• Geomechanics and Engineering
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• v.20 no.5
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• pp.461-474
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• 2020

Analysing the incompatible deformation and damage evolution around the tunnels in mixed strata is significant for evaluating the tunnel stability, as well as the interaction between the support system and the surrounding rock mass. To investigate this issue, confined compression tests were conducted on upper-soft and lower-hard strata specimens containing a circular hole using a rock testing system, the physical mechanical properties were then investigated. Then, the incompatible deformation and failure modes of the specimens were analysed based on the digital speckle correlation method (DSCM) and Acoustic Emission (AE) data. Finally, numerical simulations were conducted to explore the damage evolution of the mixed strata. The results indicate that at low inclination angles, the deformation and v-shaped notches inside the hole are controlled by the structure plane. Progressive spalling failure occurs at the sidewalls along the structure plane in soft rock. But the transmission of the loading force between the soft rock and hard rock are different in local. At high inclination angles, v-shaped notches are approximately perpendicular to the structure plane, and the soft and hard rock bear common loads. Incompatible deformation between the soft rock and hard rock controls the failure process. At inclination angles of 0°, 30° and 90°, incompatible deformations are closely related to rock damage. At 60°, incompatible deformations and rock damage are discordant due that the soft rock and hard rock alternately bears the major loads during the failure process. The failure trend and modes of the numerical results agree very well with those observed in the experimental results. As the inclination angles increase, the proportion of the shear or tensile damage exhibits a nonlinear increase or decrease, suggesting that the inclination angle of mixed strata may promote shear damage and restrain tensile damage.

• Transactions of Materials Processing
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• v.7 no.1
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• pp.36-48
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• 1998

In order to analyze the stretch flange forming characteristics of tailored blanks. laser welded blanks of different thickness and strength combinations were prepared and hole expansion tests were done. The stretch flange formability of laser welded blanks was reduced as increasing the deformation restraining force($strength{\times}thickness$) ratio between two welded sheets. Simulation of stretch forming mode deformation and comparson with experimental results showed that the stretch flange formabili-ty was influenced not only by the difference of the deformation restraining forces between two base sheets but also by the difference of the deformation restraining forces between base sheet and weld. Therefore the stretch flange formability was reduced more rapidly than tensile elongation as increas-ing the deformation restraining force ration. It was also found that simulation of stretch flange forming was more accurate when material properties of weld was given.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.5
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• pp.842-849
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• 1997

The aim of this study is an investigation of the interaction of two micro hole defects affecting fatigue crack initation life and propagation behavior. The locatio of two micro hole defects was considered as an angle of alignment and the distance between the centers of two micro hole defects. The fatigue cracking behavior is experimented under bending. When micro defects are located close to each other, the fatigue crack initiation lives are varied with their relative locations. In the experiments, the area of local plastic strain strongly played a role in the fatigue crack initiation lives. Therefore we introduce a parameter which contains the plastic deformation area at stress concentrations and propose a fatigue crack initiation life prediction curve. In addition, the directions and propagation rates of fatigue cracks initiated at two micro hole defects are studied experimentally.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.6
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• pp.563-575
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• 2007

This contribution contained the classical work of an open-hole tensile plate to demonstrate the performance of grating shearography and to compare with the results obtained by other full-field measurement techniques, The isotropic plate with an open-hole has often appeared in the previous contributions introducing novel full-field method and system. Grating shearography directly provided six quantitative measurands about the specimen's surface kinematics by using a single measurement set: three in-plane strains, in plane rotation, and two out-of-plane slopes. The quasi-plane wavefront of grating metrology led to high signal-to-noise ratio (SNR) and thus neither fitting nor filtering was applied, and the small shearing distance of $101{\mu}m$ could be used. The small shearing distance provided the outstanding spatial resolution of $80{\mu}m$ and sensitivity appropriate for experimental mechanics. Finally, the grating shearography enabled the visualization of the complex surface deformation around the hole and also detected parasitic flexions of the specimen in the micrometer regime during the tensile test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.99-100
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• 2006

Cold gas dynamic spray or cold-spray is a deposition process, which causes deformation of a thin substrate. The deformation is usually convex to the deposited side. In this research, the main cause of the deformation was investigated using 6061-T6 aluminum alloy. The effects or anisotropic coefficient or thermal expansion (CTE) or the deposited layer by cold-spray and residual stress were studied by experiments and finite element analysis. The Hole Drilling method was applied to measure residual stress in the cold-spray layer and substrate. The data obtained by the experiments were used for the analysis of substrate deformation. From the result of the analysis, it was concluded that compressive residual stress was the main reason of substrate deformation while CTE had little effect.

• Coupled systems mechanics
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• v.8 no.4
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• pp.299-313
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• 2019

The paper represents computer modeling of the deformed state of physically nonlinear transversally isotropic bodies with hole. In order to describe the anisotropy of the mechanical properties of transversally-isotropic materials a structurally phenomenological model has been used. This model allows representing the initial material in the form of the coupled isotropic materials: the basic material (binder) considered from the positions of continuum mechanics and the fiber material oriented along the anisotropy direction of the original material. It is assumed that the fibers perceive only the axial tensile-compression forces and are deformed together with the base material. To solve the problems of the theory of plasticity, simplified theories of small elastoplastic deformation have been used for a transversely-isotropic body, developed by B.E. Pobedrya. A simplified theory allows applying the theory of small elastoplastic deformations to solve specific applied problems, since in this case the fibrous medium is replaced by an equivalent transversely isotropic medium with effective mechanical parameters. The essence of simplification is that with simple stretching of composite in direction of the transversal isotropy axis and in direction perpendicular to it, plastic deformations do not arise. As a result, the intensity of stresses and deformations both along the principal axis of the transversal isotropy and along the perpendicular plane of isotropy is determined separately. The representation of the fibrous composite in the form of a homogeneous anisotropic material with effective mechanical parameters allows for a sufficiently accurate calculation of stresses and strains. The calculation is carried out under different loading conditions, keeping in mind that both sizes characterizing the fibrous material fiber thickness and the gap between the fibers-are several orders smaller than the radius of the hole. Based on the simplified theory and the finite element method, a computer model of nonlinear deformation of fibrous composites is constructed. For carrying out computational experiments, a specialized software package was developed. The effect of hole configuration on the distribution of deformation and stress fields in the vicinity of concentrators was investigated.

• Transactions of Materials Processing
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• v.14 no.7 s.79
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• pp.601-606
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• 2005

A hole expansion process is an important process in producing a hub-hole in a wheel disc of a vehicle. In this process, the main parameter is the formability of a material that is expressed as the hole expansion ratio. In the process, a crack is occurred in the upper edge of a hole as the hole is expanded. Since prediction of the forming limit by hole expansion experiment needs tremendous time and effort, an appropriate fracture criterion has to be developed for finite element analysis to define forming limit of the material. In this paper, the hole expansion process of a hub-hole is studied by finite element analysis with ABAQUS/standard considering several ductile fracture criteria. The fracture mode and hole expansion ratio are compared with respect to the various fracture criteria. These criteria do not predict its fracture mode or hole expansion ratio adequately and show deviation from experimental results of hole expansion. A modified ductile fracture criterion is newly proposed to consider the deformation characteristics of a material accurately in a hole expansion process. A fracture propagation analysis at the hub-hole edge is also performed for high accuracy of prediction using the new fracture criterion proposed.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.10
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• pp.50-55
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• 2021

In this study, to create circular holes on an inclined conic face, we developed a novel process of vertical piercing on the plane before drawing, instead of applying an expensive cam-piercing method. The pierced holes are deformed during the drawing, and their shapes are affected by the size of the center hole. Using the Abaqus CAE program, the deformation tendency of the holes, according to the diameter of the center hole, was identified, and the diameter for securing the roundness of the side holes were determined through actual experiments. The developed process was successfully applied to mass production of the part, and a cost reduction is expected.