A Dynamic Structure Design of PC type Sub-structure for next Semi-conduct, TFT-LCD Fab based on Dynamic Test and Simulation (차세대 반도체, TFT-LCD Fab 구조설계를 위한 PC형 격자보에 대한 동적 특성 평가 및 개선방안)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 2004.05a
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- pp.237-242
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- 2004