• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.364-371
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• 1997

Silicon trench etching has been carried out using a magnetically enhanced reactive ion etching system in HBr plasma containing He-$O_2$, $CF_4$. The changes of etch rate and etch profile, the degree of residue formation, and the change of surface chemical state were investigated as a function of additive gas flow rate. A severe lateral etching was observed when pure HBr plasma was used to etch the silicon, resulted in a pot shaped trench. When He-$O_2$, $SiF_4$ additives were added to HBr plasma, the lateral etching was almost eliminated and a better trench etch profile was obtained. The surface etched in HBr/He-$O_2/SiF_4$ plasma showed relatively low contamination and residue elements compared to the surface etched in HBr/He-$O-2/CF_4$plasma. In addition, the etching characteristics including low residue formation and chemically clean etched surface were obtained by using HBr containing He-$O_2$ or $SiF_4$ additive gases instead of $CF_4$ gas, which were confirmed by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

• Journal of Soil and Groundwater Environment
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• v.13 no.1
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• pp.1-12
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• 2008

The purpose of this study is to characterize the hydrogeochemical characteristics of hot spring waters and to interpret the source of noble gases and the geochemical environment of the hot spring waters distributed along the eastern area of the Korean peninsula. For this purpose, We carried out the chemical, stable isotopic and noble gas isotopic analyses for eleven hot spring water and fourteen hot spring gas samples collected from six hot spring sites. The hot spring waters except the Osaek hot spring water show the pH range of 7.0 to 9.1. However, the Osaek $CO_2$-rich hot spring water shows a weak acid of pH 5.7. The temperature of hot spring waters in the study area ranges from $25.7^{\circ}C$ to $68.3^{\circ}C$. Electrical conductivity of hot spring waters varies widely from 202 to $7,130{\mu}S/cm$. High electrical conductivity (av., $3,890{\mu}S/sm$) by high Na and Cl contents of the Haeundae and the Dongrae hot spring waters indicates that the hot spring waters were mixed with seawater in the subsurface thermal system. The type of hot springs in the viewpoint of dissolved components can be grouped into three types: (1) alkaline Na-$HCO_3$ type including sulfur gas of the Osaek, Baekam, Dukgu and Chuksan hot springs, and (2) saline Na-Cl type of the Haeundae and Dongrae hot springs, and (3) weak acid $CO_2$-rich Na-$HCO_3$ type of Osaek hot spring. Tritium ratios of the Haeundae and the Dongrae hot springs indicate different residence time in their aquifers of older water of $0.0{\sim}0.3$ TU and younger water of $5.9{\sim}8.8$ TU. The ${\delta}^{18}O$ and ${\delta}D$ values of hot spring waters indicate that they originate from the meteoric water, and that the values also reflect a latitude effect according to their locations. $^3He/^4He$ ratios of the hot spring waters except Osaek $CO_2$-rich hot spring water range from $0.1{\times}10^{-6}$ to $1.1{\times}10^{-6}$ which are plotted above the mixing line between air and crustal components. It means that the He gas in hot spring waters was originated mainly from atmosphere and crust sources, and partly from mantle sources. The Osaek $CO_2$-rich hot spring water shows $3.3{\times}10^{-6}$ in $^3He/^4He$ ratio that is 2.4 times higher than those of atmosphere. It provides clearly a helium source from the deep mantle. $^{40}Ar/^{36}Ar$ ratios of hot spring water are in the range of an atmosphere source.

• Geosystem Engineering
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• v.21 no.6
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• pp.318-325
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• 2018

Eight tight sandstone reservoir samples from $He_8$ and $Shan_1$ Formations of the Sulige Gas field were selected to perform gas-water micro-displacement experiment based on authentic sandstone micro-model. The gas pressure-relief experiment was proposed for the first time to simulate the pressure change and gas-water percolation characteristics in the process of gas exploitation. The experiment results show that: (1) In the process of gas accumulation, the gas preferentially flows into the well-connected pores and throats with large radius, but rarely flows into the area without pores and throats. (2) Under sufficient gas drive, the water in pores and throats usually exists in the forms of 'thin water film', 'thick water film', and 'water column', but under insufficient gas drive, gas fails to flow into new pathways in time, so that the reservoirs with large pores and throats are high in water cut. (3) Under the same water saturation, the reservoirs with better petrophysical properties has higher gas recovery factor within unit time. Under the same petrophysical conditions, the reservoirs with lower water saturation show higher gas recovery factor within unit time. The higher the permeability, the stronger the liquid carrying capacity of reservoirs.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.13 no.6
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• pp.514-523
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• 2001

The thermal performance characteristics of gas-loaded heat pipe(GLHP) were investigated by using transient diffuse-front model. Numerical evaluation of the GLHP is made with water as a working fluid and Nitrogen as control gas in the stainless steel tube. The transient vapor temperature and wall temperature were obtained. It is found that the temperature profiles and gas mole fraction distribution have been mainly influence by the diffusion between working fluid and noncondensable control gas in the condenser of GLHP. It is also found that he large power input make the diffusion region smaller.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.2
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• pp.16-22
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• 2004

The paper presents the effects of output-coupling power and small signal gain of selenium vapour multiline laser by discharge of either to $^4$He or $^3$He. The purity of the He gas was improved with a special He-fille.. The result shows that compared with those of $^4$He, the output-coupling power and small-signal gain of $^3$He increase in the most of the lines. Especially, the small-signal gain of $^3$He for the strong lines (497.6 nm, 499.3 nm, 506.9 nm, 517.6 nm, 522.8 nm, 530.5 nm) lies about 30% higher than that of $^4$He, and the output-coupling power from doubles to triples.

• Korean Journal of Optics and Photonics
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• v.5 no.4
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• pp.457-460
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• 1994

Dependence of saturation energy density and small signal gain coefficient on the active gas pressure in XeCl laser amplifier has been investigated. The saturation energy density was increased almost linearly as 1.3, 1.45, 2.0, and $2.3mJ/\textrm{cm}^2$ when the pressure of Xe and He were 30 and 2000 mb, and the pressure of HC] was varied as 34, 52, 73, and 92 mb. Whereas the small signal gain coefficient was measured to be 6.5, 7.5, 7.0, 7.0 %/cm, which shows that the small signal gain did not varies not so much.o much.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.121-125
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• 2001

We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles bythe He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient as pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1568-1569
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• 2007

TFT-LCD used in display area is not a light-emissive device itself but TFT-LCD can overcome through the employ of the backlight unit (BLU). BLU is very important device in TFT-LCD system. However, the old-fashion BLU of CCFL type is crucible to the health due to the contained material, mercury (Hg). Moreover, strong temperature dependency of lamp employed with Hg becomes the other disadvantage in practical usage. To solve these problems, Hg-Free lamp with strong thermal resistance property is required to displace the Hg lamp. We studied optical and electrical properties of Xe-Ne-He mixed gas that is dependent on change of mixed ratio and pressure. In our results, the designed lamp without the phosphorescent material has the lowest firing voltage at xe 50%(Ne:He=9:1).

• Bulletin of the Korean Chemical Society
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• v.16 no.2
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• pp.101-104
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• 1995

In an attempt to understand the nature of hyperthermal ion-surface collisions, noble gas ion beams (He+, Ne+, Ar+, and Xe+) are scattered from a Si(100) surface for collision energies of 20-300 eV and for 45°incidence angle. The scattered ions are mass-analyzed using a quadrupole mass spectrometer and their kinetic energy is measured in a time-of-flight mode. The scattering event for He+ and Ne+ can be approximated as a sequence of quasi-binary collisions with individual Si atoms for high collision energies (Ei > 100 eV), but it becomes of a many-body nature for lower energies, Ar+ and Xe+ ions undergo mutliple large impact parameter collisions with the surface atoms. The effective mass of a surface that these heavy ions experience during the collision increases drastically for low beam energies.

• Bulletin of the Korean Chemical Society
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• v.12 no.6
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• pp.652-658
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• 1991

The effect of intermolecular collisions in the infrared multiphoton dissociation (IRMPD) of difluorochloromethane was investigated using He, Ar, and $N_2$ as buffer gases. The reaction probability for IRMPD of difluorochloromethane was measured as a function of laser fluence and the buffer gas pressure under unfocused beam geometry. It was observed that the reaction probability was initially enhanced with the increase of buffer gas pressure up to about 20 torr, but showed a decline at higher pressures. The reaction probability increases monotonically with the laser fluence, but the rate of increase diminishes at higher fluences. An attempt was made to simulate the experimental results by the method of energy grained master equation (EGME). From the parameters that fit the experimental data, the average energy loss per collision, $<{\Delta}E>_d$, was estimated for the He, Ar, and $N_2$ buffer gases.