring system has amplifier, A/D converter and microprocessor. And we suggest a method to reduce the error by using the PID temperature control. We use optimum parameters setting of Ziegler & Nichols as well as PID temperature control algorithm for the temperature compensation. In this method, PID optimum parameter is set from dummy time(L) and maximum slope(R). As a result of using this PID temperature control, it is founded that it has the fast response and low steady state error. Therefore, it is certainly proved that this is very suitable algorithm to correct the error on measurement.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.20 no.1
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• pp.336-345
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• 1996

A theoretical and experimental study was conducted in order to design highly efficient solar air heaters using porous material. Radiative characteristics of glass windows and porous absorbing media were correlated through spectral transmittances measured by the UV-Visible and the FT-IR spectrometers. Using those characteristics the efficiencies of collectors were numerically calculated with the use of the two-flux radiation model. Based on the theoretical results, an experimental solar collector was designed and constructed. Experimental results under various conditions show that the daily efficiencies are over 60% in general and agree well with the theoretically calculated ones.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.5
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• pp.474-480
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• 2011

Space Imaging Sensor operated on LEO is affected from the Earth IR and Albedo as well as the Sun Radiation. The Imaging Sensor exposed to extreme environment needs thermal control subsystem to be maintained in operating/non-operating allowable temperature. Generally, units are periodically dissipated on spacecraft panel, which is designed as radiator. Because thermal design of the imaging sensor inside a spacecraft is isolated, heat pipes connected to radiators on the panel efficiently transfer dissipation of the units. First of all, preliminary thermal design of radiating area and heater power is performed through steady energy balance equation. Based on preliminary thermal design, on-orbit thermal analysis is calculated by SINDA, so calculation for thermal design could be easy and rapid. Radiators are designed to rib-type in order to maintain radiating performance and reduce mass. After on-orbit thermal analysis, thermal requirements for Space Imaging Sensor are verified.

• Journal of the Korean Society of Marine Environment & Safety
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• v.10 no.1 s.20
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• pp.51-54
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• 2004

In recently days, the breed fish farm is increased in the beach side for farming fish. In such a farm, the heater is requested for preventing freezing in cold season. The heating material are requested high corrosion resistance and strength for endurance high corrosive salt and pressure. In case of low corrosion resistance and/or strength, the heating element shall be broke down and eventually make spillage or leaking contaminated salt. In the most cases, crevice corrosion is localized form of corrosion usually associated with a stagnant solution on the micro-environmental level. In this study, the crevice corrosion of Ferritic type 430 stainless steel is investigated. The size of specimen is $15{\times}20{\times}3mmt$. Test solution is 1N H2SO4 + 0.05N NaCl. The artificial crevice gap size is $0.24{\times}3{\times}15mmL$. Crevice corrosion is measured under applied voltage 300mV(SCE) to the external surface. the result of this study showed that 1) the induced time for initiation of crevice is 750seconds, 2) potential is dropped in the crevice from the top of gap opening from -320 to -399mV. The result confirmed that the potential drop(IR mechanism) in the crevice is one of mechanism for crevice corrosion.