• Title/Summary/Keyword: Hot Wall Method

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저압 화학 기상 증착법을 이용한 실리콘 표면 위의 텅스텐 박막의 증착 (Deposition of Tungsten Thin Film on Silicon Surface by Low Pressure Chemical Vapor Deposition Method)

  • 김성훈
    • 대한화학회지
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    • 제38권7호
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    • pp.473-479
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    • 1994
  • 저압 화학 기상 증착법을 사용하여 $WF_6$의 환원반응으로 텅스텐 박막을 p형 실리콘 (100)표면위에 증착하였다. Cold-wall조건에서는 실리콘 기판과 $SiH_4$를 각각 이용하여 $WF_6$를 환원시켜 텅스텐 박막을 증착하였으며 hot-wall 조건에서는 $WF_6$$SiH_4$로 환원시켜 증착하였다. 박막의 결정구조는 어느 조건에서나 체심입방구조를 이루었으며, 증착조건에 따른 박막의 물리적 및 전기적 특성을 조사하였다. 증착된 박막을 온도 $800^{\circ}C$에서 열처리한 결과 hot-wall 조건의 박막이 $WSi_2$로 변화하였다. Hot-wall과 cold-wall조건에서의 박막을 분석한 결과 박막의 특성은 cold-wall조건이 우수하나 hot-wall조건에서는 열처리 방법에 의하여 실리콘 기판과 적합성이 우수한 것으로 알려진 $WSi_2$ 박막의 제조가 가능함을 알 수 있었다.

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Hot-wall epitaxy법에 의한 CdTe 박막의 성장과 특성 (Hot-wall epitaxial growth and characteristic of CdTe films)

  • 박효열;조재혁;진광수;황영훈
    • 한국결정성장학회지
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    • 제14권4호
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    • pp.140-144
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    • 2004
  • Hot-wall epitaxy법으로 GaAs 기판 위에 성장시킨 CdTe 박막은 (III) 면의 단결정 박막으로 성장되었음을 XRD 측정으로부터 확인하였으며, 박막 성장률은 SEM 측정 사진으로부터 30 $\AA/s$임을 알았다. PL 측정으로 얻은 최적성장조건은 원료물질 온도 $500^{\circ}C$, 기판 온도 $320^{\circ}C$이었다.

Hot Wall 법의 반복 증착에 의해 제작한 ZnS:Mn 박막 엘렉트로루미네센스의 특성 (Characteristics of Zns:Mn Thin Film Electroluminescences Prepared by a Repeated Deposition of Hot Wall Method)

  • 이상태
    • 한국항해학회지
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    • 제25권4호
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    • pp.435-442
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    • 2001
  • A new technique to grow a manganese-doped zinc-sulfide(ZnS:Mn) has been proposed using the repeated deposition of the Hot Wall method. The optical characteristics and crystallinity for the ZnS and ZnS:Mn thin films deposited on a quartz glass substrate by the method were investigated. Also, The ZnS:Mn thin film elcetroluminescent devices were fabricated by the method to study luminescence characteristics. All films showed (111)-oriented cubic structure. By the repeated deposition, the deposition rates were decreased, and the optical characteristics and crystalline properties were improved, which clarifies that the method is effective to deposit the thin films with good crystallinity Futhermore, the crystallinity was more improved by the doping of Mn. Only one peak emission at around 585nm originating from Mn luminescent center is observed In the photoluminescent and electroluminescent spectra of ZnS:Mn films and the luminance of the ZnS:Mn-based thin film electroluminescent devices was obtained below 60cd/$m^2$ . The optical and crystalline properties, luminescence characteristics are discussed in terms of the effects of the repeated deposition and Mn-doping.

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Hot Wall Epitaxy (HWE)에 의한 성장된 $ZnIn_2S_4$ 단결정 박막의 광전류 특성 (Opto-electric Properties of $ZnIn_2S_4$ single crystal thin film Grown by Hot Wall Epitaxy method)

  • 홍광준;이상열
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.71-72
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    • 2006
  • The stochiometric mixture of evaporating materials for the $ZnIn_2S_4$ single crystal thin film was prepared from horizontal furnace. To obtain the $ZnIn_2S_4$ single crystal thin film. $ZnIn_2S_4$ mixed crystal was deposited on throughly etched semi-insulating GaAs(100). In the Hot Wall Epitaxy(HWE) system. From the photocurrent spectrum by illumination of perpendicular light on the c-axis of the $ZnIn_2S_4$ single crystal thin film, we have found that the values of spin orbit splitting ${\Delta}So$ and the crystal field splitting ${\Delta}Cr$ were 0.0148 eV and 0.1678 eV at $10_{\circ}K$, respectively.

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Hot Wall Epitaxy(HWE)법에 의한 $AgGaSe_2$ 단결정 박막 성장과 전기적 특성 (Growth and electrical properties for $AgGaSe_2$ epilayers by hot wall epitaxy)

  • 박창선;홍광준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.96-97
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    • 2008
  • Single crystal $AgGaSe_2$ layers were grown on thoroughly etched semi-insulating GaAs(100) substrate at 420 $^{\circ}C$ with hot wall epitaxy (HWE) system by evaporating $AgGaSe_2$ source at 630 $^{\circ}C$. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of single crystal $AgGaSe_2$ thin films measured with Hall effect by van def Pauw method are $9.24\times10^{16}cm^{-3}$ and 295 $cm^2/V{\cdot}s$ at 293 K, respectively.

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Hot Wall법에 의해 제작한 SrS:Ag 박막EL소자의 특성 (Characterization of SrS:Ag Thin Film Electroluminescence Deposited by Hot Wall Technique)

  • 이상태;허성곤;이홍찬
    • 한국마린엔지니어링학회:학술대회논문집
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    • 한국마린엔지니어링학회 2005년도 후기학술대회논문집
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    • pp.242-243
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    • 2005
  • The SrS:Ag, Cl thin films have been grown by the hot wall technique with S furnace placed on the outside of the growth chamber in order to investigate the crystallographic and optical characteristics. The XRD patterns indicate a strongly preferential orientation in the [200] direction. The PL spectrum has an emission peak of about 398nm which is assigned by the transition from $4d^{95}s^1$ to $4d^{10}$ of$Ag^+$ center.

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Hot Wall 법에 의한 ZnS 박막의 제작과 기초적 물성연구 (Growth and characterization of ZnS thin films by Hot Wall Method)

  • 허성곤;이상태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.108-111
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    • 2000
  • The Zns thin films were deposited on non-alkali glass substrate by the Hot Wall method. The thin films grown at various evaporation cell and substrate temperature were characterized by spectrophotometer and X-ray diffraction to investigate the optical and structural characteristics. The deposition rates were increased with increasing the cell temperature, and were decreased with increasing substrate. The optical characteristics of thin films depends on the deposition rates. The band gap energies measured at room temperature with 3.4~3.5eV are smaller than the theoretical value of 3.54eV. All ZnS thin films are oriented in (111) of the principal direction of a zincblende structure.

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Photoluminescence Characteristics of ZnO Nano Needle-like Rods grown by the Hot Wall Epitaxy Method

  • Eom, Sung-Hwan;Choi, Yong-Dae
    • Transactions on Electrical and Electronic Materials
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    • 제8권5호
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    • pp.191-195
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    • 2007
  • We investigated photoluminescence characteristics of ZnO nano needle-like rods grown on a c-plane $AL_2O_3$ substrate by the hot wall epitaxy method. The nano-rods were vertically well aligned along the ZnO c-axis. The diameters of the ZnO nano-rods ranged from 20 nm to 30 nm and their lengths were between 600 and 700 nm. In the photoluminescence spectrum at 10 K, the exciton emission bound to the neutral donor dominated while defect related emission was weakly observed. With a further increase of temperature, the free exciton emission appeared and eventually became dominant at room temperature.

복사열전달을 고려한 모형 온수온돌 주택 열성능 시뮬레이션 (Simulation of the Thermal Performance on an Ondol House with Hot Water Heating in Consideration of Radiation Heat Transfer)

  • 최영돈;윤종호;홍진관;이남호;강대호
    • 설비공학논문집
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    • 제5권4호
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    • pp.295-305
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    • 1993
  • Thermal performance of test cell of model hot water Ondol house was simulated by equivalence heat resistence and heat capacity method. In this method wall was replaced by two equivalence and one heat capacity. This method enables to simulate the variation of temperature of each element of model house. The effect of pipe diameter, pitch of pipe and with or without consideration of inter-radiation between wall surfaces on the energy consumption rate were investgated. Results show that radiations between the ground surface of room and wall surfaces contribute to the heating of room air by reducing the convection heat loss through the wall surfaces.

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