• Applied Microscopy
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• 제29권3호
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• pp.265-274
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• 1999

DC마그네트론 스퍼터링방법으로 공정조건을 변화시키며 종착된 구리박막의 미세구조를 분석하였다. 폴리이미드위에 두께 50nm의 Cr박막을 증착한 뒤 두께 500 nm 또는 1000nm의 Cu 박막을 아르곤 압력을 5, 50, 100 mtorr로 변화시키며 증착하였으며 박막의 미세구조는 범용 SEM과 고분해능 SEM, TEM을 사용하여 관찰하였다. 스퍼터링 압력이 증가할수록 열린 계면이 더 많이 관찰되었다. 5 mtorr에서 형성된 박막의 표면은 균일하고 치밀한 구조인 반면에 높은 압력에서 증착된 시편에는 많은 미세 균열이 관찰되었다. 50, 100 mtorr에서 증착된 시편은 박막 두께의 영향도 관찰되어 500nm의 경우에 비해 두께가 $1{\mu}m$인 두꺼운 박막에서 더 법고 큰 균열이 발견되며 균열의 수도 증가하였다. 고분해능 SEM과 TEM으로 관찰한 결과 5 mtorr에서 증착된 시편의 특정 미세 형상은 하나의 결정립이며 주상정이 잘발달된 50, 100 mtorr에서 증착된 시편에서는 1개의 주상정 내부에 여러개의 결정립이 존재하였다. 증착압력이 증가할수록 구리박막의 결정립 크기가 감소하였는데 이는 구리원자의 표면 확산이 방해 받았기 때문이다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1271-1276
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• 2007

The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.15-18
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• 2005

We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.

• Applied Microscopy
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• 제50권
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• pp.26.1-26.3
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• 2020

The biocompatible polyurethane acrylate (PUA) nanopillars were fabricated by soft lithography using three different sizes of nanobeads (350, 500, and 1000 nm), and the human adipose-derived stem cells (hASCs) were cultured on the nanopillars. The hASCs and their various behaviors, such as cytoplasmic projections, migration, and morphology, were observed by high resolution images using a scanning electron microscope (SEM). With the accurate analysis by SEM for the controlled sizes of nanopillars, the deflections are observed at pillars fabricated with 350- and 500- nm nanobeads. These high-resolution images could offer crucial information to elucidate the complicated correlations between nanopillars and the cells, such as morphology and cytoplasmic projections.

• Structural Engineering and Mechanics
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• 제56권3호
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• pp.423-442
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• 2015

This study examines the wavelet transform for output-only system identification of ambient excited engineering structures with emphasis on its utilization for modal parameter estimation of high-order and closely-spaced modes. Sophisticated time-frequency resolution analysis has been carried out by employing the modified complex Morlet wavelet function for better adaption and flexibility of the time-frequency resolution to extract two closely-spaced frequencies. Furthermore, bandwidth refinement techniques such as a bandwidth resolution adaptation, a broadband filtering technique and a narrowband filtering one have been proposed in the study for the special treatments of high-order and closely-spaced modal parameter estimation. Ambient responses of a 5-story steel frame building have been used in the numerical example, using the proposed bandwidth refinement techniques, for estimating the modal parameters of the high-order and closely-spaced modes. The first five natural frequencies and damping ratios of the structure have been estimated; furthermore, the comparison among the various proposed bandwidth refinement techniques has also been examined.

• Structural Engineering and Mechanics
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• 제6권1호
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• pp.115-124
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• 1998

A novel boundary stress resolution method is suggested in this paper, which is based upon the displacements of finite element analysis and of high precision with stress boundary condition strictly satisfied. The method is used to modify the Zienkiewicz-Zhu ($Z^2$) a posteriori error estimator and for the h-version adaptive finite element analysis of crack problems. Successful results are obtained.

• Applied Microscopy
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• 제42권2호
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• pp.111-114
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• 2012

The scanning electron microscopy is an ideal technique for examining plant surface at high resolution. Most hydrate samples, however, must be fix and dehydrate for observation in the scanning electron microscope. Because the microscopes operate under high vacuum, most specimens, especially biological samples, cannot withstand water removal by the vacuum system without morphological distortion. Cryo-techniques can observe in their original morphology and structure without various artifacts from conventional sample preparation. Rapid cooling is the method of choice for preparing plant samples for scanning electron microscopy in a defined physiological state. As one of cryo-technique, high-pressure freezing allows for fixation of native non-pretreated samples up to $200{\mu}M$ thick and 2 mm wide with minimal or no ice crystal damage for the freezing procedure. In this study, we could design to optimize structural preservation and imaging by comparing cryo-SEM and convention SEM preparation, and observe a fine, well preserved Arabidopsis stem's inner ultrastructure using HPF and cryo-SEM. These results would suggest a useful method of cryo-preparation and cryo-SEM for plant tissues, especially intratubule and vacuole rich structure.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.145-146
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• 2013

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1282-1287
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• 2007

The nature of the signal collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired images is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important for improving on the resolution of SEM. This paper presents the manufacture of secondary electron detector and the optimal position of electron detector through numerical analysis in SEM.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.122-128
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• 2007

The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.