• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.85-86
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• 2012

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.308-313
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• 2003

Thermal mass flow meters (TMFMs) are most widely used for measuring mass flow rates in the semiconductor industry. A TMFM should have a short response time in order to measure the time-varying flow rate rapidly and accurately. Therefore it is important to study transient heat transfer phenomena in the sensor tube of a TMFM that is the most critical part in the TMFM. In the present work, a simple numerical model for transient heat transfer phenomena of the sensor tube of a TMFM is presented. Numerical solutions for the tube and fluid temperatures in a transient state are obtained using the proposed model and compared with experimental results to validate the proposed model. Based on numerical solutions, heat transfer mechanism in a transient state in the sensor tube is explained. Finally, a correlation for predicting the response time of a sensor tube is presented. The correlation is verified by experimental results.

• 동력기계공학회지
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• 제7권3호
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• pp.35-39
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• 2003

In this paper, the heat transfer phenomena in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC, the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations of flow rate, generated heat by heating wire, sensor location and tube thickness were investigated to find the optimized condition. Based on this study, static and dynamic characteristics of sensor can be used for mass flow controller.

• 한국소음진동공학회논문집
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• 제25권10호
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• pp.707-713
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• 2015

This paper proposes experimental results for control performance deterioration of a piezoelectric actuator under high temperature conditions due to external heat environment. In this work, a heat environment from 30 ℃ to 190 ℃ is established by a heat chamber which is capable of high temperature of heat environment. Inside the heat chamber, an experimental apparatus consisting of the stack type of piezoelectric actuator, laser sensor, gap sensor and temperature sensor is established. After evaluating temperature dependent blocking force, displacement and time response of a piezoelectric actuator inside the heat chamber, tracking control performances are evaluated under various temperature conditions via proportional-integral-derivative(PID) feedback controller. The desired position trajectory has a sinusoidal wave form with a fixed frequency. Control performances are experimentally evaluated at both room temperature and high temperature and presented in time domain.

• Progress in Superconductivity
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• 제12권1호
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• pp.41-45
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• 2010

Low temperature micro-calorimeters have been employed in the field of high resolution alpha spectrometers. These alpha detectors typically consist of a superconducting or metal absorber and a temperature sensor. The temperature sensor can be a transition edge sensor (TES), a metallic magnetic calorimeter (MMC) or other low temperature detectors for an accurate measurement of temperature change due to an alpha particle absorption. We report a recent study of the heat flow between a replaceable absorber and a temperature sensor. A piece of gold foil in $2.4{\times}2.7{\times}0.03\;mm^3$ is used as an absorber. A $40\;{\mu}m$ diameter Au:Er paramagnetic sensor is attached to another small piece of gold foil in $400{\times}200{\times}30\;{\mu}m^3$ to serve as the temperature sensor. This sensor assembly, Au:Er and gold foil, is placed on a miniature SQUID susceptometer in a gradiometric configuration. The thermal connection between the absorber and the sensor was made with three gold bonding wires. The measured thermal conductance shows a linear dependence to the temperature. The values are in a good agreement with Wiedemann-Franz type thermal conductance of the gold wires.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.28-40
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• 2022

Although precise temperature control in the heat treatment process is a key factor in process reliability, there are many cases where there is no separate heat source control optimization system in the field. To solve this problem, the program monitors the temperature data according to the heat source change through sensor communication in a recursive method based on multiple variables that affect the process, and the target heat source value and the actual heat treatment heat source to match the internal air temperature and material temperature. A control optimization system was constructed. Through this study, the error rate between the target temperature and the atmosphere (material surface) temperature of around 10.7% with the existing heat source control method was improved to an improved result of around 0.1% using a process optimization algorithm and system.

• 한국가스학회:학술대회논문집
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• 한국가스학회 1997년도 추계학술발표회 논문집
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• pp.229-235
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• 1997

A low power (300 mW) catalytic bead combustible gas sensor is developed and utilized with a computer controlled sampling system for measuring heat content of natural gas. The heat content of gas is proportional to the change in the energy required to exposure to the sample of combustible gas. The heat content of natural gas samples ranging 36.30 - 39.88 MJ/$m^3$ is measured in the range of approximately $1\%$ error, which is comparable to its nominal heat content. Each gas has a slightly different curve of sensitivity vs. sensor temperature. Thus there Is no temperature at which all sensitivities are equal. In calibration process the choice of a optimum operating temperature is an important factor that influences the overall performance of the measurement system.

• 대한기계학회논문집
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• 제12권3호
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• pp.622-629
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• 1988

본 연구에서는 박판형 열유속 센서의 감도를 높임과 동시에 두께와 면적을 줄 이기 위한 방안으로서 시벡 계수(Seebeck doefficient)가 일반 열전대재료보다 월등히 큰 반도체 열전재료를 이용하여 박판형 센서를 제작하고 그 성능을 조사하였다. 센 서의 제작에 사용한 열전재료는 Melcor 사에서 열전 열펌프 생산에 사용하기 위하여 개발한 소자로서 통상 텔루루화 비스무스(bismuth telluride)라 불리우며 그 조성은 비스무스, 텔루륨, 셀레늄, 안티몬의 4가지 합금에 미량의 불순물(dopent)이 첨가된 것으로 불순물의 종류에 따라 전기적인 P형 또는 N형의 반도체가 되는 것으로 알려져 있으며 Table 1에 물성치가 나타나 있다.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.132-136
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• 2004

대기중의 NO₂ 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. WO₃와 같은 가스 감응물질을 목표 온도까지 가열하기 위해서 마이크로 핫플레이트를 가스센서에 장착하였다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘 웨이퍼 기판의 온도가 거의 상온에 가까워 핫플레이트에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 마이크로 핫플레이트의 형상을 변경함으로써 가스 감지물질의 온도 균일도를 높일 수 있다.

• 센서학회지
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• 제24권3호
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• pp.155-158
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• 2015

In this paper, in-situ heat cooling with temperature monitoring is reported to solve thermal issues in electric vehicle (EV) batteries. The device consists of a thick graphene cooler on top of the substrate and a platinum-based resistive temperature sensor with an embedded heater above the graphene. The graphene layer is synthesized by using chemical vapor deposition directly on the Ni layer above the Si substrate. The proposed thick graphene heat cooler does not use transfer technology, which involves many process steps and does not provide a high yield. This method also reduces the mechanical damage of the graphene and uses only one photomask. Using this structure, temperature detection and cooling are conducted simultaneously using one device. The temperature coefficient of resistance (TCR) of a $1{\times}1mm^2$ temperature sensor on 1-$\grave{i}m$-thick graphene is $1.573{\times}10^3ppm/^{\circ}C$. The heat source cools down $7.3^{\circ}C$ from $54.4^{\circ}C$ to $47.1^{\circ}C$.