• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.5
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• pp.527-533
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• 1999

Hertzian indentation tests with spherical indenters in water were conducted to examine the contact fatigue in three dental ceramics, such as feldspathic porcelain, micaceous glass-ceramic (MGC) and glass-infiltrated alumina, which was used as dental restorations, and evaluated the effect of contact damage on strength. Initial damage was dependent of microstructure, showing cone cracks of brittle behavior in the feldspathic porcelain and deformation of quasi-plastic behavior in the MGC, with an intermediate case in the glass-infiltrated alumina. However, as increasing the number of cyclic loading (n=1~n =$10^6$)all materials showed an abrupt strength degradation, at which fracture was originated from damage in the contact fatigue. There were two strength degradation with increasing the number of cyclic loading in specific loads (200N, 500N, 1000N):first was from the cone cracks, and second was from the radial cracks created by cyclic loading. The radial cracks, once formed, led to rapid degradation in strength properties, Finally the material was failed at the high number of cyclic loading. Strength degradation with indentation load at fixed number of cyclic loading indicated that the feldspathic porcelain should be highly damage tolerant to the contact fatigue.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.44.2-44.2
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• 2009

Polycrystalline materials suchas yttria and alumina have been applied as a plasma resisting material for the plasma processing chamber. However, polycrystal line material may easily generate particles and the particles are sources of contamination during the plasma enhanced process. Amorphous material can be suitable to prevent particle generation due to absence of grain-boundaries. We manufactured nitrogen-containing $SiO_2-Al_2O_3-Y_2O_3$ based glasses with various contents of silicon and fixed nitrogen content. The thermal properties, mechanical properties and plasma etching rate were evaluated and compared for the different composition samples. The plasma etching behavior was estimated using XPS with depth profiling. From the result, the plasma etching rate highly depends on the silicon content and it may results from very low volatile temperature of SiF4 generated during plasma etching. The silicon concentration at the plasma etched surface was very low besides the concentration of yttrium and aluminum was relatively high than that of silicon due to high volatile temperature of fluorine compounds which consisted with aluminum and yttrium. Therefore, we conclude that the samples having low silicon content should be considered to obtain low plasma etching rate for the plasma resisting material.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.207-207
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• 2011

Amorphous transparent oxide semiconductors (a-TOS) have been widely studied for many optoelectronic devices such as AM-OLED (active-matrix organic light emitting diodes). Recently, Nomura et al. demonstrated high performance amorphous IGZO (In-Ga-Zn-O) TFTs.1 Despite the amorphous structure, due to the conduction band minimum (CBM) that made of spherically extended s-orbitals of the constituent metals, an a-IGZO TFT shows high mobility.2,3 But IGZO films contain high cost rare metals. Therefore, we need to investigate the alternatives. Because Aluminum has a high bond enthalpy with oxygen atom and Alumina has a high lattice energy, we try to replace Gallium with Aluminum that is high reserve low cost material. In this study, we focused on the electrical properties of IZO:Al thin films as a channel layer of TFTs. IZO:Al were deposited on unheated non-alkali glass substrates (5 cm ${\times}$ 5 cm) by magnetron co-sputtering system with two cathodes equipped with IZO target and Al target, respectively. The sintered ceramic IZO disc (3 inch ${\phi}$, 5 mm t) and metal Al target (3 inch ${\phi}$, 5 mm t) are used for deposition. The O2 gas was used as the reactive gas to control carrier concentration and mobility. Deposition was carried out under various sputtering conditions to investigate the effect of sputtering process on the characteristics of IZO:Al thin films. Correlation between sputtering factors and electronic properties of the film will be discussed in detail.

• Restorative Dentistry and Endodontics
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• v.26 no.5
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• pp.393-398
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• 2001

Polymerization of light-activated restorations results in temperature increase caused by both the exothermic reaction process and the energy absorbed during irradiation. Within composite resin, temperature increases up to 2$0^{\circ}C$ or more during polymerization. But, insulation of hard tissue of tooth lowers this temperature increase in pulp. However, many clinicians are concerned about intrapulpal temperature injury. The purpose of this study was to evaluate temperature changes in the pulp according to various restorative materials and bases during curing procedure. Caries and restoration-free mandibular molars extracted within three months were prepared Class I cavity of 3$\times$6mm with high speed handpiece fissure bur. 1mm depth of dentin was evaluated with micrometer in mesial and distal pulp horns. Pulp chambers were filled with 37.0$\pm$0.1$^{\circ}C$ water to CEJ. Chromium-alumina thermocouple was placed in pulp horn below restorative materials for evaluating of temperature changes. This thermocouple was connected to temperature-recording device(Multiplication analyzer MX, 6.000, JAPAN). Temperature changes was evaluated from initial 37.$0^{\circ}C$ after temperature changes to 37.$0^{\circ}C$. Tip of curing unit was placed in the center of prepared cavity separated 1mm from restorative materials. Curing time was 40s. The restorative materials were used with Z 100, Fuji II LC, Compoglass flow and bases were used with Vitrebond, Dycal. Resrorative materials were placed in 2mm. The depth of bases were formed in 1mm and in this upper portion, resin of 2mm depth was placed. This procedure was performed 10 times. The results were as follows. 1. All the groups showed that the temperature in pulp increased as curing time increased 2. The temperature increase of glass ionomer was significantly higher than that of Resin and Compomer during curing procedure (P<0.05). 3. The temperature increase in glass ionomer base was significantly higher than that of Calcium hydroxide base during Resin curing procedure (P<0.05).

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.8
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• pp.593-598
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• 2007

The present study has dealt with the measuring method of ice slurry viscosity using falling sphere viscometer. The experimental apparatus was composed by test section and high-speed video system. And the spheres used in this study were alumina and glass. The main parameters were ice packing factor (IPF) and falling velocity of sphere so the acquired results were discussed for these parameters. The viscosity of ice slurry was calculated by using measured falling velocity and moving distance at instantaneous time and the Stokes hypothesis was used for this calculation. It was clarified that possible measuring range was $IPF\;=\;0.06{\sim}0.14$ of this type of measuring device and measuring method. In addition, it was clarified that the viscosity of ice slurry increased to increase of ice packing factor (IPF) of ice slurry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.6
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• pp.499-502
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.205-205
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• 2010

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.365-365
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for NOx gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of 400 pm were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin films with different thickness are analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The GZO gas sensors are tested by gas measurement system under varing operation temperature and show good performance to the NOx gas in sensitivity and response time.