• 제어로봇시스템학회논문지
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• 제15권9호
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• pp.909-915
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• 2009

This work is to develop a vision system for high precision alignment between upper and lower plates required at the imprinting process of the large LCD flat panel. We compose a gantry-stage that has highly repeated accuracy for high precision alignment and achieves analysis about thermal transformations of stage itself. Position error in the stage is corrected by feedback control from the analysis. This system can confirm alignment mark of upper and lower plates by using two cameras at a time for the alignment of two plates. Pattern matching that uses geometric feature is proposed to consider the recognition problem for alignment mark of two plates. It is algorithm to correct central point and angle for the alignment from the recognized mark of upper and lower plates based on the special characteristics. At the alignment process, revision for error position is performed through Look and Move techniques.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.32-35
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• 1997

A recent development in the Flat Panel Display(FPD) industry requires an auto-alignment system which is operated in high speed and high precision. In the FPD production process, aligning photo-mask with respect to guide mark printed in the glass should be accomplished in the accuracy of sub-micron order. So the system has high bandwidth and needs a dedicated control system which is fast and robust enough to control linear motors in precise manner. Proposed auto-alignment system structure in this presentation which consists of the master controller board, the DSP position controller board which controls 3 axis precision linear motors, the servo system and the man machine interface software. Designed and tuned under repeated experiments, the proposed system showed a reasonable performance in the aspect of rise time and steady state error.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.457-460
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• 1998

Recently, the research of the FPD(Flat Panel Display)which is substituted for CRT(Cathode Ray Tube) has been widely progressed. But most equipment that are used for production of FPD are expensive and we must import these equipment. Among these equipment, most important one is a auto-alignment system. In this paper, we present a high speed, high precision auto-alignment system, in which a PLD auto tuning algorithm, 1-dimensional CCD(Dcharge Coupled Device) camera, vision board, and vision data processing algorithm are included.

• Nuclear Engineering and Technology
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• 제54권10호
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• pp.3703-3716
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• 2022

Target alignment technology is one of the most critical technologies in laser fusion experiments and is an important technology related to the success of laser fusion experiments. In this study, by combining the open-loop and closed-loop errors of the target alignment, the Kalman state observer is used to estimate the position of the target, which improves the observation precision of the target alignment. Then the optimized result is used to guide the alignment of the target. This method can greatly optimize the target alignment error and reduce uncertainty. With the improvement of the target alignment precision, it will greatly improve the reliability and repeatability of the experiments' results, thereby improving the success rate of the experiments.

• 한국정밀공학회지
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• 제20권6호
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• pp.88-95
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• 2003

This paper presents the measurement and correction method of PCB alignment errors for PCB screen printer. Electronic equipment is getting smaller and yet must satisfy high performance standard. Therefore, there is a great demand for PCB with high density. However conventional PCB screen printer doesn't have enough accuracy to accommodate the demand fur high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because the alignment errors of PCB occur when it is loaded to the screen printer. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors with high-accuracy. An automatic optical inspection part measures the PCB alignment errors using machine vision, and the high-accuracy 3-axis stage makes correction for these errors. This system used two CCD cameras to get images of two fiducial marks of PCB. The geometrical relationship between PCB, cameras, and xy$\theta$ stage is derived, and analytical equations for alignment errors are also obtained. The unknown parameters including camera declining angles and etc. can be obtained by initialization process. Finally, the proposed algorithm is verified by experiments by using test bench.

• 한국정밀공학회지
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• 제18권11호
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

• 한국정밀공학회지
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• 제11권1호
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• pp.150-156
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• 1994

To meet the process requirement of semiconductor device manufacturing, it is necessary to improve the alignment accuracy in exposure equipments. We developed the excimer laser stepper and will describe the methodology for alignment measurement and experimental results. Our wafer alignment system consists of off-axis optics, TTL(Through The Lens) optics and high precision stage. Off-axis alignment utilizes the image processing and /or diffraction from thealign marks of off-centered chip area. On the other hand, TTL alignment can be used for the die-by-die alignment using dual beam interferometry. When only off-axis alignment was used, the experimental alignment error(lml+3 .sigma. ) was 0.26-0.29 .mu. m, and will be reduced down to 0.15 .mu. m by adding TTL alignment.

• 한국정밀공학회지
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• 제20권6호
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• pp.96-104
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• 2003

This paper presents the measurement and correction method of PCB alignment errors for PCB screen printer. Electronic equipment is getting smaller and yet must satisfy high performance standard. Therefore, there is a great demand for PCB with high density. However conventional PCB screen printer doesn't have enough accuracy to accommodate the demand for high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because the alignment errors of PCB occur when it is loaded to the screen printer. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors with high-accuracy. An automatic optical inspection part measures the PCB alignment errors using machine vision, and the high-accuracy 3-axis stage makes correction for these errors. This system used two CCD cameras to get images of two fiducial marks of PCB. The centers of fiducial marks are obtained by using moment, gradient method. The first method is calculating the centroid by using first moment of blob, and the latter method is calculating the center of the circle whose equation is obtained by curve-fitting the boundaries of fiducial mark. The operating system used to implement the whole set-up is carried in Window 98 (or NT) environment. Finally we implemented this system to PCB screen printer.

• 한국공작기계학회논문집
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• 제15권6호
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• pp.64-70
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• 2006

The optical element was usually used in optical devices and optical transfer devices, but it has been recently used in communication, computer and medical equipment. With the development of very high speed optical-communication, the development of the kernel parts of optical communication has also increased. Presently, the alignment of the optical element is time consuming, and an effective alignment algorithm has not yet to be developed. In this paper, the alignment automation of the optical element is studied. The ultra precision stage is applied to an optical element alignment to improve the accuracy of the alignment. The automation program of the optical element alignment is developed by LabVIEW programming to save the alignment time. The alignment algorithms of the optical element consist of field search and peak search algorithms.

• 한국정밀공학회지
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• 제23권5호
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• pp.103-110
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• 2006

Automatic optical alignment modules are a key technology in optical communication system. However, the optic component assembly depends highly on manual or semi-automated alignment process. In this paper, a novel alignment mechanism with minimum degree-of-freedom has been designed and theoretical models are derived from geometric optical characteristics on collimators, optical filters and optical ray alignment. The automatic alignment control algorithm has been newly developed based on the mechanism and models, and then we make fast, precise and reliable alignment through the algorithm. The reliability of developed modules has been verified with various simulations and performance evaluations.