• Journal of Surface Science and Engineering
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• v.33 no.2
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• pp.69-76
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• 2000

The rf plasma chemical vapor deposition is a common method employed for diamond or amorphous carbon deposition. Diamond possesses the strongest bonding, as exemplified by a number of unique properties-extraordinary hardness, high thermal conductivity, and a high melting tempera tore. Therefore, it is very important to investigate the synthesis of semiconducting diamond and its use as semiconductor devices. An inductively coupled rf plasma CVD system for producing amorphous carbon films were developed. Uniform temperature and concentration profiles are requisites for the deposition of high quality large-area films. The system consists of rf matching network, deposition chamber, pumping lines for gas system. Gas mixtures with methane, and hydrogen have been used and Si (100) wafers used as a substrate. Amorphous carbon films were deposited with methane concentration of 1.5% at the process pressure of S torr~20 torr, and process temperature of about $750^{\circ}C$. The nucleation and growth of the amorphous carbon films have been characterized by several methods such as SEM and XRD.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.537-540
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• 2001

This paper presents the characteristics of Ta-N thin-film for high precision resistors, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16 %)$N_2$). Structural properties studied using X-ray diffraction(XRD) indicate the presence of TaN, $Ta_3N_5$ or a mixture of Ta-N phases in the films depending on the amount of nitrogen in the sputtering gas. The chemical composition are investigated by auger electro spectroscopy(AES). The optimized conditions of Ta-N thin-film resistors were deposited in 4 % $N_2$ gas flow ratio. Under optimum conditions, the Ta-N thin-film resistors are obtained a high resistivity, $\rho=305.7{\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-36 $ppm/^{\circ}C$.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.175-177
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• 2012

A corrosion resistance and hard nitrocarburized layer was distinctly formed on 310 austenitic stainless steel substrate by DC plasma nitrocarburizing. Basically, 310L austenitic stainless steel has high chromium and nickel content which is applicable for high temperature applications. In this experiment, plasma nitrocarburizing was performed in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-N_2-CH_4$ gas mixtures. After the experiment structural phases, micro-hardness and corrosion resistance were investigated by the optical microscopy, X-ray diffraction, scanning electron microscopy, micro-hardness testing and Potentiodynamic polarization tests. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. XRD indicated a single expanded austenite phase was formed at all treatment temperatures. Such a nitrogen and carbon supersaturated layer is precipitation free and possesses a high hardness and good corrosion resistance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.537-540
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• 2001

This paper presents the characteristics of Ta-N thin-(ibm for high precision resistors, which were deposited oni substrate by DC reactive magnetorn sputtering in an argon-nitrogen atmosphere(Ar-(4∼16%)N$_2$). Sturcutural properties sutided using X-ray diffraction (XRD) indicate the presence of TaN, Ta$_3$N$\sub$5/ or a mixture of Ta-N phases in the films depending on the amount of nitrogen in the sputtering gas. The chemical composition are investigated by auger electro spectroscopy(AES). The optimized conditions of Ta-N thin-film resistors were deposited in 4 % N$_2$ gas flow ratio. Under optimum conditions, the Ta-N thin-film resistors are obtained a high resistivity, $\rho$=305.7 ${\mu}$Ωcm, a low temperature coefficient of resistance, TCR=-36 ppm/$^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.22 no.6
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• pp.80-86
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• 1985

Aluminum nitride (AlN) was synthesized from aluminum (Al) powders as a starting material in the tempe-rature range of 450~1, 15$0^{\circ}C$ in the presence of 90% $N_2$-10%$H_2$ gases. The thermogravimentric analysis showed that the nitridation of Al powders started at about 43$0^{\circ}C$ and escalated greatly from 53$0^{\circ}C$. The scanning electron microcopic observation revealed that AlN crystals were different in shape with varying temperature of nitridation. The crystals of AlN which were formed in the lower temperature than the melting point of Al were spherical while those of AlN in the higher temperature were fibrous. The yield of AlN was determined quantitatively by both XRD method and weight gain between before and after the nitridation of Al compacts. It was considered that the former was available for the specimen which was made in the high nitriding temperature. But the latter was unavilable for the same one probably because of the volatile loss of Al in the higher temperature.

• Advances in concrete construction
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• v.10 no.5
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• pp.443-454
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• 2020

In recent years, many studies have been done on the performance of concrete containing glass powder (GP). For the purpose of widespread use of GP in concrete mixes, a knowledge of the performance of such a mixture after a fire is essential for the perspective of structural use. This research work was carried out to evaluate the performance of High Performance Concrete (HPC) made with GP after being exposed to elevated temperature. The studied mixtures include partial replacement of cement by GP with up to 30%. The mechanical performance and structural alterations were assessed after high temperature treatment from 200℃ to 800℃. The mechanical performance was evaluated by testing the specimens to the compressive and tensile strength. In addition, the mass loss and the porosity were measured to notice the structural alterations. Changes in microstructure due to temperature was also investigated by the X-ray diffraction (XRD) and thermal gravimetric analyses (TGA) as well as porosity adsorption tests. The results of the concrete strength tests showed a slight difference in compressive strength and the same tensile strength performance when replacing a part of the cement by GP. However, after high temperature exposition, concrete with GP showed better performance than the reference concrete for temperature below 600℃. But, after heating at 800℃, the strength of the concrete with GP drop slightly more than reference concrete. This is accompanied by an important increase in mass loss and water porosity. After the microstructure analysis, no important changes happened differently for concrete with GP at high temperature except a new calcium silica form appears after the 800℃ heating.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.109-109
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• 2000

Recently, carbon nanotube has been investigating for field emission display ( (FED) applications due to its high electron emission at relatively low electric field. However, the growing of carbon nanotube generally requires relatively high temperature processing such as arc-discharge (5,000 ~ $20,000^{\circ}C$) and laser evaporation (4,000 ~ $5,000^{\circ}C$) methods. In this presentation, low temperature growing of carbon nanotube by plasma enhanced chemical vapor deposition (PECVD) using nickel catalyst which is compatible to conventional FED processing temperature will be described. Carbon n notubes with average length of 100 run and diameter of 2 ~ $3\mu$ill were successfully grown on silicon substrate with native oxide layer at $550^{\circ}C$using nickel catalyst. The morphology and microstructure of carbon nanotube was highly depended on the processing temperature and nickel layer thickness. No significant carbon nanotube growing was observed with samples deposited on silicon substrates without native oxide layer. This is believed due to the formation of nickel-silicide and this deteriorated the catalytic role of nickel. The formation of nickel-silicide was confirmed by x-ray analysis. The role of native oxide layer and processing parameter dependence on microstructure of low temperature grown carbon nanotube, characterized by SEM, TEM XRD and R없nan spectroscopy, will be presented.

• The Korean Journal of Quaternary Research
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• v.23 no.2
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• pp.13-33
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• 2009

Mineralogical analysis with petrographic microscope and XRD was carried out to verify manufacturing technique of the tiles(9 samples) and kiln wall materials(5 samples) from the Anchang-ri history site in Wonju county. One of the results we found is such that during the tile manufacturing process fine tile fragments or wall materials might be added instead of chamottes to maintain tile pattern. Abandoned tiles or wall materials were recycled repeatedly, which may be supported by the recycled chamottes that made from iron-rich fine aggregates or disposed kiln wall materials in many samples analyzed. The tiles and wall materials are divided into 3 types, including low temperature type (below $800^{\circ}C$), intermediate temperature type ($800-930^{\circ}C$) and high temperature type ($930-1470^{\circ}C$) as a function of firing temperature which deduced by mineral assemblages identified under petrographic microscope and by XRD composition. Both Kiln A8 of Choseon Dynasty and wall material AW5 were burned at the highest temperature among the all analyzed samples.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2021.11a
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• pp.133-134
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• 2021

Limestone-calcined clay-Cement (LC3) concrete provides a solution for sustainability, durability, and profitability of concrete industry. This study shows experimental studies of the macro properties (residual compressive strength), the meso properties (mesoscopic images), and micro properties (thermogravimetric (TG) analysis, X-ray powder diffraction (XRD), FTIR spectra, Raman spectra, Mercury intrusion porosimetry, and SEM) of LC3 paste with various mixtures and at high elevated temperatures (20 ℃, 300 ℃, 550 ℃ and 900 ℃). We find (1) Regarding to macro properties, LC3 cementitious materials are at a disadvantage in compressive strength when the temperature is higher than 300 ℃. (2) Regarding to meso properties, when the temperature reached 550 ℃, all samples generated more meso cracks. (3) Regarding to micro properties, first, as the substitution amount increases, its CH content decreases significantly; second, at 900 ℃, for samples with calcined clay, a large amount of gehlenite crystalline phase was found; third, at elevated temperatures (20 ℃, 300 ℃, 550 ℃ and 900 ℃), there is a linear relationship between the residual compressive strength and the cumulative pore volume; fourth, at 900 ℃, a large amount of dicalcium silicate was generated, and damage cracks were more pronounced. The experimental results of this study are valuable of material design of fire resistance of LC3 concrete.

• Journal of Powder Materials
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• v.28 no.3
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• pp.221-226
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• 2021

We fabricate the non-equiatomic high-entropy alloy (NE-HEA) Fe_49.5Mn₃₀Co₁₀Cr₁₀C_0.5 (at.%) using spark plasma sintering under various sintering conditions. Each elemental pure powder is milled by high-energy ball milling to prepare NE-HEA powder. The microstructure and mechanical properties of the sintered samples are investigated using various methods. We use the X-ray diffraction (XRD) method to investigate the microstructural characteristics. Quantitative phase analysis is performed by direct comparison of the XRD results. A tensile test is used to compare the mechanical properties of small samples. Next, electron backscatter diffraction analysis is performed to analyze the phase fraction, and the results are compared to those of XRD analysis. By combining different sintering durations and temperature conditions, we attempt to identify suitable spark plasma sintering conditions that yield mechanical properties comparable with previously reported values. The samples sintered at 900 and 1000℃ with no holding time have a tensile strength of over 1000 MPa.