• Korean Chemical Engineering Research
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• v.53 no.5
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• pp.557-564
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• 2015

The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-$CO_2$ (supercritical-$CO_2$) consists of two steps. Firstly, MEMS-wafers are etched by organic solvent in a separate etching equipment from the high pressure dryer and then moved to the high pressure dryer to rinse and dry them using SC-$CO_2$. We found that the previous two step process could be applied to etch and dry wafers for MEMS but could not confirm the reproducibility through several experiments. We thought the cause of that was the stiction of structures occurring due to vaporization of the etching solvent during moving MEMS wafer to high pressure dryer after etching it outside. In order to improve the structure stiction problem, we designed a continuous process for etching, rinsing and drying MEMS-wafers using SC-$CO_2$ without moving them. And we also wanted to know relations of states of carbon dioxide (gas, liquid, supercritical fluid) to the structure stiction problem. In the case of using gas carbon dioxide (3 MPa, $25^{\circ}C$) as an etching solvent, we could obtain well-treated MEMS-wafers without stiction and confirm the reproducibility of experimental results. The quantity of rinsing solvent used could be also reduced compared with the previous technology. In the case of using liquid carbon dioxide (3 MPa, $5^{\circ}C$, we could not obtain well-treated MEMS-wafers without stiction due to the phase separation of between liquid carbon dioxide and etching co-solvent(acetone). In the case of using SC-$CO_2$ (7.5 Mpa, $40^{\circ}C$), we had as good results as those of the case using gas-$CO_2$. Besides the processing time was shortened compared with that of the case of using gas-$CO_2$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.7
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• pp.599-606
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• 2019

Most facilities that manufacture products made from the hazardous materials operate at high temperatures and pressures. Therefore, there is a risk of fire explosion. In particular, an explosion accident is a major risk factor for facilities with hazardous materials, such as oil, chemical, and gas. Propylene is often used in sites producing basic raw materials and synthetic materials by addition polymerization at petrochemical plants. To prevent an explosion in the business using propylene, the explosion range with the oxygen concentration was calculated according to the changes in temperature and pressure using an inert gas, carbon dioxide. In these measurements, the temperature was $25^{\circ}C$, $100^{\circ}C$, and $200^{\circ}C$ and the amount of carbon dioxide in the container was $1.0kgf/cm^2.G$, $1.5kgf/cm^2.G$, $2.0kgf/cm^2.G$, and $2.5kgf/cm^2.G$. The explosion limit was related to temperature, pressure, and oxygen concentration. The minimum oxygen concentration for an explosion decreased with increasing temperature and pressure. The range of explosion narrowed with decreasing oxygen concentration. In addition, no explosion occurred at concentrations below the minimum oxygen concentration, even with steam and an ignition source of propylene.

• Korean Journal of Food Science and Technology
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• v.25 no.3
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• pp.288-294
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• 1993

Solubilities of urea-crystallized tuna oil methyl esters in supercritical carbon dioxide were determined by a flow through extraction reactor. Experimental results obtained under a quasi-equlibrium condition showed that at 150 bar, solubilities of the esters in supercritical $CO_2$ were 0.075, 0.028 and 0.006(w/w) at $40^{\circ}C,\;60^{\circ}C\;and\;80^{\circ}C$, respectively. In the pressure and temperature ranges $(100{\sim}200bar\;and\;40{\sim}80^{\circ}C)$, the solubility increased with the density of $CO_2$. However, selectivity of supercritical carbon dioxide on the extracted compounds was much better at low density than at high density. Supercritical fractionation with a temperature gradient $(50{\sim}75^{\circ}C)$ resulted in concentrates of EPA and DHA in purities of 12% and 85%, respectively.

• KEPCO Journal on Electric Power and Energy
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• v.1 no.1
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• pp.135-140
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• 2015

Decomposition of carbon dioxide is studied using $Ar/CO_2$ mixture inductively coupled plasmas (ICP). Argon gas was added to generate plasma which has high electron density. To measure decomposition rate of $CO_2$, optical emission actinometry is used. Changing input power, pressure and mixture ratio, the plasma parameters and the spectrum intensity were measured using single Langmuir probe and spectroscope. The source characteristic of Carbon dioxide ICP observed from the obtained plasma parameters. The decomposition rate is evolved depending on the reaction and discharge mode. This result is analyzed with both the measurement of the plasma parameters and the dissociation mechanism of $CO_2$.

• Textile Coloration and Finishing
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• v.31 no.3
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• pp.135-146
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• 2019

A series of azo based disperse dyes were synthesized and applied to polyester(PET) fiber in supercritical carbon dioxide($ScCO_2$). Various aniline derivatives were used as diazo component and coupled with glycine ethylester or carbonic acid ethylester derivatives to give azo based disperse dyes. Depending on the various diazo substituents, absorption maxima varied from 415 to 529nm in acetone. Dyeing in $ScCO_2$ was carried out at $120^{\circ}C$ and 250bar pressure for 2hrs with 0.5% o.w.f. of dye concentration. Dyed PET fiber had excellent brightness and good light, washing and perspiration(acid/alkali) fastness properties.

• Journal of the Korea Safety Management & Science
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• v.16 no.4
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• pp.167-173
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• 2014

Hydrogen energy is expanding in range for civil use together with development of pollution-free power sources recently, and it is judged that the use of hydrogen will increase more as a part of carbon dioxide reduction measures according to the Climatic Change Convention. Especially, it is thought that the securement of safety of the used dispenser will be the biggest obstacle in the use of high-pressure hydrogen because the hydrogen station is operated in a high pressure. This study found risks in the process and problems on operation by making use of HAZOP(6 kinds), a qualitative safety evaluation technique, and FMEA(5 kinds), a fault mode effect analysis, for the hydrogen charging system at a hydrogen gas station, derived 6 risk factors from HAZOP and 5 risk factors from FMEA, and prepared measures for it.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1993.10a
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• pp.413-422
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• 1993

Air shipment affords the quickest possible delivery of horticultural products. The price of air shipped horticultural products are relatively high as most of these products are perishable. Usually the temperature in the cargo compartment is not controlled during flight. Thus, special attention should be paid to procooling prior to shipment. The environmental condition during transportation of horticultural products is an essential parameter for maintaining the quality of perishable products. Commonly horticultural products were loaded by ULD(Unit Load Devices) as a container or pallet in the aircraft (except for small aircraft) . Therefore, inside temperature of the container and cargo compartment came into question. Scarce literature on the relationship between environmental condition and quality changes of horticultural products during air shipment can be found. By the stand point of keeping fresh quality, investigations on the actual condition of air shipments were carried out to improve the technique during the distribution process of fresh horticultural products. Temperature, humidity, atmospheric pressure, carbon dioxide, ethylene, impacts, and changes in quality during the air shipment of snapbeans, okras and chrysanthemums were measured. Temperature was measured by recording thermometers, relative humidity by recording hygrometers, atmospheric pressure by a strain -guage type pressure sensor, carbon dioxide by testing tubes, ethylene by sampling bags and a gaschromatograph, impacts and vibrations by impact recorders and a 3D accelerometer. Relationships between environmental conditions and quality changes during air shipments were clarified. It was expected from investigations into actual shipments that the ventilation and insulation properties of air freight containers were related to the quality of agricultural products. Aircraft can no directly load and unload trucks into them. The transshipment is inclined to cause shocks and vibrations, and to invite damages within a short time.

• Journal of ILASS-Korea
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• v.19 no.1
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• pp.1-8
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• 2014

Liquefied petroleum gas (LPG) is regarded as an alternative fuel for spark ignition engine due to similar or even higher octane number. In addition, LPG has better fuel characteristics including high vaporization characteristic and low carbon/hydrogen ratio leading to a reduction in carbon dioxide emission. Recently, development of LPG direct injection system started to improve performance of vehicles fuelled with LPG. However, spray characteristics of LPG were not well understood, which is should be known to develop injector for LPG direct injection engines. In this study, effects of operation condition including ambient pressure, temperature, and injection pressure on spray properties of n-butane were evaluated and compared to gasoline in a multi-hole injector. As general characteristics of both fuels, spray penetration becomes smaller with an increase of ambient pressure as well as a reduction in the injection pressure. However, it is found that evaporation of n-butane was faster compared to gasoline under all experimental condition. As a result, spray penetration of n-butane was shorter than that of gasoline. This result was due to higher vapor pressure and lower boiling point of n-butane. On the other hand, spray angle of both fuels do not vary much except under high ambient temperature conditions. Furthermore, spray shape of n-butane spray becomes completely different from that of gasoline at high ambient temperature conditions due to flash boiling of n-butane.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.7
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• pp.409-416
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• 2009

On 21st century, global warming is the most serious environmental problem threatening the existence of lives on the earth. One of the serious reasons of this nature phenomena was due to the greenhouse effect by carbon dioxide mainly produced with the combustion process of hydro-carbon fuel. and it is mostly produced. In the high oil prices age, intensification of energy efficiency promotion in the building sector is required. Windows are dominating large percentage whole building loads, and are regarding as the primary target of energy efficiency. The purpose of this research is on the obtaining of the renewable energy source in the skyscrape buildings in the metropolitan area. The air movement is happens due to the atmospheric pressure differences in the air. Due to this simple physical theory, it is easily expected to obtain the useful renewable nature energy through the high -raised vertical air stack installed in a tall building. However, there is one problem that should be resolved which is called air-hole effect in the sky -scrape buildings.

• Journal of Surface Science and Engineering
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• v.41 no.3
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• pp.114-120
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• 2008

The pyrolysized carbon xerogel and aerogels were prepared from the sol-gel polymerization of resorcinol-formaldehyde(RF) followed by the dry process under ambient pressure and supercritical carbon dioxide condition respectively. The thermal behaviour of RF polymer xerogel was investigated with TGA analyzer to correspond with the pyrolysis process. The surface properties such as particle size, morphology and the point of zero charge of the pyrolysized porous carbon aerogels were studied for the precious metal catalyst supported media. It was found that the volume of the polymer aerogel decreased because of the significant linear shrinkage and weight loss of polymer gel during the carbonization. The point of zero charge of the carbon aerogel pyrolysized at $1050^{\circ}C$ under inert gas flow was about 10.