• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.220-220
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• 2013

Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

• Korean Journal of Materials Research
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• v.8 no.8
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• pp.751-756
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• 1998

Effects of remote hydrogen plasma cleaning process parameters on the removal of Fe impurities on Si surfaces and the Fe removal mechanism were investigated. Fe removal efficiency is enhanced with decreasing the plasma exposure time and increasing the rf-power. The optimum plasma exposure time and rf-power are 1 min and 100W. respectively, in the range below 10 min and 100W. Fe removal efficiency is better under lower pressures than higher pressures, and the optimum $\textrm{H}_2$ flow rate was found to be 20 and 60sccm, respectively, under a low and a high pressure. The post-RHP(remote hydrogen plasma) annealing enhanced metallic contaminants removal efficiency, and the highest efficiency was achieved at $600^{\circ}C$. According to the AFM analysis results Si surface roughness was improved by 30-50%, which seems to be due to the removal of particles by the plasma cleaning. Also. Fe impurities removal mechanisms by remote hydrogen plasma are discussed.

• Journal of Hydrogen and New Energy
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• v.24 no.3
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• pp.206-215
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• 2013

A linear engine has advantages in terms of volume and weight, because there are no rotating parts. Thus, it is considered that linear engines might be suitable in hybrid vehicles. However, the linear engine has challenges in terms of the engine ignition timing and efficiency, so the engine has not been commercialized yet. In this study, the dynamic and combustion characteristics of the linear engine might be specified by various loads which are changed by conductance. The engine used in this experiment consists of two combustion chambers, four compressors, two linear alternators and a mover with a piston head and magnets. The way fuel is supplied in the experiment is by propane fuel being mixed with air in the carburetor, then being delivered into combustion cylinders via compressors. In the experiment, conductance is altered from 0.04 to 0.16mho, and the ignition timing is ahead by just 5.0mm from the maximum stroke. As a result of the experiment, frequency, stroke, input calories and maximum pressure are decreased when the conductance is increased. Meanwhile, IMEP, generation efficiency and electric power are increased when the conductance is increased. Therefore, it might confirm that high conductance generates more efficient electric power, but that thermal efficiency is the highest in the state of 0.08mho.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.06a
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• pp.40-41
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• 1996

Nitridation technique has been receiving much attention for the formation of a thin nitrided buffer layer on which high quality nitride films can be formedl. Particularly, gallium nitride (GaN) has been considered as a promising material for blue-and ultraviolet-emitting devices. It can also be used for in situ formed and stable passivation layers for selective growth of $GaAs_2$. In this work, formation of a thin nitrided layer is investigated. Nitrogen electron cyclotron resonance(ECR)-plasma is employed for the formation of thin nitrided layer. The plasma source used in this work is a compact ECR plasma gun3 which is specifically designed to enhance control, and to provide in-situ monitoring of plasma parameters during plasma-assisted processing. Microwave power of 100-200 W was used to excite the plasma which was emitted from an orifice of 25 rnm in diameter. The substrate were positioned 15 em away from the orifice of plasma source. Prior to nitridation is performed, the surface of n-type (001)GaAs was exposed to hydrogen plasma for 20 min at $300{\;}^{\circ}C$ in order to eliminate a native oxide formed on GaAs surface. Change from ring to streak in RHEED pattern can be obtained through the irradiation of hydrogen plasma, indicating a clean surface. Nitridation was carried out for 5-40 min at $RT-600{\;}^{\circ}C$ in a ECR plasma-assisted molecular beam epitaxy system. Typical chamber pressure was $7.5{\times}lO^{-4}$ Torr during the nitridations at $N_2$ flow rate of 10 seem.(omitted)mitted)

• Journal of Hydrogen and New Energy
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• v.22 no.4
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• pp.552-558
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• 2011

A 50 kW class rotating body type wave energy converter consisted of two floating bodies and a PTO (Power Takeoff) unit is studied. As an wave energy extractor, the body is designed to have a VLCO (Variable Liquid-Column Oscillator) having a liquid filled U-tube with air chambers. Owing to the oscillation of the liquid in the U-tube caused by the air spring effect of the air chambers, the amplitude of response of the VLCO becomes significantly amplified for a target wave period. The PTO converts the rotational moment introduced from the relative motion of the hinged bodies to an hydraulic power by means of a cylinder. A high pressure accumulator, hydraulic motor and a generator are equipped in the PTO to convert the hydraulic power to electric power. A control law for adjusting the oscillation period of the VLCO is proposed for the efficient operation of the VLCO with various wave conditions. It is found that the effect of the air spring has an important role to play in making the oscillation of the VLCO match with the ocean wave. In this way, the wave energy converter equipped with the VLCO provides the most effective mode for extracting energy from the ocean wave.

• Journal of Hydrogen and New Energy
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• v.24 no.6
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• pp.535-542
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• 2013

To enhance the performance of SEWGS system by holding the WGS catalyst in a SEWGS reactor using bed inserts, effect of bed insert geometry on CO conversion of WGS catalyst was measured and investigated. Small scale fluidized bed reactor was used as experimental apparatus and tablet shaped WGS catalyst and sand particle were used as bed materials. The cylinder type and the spring type bed inserts were used to hold the WGS catalysts. The CO conversion of WGS catalyst with the change of steam/CO ratio was determined based on the exit gas analysis. Moreover, gas flow direction was confirmed by bed pressure drop measurement for each case. The measured CO conversion using the bed inserts showed high value comparable to previous results even though at low catalyst content. Most of input gas flowed through the bed center side when we charged tablet type catalyst into the cylinder type bed insert and this can cause low $CO_2$ capture efficiency because the possibility of contact between input gas and $CO_2$ absorbent is low in this case. However, the spring type bed insert showed good reactivity and good distribution of gas, and therefore, the spring type bed insert was selected as the best bed insert for SEWGS process.

• The KSFM Journal of Fluid Machinery
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• v.20 no.1
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• pp.65-73
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• 2017

Intercoolers for multi-stage turbocharger of the hydrogen reciprocating engine for HALE UAV are installed for reducing the charged air inlet temperature of the engine. The intercooler is air to air, cross flow, plate-fin type and the fin configuration is offset-strip fin which is referenced from the heat exchanger of the ERAST. Most of HALE UAV's cruising altitude is 60,000 ft and the density of air for this altitude is very low compared to sea level. Therefore the required heat transfer area for the HALE UAV is about three-times bigger than the sea level. Consequently, it is essential to design to meet the required efficiency of intercooler in the range of not excessively growing the weight of the heat exchanger. The quasi-one dimensional heat transfer design/analysis for satisfying the requirement of the engine are written in this paper. The numerical analyses for estimating the coolant flow rate of the engine bay and pressure loss in the header and core are also summarized.

• Journal of Hydrogen and New Energy
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• v.27 no.6
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• pp.693-701
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• 2016

Steam gasification of low rank coals is possible at relatively low temperature and low pressure, and thus shows higher efficiency compared to high rank coals. In this study, the gasification reactivity of four different Indonesian low rank coals (Samhwa, Eco, Roto, Kideco-L) was evaluated in $T=700-800^{\circ}C$. The low rank coals containing $53.8{\pm}3.4$ wt% volatile matter in proximate analysis and $71.6{\pm}1.2$ wt% carbon in ultimate analysis showed comparable gasification reactivity. In addition, $K_2CO_3$ catalyst rapidly accelerated the reaction rate at $700^{\circ}C$, and all of the coals were converted over 90% within 1 hour. The XRD analysis showed no significant difference in carbonization between the coals, and the FT-IR spectrum showed similar functional groups except for differences due to moisture and minerals. TGA results in pyrolysis ($N_2$) and $CO_2$ gasification atmosphere showed very similar behavior up to $800^{\circ}C$ regardless of the coal species, which is consistent with the steam gasification results. This confirms that the indirect evaluation of the reactivity can be made by the above instrumental analyses.

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2207-2212
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• 2012

Dimethylaluminum isopropoxide (DMAI, $(CH_3)_2AlO^iPr$) as a single precursor, which contains one aluminum and one oxygen atom, has been adopted to deposit non-stoichiometric aluminum oxide ($AlO_x$) films by low pressure metal organic chemical vapor deposition without an additional oxygen source. The atomic concentration of Al and O in the deposited $AlO_x$ film was measured to be Al:O = ~1:1.1 and any serious interfacial oxide layer between the film and Si substrate was not observed. Gaseous by-products monitored by quadruple mass spectrometry show that ${\beta}$-hydrogen elimination mechanism is mainly contributed to the $AlO_x$ CVD process of DMAI precursor. The current-voltage characteristics of the $AlO_x$ film in Au/$AlO_x$/Ir metalinsulator-metal (MIM) capacitor structure show high ON/OFF ratio larger than ${\sim}10^6$ with SET and RESET voltages of 2.7 and 0.8 V, respectively. Impedance spectra indicate that the switching and memory phenomena are based on the bulk-based origins, presumably the formation and rupture of filaments.

• International Journal of Aeronautical and Space Sciences
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• v.18 no.3
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• pp.512-521
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• 2017

This paper reports development process of a university-based sounding rocket using simplified hybrid rocket propulsion system for low-altitude flight application. A hybrid propulsion system was tried to be designed with as few components as possible for more economical, simpler and safer propulsion system, which is essential for the small scale sounding rocket operation as a CanSat carrier. Using blow-down feeding system and catalytic ignition as combustion starter, 250 N class hybrid rocket system was composed of three components: a composite tank, valves, and a thruster. With a composite tank filled with both hydrogen peroxide($H_2O_2$) as an oxidizer and nitrogen gas($N_2$) as a pressurant, the feeding pressure was operated in blowdown mode during thruster operation. The $MnO_2/Al_2O_3$ catalyst was fabricated for propellant decomposition, and ground test of propulsion system showed the almost theoretical temperature of decomposed $H_2O_2$ at the catalyst reactor, indicating sufficient catalyst efficiency for propellant decomposition. Auto-ignition of the high density polyethylene(HDPE) fuel grain successfully occurred by the decomposed $H_2O_2$ product without additional installation of any ignition devices. Performance test result was well matched with numerical internal ballistics conducted prior to the experimental propulsion system ground test. A sounding rocket using the developed hybrid rocket was designed, fabricated, flight simulated and launch tested. Six degree-of-freedom trajectory estimation code was developed and the comparison result between expected and experimental trajectory validated the accuracy of the developed trajectory estimation code. The fabricated sounding rocket was successfully launched showing the effectiveness of the simplified hybrid rocket propulsion system.