• Title/Summary/Keyword: Hot Wall Method

Search Result 228, Processing Time 0.026 seconds

Deposition of Tungsten Thin Film on Silicon Surface by Low Pressure Chemical Vapor Deposition Method (저압 화학 기상 증착법을 이용한 실리콘 표면 위의 텅스텐 박막의 증착)

  • Kim, Seong Hun
    • Journal of the Korean Chemical Society
    • /
    • v.38 no.7
    • /
    • pp.473-479
    • /
    • 1994
  • Tungsten thin film was deposited on p-(100) silicon substrate by using the LPCVD(low pressure chemical vapor deposition) technique. $WF_6$ was used as a source gas for tungsten and $SiH_4$ was used as a reducing gas for $WF_6$. Tungsten thin film was deposited by either SiH4 or Si substrate reduction of $WF_6$ under cold-wall condition and it was deposited by $SiH_4$ reduction of $WF_6$ under hot-wall condition. The crystal structure of deposited thin film under both conditions were identified to be bcc (body centered cubic). The physical and electrical properties of deposited thin films were investigated. The deposited film under hot-wall condition changed to $WSi_2$ film by the annealing under $800^{\circ}C.$ From the experimental results and theoretical considerations, the change of the crystal structure of the thin film by annealing was discussed. $WSi_2$ thin film, which was known to have good compatibility with Si substrate, could be produced under hot-wall condition although the film properties were superior under cold-wall condition.

  • PDF

Hot-wall epitaxial growth and characteristic of CdTe films (Hot-wall epitaxy법에 의한 CdTe 박막의 성장과 특성)

  • 박효열;조재혁;진광수;황영훈
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.14 no.4
    • /
    • pp.140-144
    • /
    • 2004
  • CdTe thin films were grown on GaAs (100) substrates by hot wall epitaxy method. From the XRD measurements, it was found that CdTe/GaAs (100) film was grown as a single crystals with the different from growth plane of (III), and growth rate of CdTe thin films was found to be 30 $\AA/sec$ by SEM. To acquire a high quality CdTe thin film, the optimum temperature for the source and substrate are found to be $500^{\circ}C$ and $320^{\circ}C$, respectively, which was checked by PL.

Characteristics of Zns:Mn Thin Film Electroluminescences Prepared by a Repeated Deposition of Hot Wall Method (Hot Wall 법의 반복 증착에 의해 제작한 ZnS:Mn 박막 엘렉트로루미네센스의 특성)

  • 이상태
    • Journal of the Korean Institute of Navigation
    • /
    • v.25 no.4
    • /
    • pp.435-442
    • /
    • 2001
  • A new technique to grow a manganese-doped zinc-sulfide(ZnS:Mn) has been proposed using the repeated deposition of the Hot Wall method. The optical characteristics and crystallinity for the ZnS and ZnS:Mn thin films deposited on a quartz glass substrate by the method were investigated. Also, The ZnS:Mn thin film elcetroluminescent devices were fabricated by the method to study luminescence characteristics. All films showed (111)-oriented cubic structure. By the repeated deposition, the deposition rates were decreased, and the optical characteristics and crystalline properties were improved, which clarifies that the method is effective to deposit the thin films with good crystallinity Futhermore, the crystallinity was more improved by the doping of Mn. Only one peak emission at around 585nm originating from Mn luminescent center is observed In the photoluminescent and electroluminescent spectra of ZnS:Mn films and the luminance of the ZnS:Mn-based thin film electroluminescent devices was obtained below 60cd/$m^2$ . The optical and crystalline properties, luminescence characteristics are discussed in terms of the effects of the repeated deposition and Mn-doping.

  • PDF

Opto-electric Properties of $ZnIn_2S_4$ single crystal thin film Grown by Hot Wall Epitaxy method (Hot Wall Epitaxy (HWE)에 의한 성장된 $ZnIn_2S_4$ 단결정 박막의 광전류 특성)

  • Hong, Kwang-Joon;Lee, Sang-Youl
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2006.11a
    • /
    • pp.71-72
    • /
    • 2006
  • The stochiometric mixture of evaporating materials for the $ZnIn_2S_4$ single crystal thin film was prepared from horizontal furnace. To obtain the $ZnIn_2S_4$ single crystal thin film. $ZnIn_2S_4$ mixed crystal was deposited on throughly etched semi-insulating GaAs(100). In the Hot Wall Epitaxy(HWE) system. From the photocurrent spectrum by illumination of perpendicular light on the c-axis of the $ZnIn_2S_4$ single crystal thin film, we have found that the values of spin orbit splitting ${\Delta}So$ and the crystal field splitting ${\Delta}Cr$ were 0.0148 eV and 0.1678 eV at $10_{\circ}K$, respectively.

  • PDF

Growth and electrical properties for $AgGaSe_2$ epilayers by hot wall epitaxy (Hot Wall Epitaxy(HWE)법에 의한 $AgGaSe_2$ 단결정 박막 성장과 전기적 특성)

  • Park, Chang-Sun;Hong, Kwang-Joon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.11a
    • /
    • pp.96-97
    • /
    • 2008
  • Single crystal $AgGaSe_2$ layers were grown on thoroughly etched semi-insulating GaAs(100) substrate at 420 $^{\circ}C$ with hot wall epitaxy (HWE) system by evaporating $AgGaSe_2$ source at 630 $^{\circ}C$. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of single crystal $AgGaSe_2$ thin films measured with Hall effect by van def Pauw method are $9.24\times10^{16}cm^{-3}$ and 295 $cm^2/V{\cdot}s$ at 293 K, respectively.

  • PDF

Characterization of SrS:Ag Thin Film Electroluminescence Deposited by Hot Wall Technique (Hot Wall법에 의해 제작한 SrS:Ag 박막EL소자의 특성)

  • Lee, Sang-Tae;Heo, Sung-Gon;Lee, Hong-Chan
    • Proceedings of the Korean Society of Marine Engineers Conference
    • /
    • 2005.11a
    • /
    • pp.242-243
    • /
    • 2005
  • The SrS:Ag, Cl thin films have been grown by the hot wall technique with S furnace placed on the outside of the growth chamber in order to investigate the crystallographic and optical characteristics. The XRD patterns indicate a strongly preferential orientation in the [200] direction. The PL spectrum has an emission peak of about 398nm which is assigned by the transition from $4d^{95}s^1$ to $4d^{10}$ of$Ag^+$ center.

  • PDF

Growth and characterization of ZnS thin films by Hot Wall Method (Hot Wall 법에 의한 ZnS 박막의 제작과 기초적 물성연구)

  • Heo, Sung-Gon;Lee, Sang-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.05b
    • /
    • pp.108-111
    • /
    • 2000
  • The Zns thin films were deposited on non-alkali glass substrate by the Hot Wall method. The thin films grown at various evaporation cell and substrate temperature were characterized by spectrophotometer and X-ray diffraction to investigate the optical and structural characteristics. The deposition rates were increased with increasing the cell temperature, and were decreased with increasing substrate. The optical characteristics of thin films depends on the deposition rates. The band gap energies measured at room temperature with 3.4~3.5eV are smaller than the theoretical value of 3.54eV. All ZnS thin films are oriented in (111) of the principal direction of a zincblende structure.

  • PDF

Photoluminescence Characteristics of ZnO Nano Needle-like Rods grown by the Hot Wall Epitaxy Method

  • Eom, Sung-Hwan;Choi, Yong-Dae
    • Transactions on Electrical and Electronic Materials
    • /
    • v.8 no.5
    • /
    • pp.191-195
    • /
    • 2007
  • We investigated photoluminescence characteristics of ZnO nano needle-like rods grown on a c-plane $AL_2O_3$ substrate by the hot wall epitaxy method. The nano-rods were vertically well aligned along the ZnO c-axis. The diameters of the ZnO nano-rods ranged from 20 nm to 30 nm and their lengths were between 600 and 700 nm. In the photoluminescence spectrum at 10 K, the exciton emission bound to the neutral donor dominated while defect related emission was weakly observed. With a further increase of temperature, the free exciton emission appeared and eventually became dominant at room temperature.

Simulation of the Thermal Performance on an Ondol House with Hot Water Heating in Consideration of Radiation Heat Transfer (복사열전달을 고려한 모형 온수온돌 주택 열성능 시뮬레이션)

  • Choi, Y.D.;Yoon, J.H.;Hong, J.K.;Lee, N.H.;Kang, D.H.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.5 no.4
    • /
    • pp.295-305
    • /
    • 1993
  • Thermal performance of test cell of model hot water Ondol house was simulated by equivalence heat resistence and heat capacity method. In this method wall was replaced by two equivalence and one heat capacity. This method enables to simulate the variation of temperature of each element of model house. The effect of pipe diameter, pitch of pipe and with or without consideration of inter-radiation between wall surfaces on the energy consumption rate were investgated. Results show that radiations between the ground surface of room and wall surfaces contribute to the heating of room air by reducing the convection heat loss through the wall surfaces.

  • PDF