• Title/Summary/Keyword: High density electron beam

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High Quality Nano Structured Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process

  • Jang, Yun-Sung;Lee, You-Jong;Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.251-252
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    • 2012
  • Recently, the growing interest in organic microelectronic devices including OLEDs has led to an increasing amount of research into their many potential applications in the area of flexible electronic devices based on plastic substrates. However, these organic devices require a gas barrier coating to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency OLEDs require an extremely low Water Vapor Transition Rate (WVTR) of $1{\times}10^{-6}g/m^2$/day. The Key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required ($1{\times}10^{-6}g/m^2$/day) is the suppression of defect sites and gas diffusion pathways between grain boundaries. In this study, we developed an $Al_2O_3$ nano-crystal structure single gas barrier layer using a Neutral Beam Assisted Sputtering (NBAS) process. The NBAS system is based on the conventional RF magnetron sputtering and neutral beam source. The neutral beam source consists of an electron cyclotron Resonance (ECR) plasma source and metal reflector. The Ar+ ions in the ECR plasma are accelerated in the plasma sheath between the plasma and reflector, which are then neutralized by Auger neutralization. The neutral beam energies were possible to estimate indirectly through previous experiments and binary collision model. The accelerating potential is the sum of the plasma potential and reflector bias. In previous experiments, while adjusting the reflector bias, changes in the plasma density and the plasma potential were not observed. The neutral beam energy is controlled by the metal reflector bias. The NBAS process can continuously change crystalline structures from an amorphous phase to nano-crystal phase of various grain sizes within a single inorganic thin film. These NBAS process effects can lead to the formation of a nano-crystal structure barrier layer which effectively limits gas diffusion through the pathways between grain boundaries. Our results verify the nano-crystal structure of the NBAS processed $Al_2O_3$ single gas barrier layer through dielectric constant measurement, break down field measurement, and TEM analysis. Finally, the WVTR of $Al_2O_3$ nano-crystal structure single gas barrier layer was measured to be under $5{\times}10^{-6}g/m^2$/day therefore we can confirm that NBAS processed $Al_2O_3$ nano-crystal structure single gas barrier layer is suitable for OLED application.

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Determination of Lattice Parameters and Observation of Lattice Misfits on Rene 80 Cast Blades (Rene 80 주조블레이드에서 격자상수의 결정 및 격자어긋남의 관찰)

  • An, Seong-Uk
    • Analytical Science and Technology
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    • v.6 no.5
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    • pp.515-520
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    • 1993
  • By the real use of Rene 80 cast blades at high temperature ${\gamma}^{\prime}$ precipitates in the matrix(${\gamma}$) mainly due to the operating temperature. These precipitates play main role for strenthening of the blades. Generally known that dislocation density increases due to ${\gamma}-{\gamma}^{\prime}$ mismatch by the generation and growth of the precipitates, because the lattice parameter of ${\gamma}^{\prime}$ is higher than that of ${\gamma}$. These lattice parameters of ${\gamma}$ and ${\gamma}^{\prime}$ are determined through the CBED(Convergent Beam Electron Diffraction) method by STEM(Scanning Transmission Electron Microscope) in this work. And also studied, whether and how much the dislocation density increases by the generation and growth of the precipitates.

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Comparison on Autogenous Weldability of Stainless Steel using High Energy Heat Source (고에너지 열원에 따른 스테인리스강의 제살용접특성 비교)

  • Kim, Jong-Do;Lee, Chang-Je;Song, Moo-Keun
    • Journal of Advanced Marine Engineering and Technology
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    • v.36 no.8
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    • pp.1076-1082
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    • 2012
  • Today the welding for LNG carrier is known to be possible using arc and plasma arc welding process. But because of the lower energy density, arc welding is inevitable to multi-pass welding for thick plate and has a limit of welding speed compared to laser which is high energy density heat source. When thick plate is welded, weld defect by multi-pass welding and heat-affected zone by high heat-input were formed. Therefore one-pass welding by key-hole has been considered to work out the problems. It is possible for Laser, electron beam, plasma process to do key-hole welding. Nowadays, plasma process has been used for welding membrane of cargo tank for LNG carrier instead of arc process. Recently, many studies have examined to apply laser process to welding of membrane. In this paper, weldability, microstructure and mechanical properties of stainless steel for LNG carrier welded by fiber laser were compared to those by plasma. As a result, although the laser welding has several times faster speed, similar properties and smaller weld and heat affected zone were obtained. Consequently, this study proves the superiority of fiber laser welding for LNG carrier.

Structural and component characterization of the B4C neutron conversion layer deposited by magnetron sputtering

  • Jingtao Zhu;Yang Liu;Jianrong Zhou;Zehua Yang;Hangyu Zhu;Xiaojuan Zhou;Jinhao Tan;Mingqi Cui;Zhijia Sun
    • Nuclear Engineering and Technology
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    • v.55 no.9
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    • pp.3121-3125
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    • 2023
  • Neutron conversion detectors that use 10B-enriched boron carbide are feasible alternatives to 3He-based detectors. We prepared boron carbide films at micron-scale thickness using direct-current magnetron sputtering. The structural characteristics of natural B4C films, including density, roughness, crystallization, and purity, were analyzed using grazing incidence X-ray reflectivity, X-ray diffraction, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy. A beam profile test was conducted to verify the practicality of the 10B-enriched B4C neutron conversion layer. A clear profile indicated the high quality of the neutron conversion of the boron carbide layer.

Evaluation of the usefulness of Bolus, which combines Step Bolus and 3D Bolus (Step Bolus와 3D Bolus를 combine 한 Bolus의 유용성 평가)

  • Lee, Chang-Suk;Chae, Moon-Ki;Park, Byung-Suk;Kim, Sung-Jin;Joo, Kyoo-Sang;Park, Chul-Yong
    • The Journal of Korean Society for Radiation Therapy
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    • v.33
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    • pp.79-88
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    • 2021
  • Objectives: Bolus, which combines 3D-bolus and Step-bolus, was produced and its usefulness is evaluated. Materials and Methods: A Bolus was manufactured with a thickness of 10mm and 5mm using a 3D printer (3D printer, USA), and a Step Bolus of 5mm was bonded to a 5mm thick bolus. In order to understand the characteristics of Step bolus and 3D bolus, the differences in relative electron density, HU value, and mass density of the two bolus were investigated. These two Bolus were applied to anthropomorpic phantom to confirm its effectiveness. After all contouring of the phantom, a treatment plan was established using the computed treatment planning system (Eclipse 16.1, Varian medical system, USA). Treatment plan was performed using electron beam 6MeV, nine dose measurement points were designated on the phantom chest, air-gap was measured at that point, and dose evaluation was performed at the same point for each bolus applied using a glass dosimeter (PLD). Results: Bolus, which combines 3D-bolus 5mm and Step-bolus 5mm, was manufactured and evaluated compared with 3D-bolus 1cm. The relative electron density of 3D Bolus was 1.0559 g/cm2 and the step Bolus was 1.0590 g/cm2, which was different by 0.01%, so the relative electron density was almost the same. In the lightweight measurement of air-gap, the combined bolus was reduced to 54.32% for all designated points compared to 3D-bolus. In the dose measurement using a glass dose meter (PLD), the consistency was high in phantom using combined bolus at most points except the slope point. Conclusion: Combined bolus made by combining 3D-bolus and Step-bolus has all the advantages of 3D-bolus and Step-bolus. In addition, by dose inaccuracy due to Air-gap, more improved dose distribution can be shown, and effective radiation therapy can be performed.

SCANNING ELECTRON MICROSCOPY ANALYSIS OF FUEL/MATRIX INTERACTION LAYERS IN HIGHLY-IRRADIATED U-Mo DISPERSION FUEL PLATES WITH Al AND Al-Si ALLOY MATRICES

  • Keiser, Dennis D. Jr.;Jue, Jan-Fong;Miller, Brandon D.;Gan, Jian;Robinson, Adam B.;Medvedev, Pavel;Madden, James;Wachs, Dan;Meyer, Mitch
    • Nuclear Engineering and Technology
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    • v.46 no.2
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    • pp.147-158
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    • 2014
  • In order to investigate how the microstructure of fuel/matrix-interaction (FMI) layers change during irradiation, different U-7Mo dispersion fuel plates have been irradiated to high fission density and then characterized using scanning electron microscopy (SEM). Specifially, samples from irradiated U-7Mo dispersion fuel elements with pure Al, Al-2Si and AA4043 (~4.5 wt.%Si) matrices were SEM characterized using polished samples and samples that were prepared with a focused ion beam (FIB). Features not observable for the polished samples could be captured in SEM images taken of the FIB samples. For the Al matrix sample, a relatively large FMI layer develops, with enrichment of Xe at the FMI layer/Al matrix interface and evidence of debonding. Overall, a significant penetration of Si from the FMI layer into the U-7Mo fuel was observed for samples with Si in the Al matrix, which resulted in a change of the size (larger) and shape (round) of the fission gas bubbles. Additionally, solid fission product phases were observed to nucleate and grow within these bubbles. These changes in the localized regions of the microstructure of the U-7Mo may contribute to changes observed in the macroscopic swelling of fuel plates with Al-Si matrices.

The Effects of Metal Plate loaded on TLD chip in 6 MV Photon and 6 MeV Electron Beams (6 MV 광자선과 6 MeV 전자선 하에서 TLD 기판 위에 얹힌 금속 박막의 효과)

  • Kim, Sookil;Byungnim Min
    • Progress in Medical Physics
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    • v.10 no.1
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    • pp.41-46
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    • 1999
  • There is necessity for making a smaller and more sensitive detector in small field sizes. This report assesses the suitability of metal-loaded thermoluminescent dosimeters for this purpose. Measurements were performed in the 6 MV photon and 6 MeV electron beams of a medical linear accelerator with LiF thermoluminescence dosimeters (TLD-100) embedded in solid water phantom. TLD-100 chips(surface area 3.2 $\times$ 3.2 $\textrm{mm}^2$) loaded with a metal plate(Tin or gold respectively) were used to enhance dose readings to TLD-100. Surface dose was measured for field size 10 $\times$ 10 $\textrm{cm}^2$ and 100 em SSD. Measurements have been made of the enhanced signal intensity and good linearity for absorbed dose with each metal. Using a 1 mm each metal on TLD-l00 in the beam increased the surface dose to 14% and 56% respectively for 6MV photon. In the case of 6 MeV electron, gold plate enhanced the TL response to 13%, but there is no difference for tin plate. The specific dose response of TLD-100 with thin metal plate increases with electron concentration of metal film, this is most likely due to increased electron scattered from the additional material with electron density higher than TLD-100. This emphasizes the role of TL dosimeters with metal as amplified dosimeters for therapeutic high energy x-ray beams. Due to the enhanced dose reading of TLD-100 with metal plate, it could be possible to develop smaller TL dosimeter with high sensitivity.

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Laser induced dry etching of GaAs (레이저유기에 의한 GaAs의 건식에칭)

  • Park, Se-Ki;Lee, Choen;Choi, Won-Chel;Kim, Moo-Sung;Min, Suk-Ki;Ahn, Byung-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.58-61
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    • 1995
  • Instead of using CCl$_4$CCl$_2$F$_2$ gases, we used a alternative reaction gas of CFCs which we have developed, for the experiment of laser induced dry etching of laser induced dry etching of GaAs, and compared with the etch profile of a usual reation gas. Laser powers(power density) on the sample surface were varied from 100 mW(12.7 MW/$\textrm{cm}^2$) to 210mW(27 MW/$\textrm{cm}^2$) The laser beam was scanned over the sample by moving the cell with a speed raging from 8.3$\mu\textrm{m}$/sec and the gas pressure also was varied form 260 Torr to 760 Torr, High etching rates up to 136 $\mu\textrm{m}$/sec and an aspect ratio of 2.6 have been achieved by single scan of laser beam. The chemical compositions of the reaction products deposited on the etched groove were measured by Auger electron spectroscopy(AES) Etch profiles, including depth and width were observed by scanning electron microscopy(SEM)

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EFFECTS OF SURFACE ROUGHNESS AND MULTILAYER COATING ON THE CORROSION RESISTANCE OF Ti-6Al-4V ALLOY

  • Ko, Yeong-Mu;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.134-135
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    • 2003
  • The dental implant materials required good mechanical properties, such as fatigue strength, combined with a high resistance to corrosion. For increasing fatigue resistance and delaying onset of stress corrosion cracking, shot peening has been used for > 50 years to extend service life of metal components. However, there is no information on the electrochemical behavior of shot peened and hydroxyapatite(HA) coated Ti-6Al-4V alloys. To increase fatigue strength, good corrosion resistance, and biocompatibility, the electrochemical characteristics of Ti/TiN/HA coated and shot peened Ti-6Al-4V alloys by electron beam physical vapor deposition(EB-PVD) have been researched by various electrochemical method in 0.9%NaCl. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. The produced materials were quenched at 1000$^{\circ}C$ under high purity dried Ar atmosphere and were hold at 500$^{\circ}C$ for 2 hrs to achieve the fatigue strength(1140㎫) of materials. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. Shot peening(SP) and sand blasting treatment was carried out for 1, 5, and 10min. On the surface of Ti-6Al-4V alloys using the steel balls of 0.5mm and alumina sand of 40$\mu\textrm{m}$ size. Ti/TiN/HA multilayer coatings were carried out by using electron-beam deposition method(EB-PVD) as shown Fig. 1. Bulk Ti, powder TiN and hydroxyapatite were used as the source of the deposition materials. Electrons were accelerated by high voltage of 4.2kV with 80 - 120mA on the deposition materials at 350$^{\circ}C$ in 2.0 X 10-6 torr vacuum. Ti/TiN/HA multilayer coated surfaces and layers were investigated by SEM and XRD. A saturated calomel electrode as a reference electrode, and high density carbon electrode as a counter electrode, were set according to ASTM GS-87. The potentials were controlled at a scan rate of 100 mV/min. by a potentiostat (EG&G Co.273A) connected to a computer system. Electrochemical tests were used to investigate the electrochemical characteristics of Ti/TiN/HA coated and shot peened materials in 0.9% NaCl solution at 36.5$^{\circ}C$. After each electrochemical measurement, the corrosion surface of each sample was investigated by SEM.

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Photostimulated Luminescence-Thermoluminescence Application to Detection of Irradiated White Ginseng Powder (방사선 조사 백삼분말의 PSL-TL 다중검지법)

  • Chung, Hyung-Wook;Delincee, Henry;Kwon, Joong-Ho
    • Korean Journal of Food Science and Technology
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    • v.32 no.2
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    • pp.265-270
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    • 2000
  • White ginseng powder, permitted to be irradiated in Korea for the purpose of microbial decontamination, was treated with electron beam at doses of $0{\sim}15\;kGy$ for a detection trial whether it is irradiated or not by measuring photostimulated luminescence for whole samples first and then (TL) for the mineral adhering to the samples. PSL values were less than threshold value (700, $T_{1}$) and were negative for nonirradiated samples but more than 5000 $(T_2)$ and were positive for irradiated ones. After PSL measurement mineral was separated from the whole samples using density separation. Mineral of nonirradiated samples was characterized by glow curves which have low intensity and were situated at the high temperature region (about $300^{\circ}C$) by the low level of natural radioactivity. Glow curves of minerals for all irradiated samples were observed at about $200^{\circ}C$. TL ratio by normalization was 0.01 for nonirradiated sample and more than 0.78 for irradiated samples, and it was possible to detect whether white ginseng powders were irradiated or not.

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