• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.7-11
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• 2003

In this research, the etching characteristics of via contact and deep contact hole have been studied using multi-pole inductively coupled plasma(MICP) etching system. We investigated Plasma density of MICP source using the Langmuir probe and etching characteristics with RF frequency, wall temperature, chamber gap, and gas chemistry containing Carbon and Fluorine. As the etching time increases, formation of the polymer increases. To improve the polymer formation, we controlled the temperature of the reacting chamber, and we found that temperature of the chamber was very effective to decrease the polymer thickness. The deep contact etch profile and high selectivity(oxide to photoresist) have been achieved with the optimum mixed gas ratio containing C and F and the temperature control of the etching chamber.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.261-261
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• 2010

In electric railways, high speed trains are normally supplied by AC 25kV power by contact between a pantograph contact strip and a contact wire. Advanced railway operating countries are actively researching various areas for the development of contact strips due to the reason that the properties of contact strips are one of the key factors of electric railways. This paper applied nano technology which is rapidly growing in many areas to the contact strip of a pantograph for current collection performance improvement considering speed up of electric railways. In detail, this paper proposes a method to dope nano particles of metal to a Korea Train eXpress(KTX) carbon pantograph and its measurement results. It is expected that the contents of this paper be used for preliminary study of high-speed railway current collection technologies.

• Carbon letters
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• v.14 no.3
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• pp.171-174
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• 2013

The high quality contact between graphene and the metal electrode is a crucial factor in achieving the high performance of graphene transistors. However, there is not sufficient research about contact resistance reduction methods to improve the junction of metal-graphene. In this paper, we propose a new method to decrease the contact resistance between graphene and metal using directly grown graphene over a metal surface. The study found that the grown graphene over copper, as an intermediate layer between the copper and the transferred graphene, reduces contact resistance, and that the adhesion strength between graphene and metal becomes stronger. The results confirmed the contact resistance of the metal-graphene of the proposed structure is nearly half that of the conventional contact structure.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.4 s.175
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• pp.963-971
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• 2000

Gerotor is a planar mechanism consisting of a rotor and lobes which form a closed space, namely a chamber. As active contact points between a rotor and lobes are subjected to very high contact stresses, wear in one or both of the rotor and lobe cannot be avoided. Therefore, in the design of Gerotor used in hydraulic motors a compromise between high torque output and contact stress is of great importance and a thorough analysis of design parameters should be conducted to achieve this compromise. In this study, a contact point is modelled as a linear spring in consideration of equivalent curvature to analyze the contact stress. As the contact stress calculation in this problem is a statically indeterminate type, a numerical iterative scheme has been adopted to obtain the solution. To fully understand the influence of design parameters on the contact stress, the relationship between pressure force, equivalent curvature, contact force and contact stress are analyzed. It is shown that the equivalent curvature of the contact point is a dominant factor that affects the maximum contact stress.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.318.2-318.2
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• 2014

The high contact resistance is still one of the major issues to be resolved in CdS/CdTe thin film solar cells. CdTe/Metal Schottky contact induced a high contact resistance in CdS/CdTe solar cells. It has been reported that the work function of CdTe thin film is more than 5.7 eV. There has not been a suitable back contact metal, because CdTe thin film has a high work function. In a few decades, some buffer layer was reported to improve a back contact problem. Buffer layers which are Te, $Sb_2Te_3$, $Cu_2Te$, ZnTe:Cu and so on was inserted between CdTe and metal electrode. A formed buffer layers made a tunnel junction. Hole carriers which was excited in CdTe film by light absorption was transported from CdTe to back metal electrode. In this report, we reported the variation of solar cell performance with different buffer layer at the back contact of CdTe thin film solar cell.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.4
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• pp.56-63
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• 1997

Sealing of lubricant-air mixture in the high performance machining center is one of most the important characteristics to carry out enhanced lubrication. High speed spindle requires non-contact type of sealing mechanism. Evaluating an optimum seal design to minimize leakage is concerned in the aspect of flow control. Effect of geometry and leakage path are evaluated according to variation of sealing geometry. Velocity, pressure, turbulence intensity of profile is calculated to find more efficient geometry and variables. This offers a methodological way of enhancement seal design for high speed spindle. The working fluid is regarded as two phases that are mixed flow of oil phase and air phase. It is more reasonable to simulate an oil jet or oil mist type high speed spindle lubrication. Turbulence and compressible flow model are used to evaluate a flow characteristic. This paper considers a design effect of sealing capability of non- contact type seals for high speed spindle and analyzes leakage characteristics to minimize a leakage 7 on the same sealing area.

• Korean Journal of Applied Biomechanics
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• v.17 no.3
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• pp.11-21
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• 2007

The purpose of this study was to examine the differences of kinematics and muscle activities depending on the changes of angle approaching balls during backhand drive in squash. The results are as follows. Stride time took the longest at AD2 and step lengths were the biggest at AD1 of left foot contact and right foot contact and AD2 of impact and follow-through. The center of gravity and the speed of racket head were the highest at AD3 and at AD2. Angle of shoulder joint were the biggest at AD1 of left foot contact, right foot contact and impact and AD3 of follow-through. Angle of elbow joint were the biggest at AD3 of left foot contact, right foot contact and follow-through and AD2 of impact. Angle of pelvis joint were the biggest at AD2 of left foot contact, AD1 of right foot contact and AD3 of impact and follow-through. Angle of knee joint were the biggest at AD2 of left foot contact, AD1 of right foot contact and AD3 of impact and follow-through. Angle of ankle joint were the biggest at AD1 of left foot contact and AD3 of right foot contact, impact and follow-through. According to the analysis results of triceps brachii, latissimus dorsi, brachioradialis muscle and flexor carpi ulnaris muscle activities were high at AD1 of all phases. Analysis results of vastus lateralis, vastus medialis, tibialis anterior and gastrocnemius medial muscle activities were high at AD2 of phase1 and phase3. Those of vastus lateralis, vastus medialis and tibialis anterior, gastrocnemius medial were high at AD3 of Phase 2 and AD1 of phase2.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.89-90
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• 2002

Ball reducer (HERB Drive: High Efficient Wave Rolling Ball Drive) with waved grooves has many advantages over other types of reducers for high-reduction ratio, low noise and low energy loss, etc. The mechanism of force transmission is very similar to that of cam and follower in automobile valve train system especially in contact behaviors. In this study, we have investigated the traces of contact between ball and outer ring, and the dynamic contact behaviors of elastohydodynamic lubrication(EHL) with a certain reduction ratio. In order to verify the contact behaviors between ball and outer ring for the critical endurance lift, the contact velocity and load are computed for a cycle. During some intervals of a cycle, the contact velocity reverses its direction very suddenly. It is expected that changing the contact direction causes undesirable endurance performance because EHL film frequently col lapse at the moment of velocity reversal. From the computational investigation in this work, we hope to predict similar contact damages in other machinery due to this kind of contact behaviors, which is very typical in many contact phenomena.

• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.131-135
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• 2005

This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.2 s.233
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• pp.169-175
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• 2005

In this paper, the contact stress and strain distributions in elastomer O-ring seals have been analyzed using a non-linear finite element method. The stress behavior of PTFE materials is assumed as Odgen model because the sealing clearance between the flange and the surface of the O-ring is not small and the sealing pressure of working fluids covers from the atmospheric pressure to high pressure of 15MPa. The contact normal force and stress in wavy O-rings in which is developed for this analysis are uniformly distributed along the flange and the wall of the rectangular groove. And the normal sealing forces are also kept high compared to other contact sealing models such as the conventional O-ring and X-ring, Thus, the FEM computed results indicate that the sealing characteristic of wavy O-rings is food compared with other contact seals.