• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.255-255
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• 2010

Recently, nonvolatile memories (NVM) of various types have been researched to improve the electrical performance such as program/erase voltages, speed and retention times. Also, the charge trap memory is a strong candidate to realize the ultra dense 20-nm scale NVM. Furthermore, the high charge efficiency and the thermal stability of SiC nanocrystals NVM with single $SiO_2$ tunnel barrier have been reported. [1-2] In this study, the SiC charge trap NVM was fabricated and electrical properties were characterized. The 100-nm thick Poly-Si layer was deposited to confined source/drain region by using low-pressure chemical vapor deposition (LP-CVD). After etching and lithography process for fabricate the gate region, the $Si_3N_4/SiO_2/Si_3N_4$ (NON) and $SiO_2/Si_3N_4/SiO_2$ (ONO) barrier engineered tunnel layer were deposited by using LP-CVD. The equivalent oxide thickness of NON and ONO tunnel layer are 5.2 nm and 5.6 nm, respectively. By using ultra-high vacuum magnetron sputtering with base pressure 3x10-10 Torr, the 2-nm SiC and 20-nm $SiO_2$ were successively deposited on ONO and NON tunnel layers. Finally, after deposited 200-nm thick Al layer, the source, drain and gate areas were defined by using reactive-ion etching and photolithography. The lengths of squire gate are $2\;{\mu}m$, $5\;{\mu}m$ and $10\;{\mu}m$. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer, E4980A LCR capacitor meter and an Agilent 81104A pulse pattern generator system. The electrical characteristics such as the memory effect, program/erase speeds, operation voltages, and retention time of SiC charge trap memory device with barrier engineered tunnel layer will be discussed.

• Journal of the Korean Society for Heat Treatment
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• v.29 no.6
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• pp.277-283
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• 2016

The influences of cooling pressure of quenching process on the mechanical properties such as hardness, impact endurance and anti-thermal fatigue behaviour of STD61 steel were investigated. The specimens were heat-treated using a vacuum furnace in which they were austenitized at $1,030^{\circ}C$ for 1hour under the pressure of $10^{-3}$ torr and cooled with quenching gas of various pressure, i.e. 1, 2 and 6 bar. According to the observation on the specimens prepared with quenching from austenizing temperature, the mechanical properties of the samples with higher quenching pressure were better than those of prepared at lower quenching pressure. The samples prepared with high quenching pressure showed the more homogeneous microstructure with finer carbides. The size of carbides such as VC and (Fe, Cr)C in quenched specimens decreased with increasing gas quenching pressure. It is considered that the rapid cooling with pressure may restrict the formation and growth of carbide.

• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.398-402
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• 2022

Vacuum Insulation Panel (VIP) is an high energy efficient insulation system that facilitate slim but high insulation performance, based on based on a porous core material evacuated and encapsulated in a multi-barrier envelope. Although VIP has been on the market for decades now, it wasn't until recently that efforts have been initiated to propose a standard on aging testing. One of the issues regarding VIP is its durability and aging due to pressure and moisture dependent increase of the initial low thermal conductivity with time. It is hard to visually determine at an early stage. Recently, a method of analyzing the damage on the a material surface by applying image processing technology has been widely used. These techniques provide fast and accurate data with a non-destructive way. In this study, the surface VIP images were analyzed using the Harris corner detection algorithm. As a result, 171,333 corner points in the normal packaging were detected, whereas 32,895 of the defective packaging, which were less than the normal packaging. were detected. These results are considered to provide meaningful information for the determination of VIP condition.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.150-150
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• 2016

Mankind is enjoying a great convenience of their life by the rapid growth of secondary industry since the Industrial Revolution and it is possible due to the invention of huge power such as engine. The automobile which plays the important role of industrial development and human movement is powered by the Engine Module, and especially Diesel engine is widely used because of mechanical durability and energy efficiency. The main work mechanism of the Diesel engine is composed of inhalation of the organic material (coal, oil, etc.), combustion, explosion and exhaust Cycle process then the carbon compound emissions during the last exhaust process are essential which is known as the major causes of air pollution issues in recent years. In particular, COx, called carbon oxide compound which is composed of a very small size of the particles from several ten to hundred nano meter and they exist as a suspension in the atmosphere. These Diesel particles can be accumulated at the respiratory organs and cause many serious diseases. In order to compensate for the weak point of such a Diesel Engine, the DPF(Diesel Particulate Filter) post-cleaning equipment has been used and it mainly consists of ceramic materials(SiC, Cordierite etc) because of the necessity for the engine system durability on the exposure of high temperature, high pressure and chemical harsh environmental. Ceramic Material filter, but it remains a lot of problems yet, such as limitations of collecting very small particles below micro size, high cost due to difficulties of manufacturing process and low fuel consumption efficiency due to back pressure increase by the small pore structure. This study is to test the possibility of new structure by direct infiltration of SiC Whisker on Carbon felt as the next generation filter and this new filter is expected to improve the above various problems of the Ceramic DPF currently in use and reduction of the cost simultaneously. In this experiment, non-catalytic VS CVD (Vapor-Solid Chemical Vaporized Deposition) system was adopted to keep high mechanical properties of SiC and MTS (Methyl-Trichloro-Silane) gas used as source and H2 gas used as dilute gas. From this, the suitable whisker growth for high performance filter was observed depending on each deposition conditions change (input gas ratio, temperature, mass flow rate etc.).

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.328-333
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• 1998

Lattice-matched InAIAs epilayers were grown on (001) InP substrate by low pressure metalorganic chemical vapor deposition. The effects of growth conditions on the properties of InAIAs were analyzed, and InGaAs/InAIAs single and multiple quantum wells were successfully grown. It was observed that the optical property of InAIAs epilayers was improved in the temperature range of 620~$700^{\circ}C$ as the growth temperature increased due to the reduction of oxygen incorporation, however, the crystallinity decreased at temperatures higher than $750^{\circ}C$ due to the degraded crystallinity of the bufter layers. The enhanced incorporation of AI into epilayer was observed at high $AsH_3$flow rates and it was explained in terms of the differences in bond strengths of AI-As and In-As. The measured photoluminescence peak energies from InGaAs/InAIAs single quantum wells were consistent with the calculated ones based on transfer matrix method. High-order satellite peaks and fine thickness fringes were observed by high-resolution x-ray diffraction, implying that the high-quality multiple quantum wells with abrupt heterointerfaces were grown.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.1-262.1
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• 2014

Lipid peroxidation induces functional deterioration of cell membrane and induces cell death in extreme cases. These phenomena are known to be related generally to the change of physical properties of lipid membrane such as decreased lipid order or increased water penetration. Even though the electric property of lipid membrane is important, there has been no report about the change of electric properties after lipid peroxidation. Herein, we demonstrate the molecular energy band change in red blood cell membrane through peroxidation by air-based atmospheric pressure DBD plasma treatment. Ion-induced secondary electron emission coefficient (${\gamma}$ value) was measured by using home-made gamma-focused ion beam (${\gamma}$-FIB) system and electron energy band was calculated based on the quantum mechanical Auger neutralization theory. The oxidized lipids showed higher gamma values and lower electron work functions, which implies the change of surface charging or electrical conductance. This result suggests that modified electrical properties should play a role in cell signaling under oxidative stress.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2002.11a
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• pp.171-184
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• 2002

Approx. 200,000 bpd vacuum residue oil is produced from oil refineries in Korea. These are supplying to use asphalt, high sulfur fuel oil, and upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435-500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER(Korea Institute of Energy Research) are studing on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature : 1,100~1,25$0^{\circ}C$, reaction pressure : 1~6kg/$\textrm{cm}^2$G, oxygen/V.R ratio : 0.8~0.9 and steam/V.R ratio : 0.4-0.5. Experimental results show the syngas composition(CO+H$_2$) : 85~93%, syngas flow rate : 50~110Mm$^3$/hr, heating value : 2,300~3,000 ㎉/Nm$^3$, carbon conversion : 65~92, cold gas efficiency : 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of Energy Engineering
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• v.12 no.1
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• pp.49-57
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• 2003

Approx. 200.000 bpd vacuum residue oil is produced from oil refineries in Korea, and is supplied to use asphalt, high sulfur fuel oil and for upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however its high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435~500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER (Korea Institute of Energy Research) are studying on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature: 1.100~l,25$0^{\circ}C$, reaction pressure: 1~6 kg/$\textrm{cm}^2$G, oxygen/V.R ratio: 0.8~0.9 and steam/V.R ratio: 0.4~0.5. Experimental results show the syngas composition (CO+H$_2$): 85~93%, syngas flow rate: 50~l10 Nm$^3$/hr, heating value: 2,300~3,000 k㎈/Nm$^3$, carbon conversion: 65~92, cold gas efficiency: 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.92-96
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• 2009

Nowadays, many research groups try to achieve the high Xe mole fraction discharge gas for high efficiency in AC-PDPs. However, the high Xe mole fraction discharge gas causes the high discharge voltage, which is a serious problem in AC-PDP's for high efficiency. In this study, the discharge gas with high Xe mole fraction and the low pressures has been applied and it's discharge voltage and vacuum ultraviolet emission characteristics have also been measured. It is shown that the discharge voltage is 354V and 389V at Ne+Xe (15%) with 400 Torr and Ne+Xe (30%) with 200 Torr, respectively. Their vacuum ultraviolet emission characteristics have similar characteristics to each other, in which their wavelengths are ranged from 140 nm to 200 nm. It is found in this experiment that the luminous efficiency for the discharge gas of Ne+Xe (30%) with 200 Torr is drastically increased by about 30%.