• 한국전기전자재료학회논문지
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• 제30권8호
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• pp.501-507
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• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• 한국세라믹학회지
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• 제52권1호
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• pp.77-82
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• 2015

The effect of the electrode type on the dielectric and piezoelectric properties of $Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrO_3-PbTiO_3$ (PMN-PZT) single crystals was investigated in an effort to improve their properties for various piezoelectric applications. First, three different types of PMN-PZT single crystals [PMN-PZT-A (piezoelectrically soft type; dielectric constant ~ 10,000), PMN-PZT-B (piezoelectrically soft type; phase-transition temperature between the rhombohedral and tetragonal phases ($T_{RT}$) ~ $145^{\circ}C$), PMN-PZT-C (piezoelectrically hard type; high mechanical quality factor ($Q_m$) ~ 1,000)] were fabricated using the solid-state single crystal growth (SSCG) method. Then, four different types of electrodes [sputtered Au, sputtered Cr/Au, sputtered Ti/Au, and fired Ag] were formed on the single crystals, and their dielectric and piezoelectric properties were measured. The single crystals with a sputtered Ti/Au electrode showed the highest dielectric and piezoelectric constants but the lowest coercive electric field ($E_C$). The single crystals with a fired Ag electrode showed the lowest dielectric and piezoelectric constants but the highest coercive electric field ($E_C$). This dependence on the type of electrode was most significant in the piezoelectrically hard PMN-PZT-C single crystals. However, the effects of the electrode type on the phase transition temperatures ($T_C$, $T_{RT}$) and dielectric loss were negligible. These results clearly demonstrate that it is important to select an appropriate electrode so as to maximize the dielectric and piezoelectric properties of single crystals in each type of piezoelectric application.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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• pp.191.1-191
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• 2003

• Structural Monitoring and Maintenance
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• 제4권3호
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• pp.237-253
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• 2017

Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.469-470
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• 2006

Piezoelectric transformers based on lead zirconate titanate(PZT) have been received considerable interest because of their wide potential applications in transformer, oscillator, resonance sensor, actuator, acoustic transducer, as well as active slider for hard disk drives. However, for the applications which need a small power supply such as thin and flat displays, micro-robot, micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. So, we have fabricated the piezoelectric micro-transformer to supply energy for micro-systems using PZT thin films and MEMS technologies.

• 한국해양공학회지
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• 제24권6호
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• pp.81-85
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• 2010

The effects of co-doping with complex dopants of softeners, $La^{+3}$ and/or $Nb^{+5}$, and a hardener, $Fe^{+3}$, on the microstructural and piezoelectric properties of PZT ceramics with a composition of a rhombohedral-tetragonal morphotropic phase boundary, $PbZr_{0.53}Ti_{0.47}O_3$, were investigated. Unlike single-element doping, the complex doping of both the softener and hardener ions led to various compensation effects for the piezoelectric properties of the PZT ceramics. For 0.5 wt.% $La_2O_3$ softener and/or 0.5 wt.% $Nb_2O_5$ doped compositions, there were apparent hardener doping (compensation) effects for an addition of over 1.0 wt.% $Fe_2O_3$. For the $La_2O_3$ and/or $Nb_2O_5$ doped composition, the co-dopant $Fe_2O_3$ addition led to lower kp and $\varepsilon$r, and increased $Q_m$ values. The prepared PZT ceramics modified with complex soft dopants, $La^{+3}$ and $Nb^+$, as well as a hard dopant, $Fe^{+3}$, showed that the piezoelectric properties were stable with the compositional variations, which made it possible to establish piezoelectric performances with higher reliability and reproducibility. The most improved piezoelectric properties of enhanced $Q_m$ with $\varepsilon_r$ remaining higher $k_p$, were obtained in the PZT composition complexly doped with $La^{+3}$ and $Fe^{+3}$. From the results obtained in this study, the properties of compositionally modified PZT ceramics can also be tailored over a wider range by changing the dopant compositions to meet the specific requirements for underwater or other applications.

• 한국결정성장학회지
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• 제21권6호
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• pp.253-258
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• 2011

본 연구에서는 1_3형 압전복합체(1-3 type piezo-composite)의 전기-기계적 성능을 수치적으로 분석하였다. PZT 세라믹스의 압전물성 계산치를 실험치와 비교하여 수치 해석방법의 정확성을 검증하였다. 그리고 구성재료의 부피 비 및 물성, PZT 기둥의 종 횡비(aspect ratio) 등이 복합체의 $k_t$특성에 미치는 영향을 해석하였다. 그 결과, PZT 부피 비가 30 vol%까지 증가함에 복합체의 $k_t$ 특성은 급격하게 증가하다가 그 이상의 영역에서는 일정한 값에 수렴한다. 그리고 상대적으로 유연한 폴리머를 사용한 복합체가 전반적으로 우수한 $k_t$ 특성을 갖는다. 또한 PZT 부피비가 30 % 이하인 경우, 복합체의 $k_t$ 특성은 PZT 기둥의 종횡 비에 많은 영향을 받는다. 그러므로 $k_t$ 특성 향상을 위해서는 상대적으로 유연한 폴리머 및 우수한 압전특성의 PZT를 사용하여 복합체를 구성하는 것이 유리하다.

• 대한기계학회논문집A
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• 제25권12호
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• pp.2002-2008
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• 2001

Nonlinear vibration characteristics of a piezoelectric-type micro actuator used for hard disk drives are experimentally studied. The nonlinear characterisitics include hysteresis, superharmonic resonance, jump phenomenon, and shifting of natural frequencies. The vibration modes and frequencies of the commercial actuator of the Hutchinson's Magnum series are measured using a laser vibrometer. From harmonic excitation to the PZT acturator, we observe interesting hysteresis patterns with 3 times input frequency. It is shown that the micro actuator has the typical 3 times superhamonic resonances coupled to the first torsional and sway modes of the suspension.

• 항공우주시스템공학회지
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• 제13권5호
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• pp.9-15
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• 2019

In this paper, dynamic analysis of a nonlinear active vibration absorber is conducted with a time delay acceleration feedback to suppress the vibration of a nonlinear single degree of freedom primary system. The primary system consisting of linear and nonlinear cubic springs, mass, and damper is subjected to the multi-harmonic hard excitation with a parametric excitation. It is proposed to reduce the vibration of the primary system and the absorber by using a lead zirconate titanate (PZT) stack actuator in series with a spring in the absorber which configures as an active vibration absorber. The method of multiple scales (MMS) is used to obtain the approximate solution of the system under the internal resonance, subharmonic, superharmonic, and principal parametric resonance conditions simultaneously. Frequency and time responses of the system are investigated considering a delay in the feedback for the various parameters of the absorber configuration and controlling force.

• 대한전자공학회논문지SD
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• 제37권3호
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• pp.1-5
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• 2000

나선형태의 평면 안테나를 갖는 유도결합형 플라즈마를 이용하여 PZT용 Pt/RuO/sub 2/ 전극을 건식식각하였다. 누설전류 억제특성이 우수한 Pt와 건식식각이 용이한 RuO/sub 2/ 박막의 장점을 동시에 이용하기 위하여 PZT의 하부전극으로 Pt/RuO/sub 2/의 2중층을 시도하였다. 우선 Pt와 RuO/sub 2/ 박막 각각에 대하여 플라즈마의 여러 조건에 따라 식각율과 선택비를 조사하였다. 조사된 공정기체는 O/sub 2/ 와 Cl/sub 2/ 의 혼합기체이며, 패터닝을 위해 사용한 마스크재료는 SiO/sub 2/ 산화막이었다. Cl/sub 2/ 의 함량이 증가함에 따라 Pt의 식각율은 점점 증가하지만, RuO/sub 2/의 경우에는 Cl/sub 2/의 함량이 처음 10% 정도가지 증가할 때에는 RuO/sub 2/의 식각율이 급격히 증가하지만 더 이상의 Cl/sub 2/ 함량에서는 식각율이 점차 감소하였다. Pt/RuO/sub 2/의 2중층을 동시에 식각하기 위한 최적의 기체혼합비를 구하였으며, 0.5 마이크론급의 미세패터닝을 시도하였다.