• 제목/요약/키워드: High Aspect Ratio

검색결과 948건 처리시간 0.032초

광소자 응용을 위한 UV-LIGA 공정 기반의 MEMS 소자 제작 (Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA Process)

  • 강호관;채경수;문성욱;오명환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.1050-1053
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    • 2002
  • This paper presents metal structure that is fabricated using UV-LIGA process with PMER N-CA3000. In order to fabricate metal structure with high aspect ratio, the systematic optimization method was adopted and then the structure of $36{\mu}m$ thick mold with aspect ratio 7:1 (trench) and $32{\mu}m$ thick nickel structure was obtained. This structure is applied to the fabrication of optical switch.

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다중 미세 각주 구조물의 사출성형기술 연구 (A Study on the Injection Molding Technology by Micro Multi-Square Strucrure Mold)

  • 제태진;신보성;박순섭
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 추계학술대회 논문집
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    • pp.1061-1064
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    • 1997
  • Micro injection molding technology is very important fiw mass product of micro structures or micro parts. And, it is so difficult that the molding technology of micro pole or thin wall(barrier rib) structures with high aspect ratio. In this stud). \vc intend to research on the basic technology of micro wall structure part:< with high aspect ratio by the inject~on moldins method. The mold for esperimenrs with micro multi-square structures was made by L, I(;A process. One square polc's size is 157 157pm. height 50011111. And the distance of each poles is 5011n1. 7'hus. molding products will be for~nctl like as the net structure with thin wall of about 50pn thickness.(aspect ratio 10) Ihrough the e~lxriment. \be obtained the prociuctr of micro multi-square slructure with bout 37.000 cell per a piece. 'Ihe micro injection molding process technolog for thin wall by multi-square structure mold was analy~cd.

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모듈형 편평원관군 열교환기의 열전달 특성 해석 (Analysis of Geometrical Effects on Heat Transfer Characteristics in a Modular Flat Tube-Bundle Heat Exchanger)

  • 박병규;이준식
    • 설비공학논문집
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    • 제17권11호
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    • pp.1014-1021
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    • 2005
  • Flow channels with non-circular cross-sections are encountered in a wide variety of heat exchangers. Accurate friction factor and Colburn j factor data are essential for the design and viable applications of such heat exchangers. In this study, an analysis is con ducted on heat transfer and pressure drop characteristics for tube-bundle heat exchanger with various arrangements of tubes, of which their geometry could easily be modified from a circular one in a harsh environment. The parameters investigated are aspect ratio, pitch, and inclined angle of tubes. The results obtained are: (1) Aspect ratio has larger influence on the j and f factor than pitch; (2) As aspect ratio increases, both j and f factors decrease; (3) The high performance is achieved when the pitch and aspect ratio are in the range of 1.5${\~}$2.5 and 1.25${\~}$2.0, respectively; and (4) the inclined arrangements of tubes show unfavorable results for both heat transfer and pressure drop characteristics in spite of the positive possibility of condensate removals in a latent heat recovery system.

노즐 형상비에 따른 고압분사의 유동 특성에 관한 실험적 연구 (Experimental Investigation on the Flow Characteristics of High Pressurized Jet with Nozzle Aspect Ratio)

  • 이상진;남궁정환;노병준
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.2031-2036
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    • 2003
  • High-pressurized jet is widely using in industrial works. however, few papers studied on the performances or characteristics on that kind of nozzles. And in this study, some flow characteristics with the variation of nozzle aspect ratios such as mean velocity distributions, momentum variations along the center line have been experimentally investigated. As the results, some semi-empirical correlations of profiles of pressure and mean velocity distributions, momentum conservations with the nozzle aspect ratios are formulated. It is expected that these empirical formula can be applied for the random estimations of nozzle performances.

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마이크로광조형에서 고 세장비 구조물 집적화 가공을 위한 UV 경화성 수지의 물성 개선 (Improvement of Mechanical Properties of UV-curable Resin for High-aspect Ratio Microstructures Fabricated in Microstereolithography)

  • 이수도;최재원;박인백;하창식;이석희
    • 한국정밀공학회지
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    • 제24권12호
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    • pp.119-127
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    • 2007
  • Recently, microstructures fabricated using microstereolithography technology have been used in the biological, medical and mechanical fields. Microstereolithography can fabricate real 3D microstructures with fine features, although there is presently a limited number of materials available for use in the process. Deformation of the fine features on a fabricated microstructure remains a critical issue for successful part fabrication, and part deformation can occur during rinsing or during fabrication as a result of fluid flow forces that occur during movement of mechanical parts of the system. Deformation can result in failure to fabricate a particular feature by breaking the feature completely, spatial deflection of the feature, or attaching the feature to neighboring microstructures. To improve mechanical strength of fabricated microstructures, a clay nanocomposite can be used. In particular, a high-aspect ratio microstructure can be fabricated without distortion using photocurable liquid resin containing a clay nanocomposite. In this paper, a clay nanocomposite was blended with a photocurable liquid resin to solve the deformation problem that occurs during fabrication and rinsing. An optimal mixture ratio of a clay nanocomposite was found through tensile testing and the minimal allowable distance between microstructures was found through fabrication experimentation. Finally, using these results, high-aspect ratio microstructures were fabricated using a clay nanocomposite resin without distortion.