• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.30 no.8
• /
• pp.501-507
• /
• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• Journal of the Korean Ceramic Society
• /
• v.52 no.1
• /
• pp.77-82
• /
• 2015

The effect of the electrode type on the dielectric and piezoelectric properties of $Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrO_3-PbTiO_3$ (PMN-PZT) single crystals was investigated in an effort to improve their properties for various piezoelectric applications. First, three different types of PMN-PZT single crystals [PMN-PZT-A (piezoelectrically soft type; dielectric constant ~ 10,000), PMN-PZT-B (piezoelectrically soft type; phase-transition temperature between the rhombohedral and tetragonal phases ($T_{RT}$) ~ $145^{\circ}C$), PMN-PZT-C (piezoelectrically hard type; high mechanical quality factor ($Q_m$) ~ 1,000)] were fabricated using the solid-state single crystal growth (SSCG) method. Then, four different types of electrodes [sputtered Au, sputtered Cr/Au, sputtered Ti/Au, and fired Ag] were formed on the single crystals, and their dielectric and piezoelectric properties were measured. The single crystals with a sputtered Ti/Au electrode showed the highest dielectric and piezoelectric constants but the lowest coercive electric field ($E_C$). The single crystals with a fired Ag electrode showed the lowest dielectric and piezoelectric constants but the highest coercive electric field ($E_C$). This dependence on the type of electrode was most significant in the piezoelectrically hard PMN-PZT-C single crystals. However, the effects of the electrode type on the phase transition temperatures ($T_C$, $T_{RT}$) and dielectric loss were negligible. These results clearly demonstrate that it is important to select an appropriate electrode so as to maximize the dielectric and piezoelectric properties of single crystals in each type of piezoelectric application.

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.10a
• /
• pp.191.1-191
• /
• 2003

• Structural Monitoring and Maintenance
• /
• v.4 no.3
• /
• pp.237-253
• /
• 2017

Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.469-470
• /
• 2006

Piezoelectric transformers based on lead zirconate titanate(PZT) have been received considerable interest because of their wide potential applications in transformer, oscillator, resonance sensor, actuator, acoustic transducer, as well as active slider for hard disk drives. However, for the applications which need a small power supply such as thin and flat displays, micro-robot, micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. So, we have fabricated the piezoelectric micro-transformer to supply energy for micro-systems using PZT thin films and MEMS technologies.

• Journal of Ocean Engineering and Technology
• /
• v.24 no.6
• /
• pp.81-85
• /
• 2010

The effects of co-doping with complex dopants of softeners, $La^{+3}$ and/or $Nb^{+5}$, and a hardener, $Fe^{+3}$, on the microstructural and piezoelectric properties of PZT ceramics with a composition of a rhombohedral-tetragonal morphotropic phase boundary, $PbZr_{0.53}Ti_{0.47}O_3$, were investigated. Unlike single-element doping, the complex doping of both the softener and hardener ions led to various compensation effects for the piezoelectric properties of the PZT ceramics. For 0.5 wt.% $La_2O_3$ softener and/or 0.5 wt.% $Nb_2O_5$ doped compositions, there were apparent hardener doping (compensation) effects for an addition of over 1.0 wt.% $Fe_2O_3$. For the $La_2O_3$ and/or $Nb_2O_5$ doped composition, the co-dopant $Fe_2O_3$ addition led to lower kp and $\varepsilon$r, and increased $Q_m$ values. The prepared PZT ceramics modified with complex soft dopants, $La^{+3}$ and $Nb^+$, as well as a hard dopant, $Fe^{+3}$, showed that the piezoelectric properties were stable with the compositional variations, which made it possible to establish piezoelectric performances with higher reliability and reproducibility. The most improved piezoelectric properties of enhanced $Q_m$ with $\varepsilon_r$ remaining higher $k_p$, were obtained in the PZT composition complexly doped with $La^{+3}$ and $Fe^{+3}$. From the results obtained in this study, the properties of compositionally modified PZT ceramics can also be tailored over a wider range by changing the dopant compositions to meet the specific requirements for underwater or other applications.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.21 no.6
• /
• pp.253-258
• /
• 2011

Electro-mechanical coupling performance ($k_t$) of a 1-3 type Piezo-composite was analyzed numerically using FEM. The calculated physical properties of the PZT ceramics were compared with the experimental data and the accuracy of the numerical method was verified. Also the $k_t$ of the composite was analyzed with the vol% and the material properties of the constitutional parts, and the aspect ratio of the PZT rod. As the simulated results, the $k_t$ increased rapidly when the vol% of the PZT ceramics increased up to 30 vol% and saturated the constant value in the above region. And the composite using the soft matrix polymer than the hard one have the superior $k_t$ characteristics. The $k_t$ was greatly influenced by the aspect ratio of the PZT rod up to 30 vol% of PZT ceramics. To improve the $k_t$ characteristics, it is useful that the composite consist of the relatively flexible polymers and the PZT material having the excellent piezoelectric characteristics.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.25 no.12
• /
• pp.2002-2008
• /
• 2001

Nonlinear vibration characteristics of a piezoelectric-type micro actuator used for hard disk drives are experimentally studied. The nonlinear characterisitics include hysteresis, superharmonic resonance, jump phenomenon, and shifting of natural frequencies. The vibration modes and frequencies of the commercial actuator of the Hutchinson's Magnum series are measured using a laser vibrometer. From harmonic excitation to the PZT acturator, we observe interesting hysteresis patterns with 3 times input frequency. It is shown that the micro actuator has the typical 3 times superhamonic resonances coupled to the first torsional and sway modes of the suspension.

• Journal of Aerospace System Engineering
• /
• v.13 no.5
• /
• pp.9-15
• /
• 2019

In this paper, dynamic analysis of a nonlinear active vibration absorber is conducted with a time delay acceleration feedback to suppress the vibration of a nonlinear single degree of freedom primary system. The primary system consisting of linear and nonlinear cubic springs, mass, and damper is subjected to the multi-harmonic hard excitation with a parametric excitation. It is proposed to reduce the vibration of the primary system and the absorber by using a lead zirconate titanate (PZT) stack actuator in series with a spring in the absorber which configures as an active vibration absorber. The method of multiple scales (MMS) is used to obtain the approximate solution of the system under the internal resonance, subharmonic, superharmonic, and principal parametric resonance conditions simultaneously. Frequency and time responses of the system are investigated considering a delay in the feedback for the various parameters of the absorber configuration and controlling force.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.3
• /
• pp.1-5
• /
• 2000

Inductively coupled plasma (ICP) excited by a spiral planar antenna is used to etch elctrodes for PZT capacitors. Pt/RuO$_{2}$ bilayers are tested as bottom electrodes for PZT capacitors in order to utilize better leakage characteristics of Pt and easy etch characteristics of RuO$_{2}$ at the same time. The etch rates and selectivities to SiO$_{2}$ hard mask have been measured for each of Pt and RuO$_{2}$ in terms of various plasma conditions. As Cl$_{2}$ ratio increases in $O_{2}$/Cl$_{2}$ mixture, the etch rate of Pt increases while that of RuO$_{2}$ reaches the highest near 10 ％ of Cl$_{2}$. Optimum gas mixture ratio has been determined for etching Pt and RuO$_{2}$ bilayers sequentially, and sub-half micron patterning is demonstrated.