• Korean Journal of Optics and Photonics
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• v.28 no.6
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• pp.356-360
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• 2017

Indium tin oxide (ITO) provides high electrical conductivity and transparency at visible and near-IR wavelengths. ITO is widely used as a transparent electrode for the fabrication of LCDs, OLEDs, and many kinds of optical applications. It is widely employed for electrodes in various electric and display sectors because of its transparency in the visible range and high conductivity. Therefore, one issue is removing a specific area of a layer of material such as ITO or metallic film on a substrate, without affecting the properties of the substrate. ITO-on-glass removal using a laser is friendlier to the environment than traditional methods. In this study, ablation of ITO film on glass using a femtosecond-laser micromachining system (wavelength 1026 nm, pulse duration 150 fs) and a nanosecond-laser micromachining system (wavelength 1027 nm, pulse duration 5 ns) are described, compared, and analyzed.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.362-362
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• 2014

Atomic layer deposition (ALD) can be regarded as a special variation of the chemical vapor deposition method for reducing film thickness. ALD is based on sequential self-limiting reactions from the gas phase to produce thin films and over-layers in the nanometer scale with perfect conformality and process controllability. These characteristics make ALD an important film deposition technique for nanoelectronics. Tantalum pentoxide ($Ta_2O_5$) has a number of applications in optics and electronics due to its superior properties, such as thermal and chemical stability, high refractive index (>2.0), low absorption in near-UV to IR regions, and high-k. In particular, the dielectric constant of amorphous $Ta_2O_5$ is typically close to 25. Accordingly, $Ta_2O_5$ has been extensively studied in various electronics such as metal oxide semiconductor field-effect transistors (FET), organic FET, dynamic random access memories (RAM), resistance RAM, etc. In this experiment, the variations of chemical and interfacial state during the growth of $Ta_2O_5$ films on the Si substrate by ALD was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor $Ta(N^tBu)(dmamp)_2$ Me was used as the metal precursor, with Ar as a purging gas and $H_2O$ as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of $Ta_2O_5$ growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the $Ta^{5+}$ state, which corresponds with the stoichiometric $Ta_2O_5$, only appeared after 4.0 cycles. Additionally, tantalum silicide was not detected at the interfacial states between $Ta_2O_5$ and Si. The measured valence band offset value between $Ta_2O_5$ and the Si substrate was 3.08 eV after 2.5 cycles.

• Korean Journal of Optics and Photonics
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• v.31 no.3
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• pp.142-147
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• 2020

In this paper, we report highly efficient second harmonic generation of continuous-wave Yb fiber lasers incorporating a periodically poled LiTaO₃ device (MgO:PPSLT) as a frequency converter. The seed laser output from a Yb fiber master oscillator using a Fabry-Perot feedback cavity was amplified in a Yb fiber amplifier stage, yielding 28.5 W of linearly polarized output at 1064 nm in a beam with beam quality, M², of ~1.07. Second harmonic generation was achieved by passing the laser beam through MgO:PPSLT. Under optimized conditions, we obtained 11.1 W of green laser output at 532 nm for an incident signal power of 25.0 W at 1064 nm, corresponding to a conversion efficiency of 44.4%. The detailed investigation to find the optimized operating conditions and prospects for further improvement are discussed.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.535-541
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• 2005

We report on the development of a passively mode-locked near-infrared femtosecond laser with Cr:YAG crystal that operates near room temperature. The laser wavelength could easily be tuned by using only the internal prism pair over 110 nm from 1400 nm to 1510 nm in cw and over about 30 nm in mode-locked operation, respectively Maximum cw output powers of 810 mW were obtained with $1.5 \%$ output coupler for absorbed pump powers of 7.6 W. For compensation of the internal group velocity dispersion, an IR graded prism pair was used. The Cr:YAG laser delivered nearly Fourier-transform limited pulses with a pulse duration as short as 64 fs at 100 MHz repetition rate. In the mode-locked regime, the laser was operating at 1510 nm with a spectral bandwidth of 44 nm. In order to avoid unstable mode-locking and power instabilities, self-built tubes were inserted into the beam path in the resonator and purged with N2 gas. Finally, output powers of the Cr:YAG laser were optimized to 250 mW fer long time stable mode-locked operation.

• Korean Journal of Optics and Photonics
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• v.22 no.6
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• pp.262-268
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• 2011

MIRIS(Multi-purpose Infra-Red Imaging System) is the main payload of the STSAT-3(Korea Science and Technology Satellite. 3), which is being developed by KASI(Korea Astronomy & Space Institute). EOC(Earth Observation Camera), which is one of two infrared cameras in MIRIS, is the camera for observing infrared rays from the Earth in the range of $3{\sim}5{\mu}m$. The optical system of the EOC is a Cassegrain prescription with aspheric primary and secondary mirrors, and its aperture is 100mm. A ring type flexure supports the EOC primary mirror with pre-loading in order to withstand expected load due to the shock and vibration from the launcher. Here we attempt to use the same mechanism by which a retainer supports the lens. Through opto-mechanical analysis it was confirmed that the EOC primary mirror is effectively supported.