• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1989년도 추계학술대회 논문집 학회본부
• /
• pp.139-141
• /
• 1989

The characteristics of the hollow cathode discharge were investigated. Temperature distribution of the hollow cathode was investigated and I-V curves of the hollow cathode discharge were obtained. In this paper variables are chamber pressure, Ar gas flow rate injected through the cathode tube and the gap distance between cathode and anode. The inter electrode electron temperature and density were measured by Langmuir probe.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
• /
• pp.874-877
• /
• 2002

The optogalvanic signals were measured using hollow cathode discharge tube with argon as buffer gas at change of discharge currents. A change of ionization rate due to electron collision causes an increase or decrease of the electric conductivity. This change in electric conductivity generates the optogalvanic signal. We conclude that optogalvanic signal has close relation with the lowest metastable atoms density at low current.

• 한국인쇄학회지
• /
• 제23권2호
• /
• pp.93-101
• /
• 2005

The measured plasma temperature of Ar hollow cathode discharge for several metal cathodes are about $620\;{\sim}\;780K$ at discharge current of $7\;{\sim}\;10mA$. The optogalvanic signals were measured using hollow cathode discharge tube with argon as buffer gas at change of discharge currents. A change of ionization rate due to electron collision causes an increase or decrease of the electric conductivity. This change in electric conductivity generates the optogalvanic signal. We conclude that optogalvanic signal has close relation with the lowest metastable atoms density at low current.

• 열처리공학회지
• /
• 제25권2호
• /
• pp.80-84
• /
• 2012

An apparatus was constructed to nitrify small metallic sintered components by using a hollow-cathode discharge plasma method. A stainless steel basket, which contains a sintered part to be nitrified, is potentially grounded and serves as hollow-cathode electrode. Hollow-cathode plasma was produced by supplying the positive voltage to the anode. In this study sintered carbon iron and stainless steel were used as testing specimens. It was shown that an effective nitrifying took place by controlling the total pressure of nitrogen and hydrogen gas and applied voltage.

• 한국진공학회지
• /
• 제11권2호
• /
• pp.119-126
• /
• 2002

Hollow cathode discharge(HCD)에서 알곤 기체를 완충 기체로 사용하여 전류 변화에 따른 광검류 신호를 측정하였다. 광검류 신호는 방전의 전기 전도도의 증가 또는 감소에 의해 나타나며 전기 전도도의 변화는 전자 충돌에 의한 이온화율의 변화에 의해 일어난다. 낮은 방전 전류에서 광검류 신호는 가장 낮은 준안정 준위 원자의 밀도 변화와 밀접한 관계가 있다는 결론을 얻었다.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 1998년도 춘계학술발표회 초록집
• /
• pp.150-151
• /
• 1998

• Transactions on Electrical and Electronic Materials
• /
• 제10권6호
• /
• pp.212-216
• /
• 2009

The spatial distribution of the optogalvanic (OG) signal in argon at the 801.489 nm ($1s_5-2p_8$ transition at the metastable level in Paschen notation) was investigated in the radial direction of a hollow cathode discharge tube. The results of this experiment showed that the OG signal amplitude decreases in accordance with the following two conditions; first, the level of discharge current and second, the distance from the cathode dark space. These results can be quantified by analyzing the electron density profile along the discharge regions, which can directly influence the collisional ionization induced by electron impact.

• 분석과학
• /
• 제15권6호
• /
• pp.502-508
• /
• 2002

관통형 속빈 음극관 글로우 방전 (See-through hollow cathode glow discharge)셀을 이용한 미량 및 극미량 분석을 가능한 분광 분석 장치를 개발하였다. 이 장치는 기존의 관통형 속빈 음극관 글로우 방전 셀을 개선하기 위하여 수냉식 냉각 장치를 부착한 새로운 방전 셀의 형태로 개발하였다. 기존의 방전 셀로 미량 및 극미량 분석은 가능하였지만, 공랭식 냉각장치로도 플라즈마의 온도를 높이는 데 한계가 있으며, 단 시간에 플라즈마가 불안정해지는 문제점이 발생하였다. 이러한 문제점을 개선하기 위해서 본 장치에서는 수냉식 냉각 방식을 채택하여 플라즈마의 안정성을 높였으며, 플라즈마 온도를 증가시킬 수 있다. 개선된 방전 셀의 기초 연구를 위해 속빈 음극관의 재질 및 구경변화에 따른 방전 전력 및 압력에 관련한 연구를 하였으며, 속빈 음극관의 구경의 변화에 따른 플라즈마 온도 변화에 대해 측정하였다.

• 전기학회논문지
• /
• 제57권1호
• /
• pp.78-81
• /
• 2008

A hollow cathode which has extremely stable discharge characteristic has been developed. This is composed of the two separated lanthanum hexaboride(LaB6) of a disk type in the tube as the electron emitters. The way of design is of great advantage to extend the surface discharge area of the LaB6, which is also useful for optimal fixing of the LaB6. The hollow cathode is capable of producing 30 kW(100 V, 300 A) of power continuously. Because the generated plasma beam with the high temperature(above $3000^{\circ}C$) from the hollow cathode passes through the center hole of the two intermediate electrodes, it is designed with the high temperature material of the tungsten and the suitable structure of the water cooling. The combinations of the hollow cathode and the two intermediate electrodes are practically useful for the ion plating plasma beam source.

• 한국전기전자재료학회논문지
• /
• 제18권4호
• /
• pp.381-385
• /
• 2005

The plasma temperature of Ar gas in hollow cathode discharge were measured. This is done by measuring the line profile of the 1s/sub 8/-2p/sub 8/ transition in Ar, using a single-frequency diode laser. Low power diode lasers have been successfully used for investigation of the line profiles of Ar transitions in hollow cathode discharges. It turns out that the plasma temperature of Ar is 640∼783 K in the discharge current range at 7∼10 mA.