• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2482-2487
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• 2007

Numerical simulations are conducted for the analysis of a thermal mass air flow sensor with periodic heating pulses on silicon-nitride ($Si_3N_4$) thin membrane structure. This study aims to find the locations of temperature sensors on the thin membrane and the heating pulse conditions, that the higher sensitivity can be achieved, for the development of a MEMS fabricated mass air flow sensor which is driven in periodic heating pulse. The simulations, thus, focus on the membrane temperature profile according to variation of the flow velocity, heating duration time and imposed power. The flow velocity of the simulations is ranging from 3 m/s to 35 m/s, heating duration time from 1 ms to 3 ms and imposed power from 50 mW to 90 mW. The corresponding Reynolds numbers vary from 1000 to 10000.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1842-1846
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• 2008

This work reports development of novel liquid-level sensors based on the $3{\omega}$ method. The sensors determine the liquid level by measuring the thermal response as in the conventional hot-wire technique. However the sensors employ an AC heating method to enhance the sensitivity, noise resistance and time response. Also, the microfabricated thin-film structure of the sensor provides mass-producibility as well as improved sensor performance owing to the increase in the surface-volume ratio of the sensor. Two different types of the sensor are developed: one for point detection of the fluid phase and the other for monitoring continuous variation of liquid level. Notable is that the performance of the sensor is not considerably affected by the liquid flow.

• 한국생산제조학회지
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• 제24권1호
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• pp.103-109
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• 2015

This paper introduces a multi-purpose smart fusion sensor. Normally, this type of sensor can contribute to energy savings specifically related to lighting and heating/air conditioning systems by detecting individuals in an office building. If a fire occurs, the sensor can provide information regarding the presence and location of residents in the building to a management center. The system consists of four sensors: a thermopile sensor for detecting heat energy, an ultrasonic sensor for measuring the distance of objects from the sensor, a fire detection sensor, and a passive infrared sensor for detecting temperature change. The system has a wireless communication module to provide the management center with control information for lighting and heating/air conditioning systems. We have also demonstrated the usefulness of the proposed system by applying it to a real environment.

• 융합보안논문지
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• 제8권1호
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• pp.27-33
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• 2008

본 연구에서는 센서네트워크 기반의 컴퓨팅 기술이 혼합된, 개별난방 제어 시스템을 제안한다. 지그비 RF 기술과 임베디드 하드웨어 기술의 조합을 통하여, 주택 및 아파트 등에서 각 방별로 온도 및 습도를 취합하여 난방을 관리할 수 있다. 또한 제안된 시스템은 체감온도 기반으로 난방을 관리하여 인간에게 쾌적한 환경을 제공하기 위한 최적의 선택이라 할 수 있다.

• 한국전기전자재료학회논문지
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• 제11권11호
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• pp.996-1000
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• 1998

This paper describes the characteristics of Pt microheater using aluminum oxide films as medium layer and its application to flow sensors. Pt microheater have heating temperature of $390^{\circ}C$ at heating power of 1.2 W. Output voltages of flow sensors which were fabricated by integrating sensing-part with heating-part increase as gas flow rate and its conductivity increase. At $O_2$ flow rate of 2000 sccm, heating power of 0.8 W, output voltage of flow sensor is 101 mV under bridge-applied voltage of 5 V.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• Journal of Advanced Marine Engineering and Technology
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• 제28권3호
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• pp.531-537
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• 2004

In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.

• 한국정보통신학회논문지
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• 제23권10호
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• pp.1188-1194
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• 2019

유체의 흐름을 측정하는 여러 방법 중 열선 풍속 센서는 유체의 열전달에 의해 속도나 온도를 측정하는 장치로 비정상 속도 및 난류 속도 성분을 측정하는데 유용하다. 하지만 열선 풍속 센서는 외부의 환경 요인에 민감하며, 주변 온도, 습도, 신호 잡음 등에 의해 정확도가 떨어지는 단점이 있다. 이런 단점을 보완하는 방법으로 온도 보상 회로를 추가하는 기술이 나오고 있지만 가격 경쟁력을 갖출 수 없는 상황이다. 이를 해결하기 위해 본 논문에서는 온도 보상이 필요 없는 풍속 감지 센서에 대해 연구를 진행하였다. 열선식 풍속 센서는 외부 환경 요인 중에서도 주변 온도에 매우 취약하다. 주변 온도로는 전자 회로에 의한 발열의 영향이 가장 크게 미치고 있으며, 이를 개선하는 방법으로 발열체에 보조 발열체를 추가로 장착하여 보조발열체와 발열체의 일정한 온도차를 제어하는 것이다. 이와 같이 기존 기술에 비해 복잡하지 않은 방법으로 동등한 성능을 확보할 수 있다는 것을 확인할 수 있었다.

• 동력기계공학회지
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• 제7권3호
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• pp.35-39
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• 2003

In this paper, the heat transfer phenomena in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC, the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations of flow rate, generated heat by heating wire, sensor location and tube thickness were investigated to find the optimized condition. Based on this study, static and dynamic characteristics of sensor can be used for mass flow controller.

• 센서학회지
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• 제29권4호
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• pp.220-226
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• 2020

Graphene has been widely considered a promising candidate for high-quality chemical sensors, owing to its outstanding characteristics, such as sensitive gas adsorption at room temperature, high conductivity, high flexibility, and high transparency. However, the main drawback of a graphene-based gas sensor is the necessity for external heaters due to its slow response, incomplete recovery, and low selectivity at room temperature. Conventional heating devices have limitations such as large volume, thermal safety issues, and high power consumption. Moreover, metal-based heating systems cannot be applied to transparent and flexible devices. Thus, to solve this problem, a method of supplying the thermal energy necessary for gas sensing via the self-heating of graphene by utilizing its high carrier mobility has been studied. Herein, we provide a brief review of recent studies on self-activated graphene-based gas sensors. This review also describes various strategies for the self-activation of graphene sensors and the enhancement of their sensing properties.