• Title/Summary/Keyword: High voltage power supply

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A Study on Energy Recovery Circuit in Sputtering Plasma Power supply for arc Discharge Prevention (스퍼터용 플라즈마 전원장치의 아크방지를 위한 에너지 회생회로에 대한 연구)

  • Ban, Jung-Hyun;Han, Hee-Min;Kim, Joohn-Sheok
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.61 no.3
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    • pp.116-121
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    • 2012
  • Recently, in the field of renewable energy such as solar cells including the semiconductor and display industries, thin film deposition process is being diversified. Furthermore, to deal with trend of making high-quality and fast, the high-capacity and output plasma power supply which can control high density plasma is required. The biggest problem is arc discharge caused by using high voltage power supply. Thus, the key function of plasma power supply is to prevent arc discharge and there is a need to maintain the possible minimum arc energy. In DC sputtering power supply, on a periodic basis (-)voltage powering up is able to significantly reduce arcing, as well as arc discharge prevention, and maintaining uniform charge density. This conventional method for powering up (-)voltage requires heavy mutual inductance of the transformer to avoid distortion problem of the output voltage. This study is about energy recovery circuit for arc discharge prevention in sputtering plasma power supply. By using energy recovery circuit, it is possible to reduce the mutual inductance and size of the transformer dramatically, prevent distortion of the output voltage and has a stable output waveform. This work was proved through simulation and experimental study.

A New High Speed Pulsed Mode Switching DC Power Supply with High Power Factor (새로운 방식의 고속 펄스모드 스위칭 기능을 갖는 고역률 직류전원장치)

  • 안종수;노의철;김인동
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.53 no.1
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    • pp.47-54
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    • 2004
  • A new high voltage DC power supply is proposed. The proposed power supply is constructed with several power converters connected in series. It is easy to obtain high DC voltage for the same structure of each power converter. The output DC power of the proposed power supply can be disconnected from the load within several hundred microseconds at the instant of a load short-circuit fault. The rising time of the output DC voltage is also as small as several hundred microseconds, and there is no overshoot of the voltage because all of the output filter capacitors keep undischarged state even in load short-circuit condition. Therefore, the proposed scheme is suitable for the protection of frequent output short-circuit and fast on/off switching of output DC voltage. The proposed power supply has improved features such as simple structure, high power factor, and reduced size and volume compared with the conventional schemes. The operating principle is described and the validity of the proposed scheme is proved through simulations and experiments.

Input-Series Multiple-Output Auxiliary Power Supply Scheme Based on Transformer-Integration for High-Input-Voltage Applications

  • Meng, Tao;Ben, Hongqi;Wei, Guo
    • Journal of Power Electronics
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    • v.12 no.3
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    • pp.439-447
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    • 2012
  • In this paper, an input-series auxiliary power supply scheme is proposed, which is suitable for high input voltage and multiple-output applications. The power supply scheme is based on a two-transistor forward topology, all of the series modules have a common duty ratio, all the switches are turned on and off simultaneously, and the whole circuit has a single power transformer. It does not require an additional controller but still achieves efficient input voltage sharing (IVS) for each series module through its inherent transformer-integration strategy. The IVS process of this power supply scheme is analyzed in detail and the design considerations for the related parameters are given. Finally, a 100W multiple-output auxiliary power supply prototype is built, and the experimental results verify the feasibility of the proposed scheme and the validity of the theoretical analysis.

Design of Power Factor Correction IC for 1.5kW System Power Module (1.5kW급 System Power Module용 Power Factor Correction IC 설계)

  • Kim, Hyoung-Woo;Seo, Kil-Soo;Kim, Ki-Hyun;Park, Hyun-Il;Kim, Nam-Kyun
    • Proceedings of the IEEK Conference
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    • 2008.06a
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    • pp.499-500
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    • 2008
  • In this paper, we design and implement the monolithic power factor correction IC for system power modules using a high voltage(50V) CMOS process. The power factor correction IC is designed for power applications, such as refrigerator, air-conditioner, etc. It includes low voltage logic, 5V regulator, analog control circuit, high-voltage high current output drivers, and several protection circuits. And also, the designed IC has standby detection function which detects the output power of the converter stage and generates system down signal when load device is under the standby condition. The simulation and experimental results show that the designed IC acts properly as power factor correction IC with efficient protective functions.

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Polarity Inversion DC/DC Power Conversion Power Supply with High Voltage Step-up Ratio (고전압 변환비치 극성 반전형 DC/DC 전력 변환 전원장치)

  • Jung, Dong-Yeol;Jung, Yong-Joon;Hong, Sung-Soo;Han, Sang-Kyoo;SaKong, Sug-Chin;Roh, Chung-Wook
    • The Transactions of the Korean Institute of Power Electronics
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    • v.13 no.3
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    • pp.196-205
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    • 2008
  • A noble polarity inversion dc/dc power conversion circuit that has the high input-output voltage conversion ration characteristics is presented for high voltage DC power supply applications. The proposed circuit features the reduced voltage stresses of the component compared to those of the conventional ones. The operational principles of the proposed circuit is analyzed and comparative features are presented. The simulation results and experimental results are presented to verify the validity of the proposed circuit.

Bidirectional Pulse Power Supply for Dielectric Barrier Discharge (유전체 장벽 방전을 위한 양방향 펄스 전원장치)

  • Shin, Wan-Ho;Hong, Won-Seok;Jeoung, Hwan-Myoung;Choi, Jae-Ho
    • Proceedings of the KIEE Conference
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    • 2005.07b
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    • pp.1521-1523
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    • 2005
  • High voltage plasma power supply was adopted to control polluted gases and an ozone generation. Bidirectional pulse power supply consisted of power semiconductor switch devices, a high voltage transformer, and a control board adapted switching method. Plasma power supply with sinusoidal bidirectional pulse, which has output voltage range of 0-20kV and output frequency range of 1kHz-20kHz, is realized. Using proposed system, pulsed high voltage/high frequency discharges were tested in a DBD(dielectric barrier discharge) reactor, and the spatial distribution of a glow discharge was observed. The system showed stable operational characteristics, even though the voltage and the frequency increased. Above features were verified by experiments.

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Study on the High and High Voltage 35 kW, 50 kV Inverter Power Supply (대출력 고전압 35 kW, 50 kV 인버터 전원장치 개발에 관한 연구)

  • Son, Yoon-Gyu;Jang, Sung-Duck;Oh, Jong-Seok;Cho, Moo-Hyun
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.51 no.11
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    • pp.628-634
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    • 2002
  • A capacitor-charging power supply using high frequency inverter technology is strongly recommended for the charging section of the pulsed power supplies. A high frequency inverter swiching makes the overall system size small. The command-charging feature can guarantee the higher reliability of switching function. The protection circuit can be easily included in the system and the good regulation of charging voltage can be acieved by the feedback system. Several modules can be stacked to supply required output power and a failed module can be easily replaced. A 50-kV, 35-kW capacitor charging power supply is developed. In this paper the detailed design and test results of a prototype unit are presented.

Development of Ozone Generating System Applying Forward Type High Voltage Pulse Power Supply (Forward형 고압펄스 전원장치를 적용한 오존발생 시스템 의 개발)

  • 김동희;원재선;김경식;이광식;정도영;오승훈
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.52 no.7
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    • pp.335-342
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    • 2003
  • This paper presents a forward type high voltage pulse power supply for high voltage small current, which can be designed as a simple circuit configuration and managed easily using Power-MOSFET in the view of commercialization. According to the switching frequency, coupling factor(k) and duty ratio(D), the Principle of basic operation and the characteristics of the proposed pulse power supply are estimated. Simulation results have demonstrated the feasibility of the proposed pulse power supply. Also experimental results are presented to verify theoretical discussion with a lamp type ozonizer as a load. For studying the application at the part of environment of water, When ozonizer gas reacts with a colon bacillus, the sterilization characteristics of a colon bacillus according to the ozone concentration and response time have been investigated. This proposed pulse power supply will be able to be practically used as a pulse power supply in various environment improvement facilities like sterilization of colon bacillus, deodorization, and Nox gas elimination.

Development of PC based High Voltage Generator for Dental CT (PC기반 치과 CT용 고전압 펄스 발생장치 개발)

  • Kim, Hack-Seong;Oh, Jun-Yong;Song, Sang-Hoon;Won, Choong-Yeon
    • Proceedings of the KIPE Conference
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    • 2008.06a
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    • pp.580-582
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    • 2008
  • The object of this paper is develope the PC based controlled high voltage power supply and studies 1.2kW(120kV, 10mA) pulse power X-ray generator possible to adapt fluoroscopy of Dental CT X-ray generator and industrial X-ray pulse power equipment. The developed pulse power X-ray generator consisted of mono-block tank include X-ray tube and high voltage X-ray power supply circuit and high voltage control unit with RS232C/422 communication port. The PC control program of pulse power X-ray generator uses LabVIEW, and the size of high voltage transformer and high voltage generator is minimized by high voltage high frequency inverter has 100kHz switching frequency. Also this paper shows result of X-ray tube voltage and tube current correspond to variable load.

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40kV Solid State Pulsed Power Supply for Environmental Applications (40kV 친환경 응용을 위한 반도체 기반 펄스 전원장치)

  • Song, Seung-Ho;Cho, Hyun-Bin;Park, Su-Mi;Lee, Seung-Hee;Jin, Hee-Sung;Ryoo, Hong-Je
    • Proceedings of the KIPE Conference
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    • 2018.07a
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    • pp.45-47
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    • 2018
  • This paper describes the 40kV solid state pulsed power supply for environmental applications. The output specifications of the pulsed power supply are 40kV, 300A, 3kHz, and average output power of 13kW. In order to generate a high voltage, a series stacking cell structure is used which is charged in parallel and discharged in series. Due to this structure, there is no dynamic voltage balancing problem as well as static voltage balancing problem for switches used in high voltage pulse power supplies. To verify this pulse power supply design, PSpice modeling was performed. Finally, experimental results with non-inductive resistive load and gas treatment reactor proved the reliability of the solid state pulsed power supply.

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