• 한국생산제조학회지
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• 제22권2호
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• pp.310-317
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• 2013

In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1998년도 제28회 추계학술대회
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• pp.131-138
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• 1998

It is essential that hard disk drives perform reliable under various temperature, humidity, and ambient pressure conditions. In this paper the tribological characteristics of a head/disk interface are investigated under various environmental conditions. Specially, Contact-Start-Stop(CSS) tests were performed to assess the stiction and slider take-off behavior. It is shown that the surface damage is accelerated by high temperature and humidity as well as low ambient pressure.

• 대한물리의학회지
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• 제16권2호
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• pp.1-8
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• 2021

PURPOSE: This study examined the effects of changes in the head direction (forward, upward 10° and downward 10°) on the quadriceps, center of pressure (COP), and foot pressure during squat exercises. The aim was to determine if the head direction could better activate the quadriceps muscle and provide a safer and stable squat posture during squat exercise. METHODS: Fifteen healthy college students were asked to stand on a Zebris, and three electrodes for sEMG were attached to their vastus medialis oblique (VMO), vastus lateralis (VL), and rectus femoris (RF) muscles. The participants then performed squatting exercises under three head directions (forward, upward 10°, and downward 10°). Surface electrodes were then used to record the EMG data during exercise. The Zebris FDM-SX was used to measure the foot pressure and COP of the participants. RESULTS: In squat exercise, the upward head direction group showed significantly higher VL activation than the downward head direction group (p < .05). The upward head direction group showed a significant backward change in the deviation of the COP than the downward and forward groups (p < .05). The upward head direction group showed a significant decrease in forefoot pressure than the downward and forward groups (p < .05) and an increase in the hindfoot pressure compared to the downward and forward groups (p < .05). CONCLUSION: The head direction upward in squat exercise has a positive effect on the quadriceps.

• 대한인간공학회지
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• 제30권2호
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• pp.339-347
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• 2011

Objective: The purpose of this study was to evaluate of various material of pillows by using biomechanical variables such as the cervical stability, head pressure distribution, and muscle activity. Method: Eight subjects participated in the experiment. Three different materials such as polyester sponge, memory foam and the buckwheat shell used for Korean traditional pillow were tested. Electro-goniometer, six channels of electromyography(EMG), ten channels of the head pressure sensors were used to measure the biomechanical responses. Surface electrodes were attached to the right/left semispinals capitis(RSC, LSC), the right/left sternocleidomastoid(RSM, LSM), the right/left upper trapezius(RUT, LUT). The cervical stability was evaluated by the angle deviated from the standing neck position. The head pressure distribution was evaluated by the pressure per unit area recorded on the sensors and the intensity of peak pressure. Electromyography(EMG) data were analyzed by using root mean square(RMS) and mean power frequency(MPF). Results: The buckwheat shell material showed a higher stability in the cervical spine then the other pillows during spine position. In terms of head pressure distribution, the memory form indicated the lowest pressure at supine position, buckwheat shell material indicated the lowest pressure during lying down to side, and polyester cushion recorded the highest pressure at all postures. Conclusion: The buckwheat shell material has a biomechanical advantage to maintain a healthy neck angle and reduce the pressure on the head, which means the buckwheat shell is a potential material for ergonomic pillow design. The pillow with memory form showed second best biomechanical performance in this study. Application: The shape of the buckwheat shell pillow and the characteristics of materials can be used to design the pillow preventing neck pain and cervical disk problems.

• Design & Manufacturing
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• 제10권2호
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• pp.18-23
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• 2016

Injection molded thermoplastic parts may need to be coated to facilitate paint adhesion, or to satisfy other surface property requirements, such as appearance, durability, and weather resistance. In this paper, a two-component polyurethane metering system was developed for the simultaneous injection and surface coating of a plastic substrate. The system was composed of storage tanks, feed pumps, axial piston pumps, mixing head. The tank was designed to be double-jacket structured and fabricated for polyol and isocyanate, respectively. A temperature chamber was used to maintain the material temperature to be $80^{\circ}C$ during flowing from storage tank to mixing head. Inside the chamber, feed pump, low pressure filter, high pressure pump, high pressure filter, pressure sensor, flow meter were installed. A mixing head of L-type was used for homogeneous mixing of polyol and isocyanate. Inside the mixing head, a cartridge heater and a temperature sensor were installed to control the temperature of the materials. The flow rate of axial-piston pump was controlled by using closed-loop feedback control algorithm. The input flow-rates were compared with the measured values. The output error was 6.7% for open-loop control, whereas the error was below 2.2% for closed-loop control. In addition, the pressure generated through mixing-head nozzle increased with increasing flow rate. It was found that the pressure drop between metering pump and mixing-head nozzle was almost 10 bar.

• 한국생산제조학회지
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• 제21권3호
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• pp.401-407
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• 2012

The recent manufacturing process in the thin wafers and flat panel necessitate new approaches to reduce handling fragile and surface-sensitive damage of components. This paper presents a new pneumatic levitation for non-contact handling of parts and substrates. This levitation can achieve non-contact handling by blowing air into an air pressure pick-up head with radial passages to generate a negative pressure region. Negative pressure is caused by the radial air flow by nozzle throat and through holes connecting to the bottom region. The numerical analysis deals with the levitational motion with different design factors. The dynamic motion is examined in terms of force balance(dynamic equilibrium) occurring to the flow field between two objects. The stable equilibrium position and the safe separation distance are determined by analyzing the local pressure distribution in the fluid motion. They make considerable design factors consisting the air pressure pick-up head. As a result, in case that the safe separation distance is beyond 0.7mm, the proposed pick-up head can levitate stably at the equilibrium position. Furthermore, it can provide little effect of torque, and obtain more wide picking region according to the head size.

• 대한기계학회논문집B
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• 제40권6호
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• pp.383-389
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• 2016

사각공동 및 채널이 형성된 마이크로구조 표면을 활용하여 수조비등 임계열유속에 대한 중력 및 모세관 압력의 영향에 대해 연구하였다. 마이크로 공동구조는 모세관 압력에 의한 액체유동을 억제하는 역할을 하였고, 마이크로 채널구조는 비등표면으로의 1차원적인 액체유동을 유발하는데 기여하였다. 이를 통해 임계열유속과 모세관 유동의 상관관계를 정량화할 수 있었다. 비등표면으로의 액체공급을 위한 원동력은 중력수두 및 모세관 압력에 의해 유발될 수 있다. 본 연구에서는 수조비등 실험 및 가시화 데이터의 분석을 통해 수조비등 표면에서의 핵비등을 유지할 수 있는 액체공급은 중력 수두 및 모세관 압력과 밀접한 상관관계를 가지고 있음을 확인할 수 있었다.

• 한국정밀공학회지
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• 제22권4호
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• pp.44-51
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• 2005

In this paper, a new polishing head with the variable pressure structure was studied to improve the planarization uniformity of the conventional template-metal head. Metal surface waviness and slurry distribution on the pad have been known to affect the polishing uniformity even in the synchronized quill and platen velocities. A polishing head with silicon rubber sheet was used to get a curved pressure distribution. In the experiment, the vertical deflection behavior on the pad was characterized with back pressure in the air chamber. Quill force increased linearly with backpressure. However, backpressure under a quill force made the upward movements of the quill. In the wafer polishing experiments, polishing rate and polishing thickness distribution were severely changed with backpressure. The best uniformity was observed with the standard deviation off.5％ level of average polishing removal 215nm at backpressure 12.1kPa.

• 한국안전학회지
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• 제16권2호
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• pp.13-21
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• 2001

The effect of water spray for the fire sprinkler depends on droples distribution over maximum possible floor area. The present study are carried out for the characteristics of water spray and droplets experimentally and numerically km two fire sprinkler heads which are CHM head and CHl heal CHl head is self-production and CHl head is widely used up to date. As the result of using CHM head, water spray and droplets are distributed over large area because CHM head has smooth surface and non-flamed shape. When the pressure of fire sprinkler head is low, SMD(sauter mean diameter) is large and when the pressure of fire sprinkler head is high, SMD is small.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제29회 춘계학술대회
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• pp.53-60
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• 1999

As the flying height decreased, it is essential that hard disk drives perform reliable under various environmental conditions. In this paper the tribological characteristics of a head/disk interface are investigated under various temperature, relative humidity, altitude and outgas conditions. Specially, Contact-Start-Stop(CSS) tests were performed to assess the stiction, acoustic emission, slider take-off behavior, and track average amplitude(TAA). It is shown that the surface damage and head failure are accelerated by high temperature and humidity as well as low ambient pressure.