• Title/Summary/Keyword: Heating Plate

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A Heating Apparatus for Semiconductor Manufacturing using Direct Heating Method (직접 가열 방식을 이용한 반도체 제조용 히팅 장치)

  • Jung, Soon-Won;Koo, Kyung-Wan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.4
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    • pp.408-411
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    • 2008
  • As to this research is new structure of the semiconductor substrate heating apparatus. The fast thermoresponsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. For this, it adheres closely to the substrate, in which the photosensitive film is coated and the heating plate layer, adhering closely to the floor side of a substrate the mica layer which adheres closely to the floor side of the upper heating plate layer in order to minimize an insulation and heat loss, and the lower part of the mica layer and it is comprised of the floor plate layer. The heating plate layer forms the continued groove portion over the floor side whole. The sheath heater for heating a substrate is inserted with the groove portion and the heating plate layer is comprised. It is confirmed that by using the new substrate heating structure, the temperature change of the heating plate against the time is observed. Then, there is the electric power saving effect of about 40% in comparison with the existing method.

Thermal Deformation of Curved Plates by Line Heating (선상가열법에 의한 곡판의 열변형)

  • LEE JOO-SUNG;LIM DONG-YONG
    • Journal of Ocean Engineering and Technology
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    • v.19 no.1 s.62
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    • pp.33-38
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    • 2005
  • It has been well documented that plate forming is one of the most important processes in shipbuilding. In the most shipyards, the line heating method is primarily used for plate forming. Since the heating process is carried out for the curved plate and not for the flat plate, a curvature effect on the final deformation must be considered in deriving the simplified prediction models for deformation. This paper investigates the effect of curvature along the heating line on the deformation of the plate. First of all, results of numerical analysis are compared with these of a line-heating test, to justify the elasto-plastic analysis procedure for the present study, which shows good agreement. Then, the present numerical procedure is applied to flat and curved plate models, to investigate the curvature effect on the heat transfer characteristics and deformation by line heating.

Development of stress correction formulae for heat formed steel plates

  • Lim, Hyung Kyun;Lee, Joo-Sung
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.10 no.2
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    • pp.141-152
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    • 2018
  • The heating process such as line heating, triangular heating and so on is widely used in plate forming of shell plates found in bow and stern area of outer shell in a ship. Local shrinkage during heating process is main physical phenomenon used in plate forming process. As it is well appreciated, the heated plate undergoes the change in material and mechanical properties around heated area due to the harsh thermal process. It is, therefore, important to investigate the changes of physical and mechanical properties due to heating process in order to use them plate the design stage of shell plates. This study is concerned with the development of formula of plastic hardening constitutive equation for steel plate on which line heating is applied. In this study the stress correction formula for the heated plate has been developed based on the numerical simulation of tension test with varying plate thickness and heating speed through the regression analysis of multiple variable case. It has been seen the developed formula shows very good agreement with results of numerical simulation. This paper ends with usefulness of the present formula in examining the structural characteristic of ship's hull.

Simulation of Line Heating by High frequency Induction Heating (고주파 유도 가열에 의한 선상가열 시뮬레이션)

  • 김호경;장창두
    • Journal of Ocean Engineering and Technology
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    • v.17 no.1
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    • pp.80-85
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    • 2003
  • In this study, we developed an analysis method of plate forming by induction heating, verifying the effectiveness of the present method through a series of experiments. The phenomena of the induction heating involves a 3D transient problem, coupled with electromagnetic, heat transfer, and elastoplastic large deformation analyses. To solve the problem, or present an appropriate model and an integrated system. Using the present analysis model, or can estimate the plate deformation in heating without experiments and simulate the plate bending process of induction heating.

Prediction of Heating-line Positions for Line Heating Process by Using a Neural Network (신경회로망을 이용한 선상가열공정의 가열선 위치선정에 관한 연구)

  • 손광재;양영수;배강열
    • Journal of Welding and Joining
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    • v.21 no.4
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    • pp.31-38
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    • 2003
  • Line heating is an effective and economical process for forming flat metal plates into three-dimensional shapes for plating of ships. Because the nature of the line heating process is a transient thermal process, followed by a thermo elastic plastic stress field, predicting deformed shapes of plate is very difficult and complex problem. In this paper, neural network model o3r solving the inverse problem of metal forming is proposed. The backpropagation neural network systems for determining line-heating positions from object shape of plate are reported in this paper. Two cases of the network are constructed-the first case has 18 lines which have different positions and directions and the second case has 10 parallel heating lines. The input data are vertical displacements of plate and the output data are selected heating lines. The train sets of neural network are obtained by using an analytical solution that predicts plate deformations in line heating process. This method shows the feasibility that the neural network can be used to determine the heating-line positions in line heating process.

An Assemble and Expandable Substrate Heating Apparatus for the Semiconductor Manufacturing (조립과 확장이 가능한 반도체 제조용 기판 가열 장치)

  • Jung, Soon-Won;Koo, Kyung-Wan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.1
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    • pp.67-71
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    • 2009
  • This research is a new structure of the semiconductor substrate heating apparatus in which the assembly and expansion are possible. The fast thermo-responsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. There is no problem with the deformation interpreted in the state where it assembles the block of a several of the simulation result structure, the safety, and the stress. In addition, it is confirmed that building a large-size heating block is possible since the temperature deflection of the manufactured plate is lower than the standard value.

Effects of Stainless Steel Plate-Patterns on the Thermal Distortion and Surface Temperature of Aluminum Frypan (알루미늄 프라이팬에 부착된 스텐리스판의 패턴이 열 변형 및 표면온도에 미치는 영향)

  • Moon, Sungmo;Yoon, Myungsik
    • Journal of the Korean institute of surface engineering
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    • v.53 no.5
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    • pp.227-231
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    • 2020
  • This article investigated the effects of stainless steel plate-patterns bonded to aluminum frypan on the thermal distortion and surface temperature of the frypan during gas or induction heating. Two different stainless steel plate-patterns were employed: type A contains only circular holes and type B has not only circular holes but also vacant spaces of 0.5 mm thick and 40 mm long straight line crossing 60 mm long curved line. The bottom of the frypan was distorted during heating when type A stainless steel plate-bonded frypan while no significant thermal distortion was observed for type B stainless steel plate-bonded frypan during heating. Temperature of the frypan surface showed the same trend during gas heating, irrespective of stainless steel plate-patterns. During induction heating, however, the frypan with type B stainless steel plate-pattern showed lower surface temperature than the frypan with type A stainless steel plate-pattern. It is concluded that Type B stainless steel plate-pattern with circular holes and vacant spaces of lines is very effective for minimizing a thermal distortion and lowering the surface temperature of an aluminum frypan during induction heating.

Numerical Analysis of Plate Deformation by Induction Heating (고주파 유도 가열에 의한 판 변형의 간이 수치 해석)

  • 장창두;김호경;하윤석
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 2002.04a
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    • pp.311-318
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    • 2002
  • In this study, we developed an analysis method of plate forming by induction heating and verified the effectiveness of the present method through a series of experiments. The phenomena of the induction heating is a 3D transient problem coupled with electromagnetic, heat transfer, and elastoplastic large deformation analyses. To solve the problem, we suggest a proper model and an integrated system. Using the present analysis model, we can estimate the plate deformation in heating without experiments and simulate the plate bending process of induction heating.

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Development of Numerical Control System for Plate forming Automation (강판의 곡가공 자동화를 위한 수치제어 시스템의 개발)

  • 이주성
    • Journal of Ocean Engineering and Technology
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    • v.17 no.1
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    • pp.72-79
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    • 2003
  • This paper deals with the development of an interface program for automatic plate forming, which can exchange information between the heating line information generation program and the automatic heating apparatus. In this paper, the performance of the developed interface program has been verified from the view point of numerical position control. By applying the interface program to the operation of the automatic heating apparatus, an experiment of line heating has been conducted for several steel plate models. Based on the experimental results, a simplified relation to estimate angular distortion has keen derived as a natural characteristic of the present automatic heating apparatus. As a result of the present study, the prototype of the automatic plate forming system has been constructed, and its application to the real surface models found in the ship will be presented in the near future.

Analysis of plate deformations in thermal processing using the eigenstrain concept (고유변형율의 개념을 이용한 열가공공정시 판 변형 예측에 관한 연구)

  • 손광재;양영수
    • Proceedings of the KWS Conference
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    • 2002.05a
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    • pp.149-151
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    • 2002
  • In this study, a formula for thermal processing induced plate deformations, in terms of process parameters such as heat input and plate thickness, is developed analytically using an infinite laminated plate theory to consider cuboidal inclusion with an eigenstrains. When a plate has arbitrary heating lines, complex deformed shape of plate was calculated by the method estimating plate deformation proposed by this study. To make a curved surface of the ship hull, the line heating method is mainly used. Application in automatization of line heating was deliberate by using proposed method.

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