• Proceedings of the Materials Research Society of Korea Conference
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• 2007.05a
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• pp.26.2-26.2
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• 2007

• Clean Technology
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• v.4 no.1
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• pp.68-75
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• 1998

An innovative wafer drying system was developed using Isopropyl alcohol (IPA) and nitrogen carrier gas in order to replace the commercial conventional drying system which was a non-environmentally friendly system. This system was designed as following ; the IPA evaporation chamber and the process chamber were separated to increase drying efficiency, and the carrier gas with the IPA vapor was delivered into the process chamber. It was investigated that the IPA concentration was the most important factor to operate the system. The optimum concentration was found to be 2.4 ml IPA/N2 1. In addition, the optimum flow rate of the nitrogen gas were maintained more than 60 l/min.

• Membrane Journal
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• v.16 no.1
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• pp.25-30
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• 2006

The NaA zeolite membrane was synthesized on the surface of a porous ${\alpha}$-alumina support from the reaction solution composed of 1Si : 1Na : 4Na $6H_{2}O$. The pervaporation performance of the synthesized NaA zeolite membrane was investigated for the iso-propyl alcohol (IPA) aqueous solution according to the different feed concentration and the different operating temperature. The total flux decreases by increasing the feed IPA concentration and increases by increasing the temperature. The total flux was about $4.0{\times}10^3g/m^2\;hr\;at\;60^{\circ}C$ and 0.6 mole fraction of IPA and the separation factor was $1.8{\times}10^7\;at\;60^{\circ}C$ and 0.8 mole fraction of IPA. The separation performance of water through the NaA membrane was found to be superior to that obtainable with a distillation process just by comparison of the vapor-liquid equilibrium data.

• Membrane Journal
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• v.25 no.1
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• pp.32-41
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• 2015

High performance polysulfone microfiltration membranes with a high were successfully prepared by vapor induced phase separation (VIPS) coupled with non-solvent induced phase separation (NIPS) process. Asymmetric Membranes were prepared with PSF/DMF/PVP/PEG/DMSO/water mixed solutions and water/IPA coagulant. PSF, DMF, PVP, PEG, DMSO, water was used as a membrane polymer, a solvent, a hydrophilic polymer additive, a polar protic liquid polymer, a polar aprotic nonsolvent, and a polar protic nonsolvent in the casting solution, respectively. The addition of polar aprotic nonsolvents, and polar protic nonsolvents is a convenient and effective method to control membrane structure. In order to control the morphology of polymeric membranes, the spontaneous emulsification induced by drawing water vapor into the exposed casting solution surface has been used. Control of the internal morphology of polymeric membranes by using mixed coagulation solution such as water and IPA is discussed in the present work. The pure water permeability, pore size distribution, surface hydrophilicity and membrane morphology were investigated. Due to the addition of DMSO to casting solution, the mean pore size increased almost $0.2{\mu}m$ and the water flux increased about 1000-1800 LMH.

• Transactions of the Korean hydrogen and new energy society
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• v.31 no.3
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• pp.276-283
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• 2020

Alcohol-based solvents including ethanol (EtOH) and tert-butyl alcohol (TBA) are investigated instead of isopropanol (IPA), which is a common solvent for polytetrafluoroethylene (PTFE), as an alternative solvent for preparing the catalyst slurry with PTFE binder. As a result, the performance at 0.2 A/㎠ from the single cells from using catalyst slurries based on EtOH and TBA showed very similar value to that from the slurry using IPA, which implies the EtOH and TBA can be used as a solvent for the catalyst slurry. It is also confirmed by the very close values of the total resistance of the membrane electrode assemblies from the slurries using different solvents. In the energy dispersive spectrometry (EDS) image, the shape of crack and dispersion of PTFE are changed according to the vapor pressure of the solvent.

• Proceedings of the Membrane Society of Korea Conference
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• 1994.10a
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• pp.42-45
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• 1994

정밀화학, 제약산업 등에 필요한 에탄올, IPA 등과 같은 유기용매를 고순도로 농축하는 공정은 유기용매와 물과의 혼합물이 일정 농도에서 공비점을 형성하여 일반 증류로는 분리하기 힘들어 Benzene, Cycloheaxane 드의 Entrainer를 첨가하여 상대휘발도를 변화시켜 분리하는 공비증류가 이용되고 있다. 그러나 공비증류는 에너지 사용량이 많고 유독한 물질을 사용하므로 투과증발법과 같은 저에너지 소비형, 환경 친화적인 공정에 대한 관심이 높아지고 있다. 투과증발법에 의한 유기용매 농축공정은 물과의 친화성이 높은 비다공성 막을 이용하여 선택적으로 물을 투과하여 유기용매를 탈수하는 방법으로 투과를 위한 Driving force는 Feed side와 Permeate side사이의 Chemical potential gradient로 이는 물에 대한 Partial vapor pressure differnece로 다음과 같이 표시된다. $\Delta \mu_{F/P.W} = RT ln\frac{y_WP_P}{x_W\gamma_WP_{o.W}}$ 따라서 투과속도를 높이기 위해서 Permeate side를 진공상태로 하여 투과하는 물질을 기화시키고 이를 다시 응축하여 Permeate side의 압력을 낮게 유지시켜야 한다.

• Toxicological Research
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• v.32 no.4
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• pp.337-343
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• 2016

We determined the toxicity of mixtures of ethyl acetate (EA), isopropyl alcohol (IPA), methyl ethyl ketone (MEK), toluene (TOL) and xylene (XYL) with half-maximal effective concentration ($EC_{50}$) values obtained using human hepatocytes cells. According to these data, quantitative property-activity relationships (QPAR) models were successfully proposed to predict the toxicity of mixtures by multiple linear regressions (MLR). The leave-one-out cross validation method was used to find the best subsets of descriptors in the learning methods. Significant differences in physico-chemical properties such as boiling point (BP), specific gravity (SG), Reid vapor pressure (rVP) and flash point (FP) were observed between the single substances and the mixtures. The $EC_{50}$ of the mixture of EA and IPA was significantly lower than that of contained TOL and XYL. The mixture toxicity was related to the mixing ratio of MEK, TOL and XYL (MLR equation $EC_{50}=3.3081-2.5018{\times}TOL-3.2595{\times}XYL-12.6596{\times}MEK{\times}XYL$), as well as to BP, SG, VP and FP (MLR equation $EC_{50}=1.3424+6.2250{\times}FP-7.1198{\times}SG{\times}FP-0.03013{\times}rVP{\times}FP$). These results suggest that QPAR-based models could accurately predict the toxicity of polar and nonpolar mixtures used in rotogravure printing industries.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.19-22
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• 2007

반도체 산업은 회로의 고밀도화, 고집적화에 따라 웨이퍼 표면의 입자, 금속, 금속 이온, 유기물 등 오염물의 크기가 미세해 지고 세정에 대한 요구 조건이 더욱 엄격해지고 있다. 현재 세정 공정은 반도체 제조공정 전체에서 약 30%를 차지하고 있으며, 습식 세정 방식이 주로 사용되고 있다.[1] 습식 세정방식은 탈이온수로 린스하고 건조하는 공정이 필연적으로 따르며, 기판 표면에 건조과정에서 물반점이 남는 문제가 가장 큰 이슈로 남아 있다. 본 연구는 웨이퍼의 습식 세정 공정에 사용되는 DHF Final Clean Process후 IPA Vapor를 이용한 건조 방법을 기술 하였다. Single wafer spin process를 이용하였으며, 웨이퍼 Process 공간을 밀폐 후 N2가스를 충진하여 대기중의 산소 오염원 유입을 차단하고 수세 및 건조 가스를 이용하여 건조시킴으로써 SiFx의 SiOx로의 치환을 방지 하여 건조 효율 향상을 목적으로 한다. Bare 웨이퍼에서 65nm 이상 오염 발생 증가량을 측정 하였으며, 공정 후 웨이퍼 오염 발생량을 35개 이하로 확보 하였다.

• Membrane Journal
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• v.23 no.4
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• pp.257-266
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• 2013

The main purpose of this study is to develop a commercial scale of pervaporative process equipped with hollow fiber membrane modules, being able to effectually purify organic solvent at high temperature well over its boiling point under high vapor pressure. Three constituent technologies have been developed; 1) to fabricate braid-reinforced hollow fiber membrane stable in high pressure and high temperature application, 2) to design and fabricate a commercial scale of hollow fiber membrane module, and 3) to design and fabricate a pilot scale of pervaporation equipment system. The developed hollow fiber membrane possesses a membrane performance superior to the membrane of Sulzer (Germany) which is the most-well known for pervaporation process, and the membrane module equips hollow fiber membranes of $4.6m^2$ and the pervaporation system can treat organic liquid at 200 L/h, which is based on the dehydration of 95 wt% isopropyl alcohol (IPA). Since the membrane module is designed to flow in and pass through the inside of individual hollow fiber membrane, not to involve both the formation of feed's dead volume observed in flat-sheet membrane module and the channeling of feed occurring inside hollow fiber bundle which lower membrane performance seriously, it showed excellent separation efficiency. In particular, the module is inexpensive and has less heat loss into its surrounding, in compared with flat-sheet membrane module. In addition, permeant can be removed effectively from the outer surface of hollow fiber membrane because the applied vacuum is conveyed uniformly through space between fibers into respective fiber, even into one in the middle of the hollow fiber bundle in which the space between fibers is uniform in distance. Since the hollow fiber membrane pervaporation system is the first one ever developed in the world, our own unique proprietary technology can be secured, preoccupying technical superiority in export competitive challenges.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.251-251
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• 2016

For several decades, industrial processes consume a huge amount of raw water for various objects that consequently results in the generation of large amounts of wastewater. Wastewaters are consisting of complex mixture of different inorganic and organic compounds and some of them can be toxic, hazardous and hard to degrade. These effluents are mainly treated by conventional technologies such are aerobic and anaerobic treatment and chemical coagulation. But, these processes are not suitable for eliminating all hazardous chemical compounds form wastewater and generate a large amount of toxic sludge. Therefore, other processes have been studied and applied together with these techniques to enhance purification results. These include photocatalysis, absorption, advanced oxidation processes, and ozonation, but also have their own drawbacks. In recent years, electrochemical techniques have received attention as wastewater treatment process that could be show higher purification results. Among them, boron doped diamond (BDD) attract attention as electrochemical electrode due to good chemical and electrochemical stability, long lifetime and wide potential window that necessary properties for anode electrode. So, there are many researches about high quality BDD on Nb, Ta, W and Si substrates, but, their application in effluents treatment is not suitable due to high cost of metal and low conductivity of Si. To solve these problems, Ti has been candidate as substrate in consideration of cost and property. But there are adhesion issues that must be overcome to apply Ti as BDD substrate. Al, Cu, Ti and Nb thin films were deposited on Ti substrate to improve adhesion between substrate and BDD thin film. In this paper, BDD films were deposited by hot filament chemical vapor deposition (HF-CVD) method. Prior to deposition, cleaning processes were conducted in acetone, ethanol, and isopropyl alcohol (IPA) using sonification machine for 7 min, respectively. And metal layer with the thickness of 200 nm were deposited by DC magnetron sputtering (DCMS). To analyze microstructure X-ray diffraction (XRD, Bruker gads) and field emission scanning electron microscopy (FE-SEM, Hitachi) were used. It is confirmed that metal layer was effective to adhesion property and improved electrode property. Electrochemical measurements were carried out in a three electrode electrochemical cell containing a 0.5 % H2SO4 in deionized water. As a result, it is confirmed that metal inter layer heavily effect on BDD property by improving adhesion property due to suppressing formation of titanium carbide.