• 제목/요약/키워드: High purity hydrogen

검색결과 112건 처리시간 0.022초

Monitoring and Characterization of Bacterial Contamination in a High-Purity Water System Used for Semiconductor Manufacturing

  • Kim, In -Seop;Lee, Geon-Hyoung;Lee, Kye-Joon
    • Journal of Microbiology
    • /
    • 제38권2호
    • /
    • pp.99-104
    • /
    • 2000
  • Hydrogen peroxide has been used in cleaning the piping of an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16 megabyte DRAM semiconductor manufacturing. The level of hydrogen peroxide-resistant bacteria in UHPW water was monitored prior to and after disinfecting the piping with hydrogen peroxide. Most of the bacteria isolated after hydrogen peroxide disinfection were highly resistant to hydrogen peroxide. However, the percentage of resistant bacteria decreased with time. The hydrogen peroxide-resistant bacteria were identified as Micrococcus luteus, Bacillus cereus, Alcaligenes latus, Xanthomonas sp. and Flavobacterium indologenes. The susceptibility of the bacteria to hydrogen peroxide was tested as either planktonic cells or attached cells on glass. Attached bacteria as the biofilm on glass exhibited increased hydrogen peroxide resistnace, with the resistance increasing with respect to the age of the biofilm regrowth on piping after hydrogen peroxide treatment. In order to optimize the cleaning strategy for piping of the high-purity water system, the disinfecting effect of hydrogen preoxide and peracetic acid on the bacteria was evaluated. The combined use of hydrogen peroxide and peracetic acid was very effective in killing attached bacteria as well as planktonic bacteria.

  • PDF

복합 TiN-Al2O3 합성과 수소투과도 특성 평가 (Composite TiN-Al2O3 Syntheses and Hydrogen Permeability Characteristics Evaluation)

  • 조경원;이영환;한정흠;유제선;홍태환
    • 한국수소및신에너지학회논문집
    • /
    • 제31권2호
    • /
    • pp.177-183
    • /
    • 2020
  • To utilize hydrogen energy, high-yield, high-purity hydrogen needs to be produced; therefore, hydrogen separation membrane studies are being conducted. The membrane reactor that fabricates hydrogen needs to have high hydrogen permeability, selective permeability, heatresistant and a stable mechanical membrane. Dense membranes of Pd and Pd alloys are usually used, but these have drawbacks associated with high cost and durability. Therefore, many researchers have studied replacing Pd and Pd alloys. Dense TiN membrane is highly selective and can separate high-purity hydrogen. The porous alumina has a high permeation rate but low selectivity; therefore, separating high-purity hydrogen is difficult. To overcome this drawback, the two materials are combined as composite reclamations to produce a separation membrane with a high penetration rate and high selectivity. Accordingly, TiN-alumina was manufactured using a high-energy ball mill. The TiN-alumina membrane was characterized by X-ray diffraction analysis, scanning electron microscopy, and energy dispersive spectroscopy. The hydrogen permeability of the TiN-alumina membrane was estimated by a Sievert-type hydrogen permeation membrane apparatus. Due to the change in the diffusion mechanism, the transmittance value was lower than that of the general TiN ceramic separator.

Development of analytical method for the isotope purity of pure D2 gas using high-precision magnetic sector mass spectrometer

  • Chang, Jinwoo;Lee, Jin Bok;Kim, Jin Seog;Lee, Jin-Hong;Hong, Kiryong
    • 분석과학
    • /
    • 제35권5호
    • /
    • pp.205-211
    • /
    • 2022
  • Deuterium (D) is an isotope with one more neutron number than hydrogen (H). Heavy elements rarely change their chemical properties with little effect even if the number of neutrons increases, but low-mass elements change their vibration energy, diffusion rate, and reaction rate because the effect cannot be ignored, which is called an isotope effect. Recently, in the semiconductor and display industries, there is a trend to replace hydrogen gas (H2) with deuterium gas (D2) in order to improve process stability and product quality by using the isotope effect. In addition, as the demand for D2 in industries increases, domestic gas producers are making efforts to produce and supply D2 on their own. In the case of high purity D2, most of them are produced by electrolysis of heavy water (D2O), and among D2, hydrogen deuteride (HD) molecules are present as isotope impurities. Therefore, in order to maximize the isotope effect of hydrogen in the electronic industry, HD, which is an isotope impurity of D2 used in the process, should be small amount. To this end, purity analysis of D2 for industrial processing is essential. In this study, HD quantitative analysis of D2 for high purity D2 purity analysis was established and hydrogen isotope RM (Reference material) was developed. Since hydrogen isotopes are difficult to analyze with general gas analysis instrument, they were analyzed using a high-precision mass spectrometer (Gas/MS, Finnigan MAT271). High purity HD gas was injected into Gas/MS, sensitivity was determined by a signal according to pressure, and HD concentrations in two bottles of D2 were quantified using the corresponding sensitivity. The amount fraction of HD in each D2 was (4518 ± 275) μmol/mol, (2282 ± 144) μmol/mol. D2, which quantifies HD amount using the developed quantitative analysis method, will be manufactured with hydrogen isotope RM and distributed for quality management and maintenance of electronic industries and gas producers in the future.

천연가스 조성에 따른 수소 생산 시에 발생하는 이산화탄소 배출량 산출에 대한 연구 (A Study on the Estimation of Carbon Dioxide Generation During High Purity Hydrogen Production According to Natural Gas Composition)

  • 조정호;노재현;김동선
    • 한국수소및신에너지학회논문집
    • /
    • 제30권6호
    • /
    • pp.485-489
    • /
    • 2019
  • Hydrogen is known to be a clean fuel which does not generate a green house gas during the combustion. However, about 8 kg of carbon dioxide is generated during the course of producing 1 kg of hydrogen through reforming, water gas shift reaction and pressure swing adsorption in order to obtain a high purity hydrogen over 99.999% by volume. In this work, carbon dioxide generation is estimated according to four kinds of natural gas compositions supplied by Korea Gas Corporation and regarding natural gas as pure methane. For the simulation of the modeling, PRO/II with PROVISION V10.2 at AVEVA was utilized and Peng-Robinson equation of state with Twu's alpha function was selected.

고순도 수소가스내에 존재하는 불순물의 분석 연구: 대기압 이온화 질량분석기의 이용 (An impurity analysis study in ultra high purity Hydrogen stream: The utilization of Atmosperic Pressure Ionization Mass Spectrometer)

  • 이효석;이택홍
    • 한국수소및신에너지학회논문집
    • /
    • 제16권3호
    • /
    • pp.290-295
    • /
    • 2005
  • For the application of fuel cell, the content and concentration of impurities in hydrogen stream must be classified. The purpose of this study is to provide analysis tool for the determination of impurities in hydrogen with ultra high purity. To produce UHT hydrogen, we purified hydrogen gas by both getter-based catridge and liquid-nitrogen soaked catridge. We compare two methods and propose new method to know about what is in hydrogen stream.

고순도 수소함량에 따른 HCNG 연소특성 및 배출가스 영향 평가 (The Effect on the Combustion and Emission Characteristics of HCNG Engine According to the High Purity Hydrogen Contents)

  • 이종태;임윤성;김형준;이성욱;이장훈;김종규
    • 한국분무공학회지
    • /
    • 제17권3호
    • /
    • pp.152-157
    • /
    • 2012
  • This investigation decribes the effect of the combustion and emission characteristics of HCNG engine according to the high purity hydrogen contents. The HCNG fuel was made by the mixture with a high purity hydrogen ($H_2$) and a natural gas. The test vehicle was applied to the bi-fuel (Gasoline and CNG) system and this system was modified from the fuel supply and fuel tank. In addition, the three premixed HCNG fuels with mixed rate of 10, 20 and 30% of hydrogen were used to maintain the safety. In order to analyze the combustion characteristics of HCNG and CNG, the fuel was injected in the combustor with constant volume. The exhaust emission from light duty vehicle with bi-fuel system was analyzed by a chassis dynamometer and emission analyzer. From these results, the reduction rate of NOx emission increased in the HCNG fuel and emission amount of THC and CO shows a similar level with CNG fuel. This study can be utilized the basic data for the development of a new business plans related with HCNG engines.

고순도 수소 생성을 위한 SIP법에서 첨가제에 따른 환원 특성 (Characteristics of Redox Agent with Additive in Steam-Iron Process for the High Purity Hydrogen Production)

  • 전법주;김선명;박지훈
    • 한국수소및신에너지학회논문집
    • /
    • 제22권3호
    • /
    • pp.340-348
    • /
    • 2011
  • Effects of various inorganic-metal oxide (Zr, Zn, Si, Al and Ca as promoters and stabilizers) additive on the reduction rate of iron oxide and the composition of forming hydrogen using the steam-iron cycle operation was investigated. The reduction rate of redox agent with additive was determined from weight change by TGA. The changes of weight loss and reduction rate according to redox agent with various additive affected the hydrogen purity and cycle stability of the process. The cyclic micro reactor showed that hydrogen purity exceeding 95% could be obtained by the water splitting with Si/Fe, Zn/Fe, Zr/Fe redox agents. The redox agents with these elements had an affect on redox cycle stability as a good stabilizer for forming hydrogen by the steam-iron process.

탄화수소의 직접분해로부터 수소와 카본블랙을 생성하기 위한 열플라즈마의 응용 (Application of Thermal Plasma for Production of Hydrogen and Carbon Black from Direct Decomposition of Hydrocarbon)

  • 이태욱;남원기;백성현;박동화
    • 공업화학
    • /
    • 제18권1호
    • /
    • pp.84-89
    • /
    • 2007
  • 본 연구에서는 열플라즈마 직접분해법에 의해 메탄과 프로판으로부터 수소와 카본 블랙을 생성하는 공정에 대해 조사하였다. 메탄과 프로판의 직접분해 시 열역학적 평형조성을 깁스 자유에너지의 최소화에 근거하여 계산하였으며, 이를 바탕으로 직접분해 실험을 수행하였다. 탄화수소의 직접분해에 의해 생성된 수소의 순도는 분해가스 유량에 의존하는 것으로 나타났으며, 고순도의 수소를 얻기 위한 분해 조건을 조사하였다. 메탄을 분해가스로 사용한 경우 프로판의 경우보다 높은 수소의 순도를 나타내는데, 이는 열플라즈마에 의해 생성된 라디칼의 재결합 등으로 인한 메탄이나 에탄, 그리고 아세틸렌과 같은 부산물이 프로판의 경우에 더욱 많이 생겨나기 때문인 것으로 조사되었다. 생성된 카본블랙은 X선 회절분석과 Raman Spectroscopy 분석을 통해 결정성을 조사하였으며, SEM 분석 및 입도 분석을 통해 카본블랙의 입자 모양과 크기를 조사하였다. 그 결과 구형이며 결정성이 양호한 카본블랙이 생성되었음을 확인하였으며, 메탄으로부터 생성된 카본 블랙이 프로판으로부터 생성된 카본블랙보다 평균 입자 크기가 작은 것으로 나타났다.

Synthesis of High Purity Carbon Nano Fibers and Hydrogen from Propane Decomposition

  • Hussain, S.Tajammul;Gul, Sheraz;Mazhar, M.;Larachi, Faical
    • Bulletin of the Korean Chemical Society
    • /
    • 제29권2호
    • /
    • pp.389-392
    • /
    • 2008
  • High purity carbon nano fibers/tubes (CNF/Ts) which contain 97% pure graphitic carbon are prepared by a new catalytic method. These carbon nano fibers/tubes are ready to use without any further purification. The striking feature of this method is the production of carbon nano fibers/tubes of narrow distribution range. The developed catalytic method also produces pure hydrogen. An additional advantage of this catalytic method is that catalyst can be reused without reactivation. Ni:Cu catalyst system is embodied into SCHOTT-DURAN filter disc of large pore size (40-100 mm). Due to the production of hydrogen in the reaction catalyst stability is enhanced and deactivation process is considerably slowed down.

4탑 PSA 공정의 의한 SMR off-gas로부터 수소 정제 (Hydrogen Purification by the Four-Bed Pressure Swing Adsorption Process from Steam Methane Reforming Off-Gas)

  • 양세일;박주용;장성철;김성현;최대기
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2008년도 추계학술대회 논문집
    • /
    • pp.383-386
    • /
    • 2008
  • The four-bed PSA process using a layered bed of activated carbon and zeolite 5A was studied to produce a high purity hydrogen product from SMR off-gas. At a desired product purity (99.999%+), the recovery increased with decreasing the linear velocity. However, the difference of the increasing of the recovery became smaller with the decreasing of the linear velocity and then was similar from below the linear velocity 3.9 cm/s. When the adsorbents, the feed gas composition, and the operating conditions are given, the residence time is mainly a function for design of the PSA bed size. The minimum residence time exists to obtain the maximum recovery at desired product purity.

  • PDF