• 제목/요약/키워드: High vacuum pressure

검색결과 639건 처리시간 0.03초

저밀도 원통형 세라믹 필터의 고온 여과 성능시험 연구 (A Study of High Temperature Filtration Performance Test on Low Density Cylindrical Ceramic Filters)

  • 이동섭;홍민선;최종인
    • 한국대기환경학회지
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    • 제17권2호
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    • pp.213-222
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    • 2001
  • Cylindrical type ceramic filers, that is 60 O.D$\times$10t$\times$600L and 60 O.D$\times$10t$\times$1,000L were manufactured by vacuum forming processes using ceramic ray materials. For cylindrical type ceramic filters, porosity and bulk density were measured for, 80 to 90% and 0.3 to 0.4 g/㎤, respectively at uniform pore size of 41 to 45${\mu}{\textrm}{m}$. Bench scale candle filters (60$\psi$ $\times$10t$\times$600L) were tested using different dusts collected from many industries including chemical processing, glass processing and metal manufacturing pants. Collection efficiencies found out to range from 99.87% to 99.90%, while resistance coefficients from 1.1$\times$10(sup)11/$m^2$ to 1.7$\times$10(sup)11/$m^2$ . Full scale low density ceramic filters (60$\psi$ $\times$10t$\times$1,000L) were also tested at 1 atm, $600^{\circ}C$ to reveal the filtration efficiency, conditioning, and resistance coefficients using two different types of dust as chemical processing and metal refined processing. Darcys law resistance coefficients were measured to range 1.44$\times$10(sup)11/$m^2$ to 2.74$\times$10(sup)11/$m^2$, and collection efficiencies on the range 99.84 to 99.96%, Finally, results of long term performance test showed that filters were conditioned after 170hrs. Experimental conditions for effective filtration were examined under the condition 10 cm/sec face velocity, 3kg/$\textrm{cm}^2$ pulsing pressure, 5 min filtration cycle, and 300msec pulse opening time.

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촉매담지 세라믹 필터의 표면 산처리 효과 (Efficiency of catalyst-coated ceramic filter with acid treatment)

  • 조을훈;서광석;김수효;신민철;신병길;김진성;이희수
    • 한국결정성장학회지
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    • 제18권2호
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    • pp.91-95
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    • 2008
  • 코디어라이트를 원료로 하여 다공성 세라믹 필터를 제조하였고, 진공함침법으로 $V_2O_5$ 촉매를 코팅하였다. 제조된 세라믹 필터의 기공률은 58%, 압축강도는 10 MPa, 400$^{\circ}C$, 5 cm/sec의 유속에서 압력손실은 1,200 Pa이었다. $V_2O_5$ 촉매의 경우 $NO_x$에 대해 80% 이상의 처리효율을 나타내었고, 산처리에 의한 필터의 비표면적 증가를 통해 처리효율을 약 10%개선할 수 있었다. 이는 필터의 비표면적 증가를 통해 코팅된 촉매의 분산성을 향상시킴으로써 촉매의 활성점이 증대되었기 때문으로 판단된다.

팔라디움박막의 α 상영역 수소 활성화에너지 (Activation Energies of Hydrogen Absorption and Desorption in Pd Thin Films for the α phase)

  • 조영신
    • 한국수소및신에너지학회논문집
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    • 제10권4호
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    • pp.191-196
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    • 1999
  • 팔라디움 박막시료들(두께 18~67nm)에 대한 수소 흡수-방출 동역학을 4-극 전기비저항 측정법을 이용하여 연구하였다. 실험온도와 수소압력은 $25{\sim}50^{\circ}C$, 0~5 torr 범위였다. 팔라디움 박막은 고진공내에서 열증착 방법으로 사파이어 기판 위에 제작하였다. 수소 흡수-방출과정을 약 100회 반복할 때 까지 시료들의 분말화 현상은 관찰되지 않았으나 박막의 일부가 기판으로부터 분리되는 현상이 관찰되었다. 정방향 반응과 역방향 반응을 분리하여 분석하였다. 반응율에 대한 Arrhenius 그림에서 수소 흡수 방출 활성화 에너지를 얻었다. 팔라디움 박막의 활성화 에너지값들은 박막의 두께 변화에 강하게 의존하지 않았다. 그러나 매우 앓은 박막(두께 18nm)의 활성화 에너지값은 다른 박막의 활성화 에너지 값들보다 작은 경향을 보였다.

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오옴성 접합에서의 낮은 접촉 저항을 갖는 Pt/Ti/P형 4H-SiC (Low resistivity ohmic Pt/Ti contacts to p-type 4H-SiC)

  • 이주헌;양성준;김창교;조남인;정경화;신명섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1378-1380
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    • 2001
  • Ohmic contacts have been fabricated on p-type 4H-SiC using Pt/Ti. Low resistivitf Ohmic contacts of Pt/Ti to p-type 4H-SiC were investigated. Specific contact resistances were measured using the transmission line model method, and the physical properties of the contacts were examined using x-ray diffraction, scanning electron microscopy. Ohmic behavior with linear current-voltage characteristics was observed following anneals at $900^{\circ}C$ for 90sec at a pressure of $3.4{\times}10^{-5}$ Torr. The Pt/Si/Ti films was measured lower value of the specific contact resistance by the annealing process, and the contact resistances were improved more than one order compared to Ti contact the annealed sample. Scanning electron microscopy shows that the Pt layer effectively reduce the oxidation of Ti films. And results are obtained as $4.6{\times}10^{-4}$ ohm/$cm^2$ for a Pt/Ti metal structure after a vacuum annealing at $900^{\circ}C$ for 90sec. Titanium has a relatively high melting point, thus Ti-based metal contacts were attempted in this study.

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Triode magnetron sputtering system의 제작 및 특성평가 (Characteristic evaluations and production of triode magnetron sputtering system)

  • 김현후;이무영;김광태;윤상현;유환구;김종민;박철현;임기조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.787-790
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    • 2003
  • A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

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유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝 (Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display)

  • 배형우;장영찬;안명찬;박경태;이동구
    • 센서학회지
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    • 제29권1호
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

전도성(電導性) $SiC-ZrB_2$ 복합체(複合體)의 특성(特性) (Properties of Electro-Conductive $SiC-ZrB_2$ Composites)

  • 신용덕;박용갑
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1512-1515
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    • 1996
  • Dense $SiC-ZrB_2$ electro-conductive ceramic composites were obtained by hot pressing for high temperature structural application. The influences of the $ZrB_2$ additions an the mechanical and electrical properties of $SiC-ZrB_2$ composites were investigated. Samples were prepared by adding 15, 30, 45 vol.% $ZrB_2$ particles as a second phase to a SiC matrix. Sintering of monolithic SiC and $SiC-ZrB_2$ composites were achieved by hot pressing under a $10^{-4}$ torr vacuum atmosphere from 1000 to $2000^{\circ}C$ with a pressure of 30 MPa and held for 60 minutes at $2000^{\circ}C$. SiC and $SiC-ZrB_2$ samples obtained by hot pressing were fully dense with the relative densities over 99%. Flexural strength and fracture toughness of the samples were improved with the $ZrB_2$ contents. In the case of SiC sample containing 30vol.% $ZrB_2$, the flexural strength and fracture toughness showed 45% and 60% increase, respectively compared to those of monolithic SiC sample. The electrical resistivities of $SiC-ZrB_2$ composites were measured utilizing the four-point probe method and they decreased significantly with Increasing $ZrB_2$ contents. The resistivity of SiC-30vol.% $ZrB_2$ showed $6.50{\times}10^{-4}{\Omega}{\cdot}cm$.

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Preparation and Properties of Y2O3-Doped ZrO2 Films on Etched Al Foil by Sol-Gel Process

  • Chen, Fei;Park, Sang-Shik
    • 한국재료학회지
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    • 제25권2호
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    • pp.107-112
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    • 2015
  • The oxide films formed on etched aluminum foils play an important role as dielectric layers in aluminum electrolytic capacitors. $Y_2O_3$-doped $ZrO_2$ (YZ) films were coated on the etched aluminum foils by sol-gel dip coating, and the electrical properties of YZ-coated Al foils were characterized. YZ films annealed at $450^{\circ}C$ were crystallized into a cubic phase, and as the $Y_2O_3$ doping content increased, the unit cell of $ZrO_2$ expanded and the grain size decreased. The etch pits of Al foils were filled by YZ sol when it dried at atmospheric pressure after repeating for several times, but this step could essentially be avoided when being dried in a vacuum. YZ-coated foils indicated that the specific capacitance and dissipation factor were $2-2.5{\mu}F/cm^2$ and 2-4 at 1 kHz, respectively, and the leakage current and withstanding voltage of films approximately 200 nm thick were $5{\times}10^{-4}A$ at 21 V and 22 V, respectively. After being anodized at 500 V, the foils exhibited a specific capacitance and dissipation factor of $0.6-0.7{\mu}F/cm^2$ and 0.1-0.2, respectively, at 1 kHz, while the leakage current and withstanding voltage were $2{\times}10^{-4}-3{\times}10^{-5}A$ at 400 V and 420-450 V, respectively. This suggests that YZ film is a promising dielectric that can be used in high voltage Al electrolytic capacitors.

SiC-Ti금속기 복합재료의 강화거동에 관한 미시역학적 모델 (Micromechanical Model for the Consolidation Behavior in SiC-Ti Metal Matrix Composites)

  • 김준완;김태원
    • Composites Research
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    • 제16권3호
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    • pp.1-8
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    • 2003
  • 금속복합재료 개발을 위한 고온가압 성형공정은 기지재료의 비탄성거동과 성형체 내부의 기공에 대한 충진 과정을 수반하며 이러한 강화공정은 압력, 온도 그리고 강화재와 모재의 상대부피분률과 같은 공정변수의 영향을 받게 된다. 특히 티타늄금속기 복합재료의 강화공정은 강화재와 모재 사이의 기계적 혹은 열적 특성 차이 및 생산환경으로 인한 다양한 형태의 손상이 발생할 수 있으며 따라서 이들을 극복하기 위한 재료특성, 작용압력, 온도, 시간조건 등과 공정에 따른 조직의 진전 등 미소역학적 연구가 수반된 최적의 고온가압강화공정의 개발이 요구되어진다. 이를 위하여 본 연구는 VHP방식을 이용한 SiC/Ti-6Al-4V 연속섬유강화 금속기 복합재료의 강화공정실험을 수행하였으며 특히 미시역학적 접근에 따른 다공성 재료의 구성방정식을 이용하여 보강재와 기지재료의 변형거동과 고온가압공정에 필요한 다양한 조건들을 실험결과와 비교 연구하였으며 유한요소해석을 통해 공정변수와 그에 따른 결과들을 고찰하였다.

보건진료원의 보완대체요법에 대한 지식정도, 사용경험, 태도에 관한 연구 (A Study on Community Health Practitioners' Knowledge of, Usee Patterns of, and Attitudes toward Complementary and Alternative Medicine(CAM))

  • 김소야자;장순복;남경아
    • 지역사회간호학회지
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    • 제17권4호
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    • pp.563-572
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    • 2006
  • Purpose: This study was conducted to investigate community health practitioners' knowledge of, use patterns of, and attitudes toward CAM. Method: The subjects of this study were 817 community health practitioners (CHPs) from 9 Provinces in Korea selected through convenient sampling. They completed and submitted self-report questionnaires at the annual meeting of CHPs or sent completed questionnaires to us by mail. Result: Of the CHPs, 8.1% had a certificate of CAM-related education program, and 39.9% worried about the efficacy of CAM. They knew about massage (74.0%), finger pressure (68.1%), hand acupuncture (67.8%), diet (65.5%) and herb (64.7%). They had used herb (43.3%), massage (36.8%), hand acupuncture (32.7%) and vacuum (31.2%) with positive effects and recommended residents to use them. Attitude toward CAM tended to be positive in those with certificates of CAM, those with high academic qualification, those aged 40 or below, and those working in Chungcheong-do. Conclusion: This study showed that CHPs were interested in CAM while they worried about the therapeutic effects of it. Further studies to draw cross-sectional and national data on the use patterns of CAM from the various population and standardized instruments to investigate the types of CAM were suggested.

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