• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.61.1-61.1
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• 2015

Nanoscale semiconductor plasma processing has become one of the most challenging issues due to the limits of physicochemical fabrication routes with its inherent complexity. The mission of future and emerging plasma processing for development of next generation semiconductor processing is to achieve the ideal nanostructures without abnormal profiles and damages, such as 3D NAND cell array with ultra-high aspect ratio, cylinder capacitors, shallow trench isolation, and 3D logic devices. In spite of significant contributions of research frontiers, these processes are still unveiled due to their inherent complexity of physicochemical behaviors, and gaps in academic research prevent their predictable simulation. To overcome these issues, a Korean plasma consortium began in 2009 with the principal aim to develop a realistic and ultrafast 3D topography simulator of semiconductor plasma processing coupled with zero-D bulk plasma models. In this work, aspects of this computational tool are introduced. The simulator was composed of a multiple 3D level-set based moving algorithm, zero-D bulk plasma module including pulsed plasma processing, a 3D ballistic transport module, and a surface reaction module. The main rate coefficients in bulk and surface reaction models were extracted by molecular simulations or fitting experimental data from several diagnostic tools in an inductively coupled fluorocarbon plasma system. Furthermore, it is well known that realistic ballistic transport is a simulation bottleneck due to the brute-force computation required. In this work, effective parallel computing using graphics processing units was applied to improve the computational performance drastically, so that computer-aided design of these processes is possible due to drastically reduced computational time. Finally, it is demonstrated that 3D feature profile simulations coupled with bulk plasma models can lead to better understanding of abnormal behaviors, such as necking, bowing, etch stops and twisting during high aspect ratio contact hole etch.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.4
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• pp.398-405
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• 2001

The rivet joint has typical structural feature that can be initiation site for the fatigue crack due to the combination of local stress concentration around rivet hole and the moisture trapping. From a viewpoint of structural assurance, it is crucial to evaluate the size of crack around the rivet holes by appropriate nondestructive evaluation techniques. Lamb wave that is one of guided waves, offers a more efficient tool for nondestructive inspection of plates. The neural network that is considered to be the most suitable for pattern recognition has been used by researchers in NDE field to classify different types of flaws and flaw sizes. In this study, clack size evaluation around the rivet hole using the neural network based on the back-propagation algorithm has been tarried out by extracting some features from the ultrasonic Lamb wave for A12024-T3 skin panel of aircraft. Special attention was paid to reduce the coupling effect between the transducer and the specimen by extracting some features related to time md frequency component data in ultrasonic waveform. It was demonstrated clearly that features extracted from the time and frequency domain data of Lamb wave signal were very useful to determine crack size initiated from rivet hole through neural network.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.537-542
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• 2014

The three-dimensional (3-D) NAND flash structure with fully charge storage using edge fringing field effect is presented, and its programming characteristic is evaluated. We successfully confirmed that this structure using fringing field effect provides good program characteristics showing sufficient threshold voltage ($V_T$) margin by technology computer-aided design (TCAD) simulation. From the simulation results, we expect that program speed characteristics of proposed structure have competitive compared to other 3D NAND flash structure. Moreover, it is estimated that this structural feature using edge fringing field effect gives better design scalability compared to the conventional 3D NAND flash structures by scaling of the hole size for the vertical channel. As a result, the proposed structure is one of the candidates of Terabit 3D vertical NAND flash cell with lower bit cost and design scalability.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.13 no.3
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• pp.209-216
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• 2001

A numerical study is peformed to investigate the effect of circumferential velocity generated by the guide vane on the nozzle flow of a jet fan, s a way of increasing the penetration force of jet fan with nozzle of 175mm diameter. For the validation of numerical results. the velocity is measured by a 5-hole pitot tube and flow visualization is conducted by the tuft method. Under the inlet condition that the maximum circumferential velocity in the stator outlet of the present jet fan is 1.8m/s, the axial velocity in the nozzle outlet has the feature that the velocity at the axis is low and the velocity near the wall high. Therefore, to increase the throw length of the jet fan, the configuration of the fairing and nozzle needs to be developed and the precise revise of the stator angle is required, In addition, the bigger the circumferential velocity, the smaller the axial velocity at the axis and the bigger non-uniformity of the flow distribution.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.11 no.3
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• pp.1650-1669
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• 2017

In this study, each pixel in an ear is used as a centroid to generate a cake. Subsequently the major axis length of this cake is computed and obtained. This obtained major axis length serves as a feature to recognize an ear. Later, the ear hole is used as a centroid and a 16-circle template is generated to extract the major axis lengths of the ear. The 16-circle template extracted signals are used to recognize an ear. In the next step, a ring-to-line mapping technique is used to map these major axis lengths to several straight-line signals. Next, the complex plane vector computing technique is used to determine the similarity of these major axis lengths, whereby a solution to the image-rotating problem is achieved. The aforementioned extracted signals are also compared to the ones that are extracted from its neighboring pixels, whereby solving the image-shifting problem. The algorithm developed in this study can precisely identify an ear image by solving the image rotation and image shifting problems.

• Proceedings of the Korea Concrete Institute Conference
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• 2006.05b
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• pp.505-508
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• 2006

Self-leveling mortar is walkable bottom mortar which can maintain the horizontality of self fluid and have the the quick-setting quality, the low-human-effort practicable material of high-quality bottom in construction. In accordance with more adhesive strength with bottom side and absorption control, Primer is used for purpose to prevent pin-hole occurrence by self leveling mortar application prior to construction. This study is composed measurement of absorption, adhesive strength. Used material is NP-40 as nonionic emulsifying agent, uses SA-210L as negative ion emulsifying agent, uses APS, SBS as ridical initiator. A result of test, in accordance with image of Primer, as low temperature and application frequency, indicates low absorption rate and adhesive strength, as solid powder and dryness time is increse, absorption rate and adhesive strength lowly shows figure.

• Journal of Advanced Marine Engineering and Technology
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• v.18 no.2
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• pp.64-74
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• 1994

The gundrill is capable of machining for having large length to diameter ratio in single pass. The techniques of gundrill and gun boring began developing in the late 18th century with the need for more accurate bores in rifle, cannon, machinery part and marine part etc. The main feature of the gun drilling provides a stabilizing cutting force resultant necessary for self guidance of the drill head. A study of the accuracy and surface finish of holes produced would reveal quite useful information regarding the process. The thesis deals with the experimental results obtained during gun drilling on marine part materials for different machining conditions.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.84-87
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• 2009

This paper describes a novel method for fabricating large area metallic stamp with high aspect ratio micro intaglio features. Micro machined brass master with pillar and larger width groove patterns were electroformed to form inverse structures on the large area metallic stamp. This enabled large area metallic stamp with fine micro high aspect ratio micro intaglio features which were small width groove patterns and quadrilateral hole patterns that cannot be fabricated by direct micro machining process. Fabricated large area metallic stamp with high aspect ratio micro intaglio features was measured and analyzed.

• The Transactions of the Korea Information Processing Society
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• v.7 no.10
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• pp.3119-3127
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• 2000

This paper is a study to find a new method of feature selection for vibrationof buman body by analyzing correlationof vibration between King Songdok Bell and Human body. The vibration characteristics are analyzed by matching body, vocal tract, diaphragm and asymmetrical clements of human body with Bell, resonator, hole in the ground and asymmetical elements. In the result, the characteristics of sound vibrationof King Songdok Bell is useful to apply it to vibration characteristics of human body because the vibration characteristics of ech elements is alike.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).