• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.12 s.255
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• pp.1611-1617
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• 2006

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.15-21
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• 2007

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.41-46
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• 2004

This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real-time. The interferometer system is modeled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modeling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high precision displacement measurement in real-time.

• Proceedings of the Optical Society of Korea Conference
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• 2009.10a
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• pp.163-164
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.16 no.10
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• pp.203-208
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• 1999

By tilting the reference mirror of Twynman-Green interferometer having a reference mirror and a moving mirror, firinge pattern composed of bright and dark parallel lines can be obtained and the fringe pattern is shifted according to the displacement of the mowing mirror. Several studies are executed for displacement measurement by detecting the intensity of the fringe with photo-diodes having small detecting area. In this study, to improve the sensitivity and robustness, the intensity of fringe is detected by using a large-area quadratic photo-diode masked with a grating panel having four kinds of binary grating having phase-difference of 0, {\pi}$/4, {\pi}$/2, 3 {\pi}$/4. The phase of the fringe is calculated with a simple 4-buckets algorithm. A experimental result shows that standard deviation of 5.653 nm is obtained comparing with a capacitive type gap sensor having nearly 1 nm accuracy.

• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.60-61
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• 2000

표면 형상을 측정하는 방법은 샘플표면의 평평도, 곡률, 거칠기, 깊이 측정등의 수많은 상업적 응용을 위해 광범위하게 개발되어왔다. 이중에서도 특히 간섭현상을 이용한 광 표면 프로파일러는 표면의 3차원 구조를 측정하는데 있어서 subangstrom의 매우 높은 깊이 분해능을 가지므로 샘플 표면의 정밀 진단에 많이 사용되어 왔다. [1,2] 광 간섭 현미경은 기본적으로 광위상 변화를 검출하여 그것을 표면구조변화로 바꾸어주는 역할을 한다. 그러나 광위상 변화는 샘플 표면의 구조뿐만 아니라 물질 변화와 박막두께 변화에도 민감하므로 순수한 표면구조측정은 샘플이 단일물질인 경우에만 달성된다는 문제점이 있다. 따라서 이러한 광위상 측정과 관련된 ambiguity를 해결하기 위해서는 일반적인 광 간섭 현미경에서 얻어지는 위상데이터와 더불어 물질변화를 분석할 수 있는 다른 추가적인 데이터가 필요하다. 이러한 필요성 때문에 우리는 광위상 뿐만 아니라 반사율 분포도 동시에 측정할 수 있는 새로운 방식의 다출력단 호모다인 간섭계(Homodyne I/Q Interferometer; HIQI)를 구성하였으며[3], 그 실험장치도는 [Fig. 1]과 같다. HIQI는 in-phase and quadrature 검출방식에 기반을 두며, 이 검출방식은 PBS에서 반사되는 빛살과 투과되는 빛살 사이의 위상차가 $\pi$/4라는 실험결과로부터 달성된다. HIQI는 샘플 표면의 3차원 구조 뿐만 아니라 광학적 특성의 2차원 분포도 동시에 얻을 수 있다. (중략)

• The Journal of the Acoustical Society of Korea
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• v.8 no.1
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• pp.75-80
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• 1989

A Mach-Zehnder interferometer using single mode optical fiber was constructed which operates in homodyne detection scheme. Its response to air-borne soun pressure was examined experimentally. A signal stabilizer was developed for maintaining optical fiber interferometer in quadrature condition using a cylindrical piezoelectric stretcher. This maintains the optical fiber sensor at a maximum sensitivity in the presence of the phase drift caused by temperature fluctuation and other types of environmental disturbances.

• Korean Journal of Optics and Photonics
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• v.7 no.1
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• pp.37-43
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• 1996

Two type interference air refractometers have been developed by using a frequency stabilized He-Ne laser in a transverse magnetic field. The refractometers were based on symmetric multiple pass interferometer. In this system, One part of the beams passed through air whose refractivity is to be measured and the other part of the beams passed through a vacuum champer to be used as a reference. Several measurements were performed under normal air condition. Maximum difference between two interference refractometers was ${\pm}2{\times}10^{-8}$.

• Journal of KSNVE
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• v.7 no.6
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• pp.931-936
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• 1997

Optical fiber sensor is a subject which has been attracted considerable attention in recent years. Detection of sound pressure with optical fibers positioned in the arms of a Mach-Zehnder interferometer is presented in this paper. A fiber length of the order of 150m is wounded is made by hollow cylinder type. To increase the sound signal 3${\times}3$ directional coupler is used. Fiber optic hydrophone is the underwater tank with 2kHz sound source. Finally, it is shown that the fiber optic hydeophone can stably detec 2kHz sound.

• 제어로봇시스템학회:학술대회논문집
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• 1989.10a
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• pp.547-552
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• 1989

Single mode optical fiber interferometeric sensors using phase tracking homodyne detection are typically susceptible to environmentally induced temperature fluctuations and other types of disturbances. In this paper compensator is described, which is a simple and effective phase tracking feedback electronic circuit must be output signal stabilized to achieve maximln sensitivity and linearity of Mach-Zehnder fiber-optic interferomter in the presence of differential phase drift. The phase tracking range of the piezoelectric cylinder in the reference arm is .+-.3.7.pi.rad, and the probe mass about 1 gram in the sensing ann was used for measurements of the gravity acceleration.