• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.30-37
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• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2000년도 추계학술발표대회 및 bio-venture fair
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• pp.115-118
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• 2000

미세 가공 기술을 이용하여 제작된 IDA 전극을 활용하여 임피던스 측정방식의 cell chip으로의 응용에 대해 고찰하였다. IDA 전극은 기존의 반도체 공정으로서 손쉽게 제작할 수 있고, 대량 제작시 전극의 재현성 확보가 용이하고 소형화 할 수 있으며 낮은 단가로 제작될 수 있는 장점이 있다. IDA 전극을 채용한 cell chip을 B16-F1 melanoma 세포 배양에 적용한 결과, 세포성장과 임피던스 변화량이 상관성을 보였고, 세포의 성장을 저해하는 약물의 투과시 cell chip의 임피던스 변화 역시 기존의 방법과 유사한 결과를 보여 주었다.

• Bulletin of the Korean Chemical Society
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• 제23권8호
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• pp.1169-1172
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• 2002